JP2007123295A5 - - Google Patents

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Publication number
JP2007123295A5
JP2007123295A5 JP2005308968A JP2005308968A JP2007123295A5 JP 2007123295 A5 JP2007123295 A5 JP 2007123295A5 JP 2005308968 A JP2005308968 A JP 2005308968A JP 2005308968 A JP2005308968 A JP 2005308968A JP 2007123295 A5 JP2007123295 A5 JP 2007123295A5
Authority
JP
Japan
Prior art keywords
pump
liquid refrigerant
jacket
circulation system
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005308968A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007123295A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005308968A priority Critical patent/JP2007123295A/ja
Priority claimed from JP2005308968A external-priority patent/JP2007123295A/ja
Priority to US11/552,007 priority patent/US7679716B2/en
Publication of JP2007123295A publication Critical patent/JP2007123295A/ja
Publication of JP2007123295A5 publication Critical patent/JP2007123295A5/ja
Priority to US12/628,252 priority patent/US8373844B2/en
Pending legal-status Critical Current

Links

JP2005308968A 2005-10-24 2005-10-24 露光装置 Pending JP2007123295A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2005308968A JP2007123295A (ja) 2005-10-24 2005-10-24 露光装置
US11/552,007 US7679716B2 (en) 2005-10-24 2006-10-23 Exposure apparatus and device manufacturing method
US12/628,252 US8373844B2 (en) 2005-10-24 2009-12-01 Exposure apparatus having an element to be cooled

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005308968A JP2007123295A (ja) 2005-10-24 2005-10-24 露光装置

Publications (2)

Publication Number Publication Date
JP2007123295A JP2007123295A (ja) 2007-05-17
JP2007123295A5 true JP2007123295A5 (enExample) 2008-12-11

Family

ID=37984259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005308968A Pending JP2007123295A (ja) 2005-10-24 2005-10-24 露光装置

Country Status (2)

Country Link
US (2) US7679716B2 (enExample)
JP (1) JP2007123295A (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007123295A (ja) 2005-10-24 2007-05-17 Canon Inc 露光装置
US7916267B2 (en) * 2006-08-29 2011-03-29 Asml Netherlands B.V. Lithographic apparatus, and motor cooling device
JP4490459B2 (ja) 2007-06-29 2010-06-23 キヤノン株式会社 露光装置及びデバイス製造方法
JP2009206112A (ja) * 2008-02-26 2009-09-10 Canon Inc 冷却装置および冷却装置の運転方法
KR101768983B1 (ko) * 2008-06-10 2017-08-17 에이에스엠엘 네델란즈 비.브이. 광학 요소를 열적으로 컨디셔닝하는 방법 및 시스템
NL2004162A (en) * 2009-02-17 2010-08-18 Asml Netherlands Bv A fluid supply system, a lithographic apparatus, a method of varying fluid flow rate and a device manufacturing method.
US9372407B2 (en) * 2013-04-18 2016-06-21 E I Du Pont De Nemours And Company Exposure apparatus and a method for exposing a photosensitive element and a method for preparing a printing form from the photosensitive element
EP3299731B1 (en) * 2015-05-22 2019-01-30 Daikin Industries, Ltd. Temperature-adjusting fluid supply apparatus
TWI826581B (zh) * 2019-11-11 2023-12-21 靖洋科技股份有限公司 壓力調控裝置以及半導體生產系統
EP3995896A1 (en) * 2020-11-10 2022-05-11 ASML Netherlands B.V. Conditioning apparatus and method

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3475973B2 (ja) * 1994-12-14 2003-12-10 株式会社ニコン リニアモータ、ステージ装置、及び露光装置
JP2002186242A (ja) * 2000-12-14 2002-06-28 Nikon Corp 電磁アクチュエータ装置、ステージ装置、露光装置及びデバイス
JP2002206833A (ja) 2001-01-05 2002-07-26 Nikon Corp 液体冷却系の振動低減方法、荷電粒子線露光装置及び半導体デバイスの製造方法
JP2004128213A (ja) 2002-10-02 2004-04-22 Canon Inc 温調システム及びそれを組み込んだ露光装置
JP2004247688A (ja) * 2003-02-17 2004-09-02 Canon Inc 冷媒供給装置
JP2005142382A (ja) 2003-11-07 2005-06-02 Canon Inc 露光装置
US7362415B2 (en) * 2004-12-07 2008-04-22 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP2006222165A (ja) 2005-02-08 2006-08-24 Canon Inc 露光装置
JP2007123295A (ja) 2005-10-24 2007-05-17 Canon Inc 露光装置

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