JP2005516117A5 - - Google Patents
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- Publication number
- JP2005516117A5 JP2005516117A5 JP2003562354A JP2003562354A JP2005516117A5 JP 2005516117 A5 JP2005516117 A5 JP 2005516117A5 JP 2003562354 A JP2003562354 A JP 2003562354A JP 2003562354 A JP2003562354 A JP 2003562354A JP 2005516117 A5 JP2005516117 A5 JP 2005516117A5
- Authority
- JP
- Japan
- Prior art keywords
- sputtering target
- tantalum sputtering
- regenerating
- tantalum
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005477 sputtering target Methods 0.000 claims 14
- 229910052715 tantalum Inorganic materials 0.000 claims 10
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 10
- 238000000034 method Methods 0.000 claims 9
- 230000001172 regenerating effect Effects 0.000 claims 6
- 239000000843 powder Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 239000000654 additive Substances 0.000 claims 3
- 230000000996 additive effect Effects 0.000 claims 3
- 238000000576 coating method Methods 0.000 claims 3
- 239000003870 refractory metal Substances 0.000 claims 3
- 239000011248 coating agent Substances 0.000 claims 2
- 239000011247 coating layer Substances 0.000 claims 2
- 238000005260 corrosion Methods 0.000 claims 2
- 230000007797 corrosion Effects 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 2
- 238000002844 melting Methods 0.000 claims 2
- 230000008018 melting Effects 0.000 claims 2
- 238000000149 argon plasma sintering Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000002923 metal particle Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US35155502P | 2002-01-24 | 2002-01-24 | |
| PCT/US2003/001825 WO2003062491A2 (en) | 2002-01-24 | 2003-01-22 | Refractrory metal and alloy refining by laser forming and melting |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005516117A JP2005516117A (ja) | 2005-06-02 |
| JP2005516117A5 true JP2005516117A5 (https=) | 2006-01-05 |
Family
ID=27613510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003562354A Pending JP2005516117A (ja) | 2002-01-24 | 2003-01-22 | レーザー成形及び溶融による耐火性金属及び合金の精製 |
Country Status (16)
| Country | Link |
|---|---|
| US (1) | US7651658B2 (https=) |
| EP (2) | EP2278045A1 (https=) |
| JP (1) | JP2005516117A (https=) |
| KR (1) | KR20040103920A (https=) |
| BR (1) | BR0307105A (https=) |
| CA (1) | CA2473830A1 (https=) |
| IL (1) | IL162837A0 (https=) |
| MX (1) | MXPA04007103A (https=) |
| NO (1) | NO20043487L (https=) |
| NZ (1) | NZ534237A (https=) |
| PL (1) | PL370455A1 (https=) |
| RS (1) | RS65004A (https=) |
| RU (1) | RU2333086C2 (https=) |
| TW (2) | TWI337205B (https=) |
| WO (1) | WO2003062491A2 (https=) |
| ZA (1) | ZA200405765B (https=) |
Families Citing this family (56)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7794554B2 (en) * | 2001-02-14 | 2010-09-14 | H.C. Starck Inc. | Rejuvenation of refractory metal products |
| JP4299157B2 (ja) * | 2004-02-03 | 2009-07-22 | トヨタ自動車株式会社 | 粉末金属肉盛ノズル |
| US7504008B2 (en) | 2004-03-12 | 2009-03-17 | Applied Materials, Inc. | Refurbishment of sputtering targets |
| US7416789B2 (en) * | 2004-11-01 | 2008-08-26 | H.C. Starck Inc. | Refractory metal substrate with improved thermal conductivity |
