JP2005259915A - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
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- JP2005259915A JP2005259915A JP2004068191A JP2004068191A JP2005259915A JP 2005259915 A JP2005259915 A JP 2005259915A JP 2004068191 A JP2004068191 A JP 2004068191A JP 2004068191 A JP2004068191 A JP 2004068191A JP 2005259915 A JP2005259915 A JP 2005259915A
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Abstract
【解決手段】半導体チップ104と、半導体チップ104に設けられたアルミニウムパッド106a、106bと、アルミニウムパッド106a、106b上に設けられ、金とPdとを含有する合金ボールバンプ108a、108bと、合金ボールバンプ108a、108bに接続し、金からなる表面を有する金線110a、110bと、を備える半導体装置100を提供する。合金ボールバンプ108a、108bは、金を98質量%以上99.5質量%以下含み、パラジウムを0.5質量%以上2質量%以下含有する組成とすることができる。
【選択図】図1
Description
図1は、本実施の形態に係る半導体装置を模式的に示した断面図である。
2AlBr3+3O→Al2O3+6Br
このように、最終的には、アルミニウムパッドの表面にアルミナが生成してしまう。
図2および図3は、本実施の形態に係る半導体装置の製造方法を示した工程断面図である。
図7は、本実施の形態の変形例に係る半導体装置の製造方法を示した工程断面図である。
アルミニウムパッド上に、金99質量%とPd1質量%とを含む合金線を用いて作成した合金ボールパッドを設け、その合金ボールパッドに純度99.99%以上の高純度金線によりワイヤーボンディング接続を行って、基板にワイヤーボンディングされた半導体チップを備える試験サンプル(I)を作成した。
アルミニウムパッド上に、金99.8質量%とPd0.2質量%とを含む合金線を用いて作成した合金ボールパッドを設け、その合金ボールパッドに純度99.99%以上の高純度金線によりワイヤーボンディング接続を行って、基板にワイヤーボンディングされた半導体チップを備える試験サンプル(II)を作成した。
アルミニウムパッド上に、純度99.99%以上の高純度金線を用いて作成した金ボールパッドを設け、その合金ボールパッドに純度99.99%以上の高純度金線によりワイヤーボンディング接続を行って、基板にワイヤーボンディングされた半導体チップを備える試験サンプル(III)を作成した。
上記のようにして得た試験サンプル(I)〜(III)を150℃、175℃、200℃などの幾つかの温度条件において加熱処理して、加速安定性試験を行った。そして、168時間、500時間、1000時間、2000時間、30000時間などの幾つかの時点で、試験サンプル(I)〜(III)を一時取り出し、それぞれ20個ずつのボンディングボールの断面を観察し、Br腐食またはカーケンダールボイドの発生があるか否かを顕微鏡で確認した。
102 アイランド
104 半導体チップ
106 アルミニウムパッド
108 合金ボールバンプ
110 高純度金線
112 リード
114 樹脂封止体
118 合金ボールバンプ
200 高周波回路装置
201 ベースプレート
204 高周波用半導体基板
206 高周波用回路基板
205 高周波伝送線路
207 ボンディングワイヤ
208 ボンディングパッド
209 ワイヤーボンディング始点
211 金属バンプ
300 半導体装置
301 配線基板
302 接続パッド
303 半導体チップ
304 金ボールバンプ
306 半導体チップ
307 接着剤
308 ボンディングワイヤ
309 接着性樹脂層
310 電極パッド
400 半導体装置
401 半導体チップ
402 電極パッド
404 ボンディングワイヤ
405 リード
406 接着テープ
407 樹脂封止体
408 半田ボール
410 絶縁膜
414 金ボールバンプ
415 ワイヤーボンディング始点
500 半導体装置
802 ボンディングボール
804 腐食層
806 カーケンダールボイド層
902 ボンディングボール
904 腐食層
906 カーケンダールボイド層
1002 ボンディングボール
1004 Pdリッチな層
Claims (15)
- 半導体素子と、
前記半導体素子に設けられた電極パッドと、
前記電極パッド上に設けられ、金とパラジウムとを含有する金属バンプと、
前記金属バンプに接続し、金からなる表面を有する導電線と、
を備えることを特徴とする半導体装置。 - 請求項1に記載の半導体装置において、
前記金属バンプは、金を98質量%以上99.5質量%以下含み、パラジウムを0.5質量%以上2質量%以下含有することを特徴とする半導体装置。 - 請求項1または2に記載の半導体装置において、
前記電極パッドは、アルミニウムを含有することを特徴とする半導体装置。 - 請求項1乃至3いずれかに記載の半導体装置において、
前記導電線は、金線であることを特徴とする半導体装置。 - 請求項1乃至3いずれかに記載の半導体装置において、
前記導電線は、TABテープ上の導電線であることを特徴とする半導体装置。 - 請求項1乃至5いずれかに記載の半導体装置において、
前記半導体素子と、前記電極パッドと、前記金属バンプと、前記導電線と、を封止する樹脂封止体をさらに備えることを特徴とする半導体装置。 - 請求項1乃至6いずれかに記載の半導体装置において、
リード線と、
前記リード線の端部に設けられ、前記導電線と接続し、金とパラジウムとを含有する第二の金属バンプと、
をさらに備えることを特徴とする半導体装置。 - 請求項7に記載の半導体装置において、
前記リード線の端部は、アルミニウムを含有することを特徴とする半導体装置。 - 請求項7または8に記載の半導体装置において、
前記樹脂封止体は、前記リード線の端部と、前記第二の金属バンプと、をさらに封止することを特徴とする半導体装置。 - 半導体素子に電極パッドを設ける工程と、
前記電極パッド上に、金とパラジウムとを含有する金属バンプを設ける工程と、
前記金属バンプに金からなる表面を有する導電線を接続する工程と、
を含むことを特徴とする半導体装置の製造方法。 - 請求項10に記載の半導体装置の製造方法において、
前記導電線を接続する工程は、金線をワイヤーボンディングする工程を含むことを特徴とする半導体装置の製造方法。 - 請求項10に記載の半導体装置の製造方法において、
前記導電線を接続する工程は、TABテープ上の導電線をTABボンディングする工程を含むことを特徴とする半導体装置の製造方法。 - 請求項10乃至12いずれかに記載の半導体装置の製造方法において、
前記半導体素子と、前記電極パッドと、前記金属バンプと、前記導電線と、を樹脂封止体により封止する工程をさらに含むことを特徴とする半導体装置の製造方法。 - 請求項10乃至13いずれかに記載の半導体装置の製造方法において、
