JP4433390B2 - 反射防止膜並びにこの反射防止膜を有する光学素子及び光学系 - Google Patents

反射防止膜並びにこの反射防止膜を有する光学素子及び光学系 Download PDF

Info

Publication number
JP4433390B2
JP4433390B2 JP2004099131A JP2004099131A JP4433390B2 JP 4433390 B2 JP4433390 B2 JP 4433390B2 JP 2004099131 A JP2004099131 A JP 2004099131A JP 2004099131 A JP2004099131 A JP 2004099131A JP 4433390 B2 JP4433390 B2 JP 4433390B2
Authority
JP
Japan
Prior art keywords
optical
layer
optical system
antireflection film
refractive index
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004099131A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005284040A (ja
JP2005284040A5 (https=
Inventor
一政 田中
剛 村田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP2004099131A priority Critical patent/JP4433390B2/ja
Priority to US11/091,410 priority patent/US7256948B2/en
Priority to TW094109954A priority patent/TWI375048B/zh
Priority to AT05251962T priority patent/ATE521909T1/de
Priority to EP05251962A priority patent/EP1584954B1/en
Priority to CNA2005100625070A priority patent/CN1677132A/zh
Publication of JP2005284040A publication Critical patent/JP2005284040A/ja
Publication of JP2005284040A5 publication Critical patent/JP2005284040A5/ja
Application granted granted Critical
Publication of JP4433390B2 publication Critical patent/JP4433390B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • G02B1/116—Multilayers including electrically conducting layers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0018—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for preventing ghost images

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Paints Or Removers (AREA)
  • Optical Filters (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Surface Treatment Of Glass (AREA)
JP2004099131A 2004-03-30 2004-03-30 反射防止膜並びにこの反射防止膜を有する光学素子及び光学系 Expired - Fee Related JP4433390B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2004099131A JP4433390B2 (ja) 2004-03-30 2004-03-30 反射防止膜並びにこの反射防止膜を有する光学素子及び光学系
US11/091,410 US7256948B2 (en) 2004-03-30 2005-03-29 Anti-reflection coating, and optical element and optical system with anti-reflection coating
AT05251962T ATE521909T1 (de) 2004-03-30 2005-03-30 Antireflexbeschichtung im sichtbaren bereich für lichteinfall in weitem winkel
EP05251962A EP1584954B1 (en) 2004-03-30 2005-03-30 Anti-reflection coating in the visible range for wide incident angles
TW094109954A TWI375048B (en) 2004-03-30 2005-03-30 Anti-reflection coating, and optical element and optical system with anti-reflection coating
CNA2005100625070A CN1677132A (zh) 2004-03-30 2005-03-30 防反射膜、及具有该防反射膜的光学元件和光学系统

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004099131A JP4433390B2 (ja) 2004-03-30 2004-03-30 反射防止膜並びにこの反射防止膜を有する光学素子及び光学系

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009241865A Division JP5252312B2 (ja) 2009-10-20 2009-10-20 反射防止膜並びにこの反射防止膜を有する光学素子及び光学系

Publications (3)

Publication Number Publication Date
JP2005284040A JP2005284040A (ja) 2005-10-13
JP2005284040A5 JP2005284040A5 (https=) 2008-04-10
JP4433390B2 true JP4433390B2 (ja) 2010-03-17

Family

ID=34909437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004099131A Expired - Fee Related JP4433390B2 (ja) 2004-03-30 2004-03-30 反射防止膜並びにこの反射防止膜を有する光学素子及び光学系

Country Status (6)

Country Link
US (1) US7256948B2 (https=)
EP (1) EP1584954B1 (https=)
JP (1) JP4433390B2 (https=)
CN (1) CN1677132A (https=)
AT (1) ATE521909T1 (https=)
TW (1) TWI375048B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9158039B2 (en) 2011-07-26 2015-10-13 Canon Kabushiki Kaisha Optical element, and optical system and optical apparatus using same