| AU2006243448B2 (en) * | 2005-05-05 | 2011-09-01 | H.C. Starck Inc. | Coating process for manufacture or reprocessing of sputter targets and X-ray anodes |
| JP5065248B2 (ja) * | 2005-05-05 | 2012-10-31 | ハー．ツェー．スタルク ゲゼルシャフト ミット ベシュレンクテル ハフツング | 基材表面の被覆法及び被覆製品 |
| US9127362B2 (en) | 2005-10-31 | 2015-09-08 | Applied Materials, Inc. | Process kit and target for substrate processing chamber |
| US7648740B2 (en) * | 2006-06-12 | 2010-01-19 | The Boeing Company | Method of making improved net-shaped components by hybrid metal deposition processing |
| ES2381854T3 (es) | 2006-07-14 | 2012-06-01 | Avioprop S.r.l. | Producción en serie de artículos tridimensionales hechos de compuestos intermetálicos |
| US20080075618A1 (en) * | 2006-09-19 | 2008-03-27 | Schlumberger Technology Corporation | Metal Powder Layered Apparatus for Downhole Use |
| US20080078268A1 (en) * | 2006-10-03 | 2008-04-03 | H.C. Starck Inc. | Process for preparing metal powders having low oxygen content, powders so-produced and uses thereof |
| GB0621184D0 (en) * | 2006-10-25 | 2006-12-06 | Rolls Royce Plc | Method for treating a component of a gas turbine engine |
| BRPI0718237A2 (pt) * | 2006-11-07 | 2013-11-12 | Starck H C Gmbh | Método para revestir uma superfície de substrato e produto revestido |
| US20080145688A1 (en) | 2006-12-13 | 2008-06-19 | H.C. Starck Inc. | Method of joining tantalum clade steel structures |
| GB0701397D0 (en) * | 2007-01-25 | 2007-03-07 | Rolls Royce Plc | Apparatus and method for calibrating a laser deposition system |
| JP4927102B2 (ja) * | 2007-02-09 | 2012-05-09 | Ｊｘ日鉱日石金属株式会社 | 高融点金属合金、高融点金属珪化物、高融点金属炭化物、高融点金属窒化物あるいは高融点金属ホウ化物の難焼結体からなるターゲット及びその製造方法並びに同スパッタリングターゲット−バッキングプレート組立体及びその製造方法 |
| MX2009011368A (es) * | 2007-04-27 | 2009-11-09 | Starck H C Inc | Aleacion a base de tantalio resistente a corrosion acuosa. |
| WO2008134516A2 (en) * | 2007-04-27 | 2008-11-06 | Honeywell International Inc. | Novel manufacturing design and processing methods and apparatus for sputtering targets |
| US8197894B2 (en) | 2007-05-04 | 2012-06-12 | H.C. Starck Gmbh | Methods of forming sputtering targets |
| GB2449862B (en) * | 2007-06-05 | 2009-09-16 | Rolls Royce Plc | Method for producing abrasive tips for gas turbine blades |
| US8968536B2 (en) | 2007-06-18 | 2015-03-03 | Applied Materials, Inc. | Sputtering target having increased life and sputtering uniformity |
| US8246903B2 (en) | 2008-09-09 | 2012-08-21 | H.C. Starck Inc. | Dynamic dehydriding of refractory metal powders |
| US8043655B2 (en) * | 2008-10-06 | 2011-10-25 | H.C. Starck, Inc. | Low-energy method of manufacturing bulk metallic structures with submicron grain sizes |
| GB0822703D0 (en) * | 2008-12-15 | 2009-01-21 | Rolls Royce Plc | A component having an abrasive layer and a method of applying an abrasive layer on a component |
| US9834829B1 (en) | 2009-07-07 | 2017-12-05 | H.C. Starck Inc. | Niobium-based alloy that is resistant to aqueous corrosion |
| US20110008201A1 (en) * | 2009-07-07 | 2011-01-13 | H.C. Starck Inc. | Niobium based alloy that is resistant to aqueous corrosion |
| WO2011124937A1 (en) * | 2009-07-07 | 2011-10-13 | Eurocoating S.P.A. | Laser process for producing metallic objects, and object obtained therefrom |
