JP2005284040A5 - - Google Patents
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- Publication number
- JP2005284040A5 JP2005284040A5 JP2004099131A JP2004099131A JP2005284040A5 JP 2005284040 A5 JP2005284040 A5 JP 2005284040A5 JP 2004099131 A JP2004099131 A JP 2004099131A JP 2004099131 A JP2004099131 A JP 2004099131A JP 2005284040 A5 JP2005284040 A5 JP 2005284040A5
- Authority
- JP
- Japan
- Prior art keywords
- optical
- layer
- approximately
- antireflection film
- optical system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims 27
- 239000010408 film Substances 0.000 claims 12
- 238000003980 solgel method Methods 0.000 claims 4
- 238000001771 vacuum deposition Methods 0.000 claims 3
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims 2
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims 2
- 239000012788 optical film Substances 0.000 claims 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 1
- 238000003384 imaging method Methods 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims 1
- 230000002265 prevention Effects 0.000 claims 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims 1
- 229910001928 zirconium oxide Inorganic materials 0.000 claims 1
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004099131A JP4433390B2 (ja) | 2004-03-30 | 2004-03-30 | 反射防止膜並びにこの反射防止膜を有する光学素子及び光学系 |
| US11/091,410 US7256948B2 (en) | 2004-03-30 | 2005-03-29 | Anti-reflection coating, and optical element and optical system with anti-reflection coating |
| AT05251962T ATE521909T1 (de) | 2004-03-30 | 2005-03-30 | Antireflexbeschichtung im sichtbaren bereich für lichteinfall in weitem winkel |
| EP05251962A EP1584954B1 (en) | 2004-03-30 | 2005-03-30 | Anti-reflection coating in the visible range for wide incident angles |
| TW094109954A TWI375048B (en) | 2004-03-30 | 2005-03-30 | Anti-reflection coating, and optical element and optical system with anti-reflection coating |
| CNA2005100625070A CN1677132A (zh) | 2004-03-30 | 2005-03-30 | 防反射膜、及具有该防反射膜的光学元件和光学系统 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004099131A JP4433390B2 (ja) | 2004-03-30 | 2004-03-30 | 反射防止膜並びにこの反射防止膜を有する光学素子及び光学系 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009241865A Division JP5252312B2 (ja) | 2009-10-20 | 2009-10-20 | 反射防止膜並びにこの反射防止膜を有する光学素子及び光学系 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005284040A JP2005284040A (ja) | 2005-10-13 |
| JP2005284040A5 true JP2005284040A5 (https=) | 2008-04-10 |
| JP4433390B2 JP4433390B2 (ja) | 2010-03-17 |
Family
ID=34909437
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004099131A Expired - Fee Related JP4433390B2 (ja) | 2004-03-30 | 2004-03-30 | 反射防止膜並びにこの反射防止膜を有する光学素子及び光学系 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7256948B2 (https=) |
| EP (1) | EP1584954B1 (https=) |
| JP (1) | JP4433390B2 (https=) |
| CN (1) | CN1677132A (https=) |
| AT (1) | ATE521909T1 (https=) |
| TW (1) | TWI375048B (https=) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2990839B1 (en) * | 2004-09-16 | 2020-11-18 | Nikon Corporation | Optical system with mgf2 optical thin film |
| JP4978836B2 (ja) * | 2007-03-19 | 2012-07-18 | 株式会社ニコン | ズームレンズ、光学機器、および結像方法 |
| JP4984231B2 (ja) * | 2007-03-22 | 2012-07-25 | 株式会社ニコン | ズームレンズ、光学機器、および結像方法 |
| JP5213424B2 (ja) * | 2007-12-10 | 2013-06-19 | キヤノン株式会社 | 光学系及びそれを有する光学機器 |
| US8199404B2 (en) | 2007-12-27 | 2012-06-12 | Pentax Ricoh Imaging Company, Ltd. | Anti-reflection coating, optical member, exchange lens unit and imaging device |
| JP5777682B2 (ja) * | 2008-08-29 | 2015-09-09 | キヤノン株式会社 | 光学素子及びその製造方法、光学系、光学機器 |
| JP5218902B2 (ja) * | 2008-09-10 | 2013-06-26 | 株式会社ニコン | 広角レンズおよび撮像装置 |
| CN102193175B (zh) | 2010-03-08 | 2016-01-20 | 株式会社尼康 | 变焦镜头系统和光学设备 |
| US8830592B2 (en) * | 2010-06-23 | 2014-09-09 | Nikon Corporation | Zoom lens, imaging apparatus, and method for manufacturing zoom lens |
| JP5338860B2 (ja) * | 2011-06-27 | 2013-11-13 | 株式会社ニコン | 光学系、この光学系を有する光学機器、及び、光学系の製造方法 |
| US9625689B2 (en) | 2010-09-17 | 2017-04-18 | Nikon Corporation | Optical system, optical apparatus equipped therewith, and method for manufacturing optical system |
| JP5338861B2 (ja) * | 2011-06-27 | 2013-11-13 | 株式会社ニコン | 光学系、この光学系を有する光学機器、及び、光学系の製造方法 |
| JP5614214B2 (ja) * | 2010-10-01 | 2014-10-29 | リコーイメージング株式会社 | 反射防止膜及び反射防止膜を有する光学部材 |
