JP2005158948A - 固体撮像装置及びその製造方法 - Google Patents
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Abstract
【解決手段】 固体撮像装置2の半導体基板6は、カバーガラス8と接合された後にバックグラインドされて薄層化されている。半導体基板5の上面には、固体撮像素子3と多数の接続端子10とが形成されている。半導体基板6の接続端子10に対面する位置には、底面側からスルーホール18が形成され、接続端子10が底面側に露呈されている。半導体基板6が実装される実装基板5の配線パターン20上には、スタッドバンプ26が形成されている。このスタッドバンプ26は、実装基板5上に半導体基板6が実装されたときにスルーホール18内に挿入されて接続端子10と当接し、配線パターン20と固体撮像素子3とを電気的に接続する。
【選択図】 図2
Description
3,51 固体撮像素子
4 固体撮像素子チップ
5 実装基板
6,53 半導体基板
7,54 スペーサー
8,55 カバーガラス
10,52 接続端子
12 低α線ガラス
13 IRカットフィルタ
18,59 スルーホール
20,56 配線パターン
26,60 スタッドバンプ
30,65 ウエハ
32,67 ガラス基板
Claims (14)
- 固体撮像素子とこの固体撮像素子に接続された接続端子とが一方の面に形成され、他方の面から形成されたスルーホールによって接続端子が他方の面側に露呈された半導体基板と、
この半導体基板の一方の面上に重ねられて固体撮像素子と接続端子とを封止する透光性部材と、
半導体基板が実装される実装基板と、
半導体基板と実装基板との少なくともいずれか一方に形成され、スルーホール内の接続端子と実装基板とを接続するバンプとからなることを特徴とする固体撮像装置。 - 固体撮像素子とこの固体撮像素子に接続された接続端子とが一方の面に形成され、他方の面から形成されたスルーホールによって接続端子が他方の面側に露呈された半導体基板と、
この半導体基板の一方の面上に重ねられて固体撮像素子と接続端子とを封止する透光性部材と、
半導体基板の他方の面に形成された外部接続端子と、
スルーホール内に形成され、このスルーホール内の接続端子と外部接続端子とを接続するバンプとからなることを特徴とする固体撮像装置。 - 前記半導体基板の外部接続端子が形成された面に周辺回路パターンを形成し、周辺回路用の電子部品を実装したことを特徴とする請求項2記載の固体撮像装置。
- 前記固体撮像素子と透光性部材との間に空隙を設けたことを特徴とする請求項1ないし3いずれか記載の固体撮像装置。
- 前記透光性部材は、低α線ガラスと、IRカットフィルタと、ローパスフィルタとからなることを特徴とする請求項1ないし4いずれか記載の固体撮像装置。
- 前記透光性部材は、スペーサーを介して半導体基板に取り付けられることを特徴とする請求項1ないし5いずれか記載の固体撮像装置。
- 前記スペーサーは、ステンレスあるいはシリコンによって形成されることを特徴とする請求項1ないし6いずれか記載の固体撮像装置。
- 前記半導体基板の厚みは、30〜100μmであることを特徴とする請求項1ないし7いずれか記載の固体撮像装置。
- ウエハの一方の面に多数の固体撮像素子と各固体撮像素子に接続された多数の接続端子とを形成する工程と、
ウエハの一方の面上に透光性を有する透光性基板を接合し、固体撮像素子と接続端子とを封止する工程と、
前記ウエハの他方の面から多数のスルーホールを形成し、各接続端子を該他方の面側に露呈させる工程と、
ウエハと、このウエハに接合された透光性基板とを各固体撮像素子ごとに分割する工程と、
実装基板にバンプを形成する工程と、
ウエハが分割されてなる半導体基板を実装基板に実装し、かつスルーホール内の接続端子と実装基板とをバンプによって接続する工程とを含むことを特徴とする固体撮像装置の製造方法。 - 前記実装基板にバンプを形成する工程に代えて、ウエハのスルーホール内にバンプを形成する工程を用い、この工程をウエハとウエハに接合された透光性基板とを各固体撮像素子ごとに分割する工程の前に実施したことを特徴とする請求項9記載の固体撮像装置の製造方法。
- ウエハの一方の面に多数の固体撮像素子と各固体撮像素子に接続される多数の接続端子とを形成する工程と、
ウエハの一方の面上に透光性を有する透光性基板を接合し、固体撮像素子と接続端子とを封止する工程と、
前記ウエハの他方の面から多数のスルーホールを形成し、各接続端子を該他方の面側に露呈させる工程と、
各スルーホール内にバンプを形成する工程と、
ウエハの他方の面に外部接続端子を形成し、バンプを介してスルーホール内の接続端子と接続させる工程と、
ウエハと、このウエハに接合された透光性基板とを各固体撮像素子ごとに分割する工程とを含むことを特徴とする固体撮像装置の製造方法。 - 前記ウエハの外部接続端子が形成される面に周辺回路パターンを形成し、このパターン上に周辺回路用の電子部品を実装する工程を設けたことを特徴とする請求項11記載の固体撮像装置の製造方法。
- 前記スルーホールを形成する工程の前に、ウエハの他方の面を研削する工程を設けたことを特徴とする請求項9ないし12いずれか記載の固体撮像装置の製造方法。
- 前記研削工程により、ウエハの厚みを30〜100μmとしたことを特徴とする請求項13記載の固体撮像装置の製造方法。
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JP2003394221A JP4542768B2 (ja) | 2003-11-25 | 2003-11-25 | 固体撮像装置及びその製造方法 |