| FR2953747B1 (fr) * | 2009-12-14 | 2012-03-23 | Snecma | Procede de reparation d'une aube en titane par rechargement laser et compression hip moderee |
| US9175568B2 (en) | 2010-06-22 | 2015-11-03 | Honeywell International Inc. | Methods for manufacturing turbine components |
| US9085980B2 (en) | 2011-03-04 | 2015-07-21 | Honeywell International Inc. | Methods for repairing turbine components |
| US8506836B2 (en) | 2011-09-16 | 2013-08-13 | Honeywell International Inc. | Methods for manufacturing components from articles formed by additive-manufacturing processes |
| US8703233B2 (en) | 2011-09-29 | 2014-04-22 | H.C. Starck Inc. | Methods of manufacturing large-area sputtering targets by cold spray |
| US9266170B2 (en) | 2012-01-27 | 2016-02-23 | Honeywell International Inc. | Multi-material turbine components |
| CN103361640A (zh) * | 2012-03-31 | 2013-10-23 | 深圳光启创新技术有限公司 | 一种超材料的加工方法及超材料 |
| US9079803B2 (en) | 2012-04-05 | 2015-07-14 | United Technologies Corporation | Additive manufacturing hybrid core |
| US9120151B2 (en) | 2012-08-01 | 2015-09-01 | Honeywell International Inc. | Methods for manufacturing titanium aluminide components from articles formed by consolidation processes |
| US20140209576A1 (en) * | 2013-01-31 | 2014-07-31 | Kazim Ozbaysal | Use of elevated pressures for reducing cracks in superalloy welding and cladding |
| WO2014158282A1 (en) | 2013-03-13 | 2014-10-02 | Daum Peter E | Laser deposition using a protrusion technique |
| CN103817328B (zh) * | 2014-02-21 | 2016-07-06 | 西安交通大学 | 提高金属粉末激光选区烧结成形件质量的装置 |
| AT14301U1 (de) * | 2014-07-09 | 2015-07-15 | Plansee Se | Verfahren zur Herstellung eines Bauteils |
| CN104801712B (zh) * | 2015-04-22 | 2017-03-01 | 华南理工大学 | 一种激光与微束等离子复合3d打印设备与方法 |
| KR101674883B1 (ko) * | 2015-12-10 | 2016-11-11 | 한국원자력연구원 | 고밀도 우라늄 표적 제조 방법 및 이를 통해 제조된 고밀도 우라늄 표적 |
| US10844475B2 (en) * | 2015-12-28 | 2020-11-24 | Jx Nippon Mining & Metals Corporation | Method for manufacturing sputtering target |
| WO2017151737A1 (en) | 2016-03-03 | 2017-09-08 | H.C. Starck Inc. | Fabricaton of metallic parts by additive manufacturing |
| CN105522154A (zh) * | 2016-03-03 | 2016-04-27 | 中研智能装备有限公司 | 一种轧辊等离子3d快速成型设备及成型方法 |
| US11407034B2 (en) | 2017-07-06 | 2022-08-09 | OmniTek Technology Ltda. | Selective laser melting system and method of using same |
| CN109402624A (zh) * | 2017-08-17 | 2019-03-01 | 中国科学院金属研究所 | 一种抑制激光增材制造合金钢内部孔洞形成的方法 |
| KR102209877B1 (ko) | 2018-11-19 | 2021-02-02 | 한국생산기술연구원 | 난용접성 소재 적층 장치 및 그 방법 |
| JP6650141B1 (ja) * | 2019-01-10 | 2020-02-19 | 株式会社ティー・オール | 使用済み成膜用ターゲットの充填式再生方法 |
| CN110218997B (zh) * | 2019-05-31 | 2020-12-01 | 阳江市五金刀剪产业技术研究院 | 一种刀具涂层的加工方法 |
| CN110295365A (zh) * | 2019-07-29 | 2019-10-01 | 福建阿石创新材料股份有限公司 | 一种溅射靶材及其制备方法和装置 |
| KR102264467B1 (ko) | 2019-11-29 | 2021-06-15 | 한국생산기술연구원 | 난용접성 소재 층 예열 적층 장치 및 그 방법 |
| CN112522698B (zh) * | 2020-11-26 | 2023-04-25 | 江苏科技大学 | 一种超声振动辅助激光熔覆钨钽铌合金装置及方法 |
| CN113543450B (zh) * | 2021-06-25 | 2022-10-25 | 西安交通大学 | 一种用于超导腔的铜铌复合材料板的制作方法 |
| CN113814414A (zh) * | 2021-09-28 | 2021-12-21 | 长沙新材料产业研究院有限公司 | 一种钽铌合金部件及其制备方法 |
