EP1577559A1 - Vakuumpumpenanlage - Google Patents

Vakuumpumpenanlage Download PDF

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Publication number
EP1577559A1
EP1577559A1 EP04425172A EP04425172A EP1577559A1 EP 1577559 A1 EP1577559 A1 EP 1577559A1 EP 04425172 A EP04425172 A EP 04425172A EP 04425172 A EP04425172 A EP 04425172A EP 1577559 A1 EP1577559 A1 EP 1577559A1
Authority
EP
European Patent Office
Prior art keywords
vacuum
pump
control unit
vacuum pumping
wireless communication
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP04425172A
Other languages
English (en)
French (fr)
Other versions
EP1577559B2 (de
EP1577559B1 (de
Inventor
Cristian Maccarrone
Massimiliano Titolo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Varian SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=34833831&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1577559(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Varian SpA filed Critical Varian SpA
Priority to DE602004005154T priority Critical patent/DE602004005154T2/de
Priority to EP04425172.6A priority patent/EP1577559B2/de
Priority to US11/078,249 priority patent/US20050201882A1/en
Priority to JP2005071457A priority patent/JP2005264938A/ja
Publication of EP1577559A1 publication Critical patent/EP1577559A1/de
Application granted granted Critical
Publication of EP1577559B1 publication Critical patent/EP1577559B1/de
Publication of EP1577559B2 publication Critical patent/EP1577559B2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/56—Number of pump/machine units in operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/80—Diagnostics
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/90—Remote control, e.g. wireless, via LAN, by radio, or by a wired connection from a central computer