US10/992,776 US7259438B2 (en) | 2003-11-25 | 2004-11-22 | Solid state imaging device and producing method thereof |
EP04257300A EP1536478A3 (en) | 2003-11-25 | 2004-11-24 | Solid state imaging device and producing method thereof |
KR1020040096743A KR100684703B1 (ko) | 2003-11-25 | 2004-11-24 | 고체촬상장치 및 그 제조 방법 |
CN2004100955127A CN1622334B (zh) | 2003-11-25 | 2004-11-25 | 固态成像装置及其制造方法 |
US11/348,308 US7527990B2 (en) | 2003-11-25 | 2006-02-07 | Solid state imaging device and producing method thereof |
US11/785,839 US7345349B2 (en) | 2003-11-25 | 2007-04-20 | Solid state imaging device and producing method thereof |
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JP2003394221A JP4542768B2 (ja) | 2003-11-25 | 2003-11-25 | 固体撮像装置及びその製造方法 |
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JP4542768B2 JP4542768B2 (ja) | 2010-09-15 |
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EP (1) | EP1536478A3 (ja) |
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KR (1) | KR100684703B1 (ja) |
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Cited By (11)
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JP2007073958A (ja) * | 2005-09-02 | 2007-03-22 | Korea Advanced Inst Of Sci Technol | イメージセンサモジュール用ウエハーレベルチップサイズのパッケージ及びその製造方法 |
JP2007158078A (ja) * | 2005-12-06 | 2007-06-21 | Zycube:Kk | 半導体装置とその製造方法 |
WO2007069750A1 (en) * | 2005-12-14 | 2007-06-21 | Fujifilm Corporation | Solid state imaging device and manufacturing method thereof |
WO2007074594A1 (ja) * | 2005-12-27 | 2007-07-05 | Sharp Kabushiki Kaisha | 半田付け実装構造とその製造方法および製造装置、電子機器、並びに配線基板 |
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WO2017010063A1 (ja) * | 2015-07-10 | 2017-01-19 | 凸版印刷株式会社 | 配線基板及びその製造方法 |
WO2017138350A1 (ja) * | 2016-02-08 | 2017-08-17 | ソニー株式会社 | ガラスインタポーザモジュール、撮像装置、および電子機器 |
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JP4000507B2 (ja) | 2001-10-04 | 2007-10-31 | ソニー株式会社 | 固体撮像装置の製造方法 |
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Also Published As
Publication number | Publication date |
---|---|
JP4542768B2 (ja) | 2010-09-15 |
EP1536478A3 (en) | 2008-07-23 |
US7259438B2 (en) | 2007-08-21 |
US7345349B2 (en) | 2008-03-18 |
KR100684703B1 (ko) | 2007-02-20 |
CN1622334A (zh) | 2005-06-01 |
CN1622334B (zh) | 2011-07-06 |
EP1536478A2 (en) | 2005-06-01 |
US20060128044A1 (en) | 2006-06-15 |
KR20050050562A (ko) | 2005-05-31 |
US20050110107A1 (en) | 2005-05-26 |
US7527990B2 (en) | 2009-05-05 |
US20070187791A1 (en) | 2007-08-16 |
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