JP2005141208A5 - - Google Patents

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Publication number
JP2005141208A5
JP2005141208A5 JP2004300211A JP2004300211A JP2005141208A5 JP 2005141208 A5 JP2005141208 A5 JP 2005141208A5 JP 2004300211 A JP2004300211 A JP 2004300211A JP 2004300211 A JP2004300211 A JP 2004300211A JP 2005141208 A5 JP2005141208 A5 JP 2005141208A5
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JP
Japan
Prior art keywords
piezoelectric
layer
substrate
voltage
lower support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004300211A
Other languages
English (en)
Japanese (ja)
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JP2005141208A (ja
Filing date
Publication date
Application filed filed Critical
Publication of JP2005141208A publication Critical patent/JP2005141208A/ja
Publication of JP2005141208A5 publication Critical patent/JP2005141208A5/ja
Pending legal-status Critical Current

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JP2004300211A 2003-11-03 2004-10-14 回折型薄膜圧電マイクロミラーおよびその製造方法 Pending JP2005141208A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR20030077389 2003-11-03

Publications (2)

Publication Number Publication Date
JP2005141208A JP2005141208A (ja) 2005-06-02
JP2005141208A5 true JP2005141208A5 (enExample) 2006-01-12

Family

ID=34420705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004300211A Pending JP2005141208A (ja) 2003-11-03 2004-10-14 回折型薄膜圧電マイクロミラーおよびその製造方法

Country Status (6)

Country Link
US (1) US7626745B2 (enExample)
EP (1) EP1528038B1 (enExample)
JP (1) JP2005141208A (enExample)
KR (1) KR100645640B1 (enExample)
CN (1) CN1614458B (enExample)
DE (1) DE602004023264D1 (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100632606B1 (ko) * 2004-08-19 2006-10-09 삼성전기주식회사 색선별 슬릿을 이용한 광변조기 다중광 스캐닝 장치
US7215461B1 (en) * 2004-09-14 2007-05-08 Silicon Light Machines Corporation MEMS devices with increased damping for suspended movable structures
KR100897671B1 (ko) * 2005-02-04 2009-05-14 삼성전기주식회사 회절형 광변조기
KR100832622B1 (ko) * 2005-05-25 2008-05-27 삼성전기주식회사 광변조기 및 그 광변조기를 이용한 프로젝터를 구비한휴대용 단말기
KR100905553B1 (ko) * 2005-06-10 2009-07-02 삼성전기주식회사 회절형 광변조기의 미러 위치 보상 장치 및 그 제어 방법
KR100859003B1 (ko) * 2005-11-01 2008-09-18 삼성전기주식회사 알루미늄 합금을 이용한 광 반사층을 갖는 광변조기 소자및 그 제조 방법
KR100781367B1 (ko) * 2005-11-01 2007-11-30 삼성전기주식회사 광반사층 상에 보호막을 갖는 광변조기 소자
DE102006057567B4 (de) * 2006-11-28 2008-09-04 Micronic Laser Systems Ab Mikrooptisches Element mit einem Substrat, an dem an einer optisch wirksamen Oberfläche mindestens eine Höhenstufe ausgebildet ist, Verfahren zu seiner Herstellung und Verwendungen
DE102006057568A1 (de) * 2006-11-28 2008-05-29 Micronic Laser Systems Ab Mikrooptisches Element mit einem Substrat und Verfahren zu seiner Herstellung
US7698941B2 (en) * 2007-06-20 2010-04-20 Headway Technologies, Inc. Sensing unit and method of making same
NO333724B1 (no) * 2009-08-14 2013-09-02 Sintef En mikromekanisk rekke med optisk reflekterende overflater
JP5703440B2 (ja) * 2010-07-09 2015-04-22 株式会社ユーテック 圧電体回折格子、プロジェクター、発光装置及び表示装置
KR102065107B1 (ko) * 2013-05-20 2020-02-12 삼성디스플레이 주식회사 무마스크 노광 장치
JP6225544B2 (ja) * 2013-07-31 2017-11-08 株式会社デンソー 圧電素子の製造方法
JP5857342B2 (ja) * 2014-07-17 2016-02-10 株式会社ユーテック 発光装置及び表示装置
WO2016130996A1 (en) * 2015-02-13 2016-08-18 Airmar Technology Corporation Acoustic transducer element
US20190033500A1 (en) * 2016-04-01 2019-01-31 Intel Corporation Package-integrated piezoelectric optical grating switch array
JP6690419B2 (ja) * 2016-06-08 2020-04-28 株式会社デンソー 半導体光デバイス、および、その製造方法
IT202000001411A1 (it) * 2020-01-24 2021-07-24 St Microelectronics Srl Metodo di lavorazione di una fetta per la fabbricazione di una struttura oscillante quale un microspecchio

Family Cites Families (18)

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Publication number Priority date Publication date Assignee Title
JPH0572490A (ja) 1991-09-13 1993-03-26 Nippon Telegr & Teleph Corp <Ntt> 光学装置
US5311360A (en) 1992-04-28 1994-05-10 The Board Of Trustees Of The Leland Stanford, Junior University Method and apparatus for modulating a light beam
JP2973272B2 (ja) 1994-05-10 1999-11-08 オムロン株式会社 可変光学面及び光スキャニングシステム
US5637517A (en) 1995-05-26 1997-06-10 Daewoo Electronics Co., Ltd. Method for forming array of thin film actuated mirrors
JP2924738B2 (ja) 1995-09-29 1999-07-26 オムロン株式会社 光偏向装置
TW357271B (en) * 1996-02-26 1999-05-01 Seiko Epson Corp Light regulator, display and the electronic machine
JPH09289342A (ja) 1996-04-19 1997-11-04 Sony Corp 多層型圧電アクチュエータ
FR2753565B1 (fr) 1996-09-13 1998-11-27 Thomson Csf Dispositif de commutation electrique et dispositif d'affichage utilisant ce dispositif de commutation
AUPO850597A0 (en) * 1997-08-11 1997-09-04 Silverbrook Research Pty Ltd Image processing method and apparatus (art01a)
US6060818A (en) 1998-06-02 2000-05-09 Hewlett-Packard Company SBAR structures and method of fabrication of SBAR.FBAR film processing techniques for the manufacturing of SBAR/BAR filters
US6238581B1 (en) 1998-12-18 2001-05-29 Eastman Kodak Company Process for manufacturing an electro-mechanical grating device
US6724125B2 (en) 1999-03-30 2004-04-20 Massachusetts Institute Of Technology Methods and apparatus for diffractive optical processing using an actuatable structure
GB2353410B (en) 1999-08-18 2002-04-17 Marconi Electronic Syst Ltd Electrical switches
JP3979515B2 (ja) 1999-12-28 2007-09-19 パイオニア株式会社 可変光学素子とその可変光学素子を備えたピックアップ装置並びにそのピックアップ装置を備えた情報記録再生装置
JP2002055297A (ja) 2000-08-11 2002-02-20 Ngk Insulators Ltd レーザビーム出力装置
JP2002162573A (ja) 2000-11-24 2002-06-07 Sony Corp 空間変調器及び画像表示装置
AU2002309106A1 (en) 2001-07-05 2003-02-24 International Business Machines Coporation Microsystem switches
JP3852306B2 (ja) 2001-07-06 2006-11-29 ソニー株式会社 Ｍｅｍｓ素子の製造方法、ｇｌｖデバイスの製造方法、及びレーザディスプレイの製造方法

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