JP2005340259A - 半導体レーザ装置 - Google Patents
半導体レーザ装置 Download PDFInfo
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- JP2005340259A JP2005340259A JP2004153200A JP2004153200A JP2005340259A JP 2005340259 A JP2005340259 A JP 2005340259A JP 2004153200 A JP2004153200 A JP 2004153200A JP 2004153200 A JP2004153200 A JP 2004153200A JP 2005340259 A JP2005340259 A JP 2005340259A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 131
- 230000031700 light absorption Effects 0.000 claims description 110
- 238000005253 cladding Methods 0.000 claims description 80
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 44
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims description 11
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 claims description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 229910052725 zinc Inorganic materials 0.000 claims description 6
- 229910052732 germanium Inorganic materials 0.000 claims description 5
- 229910052787 antimony Inorganic materials 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 229910052741 iridium Inorganic materials 0.000 claims description 4
- 229910052742 iron Inorganic materials 0.000 claims description 4
- 229910052748 manganese Inorganic materials 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 229910052762 osmium Inorganic materials 0.000 claims description 4
- 229910052763 palladium Inorganic materials 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229910052702 rhenium Inorganic materials 0.000 claims description 4
- 229910052707 ruthenium Inorganic materials 0.000 claims description 4
- 229910052718 tin Inorganic materials 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
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- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 6
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- 230000004888 barrier function Effects 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
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- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
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- 229910052733 gallium Inorganic materials 0.000 description 1
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
【課題】 放射光強度の分布形状が乱れることを抑制できる半導体レーザ装置を提供する。
【解決手段】 この発明の半導体レーザ装置によれば、リッジ部150は導波路をなし、導波光は、リッジ部150に沿って導波され、この導波光の裾は第1サイド部151にも存在するが、第2サイド部152は上記導波光の裾が達しない領域となる。一方、リッジ部150から発生した散乱光は第1サイド部151を経て、第2サイド部152に広がっていくが、この第2サイド部152では、第1上クラッド層108上に光吸収体となる光吸収層127を形成しているので、散乱光が吸収される。この第2サイド部152で散乱光を吸収することによって、放射光のリップルが低減される。また、光吸収層127をp側オーミック電極125と電気的にコンタクトさせたので、光吸収層127への電荷蓄積の問題を回避できる。
【選択図】 図1
Description
上記リッジ部の両外側に配置されると共に、上記下クラッド層、上記活性層、上記第1上クラッド層、および上記第1上クラッド層よりも屈折率の小さい埋め込み層が順に積層された第1サイド部と、
上記第1サイド部の両外側に配置されると共に、上記下クラッド層、上記活性層、上記第1上クラッド層、上記光吸収層が順に積層された第2サイド部とを有し、