リード線の端部に、金とパラジウムとを含有する第二の金属バンプを設ける工程と、
前記第二の金属バンプに前記導電線を接続する工程と、
をさらに含むことを特徴とする半導体装置の製造方法。 - 請求項14に記載の半導体装置の製造方法において、
前樹脂封止体により封止する工程は、前記リード線の端部と、前記第二の金属バンプと、を前記樹脂封止体により封止する工程を含むことを特徴とする半導体装置の製造方法。
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WO2008038681A1 (fr) * | 2006-09-26 | 2008-04-03 | Hitachi Metals, Ltd. | Composant de substrat céramique et composant électronique utilisant celui-ci |
WO2010005086A1 (ja) * | 2008-07-11 | 2010-01-14 | 新日鉄マテリアルズ株式会社 | ボンディングワイヤの接合構造 |
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US7847398B2 (en) * | 2007-08-01 | 2010-12-07 | Amkor Technology, Inc. | Semiconductor device having a stacked bump to reduce kirkendall voids and or cracks and method of manufacturing |
US7977804B2 (en) * | 2008-05-16 | 2011-07-12 | Tektronix, Inc. | Ball-bump bonded ribbon-wire interconnect |
US7859123B2 (en) * | 2008-09-19 | 2010-12-28 | Great Team Backend Foundry Inc. | Wire bonding structure and manufacturing method thereof |
JP2010123817A (ja) * | 2008-11-21 | 2010-06-03 | Fujitsu Ltd | ワイヤボンディング方法および電子装置とその製造方法 |
CN101924046A (zh) * | 2009-06-16 | 2010-12-22 | 飞思卡尔半导体公司 | 在半导体器件中形成引线键合的方法 |
US8802555B2 (en) | 2011-03-23 | 2014-08-12 | Stats Chippac Ltd. | Integrated circuit packaging system with interconnects and method of manufacture thereof |
TWI514533B (zh) * | 2012-03-22 | 2015-12-21 | Hon Hai Prec Ind Co Ltd | 高頻傳輸模組及光纖連接器 |
CN113257714B (zh) * | 2021-05-12 | 2023-04-28 | 广州飞虹微电子有限公司 | 用于芯片焊接的铜铝混焊方法及设备 |
CN113782454A (zh) * | 2021-09-07 | 2021-12-10 | 西安微电子技术研究所 | 一种实现无预镀层引线框架表面引线键合的方法 |
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US4717066A (en) * | 1986-02-24 | 1988-01-05 | American Telephone And Telegraph Company, At&T Bell Laboratories | Method of bonding conductors to semiconductor devices |
JP2891432B2 (ja) * | 1989-12-27 | 1999-05-17 | 田中電子工業株式会社 | 半導体材料の接続方法,それに用いる接続材料及び半導体装置 |
JP2954109B2 (ja) | 1997-09-22 | 1999-09-27 | 九州日本電気株式会社 | 半導体装置及びその製造方法 |
JPH11312749A (ja) * | 1998-02-25 | 1999-11-09 | Fujitsu Ltd | 半導体装置及びその製造方法及びリードフレームの製造方法 |
JP2001015677A (ja) | 1999-06-25 | 2001-01-19 | Toshiba Corp | 半導体装置 |
JP2001237263A (ja) | 2000-02-24 | 2001-08-31 | Hitachi Ltd | 高周波回路装置及びその製造方法 |
EP2306503A3 (en) * | 2001-12-14 | 2011-11-02 | STMicroelectronics Srl | Semiconductor electronic device and method of manufacturing thereof |
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WO2008038681A1 (fr) * | 2006-09-26 | 2008-04-03 | Hitachi Metals, Ltd. | Composant de substrat céramique et composant électronique utilisant celui-ci |
US8064219B2 (en) | 2006-09-26 | 2011-11-22 | Hitachi Metals, Ltd. | Ceramic substrate part and electronic part comprising it |
JP5293185B2 (ja) * | 2006-09-26 | 2013-09-18 | 日立金属株式会社 | 電子部品の製造方法 |
WO2010005086A1 (ja) * | 2008-07-11 | 2010-01-14 | 新日鉄マテリアルズ株式会社 | ボンディングワイヤの接合構造 |
KR101099233B1 (ko) | 2008-07-11 | 2011-12-27 | 가부시키가이샤 닛데쓰 마이크로 메탈 | 본딩 와이어의 접합 구조 |
JP5343069B2 (ja) * | 2008-07-11 | 2013-11-13 | 新日鉄住金マテリアルズ株式会社 | ボンディングワイヤの接合構造 |
US9331049B2 (en) | 2008-07-11 | 2016-05-03 | Nippon Steel & Sumikin Materials Co., Ltd. | Bonding structure of bonding wire |
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