JP2006222165A5 - - Google Patents

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Publication number
JP2006222165A5
JP2006222165A5 JP2005032357A JP2005032357A JP2006222165A5 JP 2006222165 A5 JP2006222165 A5 JP 2006222165A5 JP 2005032357 A JP2005032357 A JP 2005032357A JP 2005032357 A JP2005032357 A JP 2005032357A JP 2006222165 A5 JP2006222165 A5 JP 2006222165A5
Authority
JP
Japan
Prior art keywords
liquid
flow path
immersion exposure
exposure apparatus
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005032357A
Other languages
English (en)
Japanese (ja)
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JP2006222165A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005032357A priority Critical patent/JP2006222165A/ja
Priority claimed from JP2005032357A external-priority patent/JP2006222165A/ja
Priority to US11/275,953 priority patent/US7352437B2/en
Publication of JP2006222165A publication Critical patent/JP2006222165A/ja
Publication of JP2006222165A5 publication Critical patent/JP2006222165A5/ja
Pending legal-status Critical Current

Links

JP2005032357A 2005-02-08 2005-02-08 露光装置 Pending JP2006222165A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005032357A JP2006222165A (ja) 2005-02-08 2005-02-08 露光装置
US11/275,953 US7352437B2 (en) 2005-02-08 2006-02-07 Exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005032357A JP2006222165A (ja) 2005-02-08 2005-02-08 露光装置

Publications (2)

Publication Number Publication Date
JP2006222165A JP2006222165A (ja) 2006-08-24
JP2006222165A5 true JP2006222165A5 (enExample) 2008-04-03

Family

ID=36779567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005032357A Pending JP2006222165A (ja) 2005-02-08 2005-02-08 露光装置

Country Status (2)

Country Link
US (1) US7352437B2 (enExample)
JP (1) JP2006222165A (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4418724B2 (ja) * 2004-09-17 2010-02-24 キヤノン株式会社 露光装置
JP2006222165A (ja) 2005-02-08 2006-08-24 Canon Inc 露光装置
US8018573B2 (en) * 2005-02-22 2011-09-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP2007123295A (ja) * 2005-10-24 2007-05-17 Canon Inc 露光装置
SG143137A1 (en) * 2006-11-13 2008-06-27 Asml Netherlands Bv Conduit system for a lithographic apparatus, lithographic apparatus, pump, and method for substantially reducing vibrations in a conduit system
US8068208B2 (en) * 2006-12-01 2011-11-29 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for improving immersion scanner overlay performance
US7426015B2 (en) * 2007-01-17 2008-09-16 Asml Netherlands B.V. Device manufacturing method and lithographic apparatus
JP5207663B2 (ja) * 2007-05-31 2013-06-12 キヤノン株式会社 露光システムおよびデバイス製造方法
JP4490459B2 (ja) 2007-06-29 2010-06-23 キヤノン株式会社 露光装置及びデバイス製造方法
JP5277731B2 (ja) * 2008-06-02 2013-08-28 株式会社ニコン 露光装置、露光方法、及びデバイス製造方法
JP2010021370A (ja) * 2008-07-10 2010-01-28 Canon Inc 液浸露光装置およびデバイス製造方法
DE102008050868A1 (de) * 2008-09-30 2010-04-08 M+W Zander Products Gmbh Einrichtung zur Temperaturstabilisierung von Flüssigkeiten, vorzugsweise von ultrareinem Wasser, bei der Herstellung von Chips sowie Verfahren zur Temperaturstabilisierung von Flüssigkeiten zur Anwendung bei der Herstellung von Chips
NL2004162A (en) * 2009-02-17 2010-08-18 Asml Netherlands Bv A fluid supply system, a lithographic apparatus, a method of varying fluid flow rate and a device manufacturing method.
NL2005009A (en) * 2009-07-27 2011-01-31 Asml Netherlands Bv Lithographic apparatus and device manufacturing method.
NL2006648A (en) * 2010-06-01 2011-12-06 Asml Netherlands Bv A fluid supply system, a lithographic apparatus, a method of varying fluid flow rate and a device manufacturing method.
JP5744597B2 (ja) * 2011-03-31 2015-07-08 Hoya株式会社 マスクブランクス用ガラス基板の製造方法、マスクブランクスの製造方法、転写マスクの製造方法、及び半導体装置の製造方法
CN102430979A (zh) * 2011-10-13 2012-05-02 清华大学 抛光液温度控制装置和抛光液输送设备
CN103176370B (zh) * 2013-03-13 2015-04-15 华中科技大学 一种用于浸没式光刻的浸液温控系统
CN112445084B (zh) * 2020-12-20 2021-11-30 华中科技大学 一种浸没式光刻机的温度控制方法及装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06124873A (ja) 1992-10-09 1994-05-06 Canon Inc 液浸式投影露光装置
JP3747566B2 (ja) * 1997-04-23 2006-02-22 株式会社ニコン 液浸型露光装置
JP2002036488A (ja) * 2000-07-25 2002-02-05 Fuji Photo Film Co Ltd インクジェット式製版方法及び製版装置
TWI300953B (en) * 2002-03-15 2008-09-11 Nikon Corp Exposure system and device manufacturing process
JP2004128213A (ja) 2002-10-02 2004-04-22 Canon Inc 温調システム及びそれを組み込んだ露光装置
TWI543235B (zh) * 2003-06-19 2016-07-21 尼康股份有限公司 A method of manufacturing an exposure apparatus and an element
SG109000A1 (en) * 2003-07-16 2005-02-28 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
TWI475596B (zh) * 2003-08-29 2015-03-01 尼康股份有限公司 A liquid recovery device, an exposure device, an exposure method, and an element manufacturing method
EP1524558A1 (en) * 2003-10-15 2005-04-20 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
JP2005142382A (ja) 2003-11-07 2005-06-02 Canon Inc 露光装置
JP4323946B2 (ja) * 2003-12-19 2009-09-02 キヤノン株式会社 露光装置
JP4326461B2 (ja) * 2004-11-15 2009-09-09 Ｓｍｃ株式会社 小流量液体の温調システム
JP2006222165A (ja) 2005-02-08 2006-08-24 Canon Inc 露光装置

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