DE69706472D1 - Steuerungssystem zum Steuern mehrerer Vakuumpumpen - Google Patents

Steuerungssystem zum Steuern mehrerer Vakuumpumpen

Info

Publication number
DE69706472D1
DE69706472D1 DE69706472T DE69706472T DE69706472D1 DE 69706472 D1 DE69706472 D1 DE 69706472D1 DE 69706472 T DE69706472 T DE 69706472T DE 69706472 T DE69706472 T DE 69706472T DE 69706472 D1 DE69706472 D1 DE 69706472D1
Authority
DE
Germany
Prior art keywords
control system
vacuum pumps
several vacuum
controlling several
controlling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE69706472T
Other languages
English (en)
Other versions
DE69706472T2 (de
Inventor
Nobuharu Noji
Koichi Kido
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=15485702&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69706472(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of DE69706472D1 publication Critical patent/DE69706472D1/de
Application granted granted Critical
Publication of DE69706472T2 publication Critical patent/DE69706472T2/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/4185—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the network communication
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/007—Installations or systems with two or more pumps or pump cylinders, wherein the flow-path through the stages can be changed, e.g. from series to parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
    • F25B2400/06—Several compression cycles arranged in parallel
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31102—Program network controller, connected devices
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31103—Configure parameters of controlled devices
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31104—Remote configuration of parameters of controlled devices
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31105—Remote control of network controller
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31115—Network controller
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31123—Multi mode network controller, monitor, control, configuration, maintenance
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31206—Exchange of parameters, data, programs between two station, station and central or host or remote
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31237—Host and rs232, rs485 to network controller and rs232 to controlled devices
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37252—Life of tool, service life, decay, wear estimation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
DE69706472T 1996-05-21 1997-05-21 Steuerungssystem zum Steuern mehrerer Vakuumpumpen Revoked DE69706472T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14993196 1996-05-21

Publications (2)

Publication Number Publication Date
DE69706472D1 true DE69706472D1 (de) 2001-10-11
DE69706472T2 DE69706472T2 (de) 2002-05-16

Family

ID=15485702

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69706472T Revoked DE69706472T2 (de) 1996-05-21 1997-05-21 Steuerungssystem zum Steuern mehrerer Vakuumpumpen

Country Status (4)

Country Link
US (1) US5971711A (de)
EP (1) EP0809164B1 (de)
KR (1) KR970075386A (de)
DE (1) DE69706472T2 (de)

