ZA200405765B - Refractory metal and alloy refining by laser forming and melting. - Google Patents

Refractory metal and alloy refining by laser forming and melting. Download PDF

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Publication number
ZA200405765B
ZA200405765B ZA200405765A ZA200405765A ZA200405765B ZA 200405765 B ZA200405765 B ZA 200405765B ZA 200405765 A ZA200405765 A ZA 200405765A ZA 200405765 A ZA200405765 A ZA 200405765A ZA 200405765 B ZA200405765 B ZA 200405765B
Authority
ZA
South Africa
Prior art keywords
sputtering target
target
tantalum
powder
refractory metal
Prior art date
Application number
ZA200405765A
Other languages
English (en)
Inventor
Paul R Aimone
Prabhat Kumar
Peter R Jepson
Original Assignee
Starck H C Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Starck H C Inc filed Critical Starck H C Inc
Publication of ZA200405765B publication Critical patent/ZA200405765B/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F5/00Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3407Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00Coating not provided for in groups C23C2/00 - C23C24/00
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00Coating starting from inorganic powder
    • C23C24/08Coating starting from inorganic powder by application of heat or pressure and heat
    • C23C24/10Coating starting from inorganic powder by application of heat or pressure and heat with intermediate formation of a liquid phase in the layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Powder Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Coating By Spraying Or Casting (AREA)
ZA200405765A 2002-01-24 2004-07-20 Refractory metal and alloy refining by laser forming and melting. ZA200405765B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US35155502P 2002-01-24 2002-01-24

Publications (1)

Publication Number Publication Date
ZA200405765B true ZA200405765B (en) 2005-07-20

Family

ID=27613510

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA200405765A ZA200405765B (en) 2002-01-24 2004-07-20 Refractory metal and alloy refining by laser forming and melting.

Country Status (16)

Country Link
US (1) US7651658B2 (https=)
EP (2) EP2278045A1 (https=)
JP (1) JP2005516117A (https=)
KR (1) KR20040103920A (https=)
BR (1) BR0307105A (https=)
CA (1) CA2473830A1 (https=)
IL (1) IL162837A0 (https=)
MX (1) MXPA04007103A (https=)
NO (1) NO20043487L (https=)
NZ (1) NZ534237A (https=)
PL (1) PL370455A1 (https=)
RS (1) RS65004A (https=)
RU (1) RU2333086C2 (https=)
TW (2) TWI337205B (https=)
WO (1) WO2003062491A2 (https=)
ZA (1) ZA200405765B (https=)

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FR2953747B1 (fr) * 2009-12-14 2012-03-23 Snecma Procede de reparation d'une aube en titane par rechargement laser et compression hip moderee
US9175568B2 (en) 2010-06-22 2015-11-03 Honeywell International Inc. Methods for manufacturing turbine components
US9085980B2 (en) 2011-03-04 2015-07-21 Honeywell International Inc. Methods for repairing turbine components
US8506836B2 (en) 2011-09-16 2013-08-13 Honeywell International Inc. Methods for manufacturing components from articles formed by additive-manufacturing processes
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KR101674883B1 (ko) * 2015-12-10 2016-11-11 한국원자력연구원 고밀도 우라늄 표적 제조 방법 및 이를 통해 제조된 고밀도 우라늄 표적
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CN109402624A (zh) * 2017-08-17 2019-03-01 中国科学院金属研究所 一种抑制激光增材制造合金钢内部孔洞形成的方法
KR102209877B1 (ko) 2018-11-19 2021-02-02 한국생산기술연구원 난용접성 소재 적층 장치 및 그 방법
JP6650141B1 (ja) * 2019-01-10 2020-02-19 株式会社ティー・オール 使用済み成膜用ターゲットの充填式再生方法
CN110218997B (zh) * 2019-05-31 2020-12-01 阳江市五金刀剪产业技术研究院 一种刀具涂层的加工方法
CN110295365A (zh) * 2019-07-29 2019-10-01 福建阿石创新材料股份有限公司 一种溅射靶材及其制备方法和装置
KR102264467B1 (ko) 2019-11-29 2021-06-15 한국생산기술연구원 난용접성 소재 층 예열 적층 장치 및 그 방법
CN112522698B (zh) * 2020-11-26 2023-04-25 江苏科技大学 一种超声振动辅助激光熔覆钨钽铌合金装置及方法
CN113543450B (zh) * 2021-06-25 2022-10-25 西安交通大学 一种用于超导腔的铜铌复合材料板的制作方法
CN113814414A (zh) * 2021-09-28 2021-12-21 长沙新材料产业研究院有限公司 一种钽铌合金部件及其制备方法
CN120060718B (zh) * 2025-04-29 2025-07-29 南京航空航天大学 一种抗侵彻多组元合金及其制备方法

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Also Published As

Publication number Publication date
PL370455A1 (en) 2005-05-30
RU2004125882A (ru) 2005-06-10
RU2333086C2 (ru) 2008-09-10
US20050142021A1 (en) 2005-06-30
TWI337205B (en) 2011-02-11
US7651658B2 (en) 2010-01-26
MXPA04007103A (es) 2004-10-29
TW200401845A (en) 2004-02-01
WO2003062491A3 (en) 2003-12-24
JP2005516117A (ja) 2005-06-02
CA2473830A1 (en) 2003-07-31
NO20043487L (no) 2004-08-20
KR20040103920A (ko) 2004-12-09
TW200706676A (en) 2007-02-16
RS65004A (sr) 2006-10-27
WO2003062491A2 (en) 2003-07-31
NZ534237A (en) 2006-01-27
EP1470265A2 (en) 2004-10-27
TWI314591B (en) 2009-09-11
IL162837A0 (en) 2005-11-20
BR0307105A (pt) 2004-12-28
EP2278045A1 (en) 2011-01-26

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