上記光吸収層が上記電極層と電気的にコンタクトしていることを特徴としている。
この第1の光吸収層上に形成されると共に、Ru、Os、Zr、Mo、W、Re、Zn、Fe、Sn、Ti、Cr、Sb、Ir、Mn、Pt、Pdのうちの少なくとも1つで作製された第2の光吸収層とを有する。
図1にこの発明の半導体レーザ装置の第1実施形態の模式的な断面を示し、図2にこの第1実施形態の模式的な上面を示す。図1の模式断面図は、図2のA−A線に沿った断面を示している。
次に、図9に本発明の半導体レーザ装置の第2実施形態の模式的な上面図を示し、図10に上記第2実施形態の模式的な断面を示す。この図10は、図9の線A−Aに沿った断面図である。
次に、図12に、この発明の半導体レーザ装置の第3実施形態の模式的な断面を示す。
101,201,301 n型GaAsバッファ層
102,202,302 n型Ga0.5In0.5Pバッファ層
103,203,303 n型(Al0.67Ga0.33)0.5In0.5P第1下クラッド層
104,204,304 n型(Al0.7Ga0.3)0.5In0.5P第2下クラッド層
105,205,305 アンドープ(Al0.5Ga0.5)0.5In0.5P下ガイド層
106,206,306 量子井戸層を含むアンドープ活性層
107,207,307 アンドープ(Al0.5Ga0.5)0.5In0.5P上ガイド層
108,208,308 p型(Al0.7Ga0.3)0.5In0.5P第1上クラッド層
109,209,309 p型Ga0.7In0.3Pエッチングストップ層
110,210,310 p型(Al0.7Ga0.3)0.5In0.5P第2上クラッド層
111,211,311 p型Ga0.5In0.5P中間バンドギャップ層
112,212,312 p型GaAsキャップ層
125,225,325 p側AuZnオーミック電極
127,227,327 光吸収層
128,228,328 p側電極
131,132,231,232,331,332 窓領域
150,250,350 リッジ部
151,251,351 第1サイド部
152,252,352 第2サイド部
155,255,355 前光出射端面
156,256,356 後光出射端面
157,257,357 前面反射膜
158,258,358 後面反射膜
160 導波光分布領域
161 散乱光の分布領域
170,270,370 半導体積層構造部
253 第3サイド部
Claims (14)
- 下クラッド層、活性層、第1上クラッド層、第2上クラッド層、および電極層が順に積層されたリッジ部と、
上記リッジ部の両外側に配置されると共に、上記下クラッド層、上記活性層、上記第1上クラッド層、および上記第1上クラッド層よりも屈折率の小さい埋め込み層が順に積層された第1サイド部と、
上記第1サイド部の両外側に配置されると共に、上記下クラッド層、上記活性層、上記第1上クラッド層、上記光吸収層が順に積層された第2サイド部とを有し、
上記光吸収層が上記電極層と電気的にコンタクトしていることを特徴とする半導体レーザ装置。 - 請求項1に記載の半導体レーザ装置において、
上記第2サイド部は、
上記第1上クラッド層と上記光吸収層との間に絶縁層を有することを特徴とする半導体レーザ装置。 - 請求項1または2に記載の半導体レーザ装置において、
上記第1サイド部における上記活性層の上端と上記埋め込み層の下端との間の距離が、上記第2サイド部における上記活性層の上端と上記光吸収層の下端との間の距離よりも長いことを特徴とする半導体レーザ装置。 - 請求項1に記載の半導体レーザ装置において、
上記光吸収層は、Ru、Os、Zr、Mo、W、Re、Zn、Fe、Sn、Ti、Cr、Sb、Ir、Mn、Pt、Pdのうちの少なくとも1つで作製された金属層であることを特徴とする半導体レーザ装置。 - 請求項1に記載の半導体レーザ装置において、
上記光吸収層は、Ge、Si、SiXGe1−X(0≦x≦1)、GaAs、InGaAs、AlGaAs、InP、(AlXGa1−X)yIn1−yP(0≦x≦1、0≦y≦0.5)、InGaAsのうちのいずれかで作製されていることを特徴とする半導体レーザ装置。 - 請求項1に記載の半導体レーザ装置において、
上記第1サイド部の幅は、1μm乃至5μmであることを特徴とする半導体レーザ装置。 - 請求項6に記載の半導体レーザ装置において、
上記第1サイド部は、光出射端面近傍以外における幅が1μm乃至5μmであり、上記光出射端面における幅が上記光出射端面近傍以外における幅よりも小さいことを特徴とする半導体レーザ装置。 - 請求項7に記載の半導体レーザ装置において、
上記第1サイド部は、光出射端面では幅が略ゼロであることを特徴とする半導体レーザ装置。 - 請求項1に記載の半導体レーザ装置において、
上記光吸収層の厚さは、5nm以上であることを特徴とする半導体レーザ装置。 - 請求項2に記載の半導体レーザ装置において、
上記絶縁層の厚さは、20nm以下であることを特徴とする半導体レーザ装置。 - 請求項5に記載の半導体レーザ装置において、
上記光吸収層は、上記第1上クラッド層の導電型と異なる導電型であることを特徴とする半導体レーザ装置。 - 請求項1に記載の半導体レーザ装置において、
上記光吸収層は、
Ge、Si、SiXGe1−X(ただし0≦x≦1)、GaAs、InGaAs、AlGaAs、InP、(AlXGa1−X)yIn1−yP(0≦x≦1、0≦y≦0.5)、InGaAsのうちのいずれかで作製された第1の光吸収層と、
Ru、Os、Zr、Mo、W、Re、Zn、Fe、Sn、Ti、Cr、Sb、Ir、Mn、Pt、Pdのうちの少なくとも1つで作製された第2の光吸収層とを有することを特徴とする半導体レーザ装置。 - 請求項1に記載の半導体レーザ装置において、
上記下クラッド層、上記活性層、上記第1上クラッド層、上記第2上クラッド層は、それぞれ、(AlXGa1−X)yIn1−yP(0≦x≦1、0≦y≦1)で構成されていることを特徴とする半導体レーザ装置。 - 請求項1に記載の半導体レーザ装置において、
上記活性層は、量子井戸を含み、
光出射端面近傍において上記活性層が混晶化された窓領域が形成されていることを特徴とする半導体レーザ装置。
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