US20050201882A1 - Vacuum pumping system - Google Patents

Vacuum pumping system Download PDF

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Publication number
US20050201882A1
US20050201882A1 US11/078,249 US7824905A US2005201882A1 US 20050201882 A1 US20050201882 A1 US 20050201882A1 US 7824905 A US7824905 A US 7824905A US 2005201882 A1 US2005201882 A1 US 2005201882A1
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US
United States
Prior art keywords
vacuum
control unit
vacuum pumping
pumping system
wireless communication
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/078,249
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English (en)
Inventor
Cristian Maccarrone
Massimiliano Titolo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian SpA
Original Assignee
Varian SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by Varian SpA filed Critical Varian SpA
Assigned to VARIAN S.P.A. reassignment VARIAN S.P.A. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MACCARRONE, CRISTIAN, TITOLO, MASSIMILIANO
Publication of US20050201882A1 publication Critical patent/US20050201882A1/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/56—Number of pump/machine units in operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/80—Diagnostics
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/90—Remote control, e.g. wireless, via LAN, by radio, or by a wired connection from a central computer

Definitions

  • the present invention relates to a vacuum pumping system.
  • the present invention concerns a vacuum pumping system of the kind comprising one or more vacuum pumping devices and a corresponding electronic control unit for controlling and monitoring the operation of these pumping devices.
  • Vacuum pumping systems are known for instance from the U.S. Pat. No. 5,733,104, “Vacuum Pump System”.
  • the pumping systems In case of high vacuum, i.e. in case of pressures in the range 10 ⁇ 4 to 10 ⁇ 8 mbar, the pumping systems generally comprise a turbomolecular vacuum pump associated with a backing pump or fore pump, for instance of mechanical type, allowing the turbomolecular pump to evacuate gas at atmospheric pressure.
  • turbomolecular pump An example of turbomolecular pump is disclosed in the U.S. Pat. No. 5,238,362 “Turbomolecular Pump” in the name of the Applicant of the present invention.
  • Both the turbomolecular pump and the fore pump request a local electronic control unit for controlling and monitoring the operation of the pump and of the accessory devices, if any, mounted on board or associated with the pumping device, such as for example valves, pressure detectors, cooling systems and similar devices.
  • the vacuum pump operation can be controlled by a remote electronic control unit.
  • the remote unit and the local electronic control unit of the pump are generally equipped with serial interfaces and they can be connected together by cables, permanently or only occasionally, when necessary.
  • U.S. Pat. No. 6,204,776, “Communication Abnormality Detecting/Coping Device and Vacuum Pump Remote Monitor Control Device” discloses a device for the remote control of a vacuum pump, in particular a turbomolecular pump equipped with magnetic suspensions, comprising a local control unit mounted on board of the pump and a remote control unit, the units being arranged to communicate with each other due to a connection by means of an RS232 serial cable.
  • the remote control unit comprises a multiple interface capable simultaneously communicating with the interfaces of all local control units in order to monitor and control the respective vacuum pumps.
  • a pumping system of the above type is disclosed for instance in the U.S. Pat. No. 5,971,711, “Vacuum Pump Control System” disclosing a system consisting of multiple pumps of different kinds (turbomolecular, mechanical, cryogenic and other pumps), each having its own local control unit, connected through an RS232 serial cable with a corresponding communication gate of a single remote control unit.
  • serial cables can be accidentally disconnected or damaged, with a consequent interruption of the communication between the remote control unit and the corresponding local control unit.
  • a vacuum pumping system comprises a plurality of vacuum pumping device.
  • Each vacuum pumping device has a vacuum pump and a local electronic control unit, which monitors and controls operating parameters of the vacuum pump.
  • a control station is remotely located relative to the vacuum pumping devices.
  • the control station is equipped with a remote control unit.
  • the remote control unit and the local electronic control units are equipped with respective wireless communication modules.
  • the wireless communication module of the remote control unit directly communicates with the wireless communication modules of the local control units.
  • the vacuum pumps forming the system can thus be located in the most suitable positions and at greater mutual distances without any limitation related to the use of wired connections.
  • the remote control unit is free from any physical connection with the local control units, a mobile and portable remote unit could be provided, instead of a fixed station as taught in the prior art.
  • the pumping system according to the invention can be advantageously built starting from conventional control units, since it will be sufficient to connect said control units (both the local units and the remote one) with corresponding wireless interface modules.
  • FIG. 1 shows a diagrammatic view of a vacuum pumping system having vacuum pumping devices, local electronic control units with wireless communication modules and a remotely located control station, which is equipped with a remote control unit with wireless communication module communicating directly with the wireless communication modules of the local control units.
