JP2005142382A5 - - Google Patents

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Publication number
JP2005142382A5
JP2005142382A5 JP2003377657A JP2003377657A JP2005142382A5 JP 2005142382 A5 JP2005142382 A5 JP 2005142382A5 JP 2003377657 A JP2003377657 A JP 2003377657A JP 2003377657 A JP2003377657 A JP 2003377657A JP 2005142382 A5 JP2005142382 A5 JP 2005142382A5
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JP
Japan
Prior art keywords
temperature
exposure apparatus
chamber
inert gas
adjusting means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2003377657A
Other languages
English (en)
Japanese (ja)
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JP2005142382A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2003377657A priority Critical patent/JP2005142382A/ja
Priority claimed from JP2003377657A external-priority patent/JP2005142382A/ja
Priority to US10/981,777 priority patent/US7317505B2/en
Publication of JP2005142382A publication Critical patent/JP2005142382A/ja
Publication of JP2005142382A5 publication Critical patent/JP2005142382A5/ja
Withdrawn legal-status Critical Current

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JP2003377657A 2003-11-07 2003-11-07 露光装置 Withdrawn JP2005142382A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2003377657A JP2005142382A (ja) 2003-11-07 2003-11-07 露光装置
US10/981,777 US7317505B2 (en) 2003-11-07 2004-11-05 Exposure apparatus and device manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003377657A JP2005142382A (ja) 2003-11-07 2003-11-07 露光装置

Publications (2)

Publication Number Publication Date
JP2005142382A JP2005142382A (ja) 2005-06-02
JP2005142382A5 true JP2005142382A5 (enExample) 2007-04-05

Family

ID=34587226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003377657A Withdrawn JP2005142382A (ja) 2003-11-07 2003-11-07 露光装置

Country Status (2)

Country Link
US (1) US7317505B2 (enExample)
JP (1) JP2005142382A (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005166961A (ja) * 2003-12-03 2005-06-23 Canon Inc 不活性ガスパージ方法、露光装置、デバイス製造方法、及びデバイス
JP4418724B2 (ja) * 2004-09-17 2010-02-24 キヤノン株式会社 露光装置
JP2006222165A (ja) * 2005-02-08 2006-08-24 Canon Inc 露光装置
JP4781049B2 (ja) * 2005-08-30 2011-09-28 キヤノン株式会社 露光装置およびデバイス製造方法
JP2007123295A (ja) * 2005-10-24 2007-05-17 Canon Inc 露光装置
JP2007142190A (ja) * 2005-11-18 2007-06-07 Canon Inc 露光装置及びデバイス製造方法
EP1975980A4 (en) * 2005-12-28 2010-08-04 Nikon Corp EXPOSURE DEVICE AND MANUFACTURING METHOD THEREFOR
US8953148B2 (en) * 2005-12-28 2015-02-10 Nikon Corporation Exposure apparatus and making method thereof
JP2007281142A (ja) * 2006-04-05 2007-10-25 Canon Inc 露光装置及び方法、並びに、デバイス製造方法
US7408728B2 (en) * 2006-12-04 2008-08-05 Quality Vision International, Inc. System and method for focal length stabilization using active temperature control
GB2446414A (en) * 2007-02-06 2008-08-13 Thorn Security A Detector
JP5207663B2 (ja) * 2007-05-31 2013-06-12 キヤノン株式会社 露光システムおよびデバイス製造方法
JP4490459B2 (ja) 2007-06-29 2010-06-23 キヤノン株式会社 露光装置及びデバイス製造方法
CN101276150B (zh) * 2008-03-21 2010-06-02 上海微电子装备有限公司 一种步进重复曝光装置
WO2010013671A1 (ja) * 2008-08-01 2010-02-04 株式会社ニコン 露光方法及び装置、並びにデバイス製造方法
KR101297242B1 (ko) * 2008-09-29 2013-08-16 엘지디스플레이 주식회사 액정표시장치용 냉각장치
CN107246919B (zh) * 2017-05-03 2019-08-23 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） 一种制冷型红外探测器的控制系统及其制冷判定方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD160756A3 (de) * 1981-04-24 1984-02-29 Gudrun Dietz Anordnung zur verbesserung fotochemischer umsetzungsprozesse in fotoresistschichten
JPS61160934A (ja) * 1985-01-10 1986-07-21 Canon Inc 投影光学装置
US4825247A (en) * 1987-02-16 1989-04-25 Canon Kabushiki Kaisha Projection exposure apparatus
JP3500619B2 (ja) * 1993-10-28 2004-02-23 株式会社ニコン 投影露光装置
US6545746B1 (en) * 1996-03-04 2003-04-08 Nikon Corporation Projection exposure apparatus
WO1999012194A1 (en) * 1997-08-29 1999-03-11 Nikon Corporation Temperature adjusting method and aligner to which this method is applied
AU1051899A (en) * 1997-11-12 1999-05-31 Nikon Corporation Exposure apparatus, apparatus for manufacturing devices, and method of manufacturing exposure apparatuses
JP2000315640A (ja) 1999-04-28 2000-11-14 Canon Inc 半導体露光装置及びこれを用いたデバイス製造方法
KR20020036952A (ko) * 1999-05-27 2002-05-17 시마무라 테루오 노광장치 및 디바이스 제조방법, 그리고 노광장치의환경제어방법
JP3869999B2 (ja) * 2000-03-30 2007-01-17 キヤノン株式会社 露光装置および半導体デバイス製造方法
JP2002158170A (ja) * 2000-09-08 2002-05-31 Nikon Corp 露光装置及びデバイス製造方法
JP2003014239A (ja) 2001-06-29 2003-01-15 Hitachi Hometec Ltd 加熱調理器
JP2004128213A (ja) * 2002-10-02 2004-04-22 Canon Inc 温調システム及びそれを組み込んだ露光装置

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