JP2005535126A - ウエハバッチ処理システム及び方法 - Google Patents
ウエハバッチ処理システム及び方法 Download PDFInfo
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- JP2005535126A JP2005535126A JP2004526081A JP2004526081A JP2005535126A JP 2005535126 A JP2005535126 A JP 2005535126A JP 2004526081 A JP2004526081 A JP 2004526081A JP 2004526081 A JP2004526081 A JP 2004526081A JP 2005535126 A JP2005535126 A JP 2005535126A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
Abstract
Description
Claims (20)
- ウエハ処理システムであって、
複数の半導体ウエハを支持するべく構成されたウエハキャリアを受容するべく構成された処理管を含む処理室と、
プラットフォーム上にマウントされた熱源とを有し、
前記熱源が、前記処理管外の第1の位置と、前記処理管内の第2の位置との間を移動可能であることを特徴とするシステム。 - 前記加熱アセンブリが、熱源及び反射器を含むことを特徴とする請求項1に記載のシステム。
- 前記熱源が、電気抵抗加熱要素を含むことを特徴とする請求項2に記載のシステム。
- 前記熱源が、ハロゲンランプを含むことを特徴とする請求項2に記載のシステム。
- 前記加熱アセンブリが、更にウエハキャリアマウント手段を含むことを特徴とする請求項1に記載のシステム。
- 前記プラットフォームを、前記第1の位置と前記第2の位置との間で上下させるための昇降機構を更に含むことを特徴とする請求項1に記載のシステム。
- 複数の半導体ウエハを処理するための炉アセンブリであって、
複数の半導体ウエハを支持するべく構成されたウエハキャリアを受容するべく構成された処理管を含む処理室と、
前記処理管内にガスを流入させるための入口管と、
前記処理管内に配置された熱源とを有し、
前記熱源からの熱エネルギ出力が、前記ガスに伝達され、前記処理管内全体の処理温度を提供することを特徴とする炉アセンブリ。 - 前記熱源が、前記処理管外の第1の位置と、前記処理管内の第2の位置との間を移動可能であることを特徴とする請求項7に記載の炉アセンブリ。
- 前記熱源が、前記ガスの温度を100℃から約1200℃の範囲に高めることを特徴とする請求項7に記載の炉アセンブリ。
- 前記熱源が、電気抵抗加熱要素を含むことを特徴とする請求項7に記載の炉アセンブリ。
- 前記熱源が、ハロゲンランプを含むことを特徴とする請求項7に記載の炉アセンブリ。
- 前記熱源がマウントされたプラットフォームを更に有し、前記プラットフォームが前記処理室に接触しない前記第1の位置と、前記プラットフォームが前記処理室に接触する前記第2の位置との間を、前記プラットフォームが移動可能であることを特徴とする請求項7に記載の炉アセンブリ。
- 前記熱源が前記第2の位置にあるときに、前記熱源が前記処理管内にあるように、前記熱源が前記プラットフォーム上に配置されていることを特徴とする請求項7に記載の炉アセンブリ。
- 前記プラットフォームが、それと共に移動する入口管及び出口管を有することを特徴とする請求項13に記載の炉アセンブリ。
- 石英窓及び該石英窓の上方近接位置に配置された熱拡散部材を含む作動面を備えたプラットフォームを更に有し、前記熱拡散部材に、それが前記熱源を構成するように熱エネルギを供給するようにし、前記プラットフォームが前記処理室に接触しない前記第1の位置と、前記プラットフォームが前記処理室にシール可能に接触する前記第2の位置との間を、前記プラットフォームが移動可能であることを特徴とする請求項7に記載の炉アセンブリ。
- 前記ガスを前記処理管の周りに循環させるためのガス循環手段を更に有することを特徴とする請求項7に記載の炉アセンブリ。
- ウエハを処理するための方法であって、
熱源を処理管内の第1の位置に搬送する過程と、
前記熱源から熱エネルギを供給する過程と、
前記処理管内にて第1のガスを循環させ、前記第1のガスに前記熱エネルギを吸収させ、前記熱エネルギを前記ウエハに伝達する過程と、
半導体処理を行う過程と、
その後に、前記熱源からの熱エネルギの供給を停止する過程と、
前記処理管内にて第2のガスを循環させ、前記第2のガスに前記ウエハから熱エネルギを吸収させ、前記ウエハの温度を低下させる過程とを有することを特徴とする方法。 - 前記熱源を前記処理管外の第2の位置に搬送する過程を更に有することを特徴とする請求項17に記載の方法。
- 熱源を前記処理管内の前記第1の位置に搬送する前記過程が、前記処理管を隔絶することを含むことを特徴とする請求項17に記載の方法。
- 前記熱源が、電気抵抗性加熱要素を含むことを特徴とする請求項17に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/211,757 US6727194B2 (en) | 2002-08-02 | 2002-08-02 | Wafer batch processing system and method |
PCT/US2003/024766 WO2004013903A2 (en) | 2002-08-02 | 2003-07-30 | Wafer batch processing system and method |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005535126A true JP2005535126A (ja) | 2005-11-17 |
JP4537200B2 JP4537200B2 (ja) | 2010-09-01 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2004526081A Expired - Fee Related JP4537200B2 (ja) | 2002-08-02 | 2003-07-30 | ウエハバッチ処理システム及び方法 |
Country Status (6)
Country | Link |
---|---|
US (2) | US6727194B2 (ja) |
EP (1) | EP1532664A2 (ja) |
JP (1) | JP4537200B2 (ja) |
KR (1) | KR100686411B1 (ja) |
TW (2) | TWI295812B (ja) |
WO (1) | WO2004013903A2 (ja) |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016157923A (ja) * | 2015-02-25 | 2016-09-01 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法および加熱部 |
Also Published As
Publication number | Publication date |
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EP1532664A2 (en) | 2005-05-25 |
KR100686411B1 (ko) | 2007-02-26 |
TW200405415A (en) | 2004-04-01 |
KR20050039837A (ko) | 2005-04-29 |
US20040023517A1 (en) | 2004-02-05 |
WO2004013903A2 (en) | 2004-02-12 |
TW200403778A (en) | 2004-03-01 |
JP4537200B2 (ja) | 2010-09-01 |
US6879778B2 (en) | 2005-04-12 |
WO2004013903A3 (en) | 2004-04-08 |
US6727194B2 (en) | 2004-04-27 |
US20040022528A1 (en) | 2004-02-05 |
TWI295812B (en) | 2008-04-11 |
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