  • a vacuum pumping system 1 comprises a high-vacuum pumping device 11 and a backing or fore pumping device 31 .
  • the pumping devices 11 and 31 are mutually connected through a vacuum line (not shown), so that a gas flow sucked from a chamber under high vacuum conditions by the high-vacuum pumping device 11 can be evacuated at atmospheric pressure through the backing pumping device 31 .
  • Pumping device 11 is preferably equipped with a high vacuum pump 13 , for instance a turbomolecular pump, and further comprises a local electronic control unit 15 for monitoring and controlling the operation parameters of the high vacuum pump 13 , by driving the electric motor of the pump and other electromechanical devices that will be described hereinafter.
  • a high vacuum pump 13 for instance a turbomolecular pump
  • a local electronic control unit 15 for monitoring and controlling the operation parameters of the high vacuum pump 13 , by driving the electric motor of the pump and other electromechanical devices that will be described hereinafter.
  • pumping device 31 is equipped with a fore pump 33 , preferably a mechanical pump, for instance an oil pump, and comprises a local electronic control unit 35 .
  • a fore pump 33 preferably a mechanical pump, for instance an oil pump, and comprises a local electronic control unit 35 .
  • the local electronic control units 15 , 35 are preferably powered through the mains voltage by means of corresponding power supply cables 17 , 37 .
  • Pumping device 11 is further equipped with a set of secondary apparatuses, which also can be controlled by the local control unit 15 .
  • the apparatuses may comprise a pressure detector 19 for monitoring the residual pressure inside the pump, a cooling fan 21 , a vent valve 23 controlling the admission of a gas for slowing down the pump during the stopping phase, a purge valve 25 , controlling the admission of a dilution gas before discharging the pumped gas to the outside environment, when the pumped gas is a corrosive or harmful gas.
  • local control unit 35 can control the secondary apparatuses of pumping device 31 , which is equipped with a pump 33 .
  • the fore pump 33 is an oil mechanical pump
  • these apparatuses may comprise a pressure detector 39 for monitoring the residual pressure inside the pump, an oil detector 41 for monitoring the level and the temperature of the oil bath, a foreline valve 43 located in the vacuum line connecting high-vacuum pumping device 11 with backing pumping device 31 .
  • Pumping system 1 further comprises a single remote control station 51 which comprises a remote control unit 53 , usually equipped with or connected to an electronic processor, for central management and control of pumping system 1 .
  • Both the remote control unit 53 and the local control units 15 , 35 of the pumping devices 11 , 31 must be equipped with interfaces for two-way communication of data and commands for controlling the pumping system operation.
  • each local control unit 15 , 35 is equipped with a wireless communication module 27 , 47 allowing the local control units 15 , 35 to dialogue with a corresponding communication module 55 , also of wireless type, connected with remote control unit 53 .
  • Wireless communication module 55 of remote control unit 53 is chosen so that it can dialogue with wireless communication modules 27 , 47 of each local control unit 15 , 35 .
  • Module 55 can be for instance a multi-channel communication module, communicating on each channel with the communication module of a different local control unit. That solution allows, among others for avoiding potentially disturbing crosstalk between the communication signals of contiguous pumping devices or of different pumping systems, equipped each with its control station and located close to one another.
  • the local control units of a plurality of pumps can be managed by means of a single remote control station 51 , both when the pumps are connected together by a vacuum line, as in the example disclosed, and when they are mutually independent and are used for degassing different environments.
  • control station 51 and pumping devices 11 , 31 controlled by the station can be eliminated, so that the only wired connections in pumping system 1 consist in power supply cables 17 , 37 , 57 of the pumping system and the control station, for connection to the mains.
  • control station 51 if it is not connected to the mains but is powered otherwise, for instance by means of batteries, can be built as a portable device instead of being a fixed station.
  • pumping system 1 does not require use of special control units, but it can be built by connecting conventional control units 15 , 35 , 53 with corresponding wireless communication modules 27 , 47 , 55 , for instance through serial connections 29 , 49 , 59 .
  • wireless communication modules allows for controlling a plurality of vacuum pumping devices, arranged in any manner and located at a great distance from one another, from a remote control station. For that reason, use of the pumping system according to the present invention is particularly advantageous in case of complex applications, using a pumping system comprising multiple vacuum pumps of different types, connected together by a vacuum line, as in the example disclosed, or independently operating.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
US11/078,249 2004-03-15 2005-03-11 Vacuum pumping system Abandoned US20050201882A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP04425172.6 2004-03-15
EP04425172.6A EP1577559B2 (de) 2004-03-15 2004-03-15 Vakuumpumpenanlage

