JP2005520321A5 - - Google Patents

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Publication number
JP2005520321A5
JP2005520321A5 JP2003514594A JP2003514594A JP2005520321A5 JP 2005520321 A5 JP2005520321 A5 JP 2005520321A5 JP 2003514594 A JP2003514594 A JP 2003514594A JP 2003514594 A JP2003514594 A JP 2003514594A JP 2005520321 A5 JP2005520321 A5 JP 2005520321A5
Authority
JP
Japan
Prior art keywords
workpiece
processing tool
aligner
attached
tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003514594A
Other languages
English (en)
Japanese (ja)
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JP2005520321A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2002/022097 external-priority patent/WO2003009347A2/en
Publication of JP2005520321A publication Critical patent/JP2005520321A/ja
Publication of JP2005520321A5 publication Critical patent/JP2005520321A5/ja
Pending legal-status Critical Current

Links

JP2003514594A 2001-07-16 2002-07-11 ツールのフロントエンド加工物処理のための統合システム Pending JP2005520321A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US30598001P 2001-07-16 2001-07-16
PCT/US2002/022097 WO2003009347A2 (en) 2001-07-16 2002-07-11 Integrated system for tool front-end workpiece handling

Publications (2)

Publication Number Publication Date
JP2005520321A JP2005520321A (ja) 2005-07-07
JP2005520321A5 true JP2005520321A5 (https=) 2006-01-05

Family

ID=23183213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003514594A Pending JP2005520321A (ja) 2001-07-16 2002-07-11 ツールのフロントエンド加工物処理のための統合システム

Country Status (4)

Country Link
US (1) US7419346B2 (https=)
JP (1) JP2005520321A (https=)
TW (1) TW591736B (https=)
WO (1) WO2003009347A2 (https=)

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US9457442B2 (en) * 2005-06-18 2016-10-04 Futrfab, Inc. Method and apparatus to support process tool modules in a cleanspace fabricator
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US9834378B2 (en) * 2006-12-22 2017-12-05 Brooks Automation, Inc. Loader and buffer for reduced lot size
US7585142B2 (en) * 2007-03-16 2009-09-08 Asm America, Inc. Substrate handling chamber with movable substrate carrier loading platform
JP5387412B2 (ja) * 2007-11-21 2014-01-15 株式会社安川電機 搬送ロボット、筐体、半導体製造装置およびソータ装置
US8459922B2 (en) * 2009-11-13 2013-06-11 Brooks Automation, Inc. Manipulator auto-teach and position correction system
US8859103B2 (en) 2010-11-05 2014-10-14 Joseph Eugene Canale Glass wafers for semiconductor fabrication processes and methods of making same
CN102222605B (zh) * 2011-06-08 2013-05-15 致茂电子(苏州)有限公司 一种具有破片检测的晶圆输送设备
TW201344808A (zh) * 2012-04-25 2013-11-01 鴻海精密工業股份有限公司 組裝裝置
US8944739B2 (en) * 2012-06-01 2015-02-03 Taiwan Semiconductor Manufacturing Co., Ltd. Loadport bridge for semiconductor fabrication tools
TW201502733A (zh) * 2013-07-04 2015-01-16 鴻海精密工業股份有限公司 視覺對位元裝置、視覺對位元系統及方法
US10054482B2 (en) * 2014-09-22 2018-08-21 Antonio Maccari Tool for positioning a scanning device
US9698036B2 (en) * 2015-11-05 2017-07-04 Lam Research Corporation Stacked wafer cassette loading system
US9987747B2 (en) * 2016-05-24 2018-06-05 Semes Co., Ltd. Stocker for receiving cassettes and method of teaching a stocker robot disposed therein
US10453726B2 (en) * 2016-11-10 2019-10-22 Applied Materials, Inc. Electronic device manufacturing load port apparatus, systems, and methods
US10541165B2 (en) 2016-11-10 2020-01-21 Applied Materials, Inc. Systems, apparatus, and methods for an improved load port backplane
JP7177333B2 (ja) * 2018-07-04 2022-11-24 シンフォニアテクノロジー株式会社 ロードポート、および、ｅｆｅｍ
US10533852B1 (en) * 2018-09-27 2020-01-14 Taiwan Semiconductor Manufacturing Company, Ltd. Leveling sensor, load port including the same, and method of leveling a load port
JP7362308B2 (ja) * 2019-06-17 2023-10-17 株式会社ディスコ 加工装置
KR102256132B1 (ko) * 2020-02-18 2021-05-25 (주)캔탑스 캐리어 내부의 오염 관리 기능을 갖는 자동 반송시스템
US11581203B2 (en) 2020-09-02 2023-02-14 Applied Materials, Inc. Systems for integrating load locks into a factory interface footprint space
CN112566413B (zh) * 2020-12-11 2022-03-29 江苏星网软件有限公司 一种计算机数据采集装置及其使用方法
US12159802B2 (en) * 2021-03-04 2024-12-03 Applied Materials, Inc. Shortened load port for factory interface
US12142508B2 (en) 2021-10-12 2024-11-12 Applied Materials, Inc. Factory interface robots usable with integrated load locks
JP1728449S (ja) * 2022-03-30 2022-10-27 基板処理装置

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