KR970075386A - 진공 펌프 제어 장치 - Google Patents

진공 펌프 제어 장치 Download PDF

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KR970075386A
KR970075386A KR1019970019649A KR19970019649A KR970075386A KR 970075386 A KR970075386 A KR 970075386A KR 1019970019649 A KR1019970019649 A KR 1019970019649A KR 19970019649 A KR19970019649 A KR 19970019649A KR 970075386 A KR970075386 A KR 970075386A
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vacuum pump
vacuum
pump
controlling
controller
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KR1019970019649A
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노부하루 노지
고오이찌 기도
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마에다 시게루
가부시키가이샤 에바라 세사쿠쇼
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Application filed by 마에다 시게루, 가부시키가이샤 에바라 세사쿠쇼 filed Critical 마에다 시게루
Publication of KR970075386A publication Critical patent/KR970075386A/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/007—Installations or systems with two or more pumps or pump cylinders, wherein the flow-path through the stages can be changed, e.g. from series to parallel
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/4185—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the network communication
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
    • F25B2400/06—Several compression cycles arranged in parallel
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31102—Program network controller, connected devices
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31103—Configure parameters of controlled devices
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31104—Remote configuration of parameters of controlled devices
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31105—Remote control of network controller
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31115—Network controller
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31123—Multi mode network controller, monitor, control, configuration, maintenance
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31206—Exchange of parameters, data, programs between two station, station and central or host or remote
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31237—Host and rs232, rs485 to network controller and rs232 to controlled devices
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37252—Life of tool, service life, decay, wear estimation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)

Abstract

진공 펌프 제어 장치는 크라이오펌프, 터보몰레큘러 펌프, 크라이오터보 펌프, 루트형 진공 펌프 등의 건식 펌프 중 적어도 하나의 유형을 포함하는 복수의 진공 펌프를 제어하기 위하여 사용된다. 복수의 진공 펌프를 제어하기 위한 진공 펌프 제어 장치는 호스트 컴퓨터와; 상기 진공 펌프에 각각 연결된 복수의 진공 펌프 제어기와; 상기 호스트 컴퓨터와 상기 진공 펌프 제어기 간에 정보를 전달하기 위한 네트워크 제어 장치를 포함한다. 진공 펌프 제어기는 각각 통신선에 의해 네트워크 제어 장치에 병렬로 연결된다.

Description

진공 펌프 제어 장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 제1형태의 제1실시예에 따른 진공 펌프 제어 장치를 도시한 블록선도이다, 제2도는 제1도에 도시된 진공 펌프 제어 장치의 네트워크 제어 장치의 세부 블록선도이다, 제3도는 제1도에 도시된 진공 펌프 제어 장치 내에 있는 통신선과 그것에 연결된 주변 장치를 도시한 블록선도이다, 제4도는 네트워크 제어 장치의 전방 패널의 정면도이다, 제5도는 본 발명의 제1형태의 제2실시예에 따른 진공 펌프 제어 장치를 도시한 블록선도이다.

Claims (12)

  1. 복수의 진공 펌프를 제어하기 위한 진공 펌프 제어 장치에 있어서, 호스트 컴퓨터와; 상기 진공 펌프에 각각 연결된 복수의 진공 펌프 제어기와; 상기 호스트 컴퓨터와 상기 진공 펌프 제어기 간에 정보를 전달하기 위한 네트워크 제어 장치를 포함하며, 상기 진공 펌프 제어기가 각각의 통신선에 의해 상기 네트워크 제어 장치에 병렬로 연결되는 것을 특징으로 하는 진공 펌프 제어 장치.
  2. 제1항에 있어서, 상기 복수의 진공 펌프가 크라이오펌프, 터보몰레큘러 펌프, 건식 펌프, 크라이오터보 펌프를 포함하는 진공 펌프 중 적어도 하나의 유형을 포함하는 것을 특징으로 하는 진공 펌프 제어 장치.
  3. 제1항에 있어서, 상기 호스트 컴퓨터와 상기 네트워크 제어장치가 RS-232C 케이블에 의해 서로 연결되는 것을 특징으로 하는 진공 펌프 제어 장치.
  4. 제1항에 있어서, 상기 각각의 통신선이 RS-232C 케이블을 포함하는 것을 특징으로 하는 진공 펌프 제어 장치.
  5. 제1항에 있어서, 상기 진공 펌프들을 원격으로 제어하기 위해 상기 네트워크 제어 장치에 연결된 원격 제어기를 더욱 포함하는 것을 특징으로 하는 진공 펌프 제어 장치.
  6. 복수의 진공 펌프를 제어하기 위한 진공 펌프 제어 장치에 있어서, 호스트 컴퓨터와; 상기 진공 펌프를 제어하기 위하여 상기 호스트 컴퓨터와 상기 진공 펌프 사이에 연결된 다중제어기를 포함하는 것을 특징으로 하는 진공 펌프 제어 장치.
  7. 제6항에 있어서, 상기 복수의 진공 펌프가 크라이오펌프, 터보몰레큘러 펌프, 건식 펌프, 크라이오터보 펌프 중 적어도 하나의 유형을 포함하는 것을 특징으로 하는 진공 펌프 제어 장치.
  8. 제6항에 있어서, 상기 다중제어기가 상기 진공 펌프들을 제어하기 위하여 복수의 탈착가능한 제어 모듈을 갖는 것을 특징으로 하는 진공 펌프 제어 장치.
  9. 제6항에 있어서, 상기 다중제어기가 서로 다른 유형의 진공 펌프들을 상기 제어 모듈을 통해 감시하고 제어하는 것을 특징으로 하는 진공 펌프 제어 장치.
  10. 제6항에 있어서, 상기 진공 펌프들을 원격을 제어하기 위하여 상기 다중제어기에 연결된 원격 제어기를 더욱 포함하는 것을 특징으로 하는 진공 펌프 제어 장치.
  11. 제6항에 있어서, 복수의 진공 펌프를 제어하기 위하여 복수의 상기 다중제어기가 제공되며, 이들은 적어도 하나의 RS-485 케이블에 의해 직렬로 연결되는 것을 특징으로 하는 진공 펌프 제어 장치.
  12. 제6항에 있어서, 복수의 진공 펌프를 제어하기 위하여 복수의 상기 다중제어기가 제공되며, 이들은 RS-232C 케이블에 의해 병렬로 연결되는 것을 특징으로 하는 진공 펌프 제어 장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019970019649A 1996-05-21 1997-05-21 진공 펌프 제어 장치 KR970075386A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP8-149931 1996-05-21
JP14993196 1996-05-21

Publications (1)

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KR970075386A true KR970075386A (ko) 1997-12-10

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US (1) US5971711A (ko)
EP (1) EP0809164B1 (ko)
KR (1) KR970075386A (ko)
DE (1) DE69706472T2 (ko)

Cited By (2)

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KR100475184B1 (ko) * 2002-05-23 2005-03-08 신한일전기주식회사 가압급수장치의 원격제어방법
KR101927985B1 (ko) 2017-09-29 2019-02-26 심준우 진공펌프시스템의 공정을 위한 무선원격제어시스템

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DE69706472T2 (de) 2002-05-16

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