Definitions

  • the present invention relates to a vacuum pumping system.
  • the present invention concerns a vacuum pumping system of the kind comprising one or more vacuum pumping devices and a corresponding electronic control unit for controlling and monitoring the operation of said devices.
  • Vacuum pumping systems are known for instance from US 5,733,104.
  • said pumping systems In case of high vacuum, i.e. in case of pressures in the range 10 -4 to 10 -8 mbars, said pumping systems generally comprise a turbomolecular vacuum pump associated with a backing pump or fore pump, for instance of mechanical type, allowing the turbomolecular pump to evacuate gas at atmospheric pressure.
  • turbomolecular pump An example of turbomolecular pump is disclosed in US 5,238,362 in the name of the present Applicant.
  • Both the turbomolecular pump and the fore pump need a local electronic control unit for controlling and monitoring the operation of the pump and of the accessory devices, if any, mounted on board or associated with the pumping device, such as for instance valves, pressure detectors, cooling systems etc.
  • said remote unit and the local electronic control unit of said pump are generally equipped with serial interfaces and they can be connected together by cables, permanently or only occasionally, when necessary.
  • EP 1,041,471 discloses a device for the remote control of a vacuum pump, in particular a turbomolecular pump equipped with magnetic suspensions, comprising a local control unit mounted on board the pump and a remote control unit, said units being arranged to communicate with each other thanks to a connection by means of an RS232 serial cable.
  • the remote control unit comprises a multiple interface capable of simultaneously communicating with the interfaces of all local control units in order to monitor and control the corresponding vacuum pumps.
  • a pumping system of the above type is disclosed for instance in US 5,971,711, disclosing a system consisting of multiple pumps of different kinds (turbomolecular, mechanical, cryogenic...pumps), each having its own local control unit, connected through an RS232 serial cable with a corresponding communication gate of a single remote control unit.
  • serial cables can be accidentally disconnected or damaged, with a consequent interruption of the communication between the remote control unit and the corresponding local control unit.
  • the vacuum pumps forming said system can thus be located in the most suitable positions and at greater mutual distances, without any limitation related to the use of wired connections.
  • a mobile and portable remote unit could be provided, instead of a fixed station as in the prior art.
  • the pumping system according to the invention can be advantageously built starting from conventional control units, since it will be sufficient to connect said control units (both the local units and the remote one) with corresponding wireless interface modules.
  • said vacuum pumping system 1 includes a high-vacuum pumping device 11 and a backing or fore pumping device 31.
  • Said pumping devices 11 and 31 are mutually connected through a vacuum line (not shown), so that the gas flow sucked from a chamber under high vacuum conditions by said high-vacuum pumping device 11 can be evacuated at atmospheric pressure through said backing pumping device 31.
  • Pumping device 11 is preferably equipped with a high vacuum pump 13, for instance a turbomolecular pump, and further comprises a local electronic control unit 15 for monitoring and controlling the operation parameters of said high vacuum pump 13, by driving the electric motor of said pump and other electromechanical devices that will be described hereinafter.
  • a high vacuum pump 13 for instance a turbomolecular pump
  • a local electronic control unit 15 for monitoring and controlling the operation parameters of said high vacuum pump 13, by driving the electric motor of said pump and other electromechanical devices that will be described hereinafter.
  • pumping device 31 is equipped with a fore pump 33, preferably a mechanical pump, for instance an oil pump, and includes a local electronic control unit 35
  • Said local electronic control units 15, 35 are preferably powered through the mains voltage, by means of corresponding power supply cables 17, 37.
  • Pumping device 11 is further equipped with a set of secondary apparatuses, which also can be controlled by said local control unit 15.
  • said apparatuses may comprise a pressure detector 19 for monitoring the residual pressure inside said pump, a cooling fan 21, a vent valve 23 controlling the admission of a gas for slowing down the pump during the stopping phase, a purge valve 25, controlling the admission of a dilution gas before discharging the pumped gas to the outside environment, when said pumped gas is a corrosive or harmful gas.
  • local control unit 35 can control the secondary apparatuses pumping device 31 is equipped with.
  • fore pump 33 is an oil mechanical pump
  • said apparatuses may comprise a pressure detector 39 for monitoring the residual pressure inside said pump, an oil detector 41 for monitoring the level and the temperature of the oil bath, a foreline valve 43 located in the vacuum line connecting high-vacuum pumping device 11 with backing pumping device 31.
  • Pumping system 1 further includes a single remote control station 51 including a remote control unit 53, usually equipped with or connected to an electronic processor, for central management and control of pumping system 1.
  • both said remote control unit 53 and said local control units 15, 35 of pumping devices 11, 31 must be equipped with interfaces for two-way communication of data and commands for controlling the pumping system operation.
  • each local control unit 15, 35 is equipped with a wireless communication module 27, 47 allowing said local control units 15, 35 to dialogue with a corresponding communication module 55, also of wireless type, connected with remote control unit 53.
  • Wireless communication module 55 of remote control unit 53 is chosen so that it can dialogue with wireless communication modules 27, 47 of each local control unit 15, 35.
  • Module 55 can be for instance a multi-channel communication module, communicating on each channel with the communication module of a different local control unit. That solution allows, among othet things, avoiding potentially disturbing crosstalk between the communication signals of contiguous pumping devices or of different pumping systems, equipped each with its control station and located close to one another.
  • the local control units of a plurality of pumps can be managed by means of a single remote control station 51, both when said pumps are connected together by a vacuum line, as in the example disclosed, and when they are mutually independent and are used for degassing different environments.
  • control station 51 and pumping devices 11, 31 controlled by the station can be eliminated, so that the only wired connections in pumping system 1 consist in power supply cables 17, 37, 57 of said pumping system and said control station, for connection to the mains.
  • control station 51 if it is not connected to the mains but is powered otherwise, for instance by means of batteries, can be built as a portable device instead of being a fixed station.
  • pumping system 1 does not require use of special control units, but it can be built by connecting conventional control units 15, 35, 53 with corresponding wireless communication modules 27, 47, 55, for instance through serial connections 29, 49, 59.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP04425172.6A 2004-03-15 2004-03-15 Vakuumpumpenanlage Expired - Fee Related EP1577559B2 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE602004005154T DE602004005154T2 (de) 2004-03-15 2004-03-15 Vakuumpumpenanlage
EP04425172.6A EP1577559B2 (de) 2004-03-15 2004-03-15 Vakuumpumpenanlage
US11/078,249 US20050201882A1 (en) 2004-03-15 2005-03-11 Vacuum pumping system
JP2005071457A JP2005264938A (ja) 2004-03-15 2005-03-14 真空ポンプシステム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP04425172.6A EP1577559B2 (de) 2004-03-15 2004-03-15 Vakuumpumpenanlage

