JP2005161518A - 電子部品を研削するための研摩工具 - Google Patents
電子部品を研削するための研摩工具 Download PDFInfo
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- JP2005161518A JP2005161518A JP2004337495A JP2004337495A JP2005161518A JP 2005161518 A JP2005161518 A JP 2005161518A JP 2004337495 A JP2004337495 A JP 2004337495A JP 2004337495 A JP2004337495 A JP 2004337495A JP 2005161518 A JP2005161518 A JP 2005161518A
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- Prior art keywords
- abrasive
- grinding
- tool
- polishing
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
- B24D3/32—Resins or natural or synthetic macromolecular compounds for porous or cellular structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
- B24D3/342—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent
- B24D3/344—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent the bonding agent being organic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
- B24D3/346—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties utilised during polishing, or grinding operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Disintegrating Or Milling (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
【解決手段】 中空フィラー材料および樹脂結合剤とともに、ダイヤモンド砥粒のような微細グリット砥粒を含み、基材、ならびに最大約2〜15vol%の砥粒を含む研摩リムからなり、砥粒は最大120μmのサイズを有し、そこでは研摩リムは5から20vol%の樹脂結合剤および少なくとも40vol%の中空フィラー材料からなる。
【選択図】 なし
Description
本発明の砥石が下記の材料および方法を用いて11×1.125×9.002インチ(27.9×2.86×22.9cm)の樹脂結合ダイヤモンド砥石の形態で製造された。
研摩リムのための基材は2A2T型の超砥粒研削砥石の構成のために設計されたアルミニウム環(外径11.067インチ(28.11cm)であった。環の基部はセラミックウェハを仕上げるのに用いられる平面研削盤に砥石を取付けるためのボルト穴を含んでいた。
本発明の砥石が砥石2−Aのための下記の材料および方法を用いて11×1.125×9.002インチ(27.9×2.86×22.9cm)の樹脂結合ダイヤモンド砥石の形態で製造された。
(b)砥石組成は、イリノイ州ElmhurstのFujimi Inc.から入手された市販品の分析から評価された。
(c)分析はフェノール樹脂を示した。
(d)この砥石に使用されたフィラーは結晶性石英粒子を含んでいた。フィラーは中空ではなかった。フィラー粒子および砥粒は径が大体同一であった(各々約3μm)。
実施例1(溝付きリムを有する2つの砥石)および実施例2(溝付きリムを有する2つの砥石;および溝なしリムを有する1つの砥石2−A)により作成された砥石が27.9×2.9×22.9cm(11×1.125×9インチ)の大きさに仕上げられ、シリコンウェハ裏面研削処理において商業的に入手しうる樹脂結合ダイアモンド砥石(イリノイ州ElmhurstのFujimi,Inc.から入手されたFPW−AF−4/6−279ST−RT 3.5H砥石)と比較された。
研削試験条件:
機械:Strasbaugh 7AF型
砥石仕様:2A2TS型:27.9×2.9×22.9cm(11×1.125×9イ ンチ)
砥石仕様:表1参照
砥石速度:4,350rpm
研削液(Coolant):脱イオン水
研削液速度:3〜5ガロン/分(11.4〜18.9L/分)
除去された材料:段階1:10μm、段階2:5μm、段階3:5μm、リフト:2μ m
送り速度:段階1:1μm/s、段階2:0.7μm/s、段階3:0.5μm/s、 リフト:0.5μm/s
ドウェル:100rev(リフト前)
被削材:シリコンウェハ、N型100配向、(15.2cm(6インチ)径表面、平端 );仕上げ面粗さRa約4,000Å)
加工物速度:699rpm、一定
砥石速度:3,400rpm
研削液:脱イオン水
研削液流速:3〜5ガロン/分(11.4〜18.9L/分)
除去された材料:段階1:10μm、段階2:5μm、段階3:5μm、リフト:10 μm
送り速度:段階1:3μm/s、段階2:2μm/s、段階3:1μm/s、リフト: 5μm/s
ドウェル:50rev(リフト前)
被削材:シリコンウェハ、N型100配向、(15.2cm(6インチ)径表面、平端 )
加工物速度:590rpm、一定
形なおし操作:
ディスク:38A240−HVS(Norton Companyより入手)
ディスク寸法:15.2cm径(6インチ)
砥石速度:1200rpm
除去材料:段階1:150μm、段階2:10μm、リフト:20μm
送り速度:段階1:5μm/s、段階2:0.2μm:/s、リフト:2μm/s
ドゥエル:25rpm(リフト前)
形なおしディスクの目なおし:手支持スチック(Norton Companyか ら入手した38A150−HVBEスチック)
(b)正確な砥石摩耗速度測定をするためにこの砥石で研削されたウェハはあまりに少なかった。
データは本発明の砥石が市販の砥石よりも良好に成し遂げることを示す。本発明の砥石は研削のピーク力において市販の砥石とほとんど同じであったが、砥石摩耗速度、およびG−比、ならびに研削操作の間にウェハを鏡面仕上げするのに、市販の砥石より優れていた。
本発明の砥石(砥石2−A)の次の研削試験において、前述の実施例3に用いられたのと同一の操作条件で、約20μmの材料がシリコンウェハから除去され、50〜70Åの仕上げ面粗さが、受入れられうる水準の動力(すなわち、ウェハ焼けがなく、Strasbaugh盤の能力限界内)を用いる間に生じた。
このように本発明の研摩工具の観察された性能(セラミック加工物に表面変性をさせないで、材料の除去および表面研磨)は、砥粒なしにシリカ球のみを含む工具では観察されなかった。
Claims (5)
- 基材および2〜15vol%の砥粒を含む研摩リムからなる研摩工具であり、砥粒は最大120μmのサイズを有し、研摩リムは5から20vol%の樹脂結合剤および少くとも40vol%の中空フィラー材料を含む研摩工具。
