JP2005264938A - 真空ポンプシステム - Google Patents

真空ポンプシステム Download PDF

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Publication number
JP2005264938A
JP2005264938A JP2005071457A JP2005071457A JP2005264938A JP 2005264938 A JP2005264938 A JP 2005264938A JP 2005071457 A JP2005071457 A JP 2005071457A JP 2005071457 A JP2005071457 A JP 2005071457A JP 2005264938 A JP2005264938 A JP 2005264938A
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JP
Japan
Prior art keywords
vacuum pump
control unit
pump
communication module
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005071457A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005264938A5 (de
Inventor
Cristian Maccarone
マッカローネ クリスティアン
Massimiliano Titolo
ティトロ マッシミリアーノ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian SpA
Original Assignee
Varian SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=34833831&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP2005264938(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Varian SpA filed Critical Varian SpA
Publication of JP2005264938A publication Critical patent/JP2005264938A/ja
Publication of JP2005264938A5 publication Critical patent/JP2005264938A5/ja
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/56—Number of pump/machine units in operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/80—Diagnostics
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/90—Remote control, e.g. wireless, via LAN, by radio, or by a wired connection from a central computer

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
JP2005071457A 2004-03-15 2005-03-14 真空ポンプシステム Pending JP2005264938A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP04425172.6A EP1577559B2 (de) 2004-03-15 2004-03-15 Vakuumpumpenanlage

Publications (2)

Publication Number Publication Date
JP2005264938A true JP2005264938A (ja) 2005-09-29
JP2005264938A5 JP2005264938A5 (de) 2008-04-24

Family

ID=34833831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005071457A Pending JP2005264938A (ja) 2004-03-15 2005-03-14 真空ポンプシステム

Country Status (4)

Country Link
US (1) US20050201882A1 (de)
EP (1) EP1577559B2 (de)
JP (1) JP2005264938A (de)
DE (1) DE602004005154T2 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010523870A (ja) * 2007-04-03 2010-07-15 カー エヌ エフ ノイベルガー ゲゼルシャフト ミット ベシュレンクテル ハフツング ポンプスタンド
JP2018155241A (ja) * 2017-03-15 2018-10-04 亞台富士精機股▲ふん▼有限公司 遠隔監視機能を有するポンプ装置及びポンプ装置監視システム
JP2023500729A (ja) * 2019-11-18 2023-01-10 サルエアー エルエルシー 電気式油田コンテナパッケージ

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
DE102006045024A1 (de) * 2006-09-23 2008-03-27 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumgerät
DE202006017554U1 (de) * 2006-11-17 2008-03-27 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
CN101397986B (zh) * 2008-11-25 2010-10-13 温晋轩 多功能抽空真空设备
DE102011012810A1 (de) * 2011-03-02 2012-09-06 Oerlikon Leybold Vacuum Gmbh Verfahren zur Konfiguration einer Vakuum-Pumpenanlage
DE102012104214A1 (de) * 2012-05-15 2013-11-21 Xylem Ip Holdings Llc Pumpaggregat, Pumpaggregat-Konfigurationssystem und Verfahren
CN103423140B (zh) * 2012-07-25 2016-01-13 中节能万润股份有限公司 一种防止真空体系倒吸的方法及装置
US10138882B1 (en) * 2013-06-10 2018-11-27 Villicus, Inc. Controlling a pump
US10451075B1 (en) 2013-06-10 2019-10-22 Villicus, Inc. Saltwater disposal
EP2818718B1 (de) * 2013-06-24 2017-11-15 Vacuubrand Gmbh + Co Kg Vakuumpumpstand mit drahtloser Bedieneinheit
US10269537B2 (en) 2013-12-16 2019-04-23 Varian Semiconductor Equipment Associates, Inc. Vacuum assembly for an ion implanter system
DE102014003249A1 (de) * 2014-03-12 2015-09-17 Wilo Se Verfahren zur Konfiguration eines elektromotorischen Pumpenaggregats
DE102014209157A1 (de) 2014-05-14 2015-11-19 Wiwa Wilhelm Wagner Gmbh & Co Kg Verfahren zur Steuerung eines Pumpensystems sowie Pumpensystem
DE102014209155A1 (de) * 2014-05-14 2015-11-19 Wiwa Wilhelm Wagner Gmbh & Co Kg Verfahren zum Betrieb eines Pumpensystems sowie Pumpensystem
GB2526292B (en) * 2014-05-19 2016-06-15 Edwards Ltd Vacuum system
CN105673467A (zh) * 2016-01-27 2016-06-15 烟台阳光泵业有限公司 一种基于移动互联网的泵远程控制智能系统
CN106545490A (zh) * 2017-01-12 2017-03-29 南京智中信息技术有限公司 一种真空泵节能监控系统及方法
IT201700042515A1 (it) * 2017-04-18 2018-10-18 D V P Vacuum Tech S P A Sistema di monitoraggio di una macchina operatrice pneumofora.
CN108765890A (zh) * 2018-04-27 2018-11-06 国家电网公司 真空监控仪
CN111779675B (zh) * 2020-06-10 2022-04-29 中国重型机械研究院股份公司 基于物联网的炼钢用智能型机械真空泵系统及应用
EP4071364A1 (de) * 2022-06-30 2022-10-12 Pfeiffer Vacuum Technology AG Vakuumgerät, auswertungsvorrichtung, kommunikationssystem sowie verfahren zum betreiben eines vakuumgeräts und verfahren zum betreiben einer auswertungsvorrichtung
CN117419041B (zh) * 2023-12-18 2024-06-14 中国第一汽车股份有限公司 一种电子油泵的控制方法及装置

