JP2005167081A - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
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- JP2005167081A JP2005167081A JP2003406055A JP2003406055A JP2005167081A JP 2005167081 A JP2005167081 A JP 2005167081A JP 2003406055 A JP2003406055 A JP 2003406055A JP 2003406055 A JP2003406055 A JP 2003406055A JP 2005167081 A JP2005167081 A JP 2005167081A
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- Prior art keywords
- film
- organic insulating
- insulating film
- wiring
- tantalum
- Prior art date
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 69
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 42
- 239000004020 conductor Substances 0.000 claims abstract description 50
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- 229910052799 carbon Inorganic materials 0.000 claims description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- 238000005520 cutting process Methods 0.000 claims description 5
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- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 abstract description 102
- 229910052715 tantalum Inorganic materials 0.000 abstract description 99
- 238000000034 method Methods 0.000 abstract description 59
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract description 46
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 27
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- 230000000694 effects Effects 0.000 description 6
- 229930195733 hydrocarbon Natural products 0.000 description 6
- 150000002430 hydrocarbons Chemical class 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 238000001312 dry etching Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- -1 tungsten nitride Chemical class 0.000 description 5
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 4
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- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 4
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 4
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
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- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
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- 150000002500 ions Chemical class 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
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- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
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- HYZJCKYKOHLVJF-UHFFFAOYSA-N 1H-benzimidazole Chemical compound C1=CC=C2NC=NC2=C1 HYZJCKYKOHLVJF-UHFFFAOYSA-N 0.000 description 1
- 229910015900 BF3 Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
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- 125000004429 atom Chemical group 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 description 1
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- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 1
- 229910021334 nickel silicide Inorganic materials 0.000 description 1
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- 239000010936 titanium Substances 0.000 description 1
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- 229910021341 titanium silicide Inorganic materials 0.000 description 1
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- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
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Abstract
【解決手段】 半導体基板の主面上に窒化シリコン膜16を形成した後、この窒化シリコン膜16上に有機絶縁膜17を形成する。この有機絶縁膜は、酸化シリコン膜より低い誘電率の材料から構成されている。続いて、フォトリソグラフィ技術およびエッチング技術を使用して窒化シリコン膜16および有機絶縁膜17に配線溝18を形成する。そして、エキシマランプを使用して有機絶縁膜17に紫外線を照射して酸化膜19を形成する。紫外線の照射は酸素を含有する雰囲気中で行われる。その後、酸化膜19を介した有機絶縁膜17上にバリア導体膜となるタンタル膜を形成する。
【選択図】 図9
Description
図1は、本実施の形態1における半導体装置の一部を示した断面図である。図1において、半導体基板1の主面(素子形成面)上には、素子分離領域2が形成されており、この素子分離領域2によって区切られた活性領域には、p型ウェル3が形成されている。
本実施の形態2における半導体装置の製造方法について図面を参照しながら説明する。
2 素子分離領域
3 p型ウェル
4 ゲート絶縁膜
5 ゲート電極
5a ポリシリコン膜
6 低濃度n型不純物拡散領域
7 低濃度n型不純物拡散領域
8 サイドウォール
9 高濃度n型不純物拡散領域
10 高濃度n型不純物拡散領域
11 コバルトシリサイド膜
12 層間絶縁膜
13 コンタクトホール
14a タンタル膜
14b タングステン膜
15 プラグ
16 窒化シリコン膜
17 有機絶縁膜(第1有機絶縁膜)
18 配線溝(開口部)
19 酸化膜
20 タンタル膜
21 シード膜
22 銅膜
23 配線(第1配線)
24 窒化シリコン膜
25 有機絶縁膜(第2有機絶縁膜)
26 窒化シリコン膜
27 有機絶縁膜(第3有機絶縁膜)
28 接続孔
29 配線溝(開口部)
30 酸化膜
31 タンタル膜
32 シード膜
33 銅膜
34 配線(第2配線)
40 窒化シリコン膜
41 有機絶縁膜
42 窒化シリコン膜
43 有機絶縁膜
44 窒化シリコン膜
45 接続孔
46 配線溝(開口部)
47 酸化膜
48 タンタル膜
49 銅膜
50 配線
Claims (7)
- (a)有機絶縁膜と、
(b)前記有機絶縁膜に埋め込むように形成された配線と、
(c)前記配線の側壁部と前記有機絶縁膜の間に形成されたバリア導体膜とを備え、
前記バリア導体膜と前記有機絶縁膜との間には酸化膜が形成されていることを特徴とする半導体装置。 - 請求項1記載の半導体装置であって、
前記酸化膜は、前記有機絶縁膜の表面を酸化することにより形成されていることを特徴とする半導体装置。 - 請求項1記載の半導体装置であって、
前記酸化膜は、炭素と炭素との間の結合を切断するエネルギーを持つ光を前記有機絶縁膜の表面に照射することにより形成されていることを特徴とする半導体装置。 - 請求項1記載の半導体装置であって、
前記酸化膜は、発光波長が172nmの光を前記有機絶縁膜の表面に照射することにより形成されていることを特徴とする半導体装置。 - (a)第1配線と、
(b)前記第1配線上に形成されたプラグと、
(c)前記プラグ上に形成された第2配線と、
(d)前記第1配線を埋め込んだ第1有機絶縁膜と、
(e)前記プラグを埋め込んだ第2有機絶縁膜と、
(f)前記第2配線を埋め込んだ第3有機絶縁膜と、
(g)前記第1配線の側壁部と前記第1有機絶縁膜の間、前記プラグの側壁部と前記第2有機絶縁膜の間および前記第2配線の側壁部と前記第3有機絶縁膜の間に形成されたバリア導体膜とを備え、
前記バリア導体膜と前記第1有機絶縁膜の間、前記バリア導体膜と前記第2有機絶縁膜の間および前記バリア導体膜と前記第3有機絶縁膜の間には酸化膜が形成され、
前記プラグの下面および前記第2配線の下面には前記バリア導体膜が形成されていないことを特徴とする半導体装置。 - (a)半導体基板上に有機絶縁膜を形成する工程と、
(b)前記有機絶縁膜に開口部を形成する工程と、
(c)前記有機絶縁膜を構成する炭素と炭素との結合を切断するエネルギーを持つ光を前記開口部内に照射することにより、前記開口部内の前記有機絶縁膜の表面に酸化膜を形成する工程と、
(d)前記酸化膜上にバリア導体膜を形成する工程と、
(e)前記バリア導体膜上に導体膜を形成する工程と、
(f)前記開口部内に埋め込まれた前記導体膜および前記バリア導体膜を残し、それ以外の領域に形成された前記導体膜および前記バリア導体膜を除去する工程とを備えることを特徴とする半導体装置の製造方法。 - 請求項6記載の半導体装置の製造方法であって、
前記(d)工程と前記(e)工程との間に前記開口部の底面に形成された前記バリア導体膜を除去する工程をさらに備えることを特徴とする半導体装置の製造方法。
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