JP2005536744A - 光学位置合せ検出装置 - Google Patents

光学位置合せ検出装置 Download PDF

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Publication number
JP2005536744A
JP2005536744A JP2004531021A JP2004531021A JP2005536744A JP 2005536744 A JP2005536744 A JP 2005536744A JP 2004531021 A JP2004531021 A JP 2004531021A JP 2004531021 A JP2004531021 A JP 2004531021A JP 2005536744 A JP2005536744 A JP 2005536744A
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JP
Japan
Prior art keywords
light
light source
optical alignment
detection device
light sources
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Pending
Application number
JP2004531021A
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English (en)
Japanese (ja)
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JP2005536744A5 (https=
Inventor
フリッツ，ベルナード・エス
ルーティマン，ピーター
パドマナバーン，アラビンド
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Honeywell International Inc
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Honeywell International Inc
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Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of JP2005536744A publication Critical patent/JP2005536744A/ja
Publication of JP2005536744A5 publication Critical patent/JP2005536744A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1456—Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1434—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/01—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials specially adapted for biological cells, e.g. blood cells
    • G01N2015/011—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials specially adapted for biological cells, e.g. blood cells with lysing, e.g. of erythrocytes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/01—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials specially adapted for biological cells, e.g. blood cells
    • G01N2015/012—Red blood cells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/01—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials specially adapted for biological cells, e.g. blood cells
    • G01N2015/016—White blood cells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means
    • G01N2015/0238—Single particle scatter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N2015/1027—Determining speed or velocity of a particle
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/08—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor using a stream of discrete samples flowing along a tube system, e.g. flow injection analysis
    • G01N35/085—Flow Injection Analysis

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2004531021A 2002-08-21 2003-08-15 光学位置合せ検出装置 Pending JP2005536744A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/225,325 US6970245B2 (en) 2000-08-02 2002-08-21 Optical alignment detection system
PCT/US2003/025585 WO2004018967A1 (en) 2002-08-21 2003-08-15 Optical alignment detection system

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010036079A Division JP2010164573A (ja) 2002-08-21 2010-02-22 光学位置合せ検出装置

Publications (2)

Publication Number Publication Date
JP2005536744A true JP2005536744A (ja) 2005-12-02
JP2005536744A5 JP2005536744A5 (https=) 2006-09-28

Family

ID=31946298

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2004531021A Pending JP2005536744A (ja) 2002-08-21 2003-08-15 光学位置合せ検出装置
JP2010036079A Pending JP2010164573A (ja) 2002-08-21 2010-02-22 光学位置合せ検出装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2010036079A Pending JP2010164573A (ja) 2002-08-21 2010-02-22 光学位置合せ検出装置

Country Status (6)

Country Link
US (2) US6970245B2 (https=)
EP (1) EP1546651A1 (https=)
JP (2) JP2005536744A (https=)
CN (2) CN100422686C (https=)
AU (1) AU2003259851A1 (https=)
WO (1) WO2004018967A1 (https=)

Cited By (8)

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JP2009521701A (ja) * 2005-12-27 2009-06-04 ハネウェル・インターナショナル・インコーポレーテッド 流体分析装置における流体検知および制御
JP2009521699A (ja) * 2005-12-27 2009-06-04 ハネウェル・インターナショナル・インコーポレーテッド 流体分析装置用の流体無しインタフェース
JP2009521700A (ja) * 2005-12-27 2009-06-04 ハネウェル・インターナショナル・インコーポレーテッド 流体分析装置用の針−隔壁インタフェース
JPWO2008026742A1 (ja) * 2006-08-31 2010-01-21 株式会社ニコン 移動体駆動方法及び移動体駆動システム、パターン形成方法及び装置、露光方法及び装置、並びにデバイス製造方法
JPWO2008029757A1 (ja) * 2006-09-01 2010-01-21 株式会社ニコン 移動体駆動方法及び移動体駆動システム、パターン形成方法及び装置、露光方法及び装置、デバイス製造方法、並びにキャリブレーション方法
JP4824084B2 (ja) * 2005-04-25 2011-11-24 ハネウェル・インターナショナル・インコーポレーテッド カートリッジの流れ制御システム
TWI508133B (zh) * 2006-01-19 2015-11-11 尼康股份有限公司 Exposure method and exposure apparatus, and component manufacturing method
JP2022522331A (ja) * 2019-01-31 2022-04-18 ルクミクロ アーゲー 流体サンプル用流路を備えるカートリッジ、カートリッジを具備するアセンブリ、および光学装置をカートリッジの流路と位置合わせする方法

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US9218069B2 (en) * 2013-04-11 2015-12-22 Avago Technologies General Ip (Singapore) Pte. Ltd. Optical sensing device to sense displacement
JP2014215041A (ja) * 2013-04-22 2014-11-17 株式会社堀場製作所 粒子計数装置およびその製造方法
KR102205900B1 (ko) * 2014-01-29 2021-01-21 삼성전자주식회사 분석장치 및 분석장치의 카트리지 장착상태를 판단하는 방법
EP3001177A1 (de) 2014-09-29 2016-03-30 Grundfos Holding A/S Vorrichtung zum Erfassen von Partikeln in einer Flüssigkeit
CN107003227B (zh) * 2014-12-12 2020-06-05 贝克顿·迪金森公司 用于将光源与流动流对准的方法及其系统
EP3516369B1 (en) * 2016-09-22 2022-11-02 IMEC vzw Particle detection using thin lenses
KR102458722B1 (ko) * 2018-02-08 2022-10-26 프리시젼바이오 주식회사 유체 분석 장치 및 유체 분석 장치의 제어 방법
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CN1688865A (zh) 2005-10-26
US20030058445A1 (en) 2003-03-27
EP1546651A1 (en) 2005-06-29
US6970245B2 (en) 2005-11-29
WO2004018967A1 (en) 2004-03-04
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US7312870B2 (en) 2007-12-25
AU2003259851A1 (en) 2004-03-11
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