Publications (1)

Publication Number Publication Date
US20050201882A1 true US20050201882A1 (en) 2005-09-15

Family

ID=34833831

Family Applications (1)

Application Number Title Priority Date Filing Date
US11/078,249 Abandoned US20050201882A1 (en) 2004-03-15 2005-03-11 Vacuum pumping system

Country Status (4)

Country Link
US (1) US20050201882A1 (de)
EP (1) EP1577559B2 (de)
JP (1) JP2005264938A (de)
DE (1) DE602004005154T2 (de)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
WO2015094621A1 (en) * 2013-12-16 2015-06-25 Varian Semiconductor Equipment Associates, Inc. Vacuum assembly for an ion implanter system
CN105673467A (zh) * 2016-01-27 2016-06-15 烟台阳光泵业有限公司 一种基于移动互联网的泵远程控制智能系统
CN106545490A (zh) * 2017-01-12 2017-03-29 南京智中信息技术有限公司 一种真空泵节能监控系统及方法
US20170218966A1 (en) * 2014-05-19 2017-08-03 Edwards Limited Vacuum system
CN108765890A (zh) * 2018-04-27 2018-11-06 国家电网公司 真空监控仪
US10138882B1 (en) * 2013-06-10 2018-11-27 Villicus, Inc. Controlling a pump
US10451075B1 (en) 2013-06-10 2019-10-22 Villicus, Inc. Saltwater disposal
EP3143279B1 (de) 2014-05-14 2020-01-08 Wiwa Wilhelm Wagner Gmbh & Co. Kg Verfahren zum betrieb eines pumpensystems sowie pumpensystem
EP4062069A4 (de) * 2019-11-18 2023-08-02 Sullair, LLC Elektrisches ölfeld-containerpaket
CN117419041A (zh) * 2023-12-18 2024-01-19 中国第一汽车股份有限公司 一种电子油泵的控制方法及装置

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DE102006045024A1 (de) * 2006-09-23 2008-03-27 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumgerät
DE202006017554U1 (de) * 2006-11-17 2008-03-27 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102007016385A1 (de) * 2007-04-03 2008-10-09 Knf Neuberger Gmbh Pumpstand
CN101397986B (zh) * 2008-11-25 2010-10-13 温晋轩 多功能抽空真空设备
DE102011012810A1 (de) * 2011-03-02 2012-09-06 Oerlikon Leybold Vacuum Gmbh Verfahren zur Konfiguration einer Vakuum-Pumpenanlage
DE102012104214A1 (de) * 2012-05-15 2013-11-21 Xylem Ip Holdings Llc Pumpaggregat, Pumpaggregat-Konfigurationssystem und Verfahren
CN103423140B (zh) * 2012-07-25 2016-01-13 中节能万润股份有限公司 一种防止真空体系倒吸的方法及装置
EP2818718B1 (de) * 2013-06-24 2017-11-15 Vacuubrand Gmbh + Co Kg Vakuumpumpstand mit drahtloser Bedieneinheit
DE102014003249A1 (de) * 2014-03-12 2015-09-17 Wilo Se Verfahren zur Konfiguration eines elektromotorischen Pumpenaggregats
DE102014209157A1 (de) 2014-05-14 2015-11-19 Wiwa Wilhelm Wagner Gmbh & Co Kg Verfahren zur Steuerung eines Pumpensystems sowie Pumpensystem
TWI624596B (zh) * 2017-03-15 2018-05-21 亞台富士精機股份有限公司 可被遠端監控的幫浦機台及幫浦監控系統
IT201700042515A1 (it) * 2017-04-18 2018-10-18 D V P Vacuum Tech S P A Sistema di monitoraggio di una macchina operatrice pneumofora.
CN111779675B (zh) * 2020-06-10 2022-04-29 中国重型机械研究院股份公司 基于物联网的炼钢用智能型机械真空泵系统及应用
EP4071364A1 (de) * 2022-06-30 2022-10-12 Pfeiffer Vacuum Technology AG Vakuumgerät, auswertungsvorrichtung, kommunikationssystem sowie verfahren zum betreiben eines vakuumgeräts und verfahren zum betreiben einer auswertungsvorrichtung