| JP5936444B2 (ja) | 2011-07-26 | 2016-06-22 | キヤノン株式会社 | 光学素子、それを用いた光学系および光学機器 |
| JP5662982B2 (ja) | 2011-10-28 | 2015-02-04 | Hoya株式会社 | 反射防止膜および光学素子 |
| JP5871012B2 (ja) * | 2011-12-28 | 2016-03-01 | 株式会社ニコン | 接眼レンズ、これを備えたファインダー光学系及び光学機器、並びに接眼レンズの製造方法 |
| JP5885595B2 (ja) | 2012-06-12 | 2016-03-15 | キヤノン株式会社 | 反射防止膜、および、それを有する光学素子、光学系、光学機器 |
| US20150192763A1 (en) * | 2014-01-06 | 2015-07-09 | Flir Systems, Inc. | Coatings for use with long wavelength detection, optical system including the same, and associated methods |
| JP6991706B2 (ja) * | 2016-11-30 | 2022-02-03 | キヤノン株式会社 | 光学素子およびそれを有する光学系 |
| WO2018134028A1 (en) | 2017-01-17 | 2018-07-26 | Philips Lighting Holding B.V. | Adjustable spot light position generation |
| CN116755213A (zh) | 2020-08-03 | 2023-09-15 | 大立光电股份有限公司 | 光学镜头、取像装置及电子装置 |
| US12560804B2 (en) | 2020-10-23 | 2026-02-24 | Essilor International | Transmission optical system with limited ghost image visibility, system and method for evaluating ghost image visibility of a transmission optical system |
| US12481086B2 (en) * | 2021-08-03 | 2025-11-25 | Largan Precision Co., Ltd. | Optical lens assembly and optical module |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3781090A (en) | 1972-11-06 | 1973-12-25 | Minolta Camera Kk | Four layer anti-reflection coating |
| US4128303A (en) | 1976-04-05 | 1978-12-05 | Kabushiki Kaisha Hoya Lens | Anti reflection coating with a composite middle layer |
| JPS53105249A (en) * | 1977-02-25 | 1978-09-13 | Nippon Chemical Ind | Coated plastic optical instruments |
| JPS6029701A (ja) | 1983-07-26 | 1985-02-15 | Asahi Glass Co Ltd | ５層反射防止膜 |
| JPH07104442B2 (ja) * | 1989-04-06 | 1995-11-13 | 旭硝子株式会社 | フッ化マグネシウム膜及び低反射膜の製造方法 |
| JP2991554B2 (ja) * | 1990-11-09 | 1999-12-20 | 旭光学工業株式会社 | 広波長域ゴースト防止光学系 |
| JPH063501A (ja) | 1992-06-23 | 1994-01-14 | Dainippon Printing Co Ltd | 多孔質光学材料 |
| JPH10221502A (ja) | 1997-02-07 | 1998-08-21 | Nikon Corp | 光学薄膜の製造方法および光学薄膜 |
| US5993898A (en) | 1997-05-19 | 1999-11-30 | Nikon Corporation | Fabrication method and structure for multilayer optical anti-reflection coating, and optical component and optical system using multilayer optical anti-reflection coating |
| JPH11167003A (ja) * | 1997-12-02 | 1999-06-22 | Nikon Corp | ２波長反射防止膜 |
| JP2000357654A (ja) | 1998-10-13 | 2000-12-26 | Nikon Corp | 反射防止膜、光学素子、露光装置、及び電子物品 |
| EP0994368A3 (en) | 1998-10-13 | 2000-05-03 | Nikon Corporation | Anti-reflective films, optical elements and reduction-projection exposure apparatus utilizing same |
| JP2000249820A (ja) | 1999-02-26 | 2000-09-14 | Canon Inc | フィルターおよびレンズ鏡筒 |
| JP2000356704A (ja) | 1999-06-16 | 2000-12-26 | Asahi Optical Co Ltd | 反射防止膜の形成方法および光学素子 |
| JP3509804B2 (ja) | 1999-09-30 | 2004-03-22 | 株式会社ニコン | 多層薄膜付き光学素子及びそれを備える露光装置 |
| JP2002062406A (ja) * | 2000-08-23 | 2002-02-28 | Dainippon Printing Co Ltd | 反射防止フィルム |
| EP1315005B1 (en) | 2000-08-30 | 2007-10-10 | Nikon Corporation | Method of forming optical thin film |
| DE10064143A1 (de) * | 2000-12-15 | 2002-06-20 | Zeiss Carl | Reflexionsminderungsbeschichtung für Ultraviolettlicht bei großen Einfallswinkeln |
| DE10101017A1 (de) | 2001-01-05 | 2002-07-11 | Zeiss Carl | Reflexionsminderungsbeschichtung für Ultraviolettlicht |
| JP4284006B2 (ja) | 2001-04-10 | 2009-06-24 | 富士フイルム株式会社 | 反射防止フィルム、偏光板および画像表示装置 |
| US6950236B2 (en) | 2001-04-10 | 2005-09-27 | Fuji Photo Film Co., Ltd. | Antireflection film, polarizing plate, and apparatus for displaying an image |
| JP3673731B2 (ja) * | 2001-05-22 | 2005-07-20 | キヤノン株式会社 | 露光装置及び方法 |
| JP2004302113A (ja) | 2003-03-31 | 2004-10-28 | Nikon Corp | 反射防止膜、光学部材、光学系及び投影露光装置、並びに反射防止膜の製造方法 |
| JP2005114881A (ja) | 2003-10-06 | 2005-04-28 | Nikon Corp | 投影光学系、露光装置、および露光方法 |
-
2004
- 2004-03-30 JP JP2004099131A patent/JP4433390B2/ja not_active Expired - Fee Related
-
2005
- 2005-03-29 US US11/091,410 patent/US7256948B2/en not_active Expired - Lifetime
- 2005-03-30 TW TW094109954A patent/TWI375048B/zh not_active IP Right Cessation
- 2005-03-30 CN CNA2005100625070A patent/CN1677132A/zh active Pending
- 2005-03-30 AT AT05251962T patent/ATE521909T1/de not_active IP Right Cessation
- 2005-03-30 EP EP05251962A patent/EP1584954B1/en not_active Expired - Lifetime
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