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS648388A (en) * 1987-06-30 1989-01-12 Oki Electric Ind Co Ltd Vacuum pump device
JPH02112681A (ja) * 1988-10-22 1990-04-25 Fuji Electric Co Ltd 真空ポンプ保護方法
JPH03175164A (ja) * 1989-09-30 1991-07-30 Meiki Co Ltd 真空ポンプ用給排油装置
JPH06335291A (ja) * 1993-05-10 1994-12-02 Motorola Inc セルラ電動機制御ネットワーク
JPH1054369A (ja) * 1996-05-21 1998-02-24 Ebara Corp 真空ポンプの制御装置
WO1999066374A1 (de) * 1998-06-13 1999-12-23 Kaeser Kompressoren Gmbh Elektronische steuerung für anlagen der druckluft- oder vakuumerzeugung
JP2002329464A (ja) * 2001-05-01 2002-11-15 Chugai Ro Co Ltd ガラスパネルのチップ管と排気ヘッドとの接続方法およびその真空排気装置
JP2003278681A (ja) * 2002-03-25 2003-10-02 Shin Meiwa Ind Co Ltd 真空排気システムおよびその運転方法
WO2003089791A1 (de) * 2002-04-20 2003-10-30 Leybold Vakuum Gmbh Vakuumpumpe

Family Cites Families (12)

* Cited by examiner, † Cited by third party
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US5696495A (en) * 1989-10-04 1997-12-09 Pietzsch Automatisierungstechnik Gmbh System for controlling and regulating a construction installation having a plurality of components
US5238362A (en) * 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE9400955U1 (de) † 1994-01-21 1994-03-03 Grundfos A/S, Bjerringbro Pumpenaggregat
US5713724A (en) * 1994-11-23 1998-02-03 Coltec Industries Inc. System and methods for controlling rotary screw compressors
DE19605132C2 (de) † 1996-02-13 1998-02-05 Kostal Leopold Gmbh & Co Kg Verfahren zum Kommunikationsaufbau zwischen einer Fernwirkeinrichtung und zugeordneten Aggregaten
US5971711A (en) * 1996-05-21 1999-10-26 Ebara Corporation Vacuum pump control system
US6167389A (en) * 1996-12-23 2000-12-26 Comverge Technologies, Inc. Method and apparatus using distributed intelligence for applying real time pricing and time of use rates in wide area network including a headend and subscriber
JP3179441B2 (ja) * 1999-03-30 2001-06-25 セイコー精機株式会社 通信異常検出及び／又は対処装置及び真空ポンプ遠隔監視制御装置
US6302654B1 (en) * 2000-02-29 2001-10-16 Copeland Corporation Compressor with control and protection system
DE10018866A1 (de) † 2000-04-14 2001-10-25 Grundfos As Pumpenaggregat
US6412293B1 (en) * 2000-10-11 2002-07-02 Copeland Corporation Scroll machine with continuous capacity modulation

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS648388A (en) * 1987-06-30 1989-01-12 Oki Electric Ind Co Ltd Vacuum pump device
JPH02112681A (ja) * 1988-10-22 1990-04-25 Fuji Electric Co Ltd 真空ポンプ保護方法
JPH03175164A (ja) * 1989-09-30 1991-07-30 Meiki Co Ltd 真空ポンプ用給排油装置
JPH06335291A (ja) * 1993-05-10 1994-12-02 Motorola Inc セルラ電動機制御ネットワーク
JPH1054369A (ja) * 1996-05-21 1998-02-24 Ebara Corp 真空ポンプの制御装置
WO1999066374A1 (de) * 1998-06-13 1999-12-23 Kaeser Kompressoren Gmbh Elektronische steuerung für anlagen der druckluft- oder vakuumerzeugung
JP2002329464A (ja) * 2001-05-01 2002-11-15 Chugai Ro Co Ltd ガラスパネルのチップ管と排気ヘッドとの接続方法およびその真空排気装置
JP2003278681A (ja) * 2002-03-25 2003-10-02 Shin Meiwa Ind Co Ltd 真空排気システムおよびその運転方法
WO2003089791A1 (de) * 2002-04-20 2003-10-30 Leybold Vakuum Gmbh Vakuumpumpe

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010523870A (ja) * 2007-04-03 2010-07-15 カー エヌ エフ ノイベルガー ゲゼルシャフト ミット ベシュレンクテル ハフツング ポンプスタンド
JP2018155241A (ja) * 2017-03-15 2018-10-04 亞台富士精機股▲ふん▼有限公司 遠隔監視機能を有するポンプ装置及びポンプ装置監視システム
JP2023500729A (ja) * 2019-11-18 2023-01-10 サルエアー エルエルシー 電気式油田コンテナパッケージ
JP7357160B2 (ja) 2019-11-18 2023-10-05 サルエアー エルエルシー 電気式油田コンテナパッケージ

Also Published As

Publication number Publication date
DE602004005154T2 (de) 2007-11-08
DE602004005154D1 (de) 2007-04-19
EP1577559B1 (de) 2007-03-07
EP1577559A1 (de) 2005-09-21
US20050201882A1 (en) 2005-09-15
EP1577559B2 (de) 2016-11-16

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