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2990839B1 (en) * 2004-09-16 2020-11-18 Nikon Corporation Optical system with mgf2 optical thin film
JP4978836B2 (ja) * 2007-03-19 2012-07-18 株式会社ニコン ズームレンズ、光学機器、および結像方法
JP4984231B2 (ja) * 2007-03-22 2012-07-25 株式会社ニコン ズームレンズ、光学機器、および結像方法
JP5213424B2 (ja) * 2007-12-10 2013-06-19 キヤノン株式会社 光学系及びそれを有する光学機器
US8199404B2 (en) 2007-12-27 2012-06-12 Pentax Ricoh Imaging Company, Ltd. Anti-reflection coating, optical member, exchange lens unit and imaging device
JP5777682B2 (ja) * 2008-08-29 2015-09-09 キヤノン株式会社 光学素子及びその製造方法、光学系、光学機器
JP5218902B2 (ja) * 2008-09-10 2013-06-26 株式会社ニコン 広角レンズおよび撮像装置
CN102193175B (zh) 2010-03-08 2016-01-20 株式会社尼康 变焦镜头系统和光学设备
US8830592B2 (en) * 2010-06-23 2014-09-09 Nikon Corporation Zoom lens, imaging apparatus, and method for manufacturing zoom lens
JP5338860B2 (ja) * 2011-06-27 2013-11-13 株式会社ニコン 光学系、この光学系を有する光学機器、及び、光学系の製造方法
US9625689B2 (en) 2010-09-17 2017-04-18 Nikon Corporation Optical system, optical apparatus equipped therewith, and method for manufacturing optical system
JP5338861B2 (ja) * 2011-06-27 2013-11-13 株式会社ニコン 光学系、この光学系を有する光学機器、及び、光学系の製造方法
JP5614214B2 (ja) * 2010-10-01 2014-10-29 リコーイメージング株式会社 反射防止膜及び反射防止膜を有する光学部材
JP5662982B2 (ja) 2011-10-28 2015-02-04 Hoya株式会社 反射防止膜および光学素子
JP5871012B2 (ja) * 2011-12-28 2016-03-01 株式会社ニコン 接眼レンズ、これを備えたファインダー光学系及び光学機器、並びに接眼レンズの製造方法
JP5885595B2 (ja) 2012-06-12 2016-03-15 キヤノン株式会社 反射防止膜、および、それを有する光学素子、光学系、光学機器
US20150192763A1 (en) * 2014-01-06 2015-07-09 Flir Systems, Inc. Coatings for use with long wavelength detection, optical system including the same, and associated methods
JP6991706B2 (ja) * 2016-11-30 2022-02-03 キヤノン株式会社 光学素子およびそれを有する光学系
WO2018134028A1 (en) 2017-01-17 2018-07-26 Philips Lighting Holding B.V. Adjustable spot light position generation
CN116755213A (zh) 2020-08-03 2023-09-15 大立光电股份有限公司 光学镜头、取像装置及电子装置
US12560804B2 (en) 2020-10-23 2026-02-24 Essilor International Transmission optical system with limited ghost image visibility, system and method for evaluating ghost image visibility of a transmission optical system
US12481086B2 (en) * 2021-08-03 2025-11-25 Largan Precision Co., Ltd. Optical lens assembly and optical module