Publications (3)

Publication Number Publication Date
EP1577559A1 true EP1577559A1 (de) 2005-09-21
EP1577559B1 EP1577559B1 (de) 2007-03-07
EP1577559B2 EP1577559B2 (de) 2016-11-16

Family

ID=34833831

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04425172.6A Expired - Fee Related EP1577559B2 (de) 2004-03-15 2004-03-15 Vakuumpumpenanlage

Country Status (4)

Country Link
US (1) US20050201882A1 (de)
EP (1) EP1577559B2 (de)
JP (1) JP2005264938A (de)
DE (1) DE602004005154T2 (de)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006045024A1 (de) * 2006-09-23 2008-03-27 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumgerät
WO2008119452A1 (de) * 2007-04-03 2008-10-09 Knf Neuberger Gmbh Pumpstand
WO2010060337A1 (zh) * 2008-11-25 2010-06-03 Wen Jinxuan 多功能抽真空设备
CN103423140A (zh) * 2012-07-25 2013-12-04 烟台万润精细化工股份有限公司 一种防止真空体系倒吸的方法及装置
EP2818718A1 (de) * 2013-06-24 2014-12-31 Vacuubrand Gmbh + Co Kg Vakuumpumpstand mit drahtloser Bedieneinheit
EP3376034A1 (de) * 2017-03-15 2018-09-19 Atai Fuji Motor Co., Ltd. Pumpenvorrichtung mit fernüberwachungsfunktion und pumpenvorrichtungsüberwachungssystem
WO2018193376A1 (en) * 2017-04-18 2018-10-25 D.V.P. Vacuum Technology S.p.A. Vacuum pump

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US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
DE202006017554U1 (de) * 2006-11-17 2008-03-27 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102011012810A1 (de) * 2011-03-02 2012-09-06 Oerlikon Leybold Vacuum Gmbh Verfahren zur Konfiguration einer Vakuum-Pumpenanlage
DE102012104214A1 (de) * 2012-05-15 2013-11-21 Xylem Ip Holdings Llc Pumpaggregat, Pumpaggregat-Konfigurationssystem und Verfahren
US10451075B1 (en) 2013-06-10 2019-10-22 Villicus, Inc. Saltwater disposal
US10138882B1 (en) 2013-06-10 2018-11-27 Villicus, Inc. Controlling a pump
US10269537B2 (en) * 2013-12-16 2019-04-23 Varian Semiconductor Equipment Associates, Inc. Vacuum assembly for an ion implanter system
DE102014003249A1 (de) * 2014-03-12 2015-09-17 Wilo Se Verfahren zur Konfiguration eines elektromotorischen Pumpenaggregats
DE102014209155A1 (de) 2014-05-14 2015-11-19 Wiwa Wilhelm Wagner Gmbh & Co Kg Verfahren zum Betrieb eines Pumpensystems sowie Pumpensystem
DE102014209157A1 (de) 2014-05-14 2015-11-19 Wiwa Wilhelm Wagner Gmbh & Co Kg Verfahren zur Steuerung eines Pumpensystems sowie Pumpensystem
GB2526292B (en) * 2014-05-19 2016-06-15 Edwards Ltd Vacuum system
CN105673467A (zh) * 2016-01-27 2016-06-15 烟台阳光泵业有限公司 一种基于移动互联网的泵远程控制智能系统
CN106545490A (zh) * 2017-01-12 2017-03-29 南京智中信息技术有限公司 一种真空泵节能监控系统及方法
CN108765890A (zh) * 2018-04-27 2018-11-06 国家电网公司 真空监控仪
CN114423949A (zh) * 2019-11-18 2022-04-29 寿力公司 电动的油田集装箱封装体
CN111779675B (zh) * 2020-06-10 2022-04-29 中国重型机械研究院股份公司 基于物联网的炼钢用智能型机械真空泵系统及应用
EP4071364A1 (de) * 2022-06-30 2022-10-12 Pfeiffer Vacuum Technology AG Vakuumgerät, auswertungsvorrichtung, kommunikationssystem sowie verfahren zum betreiben eines vakuumgeräts und verfahren zum betreiben einer auswertungsvorrichtung
CN117419041A (zh) * 2023-12-18 2024-01-19 中国第一汽车股份有限公司 一种电子油泵的控制方法及装置

