JP2005519323A - 三次元導光板を有する光学スイッチ - Google Patents
三次元導光板を有する光学スイッチ Download PDFInfo
- Publication number
- JP2005519323A JP2005519323A JP2003573467A JP2003573467A JP2005519323A JP 2005519323 A JP2005519323 A JP 2005519323A JP 2003573467 A JP2003573467 A JP 2003573467A JP 2003573467 A JP2003573467 A JP 2003573467A JP 2005519323 A JP2005519323 A JP 2005519323A
- Authority
- JP
- Japan
- Prior art keywords
- light guide
- guide plate
- optical
- buried light
- base material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 128
- 239000000758 substrate Substances 0.000 claims abstract description 65
- 238000000034 method Methods 0.000 claims abstract description 14
- 239000013307 optical fiber Substances 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims description 52
- 230000001902 propagating effect Effects 0.000 claims description 9
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 4
- 229920005591 polysilicon Polymers 0.000 claims description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 2
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 2
- 230000008569 process Effects 0.000 abstract description 2
- 238000010438 heat treatment Methods 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 13
- 239000000835 fiber Substances 0.000 description 7
- 239000006185 dispersion Substances 0.000 description 6
- 239000010453 quartz Substances 0.000 description 6
- 230000005684 electric field Effects 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000011436 cob Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3534—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being diffractive, i.e. a grating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12002—Three-dimensional structures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
- G02B6/3556—NxM switch, i.e. regular arrays of switches elements of matrix type constellation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3576—Temperature or heat actuation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3578—Piezoelectric force
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Micromachines (AREA)
- Use Of Switch Circuits For Exchanges And Methods Of Control Of Multiplex Exchanges (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US36094602P | 2002-03-01 | 2002-03-01 | |
| PCT/US2003/006658 WO2003075062A2 (en) | 2002-03-01 | 2003-03-03 | Optical switch with 3d waveguides |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005519323A true JP2005519323A (ja) | 2005-06-30 |
| JP2005519323A5 JP2005519323A5 (https=) | 2009-04-16 |
Family
ID=27789047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003573467A Pending JP2005519323A (ja) | 2002-03-01 | 2003-03-03 | 三次元導光板を有する光学スイッチ |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6987901B2 (https=) |
| JP (1) | JP2005519323A (https=) |
| CN (1) | CN1316271C (https=) |
| AU (1) | AU2003220012A1 (https=) |
| DE (1) | DE10392348T5 (https=) |
| WO (1) | WO2003075062A2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020504834A (ja) * | 2016-12-16 | 2020-02-13 | ザ・チャールズ・スターク・ドレイパ・ラボラトリー・インコーポレイテッド | 導波管の内部および外部に光を選択的に結合するための統合memsスイッチ |
| JP2022140574A (ja) * | 2018-06-19 | 2022-09-26 | ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニア | Mems作動垂直カプラアレイに基づくビーム誘導システム |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU2003297698A1 (en) * | 2003-12-05 | 2005-07-21 | Kenneth A. James | Totally photonic switch for optical fibers |
| US7869672B2 (en) * | 2006-06-30 | 2011-01-11 | Applied Materials, Inc. | Optical assemblies and methods for fabrication of optical assemblies |
| GB0711822D0 (en) * | 2007-06-19 | 2007-07-25 | Univ Heriot Watt | Waveguide devices |
| US20110249938A1 (en) * | 2010-04-07 | 2011-10-13 | Alcatel-Lucent Usa, Incorporated | Optical grating coupler |
| US8515223B2 (en) * | 2010-07-30 | 2013-08-20 | Hewlett-Packard Development Company. L.P. | Lens |
| US8988754B2 (en) | 2013-01-08 | 2015-03-24 | Massachusetts Institute Of Technology | Optical phased arrays with evanescently-coupled antennas |
| US9476981B2 (en) | 2013-01-08 | 2016-10-25 | Massachusetts Institute Of Technology | Optical phased arrays |
| US9018108B2 (en) | 2013-01-25 | 2015-04-28 | Applied Materials, Inc. | Low shrinkage dielectric films |
| ES2694656A1 (es) * | 2017-06-22 | 2018-12-26 | BSH Electrodomésticos España S.A. | Componente de aparato doméstico |
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- 2003-03-03 US US10/379,284 patent/US6987901B2/en not_active Expired - Fee Related
- 2003-03-03 AU AU2003220012A patent/AU2003220012A1/en not_active Abandoned
- 2003-03-03 DE DE10392348T patent/DE10392348T5/de not_active Withdrawn
- 2003-03-03 JP JP2003573467A patent/JP2005519323A/ja active Pending
- 2003-03-03 WO PCT/US2003/006658 patent/WO2003075062A2/en not_active Ceased
- 2003-03-03 CN CNB038095076A patent/CN1316271C/zh not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020504834A (ja) * | 2016-12-16 | 2020-02-13 | ザ・チャールズ・スターク・ドレイパ・ラボラトリー・インコーポレイテッド | 導波管の内部および外部に光を選択的に結合するための統合memsスイッチ |
| JP7133552B2 (ja) | 2016-12-16 | 2022-09-08 | ザ・チャールズ・スターク・ドレイパ・ラボラトリー・インコーポレイテッド | 導波管の内部および外部に光を選択的に結合するための統合memsスイッチ |
| JP2022140574A (ja) * | 2018-06-19 | 2022-09-26 | ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニア | Mems作動垂直カプラアレイに基づくビーム誘導システム |
| JP7351981B2 (ja) | 2018-06-19 | 2023-09-27 | ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニア | Mems作動垂直カプラアレイに基づくビーム誘導システム |
| US11781379B2 (en) | 2018-06-19 | 2023-10-10 | The Regents Of The University Of California | Beam-steering system based on a MEMS-actuated vertical-coupler array |
| US12529262B2 (en) | 2018-06-19 | 2026-01-20 | The Regents Of The University Of California | Beam-steering system based on a MEMS-actuated vertical-coupler array |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1650210A (zh) | 2005-08-03 |
| WO2003075062A8 (en) | 2003-12-24 |
| US6987901B2 (en) | 2006-01-17 |
| WO2003075062A2 (en) | 2003-09-12 |
| AU2003220012A8 (en) | 2003-09-16 |
| WO2003075062A3 (en) | 2003-11-06 |
| DE10392348T5 (de) | 2005-03-03 |
| CN1316271C (zh) | 2007-05-16 |
| AU2003220012A1 (en) | 2003-09-16 |
| US20030223681A1 (en) | 2003-12-04 |
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