JP2005141208A - 回折型薄膜圧電マイクロミラーおよびその製造方法 - Google Patents

回折型薄膜圧電マイクロミラーおよびその製造方法 Download PDF

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Publication number
JP2005141208A
JP2005141208A JP2004300211A JP2004300211A JP2005141208A JP 2005141208 A JP2005141208 A JP 2005141208A JP 2004300211 A JP2004300211 A JP 2004300211A JP 2004300211 A JP2004300211 A JP 2004300211A JP 2005141208 A JP2005141208 A JP 2005141208A
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JP
Japan
Prior art keywords
piezoelectric
layer
lower support
substrate
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004300211A
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English (en)
Japanese (ja)
Other versions
JP2005141208A5 (enExample
Inventor
Don-Ho Shin
シン、ドン−ホ
Jong-Hyeong Song
ソン、ゾン−ヒョン
Seung-Do An
アン、スン−ド
Min-Suk Oh
オ、ミン−ソク
In-Ze Yo
ヨ、イン−ゼ
Sang Kyeong Yun
ユン、サン−ギョン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electro Mechanics Co Ltd
Original Assignee
Samsung Electro Mechanics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electro Mechanics Co Ltd filed Critical Samsung Electro Mechanics Co Ltd
Publication of JP2005141208A publication Critical patent/JP2005141208A/ja
Publication of JP2005141208A5 publication Critical patent/JP2005141208A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0083—Optical properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00142—Bridges
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/37—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements
    • G09F9/372—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements the positions of the elements being controlled by the application of an electric field
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2004300211A 2003-11-03 2004-10-14 回折型薄膜圧電マイクロミラーおよびその製造方法 Pending JP2005141208A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR20030077389 2003-11-03

Publications (2)

Publication Number Publication Date
JP2005141208A true JP2005141208A (ja) 2005-06-02
JP2005141208A5 JP2005141208A5 (enExample) 2006-01-12

Family

ID=34420705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004300211A Pending JP2005141208A (ja) 2003-11-03 2004-10-14 回折型薄膜圧電マイクロミラーおよびその製造方法

Country Status (6)

Country Link
US (1) US7626745B2 (enExample)
EP (1) EP1528038B1 (enExample)
JP (1) JP2005141208A (enExample)
KR (1) KR100645640B1 (enExample)
CN (1) CN1614458B (enExample)
DE (1) DE602004023264D1 (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006058833A (ja) * 2004-08-19 2006-03-02 Samsung Electro Mech Co Ltd 色選別スリットを用いた光変調器の多重ビーム走査装置
WO2012004888A1 (ja) * 2010-07-09 2012-01-12 株式会社ユーテック 圧電体回折格子、プロジェクター、発光装置及び表示装置
JP2015007780A (ja) * 2014-07-17 2015-01-15 株式会社ユーテック 発光装置及び表示装置
JP2015032587A (ja) * 2013-07-31 2015-02-16 株式会社デンソー 圧電素子およびその製造方法
JP2017219715A (ja) * 2016-06-08 2017-12-14 株式会社デンソー 半導体光デバイス、および、その製造方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7215461B1 (en) * 2004-09-14 2007-05-08 Silicon Light Machines Corporation MEMS devices with increased damping for suspended movable structures
KR100897671B1 (ko) * 2005-02-04 2009-05-14 삼성전기주식회사 회절형 광변조기
KR100832622B1 (ko) * 2005-05-25 2008-05-27 삼성전기주식회사 광변조기 및 그 광변조기를 이용한 프로젝터를 구비한휴대용 단말기
KR100905553B1 (ko) * 2005-06-10 2009-07-02 삼성전기주식회사 회절형 광변조기의 미러 위치 보상 장치 및 그 제어 방법
KR100859003B1 (ko) * 2005-11-01 2008-09-18 삼성전기주식회사 알루미늄 합금을 이용한 광 반사층을 갖는 광변조기 소자및 그 제조 방법
KR100781367B1 (ko) * 2005-11-01 2007-11-30 삼성전기주식회사 광반사층 상에 보호막을 갖는 광변조기 소자
DE102006057567B4 (de) * 2006-11-28 2008-09-04 Micronic Laser Systems Ab Mikrooptisches Element mit einem Substrat, an dem an einer optisch wirksamen Oberfläche mindestens eine Höhenstufe ausgebildet ist, Verfahren zu seiner Herstellung und Verwendungen
DE102006057568A1 (de) * 2006-11-28 2008-05-29 Micronic Laser Systems Ab Mikrooptisches Element mit einem Substrat und Verfahren zu seiner Herstellung
US7698941B2 (en) * 2007-06-20 2010-04-20 Headway Technologies, Inc. Sensing unit and method of making same
NO333724B1 (no) * 2009-08-14 2013-09-02 Sintef En mikromekanisk rekke med optisk reflekterende overflater
KR102065107B1 (ko) * 2013-05-20 2020-02-12 삼성디스플레이 주식회사 무마스크 노광 장치
WO2016130996A1 (en) * 2015-02-13 2016-08-18 Airmar Technology Corporation Acoustic transducer element
US20190033500A1 (en) * 2016-04-01 2019-01-31 Intel Corporation Package-integrated piezoelectric optical grating switch array
IT202000001411A1 (it) * 2020-01-24 2021-07-24 St Microelectronics Srl Metodo di lavorazione di una fetta per la fabbricazione di una struttura oscillante quale un microspecchio