| CN120060718B (zh) * | 2025-04-29 | 2025-07-29 | 南京航空航天大学 | 一种抗侵彻多组元合金及其制备方法 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4323756A (en) * | 1979-10-29 | 1982-04-06 | United Technologies Corporation | Method for fabricating articles by sequential layer deposition |
| US5038014A (en) * | 1989-02-08 | 1991-08-06 | General Electric Company | Fabrication of components by layered deposition |
| JPH04120259A (ja) * | 1990-09-10 | 1992-04-21 | Agency Of Ind Science & Technol | レーザ溶射法による機器・部材の製造方法および装置 |
| FR2684033B1 (fr) * | 1991-11-25 | 1993-12-31 | Gec Alsthom Sa | Procede de revetement par laser de pieces cylindriques. |
| US5640667A (en) * | 1995-11-27 | 1997-06-17 | Board Of Regents, The University Of Texas System | Laser-directed fabrication of full-density metal articles using hot isostatic processing |
| US6269536B1 (en) | 1996-03-28 | 2001-08-07 | H.C. Starck, Inc. | Production of low oxygen metal wire |
| US6046426A (en) * | 1996-07-08 | 2000-04-04 | Sandia Corporation | Method and system for producing complex-shape objects |
| DE19649865C1 (de) * | 1996-12-02 | 1998-02-12 | Fraunhofer Ges Forschung | Verfahren zur Herstellung eines Formkörpers |
| US6203861B1 (en) * | 1998-01-12 | 2001-03-20 | University Of Central Florida | One-step rapid manufacturing of metal and composite parts |
| US6172327B1 (en) * | 1998-07-14 | 2001-01-09 | General Electric Company | Method for laser twist welding of compressor blisk airfoils |
| EP1035561A2 (en) * | 1999-03-02 | 2000-09-13 | Praxair S.T. Technology, Inc. | Refractory coated component for use in thin film deposition and method for making |
| DE19925330A1 (de) * | 1999-06-02 | 2000-12-07 | Leybold Materials Gmbh | Verfahren zur Herstellung oder zum Recyceln von Sputtertargets |
| AU2001275164A1 (en) * | 2000-06-01 | 2001-12-11 | Board Of Regents, The University Of Texas System | Direct selective laser sintering of metals |
| CN1221684C (zh) * | 2001-02-14 | 2005-10-05 | H·C·施塔克公司 | 高熔点金属制品的再生 |
-
2003
- 2003-01-22 RU RU2004125882/02A patent/RU2333086C2/ru not_active IP Right Cessation
- 2003-01-22 NZ NZ534237A patent/NZ534237A/en unknown
- 2003-01-22 WO PCT/US2003/001825 patent/WO2003062491A2/en not_active Ceased
- 2003-01-22 JP JP2003562354A patent/JP2005516117A/ja active Pending
- 2003-01-22 IL IL16283703A patent/IL162837A0/xx unknown
- 2003-01-22 MX MXPA04007103A patent/MXPA04007103A/es active IP Right Grant
- 2003-01-22 KR KR10-2004-7011395A patent/KR20040103920A/ko not_active Ceased
- 2003-01-22 RS YU65004A patent/RS65004A/sr unknown
- 2003-01-22 PL PL03370455A patent/PL370455A1/xx not_active Application Discontinuation
- 2003-01-22 US US10/501,837 patent/US7651658B2/en not_active Expired - Lifetime
- 2003-01-22 CA CA002473830A patent/CA2473830A1/en not_active Abandoned
- 2003-01-22 EP EP10173686A patent/EP2278045A1/en not_active Withdrawn
- 2003-01-22 BR BR0307105-7A patent/BR0307105A/pt not_active IP Right Cessation
- 2003-01-22 EP EP20030731631 patent/EP1470265A2/en not_active Ceased
- 2003-01-23 TW TW095136542A patent/TWI337205B/zh not_active IP Right Cessation
- 2003-01-23 TW TW092101421A patent/TWI314591B/zh active
-
2004
- 2004-07-20 ZA ZA200405765A patent/ZA200405765B/en unknown
- 2004-08-20 NO NO20043487A patent/NO20043487L/no not_active Application Discontinuation
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