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US5713724A (en) * 1994-11-23 1998-02-03 Coltec Industries Inc. System and methods for controlling rotary screw compressors
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US5971711A (en) * 1996-05-21 1999-10-26 Ebara Corporation Vacuum pump control system
EP1138949A2 (de) * 2000-02-29 2001-10-04 Copeland Corporation Verdichter mit Regelungs- u. Schutzanlage
EP1197661A1 (de) * 2000-10-11 2002-04-17 Copeland Corporation Spiralmaschine mit kontinuierlicher Fördermengenregelung

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Publication number Priority date Publication date Assignee Title
US5696495A (en) * 1989-10-04 1997-12-09 Pietzsch Automatisierungstechnik Gmbh System for controlling and regulating a construction installation having a plurality of components
US5713724A (en) * 1994-11-23 1998-02-03 Coltec Industries Inc. System and methods for controlling rotary screw compressors
US5971711A (en) * 1996-05-21 1999-10-26 Ebara Corporation Vacuum pump control system
WO1998030912A2 (en) * 1996-12-23 1998-07-16 Scientific-Atlanta, Inc. Method and apparatus for applying real time pricing and usage rates in a network
EP1138949A2 (de) * 2000-02-29 2001-10-04 Copeland Corporation Verdichter mit Regelungs- u. Schutzanlage
EP1197661A1 (de) * 2000-10-11 2002-04-17 Copeland Corporation Spiralmaschine mit kontinuierlicher Fördermengenregelung

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006045024A1 (de) * 2006-09-23 2008-03-27 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumgerät
WO2008119452A1 (de) * 2007-04-03 2008-10-09 Knf Neuberger Gmbh Pumpstand
US8344875B2 (en) 2007-04-03 2013-01-01 Knf Neuberger Gmbh Pump stand
WO2010060337A1 (zh) * 2008-11-25 2010-06-03 Wen Jinxuan 多功能抽真空设备
CN103423140A (zh) * 2012-07-25 2013-12-04 烟台万润精细化工股份有限公司 一种防止真空体系倒吸的方法及装置
CN103423140B (zh) * 2012-07-25 2016-01-13 中节能万润股份有限公司 一种防止真空体系倒吸的方法及装置
EP2818718A1 (de) * 2013-06-24 2014-12-31 Vacuubrand Gmbh + Co Kg Vakuumpumpstand mit drahtloser Bedieneinheit
EP3376034A1 (de) * 2017-03-15 2018-09-19 Atai Fuji Motor Co., Ltd. Pumpenvorrichtung mit fernüberwachungsfunktion und pumpenvorrichtungsüberwachungssystem
WO2018193376A1 (en) * 2017-04-18 2018-10-25 D.V.P. Vacuum Technology S.p.A. Vacuum pump

Also Published As

Publication number Publication date
US20050201882A1 (en) 2005-09-15
EP1577559B2 (de) 2016-11-16
DE602004005154D1 (de) 2007-04-19
EP1577559B1 (de) 2007-03-07
JP2005264938A (ja) 2005-09-29
DE602004005154T2 (de) 2007-11-08

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