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Publication number Priority date Publication date Assignee Title
JPH0572490A (ja) 1991-09-13 1993-03-26 Nippon Telegr & Teleph Corp <Ntt> 光学装置
US5311360A (en) 1992-04-28 1994-05-10 The Board Of Trustees Of The Leland Stanford, Junior University Method and apparatus for modulating a light beam
JP2973272B2 (ja) 1994-05-10 1999-11-08 オムロン株式会社 可変光学面及び光スキャニングシステム
US5637517A (en) 1995-05-26 1997-06-10 Daewoo Electronics Co., Ltd. Method for forming array of thin film actuated mirrors
JP2924738B2 (ja) 1995-09-29 1999-07-26 オムロン株式会社 光偏向装置
TW357271B (en) * 1996-02-26 1999-05-01 Seiko Epson Corp Light regulator, display and the electronic machine
JPH09289342A (ja) 1996-04-19 1997-11-04 Sony Corp 多層型圧電アクチュエータ
FR2753565B1 (fr) 1996-09-13 1998-11-27 Thomson Csf Dispositif de commutation electrique et dispositif d'affichage utilisant ce dispositif de commutation
AUPO850597A0 (en) * 1997-08-11 1997-09-04 Silverbrook Research Pty Ltd Image processing method and apparatus (art01a)
US6060818A (en) 1998-06-02 2000-05-09 Hewlett-Packard Company SBAR structures and method of fabrication of SBAR.FBAR film processing techniques for the manufacturing of SBAR/BAR filters
US6238581B1 (en) 1998-12-18 2001-05-29 Eastman Kodak Company Process for manufacturing an electro-mechanical grating device
US6724125B2 (en) 1999-03-30 2004-04-20 Massachusetts Institute Of Technology Methods and apparatus for diffractive optical processing using an actuatable structure
GB2353410B (en) 1999-08-18 2002-04-17 Marconi Electronic Syst Ltd Electrical switches
JP3979515B2 (ja) 1999-12-28 2007-09-19 パイオニア株式会社 可変光学素子とその可変光学素子を備えたピックアップ装置並びにそのピックアップ装置を備えた情報記録再生装置
JP2002055297A (ja) 2000-08-11 2002-02-20 Ngk Insulators Ltd レーザビーム出力装置
JP2002162573A (ja) 2000-11-24 2002-06-07 Sony Corp 空間変調器及び画像表示装置
AU2002309106A1 (en) 2001-07-05 2003-02-24 International Business Machines Coporation Microsystem switches
JP3852306B2 (ja) 2001-07-06 2006-11-29 ソニー株式会社 Ｍｅｍｓ素子の製造方法、ｇｌｖデバイスの製造方法、及びレーザディスプレイの製造方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006058833A (ja) * 2004-08-19 2006-03-02 Samsung Electro Mech Co Ltd 色選別スリットを用いた光変調器の多重ビーム走査装置
WO2012004888A1 (ja) * 2010-07-09 2012-01-12 株式会社ユーテック 圧電体回折格子、プロジェクター、発光装置及び表示装置
JP5703440B2 (ja) * 2010-07-09 2015-04-22 株式会社ユーテック 圧電体回折格子、プロジェクター、発光装置及び表示装置
JP2015032587A (ja) * 2013-07-31 2015-02-16 株式会社デンソー 圧電素子およびその製造方法
JP2015007780A (ja) * 2014-07-17 2015-01-15 株式会社ユーテック 発光装置及び表示装置
JP2017219715A (ja) * 2016-06-08 2017-12-14 株式会社デンソー 半導体光デバイス、および、その製造方法

Also Published As

Publication number Publication date
EP1528038B1 (en) 2009-09-23
KR20050042442A (ko) 2005-05-09
KR100645640B1 (ko) 2006-11-15
CN1614458A (zh) 2005-05-11
DE602004023264D1 (de) 2009-11-05
US20050105157A1 (en) 2005-05-19
EP1528038A1 (en) 2005-05-04
CN1614458B (zh) 2010-05-12
US7626745B2 (en) 2009-12-01

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