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JP3767052B2 (ja) * 1996-11-30 2006-04-19 アイシン精機株式会社 多段式真空ポンプ
US6272400B1 (en) * 1998-07-13 2001-08-07 Helix Technology Corporation Vacuum network controller
US6045331A (en) * 1998-08-10 2000-04-04 Gehm; William Fluid pump speed controller
US6419455B1 (en) * 1999-04-07 2002-07-16 Alcatel System for regulating pressure in a vacuum chamber, vacuum pumping unit equipped with same
TW470815B (en) * 1999-04-30 2002-01-01 Arumo Technos Kk Method and apparatus for controlling a vacuum pump
US6318091B1 (en) 1999-10-28 2001-11-20 Helix Technology Corporation Cryopump system with modular electronics
FR2808098B1 (fr) * 2000-04-20 2002-07-19 Cit Alcatel Procede et dispositif de conditionnement de l'atmosphere dans une chambre de procedes
US6671583B2 (en) 2001-03-30 2003-12-30 Helix Technology Corporation Vacuum system information network
JP4280003B2 (ja) * 2001-05-31 2009-06-17 株式会社日立製作所 遠隔保守方法および産業用機器
KR100385917B1 (ko) * 2001-06-27 2003-06-02 삼성전자주식회사 이온 주입 시스템의 진공 펌핑 장치
US7016751B2 (en) 2001-07-13 2006-03-21 Helix Technology Corporation Vacuum system central control information server
US7127901B2 (en) 2001-07-20 2006-10-31 Brooks Automation, Inc. Helium management control system
DE10208676A1 (de) * 2002-02-28 2003-09-04 Man Turbomasch Ag Ghh Borsig Verfahren zum Regeln von mehreren Strömungsmaschinen im Parallel- oder Reihenbetrieb
US20030175112A1 (en) * 2002-03-13 2003-09-18 Hirotaka Namiki Vacuum pump system and vacuum pump RPM control method
US6739840B2 (en) * 2002-05-22 2004-05-25 Applied Materials Inc Speed control of variable speed pump
KR100475184B1 (ko) * 2002-05-23 2005-03-08 신한일전기주식회사 가압급수장치의 원격제어방법
EP1780414B1 (de) * 2003-06-27 2008-08-13 Helix Technology Corporation Automatisierung der Sicherheits-Regenerierung bei einer Kryopumpe
EP1577559B2 (de) * 2004-03-15 2016-11-16 Agilent Technologies, Inc. Vakuumpumpenanlage
EP1768484B2 (de) * 2004-07-13 2021-04-21 DeLaval Holding AB Steuerbare vakuumquelle
DE102004056246C5 (de) * 2004-11-22 2014-07-31 Abb Ag Anzeigeeinrichtung für ein Elektronikgerät
JP4737770B2 (ja) * 2006-09-12 2011-08-03 アネスト岩田株式会社 真空ポンプの運転制御装置および方法
DE102006045022A1 (de) * 2006-09-23 2008-03-27 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumgerät und Verfahren zu derem Betrieb
US20080078189A1 (en) * 2006-09-28 2008-04-03 Sumitomo Heavy Industries, Ltd. Communication network system
US20090053072A1 (en) * 2007-08-21 2009-02-26 Justin Borgstadt Integrated "One Pump" Control of Pumping Equipment
GB2453120B (en) * 2007-09-26 2009-09-02 Siemens Magnet Technology Ltd Intelligent helium compressor
JP5210147B2 (ja) * 2008-01-24 2013-06-12 株式会社荏原製作所 給水装置
TW201100973A (en) * 2009-02-22 2011-01-01 Mapper Lithography Ip Bv A method and arrangement for realizing a vacuum in a vacuum chamber
CH703478A1 (de) * 2010-07-30 2012-01-31 Medela Holding Ag Absaugpumpensystem.
JP5634323B2 (ja) * 2011-05-13 2014-12-03 住友重機械工業株式会社 クライオポンプシステム、クライオポンプのための再生方法
CN103267009B (zh) * 2013-05-29 2016-08-24 赖正伦 一种高效蓄能输送系统
JP2016153617A (ja) * 2015-02-20 2016-08-25 住友重機械工業株式会社 クライオポンプシステム、クライオポンプ制御装置、及びクライオポンプ再生方法
CN105952659A (zh) * 2016-05-09 2016-09-21 湖南耐普泵业股份有限公司 智能永磁电泵机组及其控制方法
WO2018090655A1 (zh) * 2016-11-17 2018-05-24 杭州三花研究院有限公司 控制系统以及控制方法
IT201700042515A1 (it) * 2017-04-18 2018-10-18 D V P Vacuum Tech S P A Sistema di monitoraggio di una macchina operatrice pneumofora.
KR101927985B1 (ko) 2017-09-29 2019-02-26 심준우 진공펌프시스템의 공정을 위한 무선원격제어시스템
CN108614493A (zh) * 2018-06-13 2018-10-02 重庆金鹰自动化工程有限公司 一种实现超真空状态的冷凝头控制系统
JP7299098B2 (ja) * 2018-08-06 2023-06-27 エドワーズ株式会社 除害システム、除害装置、およびシステム制御装置
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EP3620661B1 (de) * 2019-08-30 2021-10-06 Pfeiffer Vacuum Gmbh Anschlussvorrichtung, system und verfahren zum betreiben einer anschlussvorrichtung
JP2022083523A (ja) * 2020-11-25 2022-06-06 住友重機械工業株式会社 クライオポンプシステムおよびその監視方法

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Also Published As

Publication number Publication date
EP0809164A1 (de) 1997-11-26
KR970075386A (ko) 1997-12-10
US5971711A (en) 1999-10-26
DE69706472T2 (de) 2002-05-16
EP0809164B1 (de) 2001-09-05

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8331 Complete revocation