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3781090A (en) 1972-11-06 1973-12-25 Minolta Camera Kk Four layer anti-reflection coating
US4128303A (en) 1976-04-05 1978-12-05 Kabushiki Kaisha Hoya Lens Anti reflection coating with a composite middle layer
JPS53105249A (en) * 1977-02-25 1978-09-13 Nippon Chemical Ind Coated plastic optical instruments
JPS6029701A (ja) 1983-07-26 1985-02-15 Asahi Glass Co Ltd ５層反射防止膜
JPH07104442B2 (ja) * 1989-04-06 1995-11-13 旭硝子株式会社 フッ化マグネシウム膜及び低反射膜の製造方法
JP2991554B2 (ja) * 1990-11-09 1999-12-20 旭光学工業株式会社 広波長域ゴースト防止光学系
JPH063501A (ja) 1992-06-23 1994-01-14 Dainippon Printing Co Ltd 多孔質光学材料
JPH10221502A (ja) 1997-02-07 1998-08-21 Nikon Corp 光学薄膜の製造方法および光学薄膜
US5993898A (en) 1997-05-19 1999-11-30 Nikon Corporation Fabrication method and structure for multilayer optical anti-reflection coating, and optical component and optical system using multilayer optical anti-reflection coating
JPH11167003A (ja) * 1997-12-02 1999-06-22 Nikon Corp ２波長反射防止膜
JP2000357654A (ja) 1998-10-13 2000-12-26 Nikon Corp 反射防止膜、光学素子、露光装置、及び電子物品
EP0994368A3 (en) 1998-10-13 2000-05-03 Nikon Corporation Anti-reflective films, optical elements and reduction-projection exposure apparatus utilizing same
JP2000249820A (ja) 1999-02-26 2000-09-14 Canon Inc フィルターおよびレンズ鏡筒
JP2000356704A (ja) 1999-06-16 2000-12-26 Asahi Optical Co Ltd 反射防止膜の形成方法および光学素子
JP3509804B2 (ja) 1999-09-30 2004-03-22 株式会社ニコン 多層薄膜付き光学素子及びそれを備える露光装置
JP2002062406A (ja) * 2000-08-23 2002-02-28 Dainippon Printing Co Ltd 反射防止フィルム
EP1315005B1 (en) 2000-08-30 2007-10-10 Nikon Corporation Method of forming optical thin film
DE10064143A1 (de) * 2000-12-15 2002-06-20 Zeiss Carl Reflexionsminderungsbeschichtung für Ultraviolettlicht bei großen Einfallswinkeln
DE10101017A1 (de) 2001-01-05 2002-07-11 Zeiss Carl Reflexionsminderungsbeschichtung für Ultraviolettlicht
JP4284006B2 (ja) 2001-04-10 2009-06-24 富士フイルム株式会社 反射防止フィルム、偏光板および画像表示装置
US6950236B2 (en) 2001-04-10 2005-09-27 Fuji Photo Film Co., Ltd. Antireflection film, polarizing plate, and apparatus for displaying an image
JP3673731B2 (ja) * 2001-05-22 2005-07-20 キヤノン株式会社 露光装置及び方法
JP2004302113A (ja) 2003-03-31 2004-10-28 Nikon Corp 反射防止膜、光学部材、光学系及び投影露光装置、並びに反射防止膜の製造方法
JP2005114881A (ja) 2003-10-06 2005-04-28 Nikon Corp 投影光学系、露光装置、および露光方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9158039B2 (en) 2011-07-26 2015-10-13 Canon Kabushiki Kaisha Optical element, and optical system and optical apparatus using same

Also Published As

Publication number Publication date
EP1584954B1 (en) 2011-08-24
JP2005284040A (ja) 2005-10-13
US7256948B2 (en) 2007-08-14
US20050225878A1 (en) 2005-10-13
TW200538753A (en) 2005-12-01
ATE521909T1 (de) 2011-09-15
EP1584954A2 (en) 2005-10-12
EP1584954A3 (en) 2005-12-14
CN1677132A (zh) 2005-10-05
TWI375048B (en) 2012-10-21

Similar Documents

Publication Publication Date Title
JP4433390B2 (ja) 反射防止膜並びにこの反射防止膜を有する光学素子及び光学系
JP5201435B2 (ja) 光学系
JP4984231B2 (ja) ズームレンズ、光学機器、および結像方法
JP5636668B2 (ja) レンズ系及び光学装置
JP4978836B2 (ja) ズームレンズ、光学機器、および結像方法
US8908273B2 (en) Imaging lens, optical apparatus equipped therewith and method for manufacturing imaging lens
JP5403411B2 (ja) コンバータレンズ及びこれを有する光学装置
CN107250868B (zh) 光学系统以及具有该光学系统的摄像装置
JP5093657B2 (ja) レトロフォーカスレンズ、撮像装置、およびレトロフォーカスレンズの合焦方法
US9753271B2 (en) Eyepiece lens, viewfinder optical system and optical apparatus equipped with the same, and method for manufacturing eyepiece lens
JP5252312B2 (ja) 反射防止膜並びにこの反射防止膜を有する光学素子及び光学系
JP2015084037A (ja) 変倍光学系、光学装置、変倍光学系の製造方法
JP2009198854A (ja) 広角レンズ、これを有する撮像装置及び結像方法
JP5895745B2 (ja) 光学系、この光学系を有する撮像装置、及び、光学系の製造方法
JP2015084038A (ja) 変倍光学系、光学装置、変倍光学系の製造方法
JP5861281B2 (ja) 光学系、この光学系を有する撮像装置、及び、光学系の製造方法
JP2013235078A (ja) 光学系、この光学系を有する光学機器、及び、光学系の製造方法
JP2010271502A (ja) コンバーターレンズ及びこのコンバーターレンズを有する光学装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070223

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080221

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20090806

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090821

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20091020

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20091204

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20091217

R150 Certificate of patent or registration of utility model

Ref document number: 4433390

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130108

Year of fee payment: 3

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130108

Year of fee payment: 3

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130108

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140108

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees