CN1614458B - 衍射薄膜压电微镜及其制造方法 - Google Patents

衍射薄膜压电微镜及其制造方法 Download PDF

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Publication number
CN1614458B
CN1614458B CN2004100897386A CN200410089738A CN1614458B CN 1614458 B CN1614458 B CN 1614458B CN 2004100897386 A CN2004100897386 A CN 2004100897386A CN 200410089738 A CN200410089738 A CN 200410089738A CN 1614458 B CN1614458 B CN 1614458B
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CN
China
Prior art keywords
lower support
layer
piezoelectric
micromirror
substrate
Prior art date
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Expired - Fee Related
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CN2004100897386A
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English (en)
Chinese (zh)
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CN1614458A (zh
Inventor
尹相璟
宋钟亨
安乘道
吴旻锡
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Samsung Electro Mechanics Co Ltd
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Samsung Electro Mechanics Co Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0083—Optical properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00142—Bridges
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/37—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements
    • G09F9/372—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements the positions of the elements being controlled by the application of an electric field
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Theoretical Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Ceramic Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
CN2004100897386A 2003-11-03 2004-11-03 衍射薄膜压电微镜及其制造方法 Expired - Fee Related CN1614458B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20030077389 2003-11-03
KR10-2003-0077389 2003-11-03

Publications (2)

Publication Number Publication Date
CN1614458A CN1614458A (zh) 2005-05-11
CN1614458B true CN1614458B (zh) 2010-05-12

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CN2004100897386A Expired - Fee Related CN1614458B (zh) 2003-11-03 2004-11-03 衍射薄膜压电微镜及其制造方法

Country Status (6)

Country Link
US (1) US7626745B2 (enExample)
EP (1) EP1528038B1 (enExample)
JP (1) JP2005141208A (enExample)
KR (1) KR100645640B1 (enExample)
CN (1) CN1614458B (enExample)
DE (1) DE602004023264D1 (enExample)

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US7215461B1 (en) * 2004-09-14 2007-05-08 Silicon Light Machines Corporation MEMS devices with increased damping for suspended movable structures
KR100897671B1 (ko) * 2005-02-04 2009-05-14 삼성전기주식회사 회절형 광변조기
KR100832622B1 (ko) * 2005-05-25 2008-05-27 삼성전기주식회사 광변조기 및 그 광변조기를 이용한 프로젝터를 구비한휴대용 단말기
KR100905553B1 (ko) * 2005-06-10 2009-07-02 삼성전기주식회사 회절형 광변조기의 미러 위치 보상 장치 및 그 제어 방법
KR100859003B1 (ko) * 2005-11-01 2008-09-18 삼성전기주식회사 알루미늄 합금을 이용한 광 반사층을 갖는 광변조기 소자및 그 제조 방법
KR100781367B1 (ko) * 2005-11-01 2007-11-30 삼성전기주식회사 광반사층 상에 보호막을 갖는 광변조기 소자
DE102006057567B4 (de) * 2006-11-28 2008-09-04 Micronic Laser Systems Ab Mikrooptisches Element mit einem Substrat, an dem an einer optisch wirksamen Oberfläche mindestens eine Höhenstufe ausgebildet ist, Verfahren zu seiner Herstellung und Verwendungen
DE102006057568A1 (de) * 2006-11-28 2008-05-29 Micronic Laser Systems Ab Mikrooptisches Element mit einem Substrat und Verfahren zu seiner Herstellung
US7698941B2 (en) * 2007-06-20 2010-04-20 Headway Technologies, Inc. Sensing unit and method of making same
NO333724B1 (no) * 2009-08-14 2013-09-02 Sintef En mikromekanisk rekke med optisk reflekterende overflater
JP5703440B2 (ja) * 2010-07-09 2015-04-22 株式会社ユーテック 圧電体回折格子、プロジェクター、発光装置及び表示装置
KR102065107B1 (ko) * 2013-05-20 2020-02-12 삼성디스플레이 주식회사 무마스크 노광 장치
JP6225544B2 (ja) * 2013-07-31 2017-11-08 株式会社デンソー 圧電素子の製造方法
JP5857342B2 (ja) * 2014-07-17 2016-02-10 株式会社ユーテック 発光装置及び表示装置
WO2016130996A1 (en) * 2015-02-13 2016-08-18 Airmar Technology Corporation Acoustic transducer element
US20190033500A1 (en) * 2016-04-01 2019-01-31 Intel Corporation Package-integrated piezoelectric optical grating switch array
JP6690419B2 (ja) * 2016-06-08 2020-04-28 株式会社デンソー 半導体光デバイス、および、その製造方法
IT202000001411A1 (it) * 2020-01-24 2021-07-24 St Microelectronics Srl Metodo di lavorazione di una fetta per la fabbricazione di una struttura oscillante quale un microspecchio

Citations (1)

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CN1180417A (zh) * 1996-02-26 1998-04-29 精工爱普生株式会社 光调制装置、显示装置和电子设备

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US5311360A (en) 1992-04-28 1994-05-10 The Board Of Trustees Of The Leland Stanford, Junior University Method and apparatus for modulating a light beam
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Also Published As

Publication number Publication date
EP1528038B1 (en) 2009-09-23
KR20050042442A (ko) 2005-05-09
KR100645640B1 (ko) 2006-11-15
CN1614458A (zh) 2005-05-11
DE602004023264D1 (de) 2009-11-05
US20050105157A1 (en) 2005-05-19
EP1528038A1 (en) 2005-05-04
JP2005141208A (ja) 2005-06-02
US7626745B2 (en) 2009-12-01

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