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US5696495A (en) * 1989-10-04 1997-12-09 Pietzsch Automatisierungstechnik Gmbh System for controlling and regulating a construction installation having a plurality of components
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
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US6204776B1 (en) * 1999-03-30 2001-03-20 Seiko Seiki Kabushiki Kaisha Communication abnormality detecting/coping device and vacuum pump remote monitor control device
US20050129535A1 (en) * 2002-04-20 2005-06-16 Christian Beyer Vacuum pump

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US5696495A (en) * 1989-10-04 1997-12-09 Pietzsch Automatisierungstechnik Gmbh System for controlling and regulating a construction installation having a plurality of components
US5238362A (en) * 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
US5971711A (en) * 1996-05-21 1999-10-26 Ebara Corporation Vacuum pump control system
US6204776B1 (en) * 1999-03-30 2001-03-20 Seiko Seiki Kabushiki Kaisha Communication abnormality detecting/coping device and vacuum pump remote monitor control device
US20050129535A1 (en) * 2002-04-20 2005-06-16 Christian Beyer Vacuum pump

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
US11015592B1 (en) 2013-06-10 2021-05-25 Villicus, Inc. Controlling a pump
US10451075B1 (en) 2013-06-10 2019-10-22 Villicus, Inc. Saltwater disposal
US10138882B1 (en) * 2013-06-10 2018-11-27 Villicus, Inc. Controlling a pump
US10269537B2 (en) 2013-12-16 2019-04-23 Varian Semiconductor Equipment Associates, Inc. Vacuum assembly for an ion implanter system
WO2015094621A1 (en) * 2013-12-16 2015-06-25 Varian Semiconductor Equipment Associates, Inc. Vacuum assembly for an ion implanter system
EP3143279B1 (de) 2014-05-14 2020-01-08 Wiwa Wilhelm Wagner Gmbh & Co. Kg Verfahren zum betrieb eines pumpensystems sowie pumpensystem
US10514040B2 (en) * 2014-05-19 2019-12-24 Edwards Limited Vacuum system
US20170218966A1 (en) * 2014-05-19 2017-08-03 Edwards Limited Vacuum system
CN105673467A (zh) * 2016-01-27 2016-06-15 烟台阳光泵业有限公司 一种基于移动互联网的泵远程控制智能系统
CN106545490A (zh) * 2017-01-12 2017-03-29 南京智中信息技术有限公司 一种真空泵节能监控系统及方法
CN108765890A (zh) * 2018-04-27 2018-11-06 国家电网公司 真空监控仪
EP4062069A4 (de) * 2019-11-18 2023-08-02 Sullair, LLC Elektrisches ölfeld-containerpaket
CN117419041A (zh) * 2023-12-18 2024-01-19 中国第一汽车股份有限公司 一种电子油泵的控制方法及装置

Also Published As

Publication number Publication date
DE602004005154T2 (de) 2007-11-08
DE602004005154D1 (de) 2007-04-19
JP2005264938A (ja) 2005-09-29
EP1577559B1 (de) 2007-03-07
EP1577559A1 (de) 2005-09-21
EP1577559B2 (de) 2016-11-16

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