- 中空フィラー材料が、シリカ球、ムライト球、発泡アルミナ、ガラス球およびそれらの組合わせから選ばれる請求項1記載の研摩工具。
- 砥粒がダイヤモンドおよび立方晶窒化ホウ素ならびにそれらの組合わせからなる群より選ばれる超砥粒であり、最大60μmのサイズを有する請求項1記載の研摩工具。
- 研摩リムが50〜75vol%の中空フィラー材料を含む請求項1記載の研摩工具。
- 研摩工具が2A2T型研削砥石であり、そして研摩リムが少くとも1つの研摩セグメントを含み、その研摩セグメントは伸長したアーチ型形状、ならびに基材の高くなった環状面に一致するように選ばれた内側湾曲を有する、請求項1記載の研摩工具。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/322,945 | 1999-05-28 | ||
US09/322,945 US6394888B1 (en) | 1999-05-28 | 1999-05-28 | Abrasive tools for grinding electronic components |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000621119A Division JP2003500229A (ja) | 1999-05-28 | 2000-04-28 | 電子部品を研削するための研摩工具 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011006337A Division JP2011067949A (ja) | 1999-05-28 | 2011-01-14 | 電子部品を研削するための研摩工具 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005161518A true JP2005161518A (ja) | 2005-06-23 |
JP2005161518A5 JP2005161518A5 (ja) | 2007-06-14 |
JP4965071B2 JP4965071B2 (ja) | 2012-07-04 |
Family
ID=23257146
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000621119A Pending JP2003500229A (ja) | 1999-05-28 | 2000-04-28 | 電子部品を研削するための研摩工具 |
JP2004337495A Expired - Lifetime JP4965071B2 (ja) | 1999-05-28 | 2004-11-22 | 電子部品を研削するための研摩工具 |
JP2011006337A Pending JP2011067949A (ja) | 1999-05-28 | 2011-01-14 | 電子部品を研削するための研摩工具 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000621119A Pending JP2003500229A (ja) | 1999-05-28 | 2000-04-28 | 電子部品を研削するための研摩工具 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011006337A Pending JP2011067949A (ja) | 1999-05-28 | 2011-01-14 | 電子部品を研削するための研摩工具 |
Country Status (17)
Country | Link |
---|---|
US (1) | US6394888B1 (ja) |
EP (1) | EP1183134B1 (ja) |
JP (3) | JP2003500229A (ja) |
KR (1) | KR100416330B1 (ja) |
CN (1) | CN100402237C (ja) |
AT (1) | ATE428537T1 (ja) |
AU (1) | AU764547B2 (ja) |
CA (1) | CA2375956C (ja) |
DE (1) | DE60042017D1 (ja) |
HK (1) | HK1046514A1 (ja) |
HU (1) | HUP0201428A2 (ja) |
IL (1) | IL146387A0 (ja) |
MX (1) | MXPA01012335A (ja) |
MY (1) | MY125377A (ja) |
TW (1) | TW461845B (ja) |
WO (1) | WO2000073023A1 (ja) |
ZA (1) | ZA200108576B (ja) |
Cited By (2)
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JP2008001803A (ja) * | 2006-06-22 | 2008-01-10 | Admatechs Co Ltd | 研磨材用砥粒及びその製造方法、並びに研磨材 |
JP2010036303A (ja) * | 2008-08-05 | 2010-02-18 | Asahi Diamond Industrial Co Ltd | 半導体ウェーハ裏面研削用砥石及び半導体ウェーハ裏面研削方法 |
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Also Published As
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TW461845B (en) | 2001-11-01 |
CA2375956A1 (en) | 2000-12-07 |
ZA200108576B (en) | 2003-01-20 |
CN100402237C (zh) | 2008-07-16 |
CA2375956C (en) | 2005-06-28 |
WO2000073023A1 (en) | 2000-12-07 |
HUP0201428A2 (en) | 2002-09-28 |
ATE428537T1 (de) | 2009-05-15 |
AU764547B2 (en) | 2003-08-21 |
JP2003500229A (ja) | 2003-01-07 |
KR100416330B1 (ko) | 2004-01-31 |
KR20020085777A (ko) | 2002-11-16 |
JP4965071B2 (ja) | 2012-07-04 |
CN1368912A (zh) | 2002-09-11 |
MY125377A (en) | 2006-07-31 |
DE60042017D1 (de) | 2009-05-28 |
MXPA01012335A (es) | 2002-07-22 |
AU4497600A (en) | 2000-12-18 |
EP1183134B1 (en) | 2009-04-15 |
EP1183134A1 (en) | 2002-03-06 |
IL146387A0 (en) | 2002-07-25 |
US6394888B1 (en) | 2002-05-28 |
HK1046514A1 (zh) | 2003-01-17 |
JP2011067949A (ja) | 2011-04-07 |
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