JP6225544B2 - 圧電素子の製造方法 - Google Patents
圧電素子の製造方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims description 19
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000010409 thin film Substances 0.000 claims description 76
- 239000010408 film Substances 0.000 claims description 70
- 239000000758 substrate Substances 0.000 claims description 27
- 239000013078 crystal Substances 0.000 claims description 13
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 9
- 238000002360 preparation method Methods 0.000 claims description 7
- 238000003980 solgel method Methods 0.000 claims description 7
- 241000877463 Lanio Species 0.000 claims description 6
- 229910004121 SrRuO Inorganic materials 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229910052741 iridium Inorganic materials 0.000 claims description 2
- 229910020289 Pb(ZrxTi1-x)O3 Inorganic materials 0.000 claims 1
- 229910020273 Pb(ZrxTi1−x)O3 Inorganic materials 0.000 claims 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 21
- 238000004544 sputter deposition Methods 0.000 description 11
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 10
- 238000005240 physical vapour deposition Methods 0.000 description 8
- 125000004429 atom Chemical group 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
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- H10N30/853—Ceramic compositions
- H10N30/8548—Lead-based oxides
- H10N30/8554—Lead-zirconium titanate [PZT] based
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3578—Piezoelectric force
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- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
- H10N30/067—Forming single-layered electrodes of multilayered piezoelectric or electrostrictive parts
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/076—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition
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- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/077—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition
- H10N30/078—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition by sol-gel deposition
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- H—ELECTRICITY
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- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/079—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing using intermediate layers, e.g. for growth control
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- H10N30/706—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
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- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
- H10N30/706—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
- H10N30/708—Intermediate layers, e.g. barrier, adhesion or growth control buffer layers
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/294—Variable focal length devices
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Mechanical Optical Scanning Systems (AREA)
Description
最初に、図1を参照して、本実施形態に係る圧電素子の概略構成について説明する。
本実施形態における圧電素子100は、図7に示すように、第1実施形態の構成に加えて、下部電極20と圧電薄膜30との間に中間層50を有する。
本実施形態における圧電素子100は、図8に示すように、圧電薄膜30として、第1エピタキシャル膜31と第2エピタキシャル膜32とを有する。第1エピタキシャル膜31は、第1実施形態における圧電薄膜成膜工程と同様に、スパッタ法を用いて成膜される。一方、第2エピタキシャル膜32は、ゾルゲル法を用いて第1エピタキシャル膜31上に成膜される。
以上、本発明の好ましい実施形態について説明したが、本発明は上述した実施形態になんら制限されることなく、本発明の主旨を逸脱しない範囲において、種々変形して実施することが可能である。
Claims (7)
- 所定の面方位を一面に有する基板(10)を準備する基板準備工程と、
前記一面上に、PVDもしくはCVDを用いて、下部電極(20)を成膜する下部電極成膜工程と、
前記基板および前記下部電極を所定温度に保ちつつ、前記下部電極上に、PVDもしくはCVDを用いて、圧電体からなる圧電薄膜(30)を成膜する圧電薄膜成膜工程と、
前記圧電薄膜を変形させるために、前記下部電極との間に電圧を印加するための上部電極(40)を前記圧電薄膜上に成膜する上部電極成膜工程と、を備え、
前記基板準備工程は、Siの単結晶からなる基体(12)の(001)表面上に、γ−Al2O3からなるバッファ層(14)を、PVDもしくはCVDにより成膜する工程を有し、
前記圧電薄膜成膜工程において、前記所定温度として700℃以上を保ちつつ、前記圧電体としてPZTを主成分とする前記圧電薄膜を成膜することを特徴とする圧電素子の製造方法。 - 前記下部電極成膜工程において、PtまたはIrを用いて前記下部電極を形成することを特徴とする請求項1に記載の圧電素子の製造方法。
- 前記下部電極成膜工程の後、前記圧電薄膜成膜工程の前に、前記下部電極と前記圧電薄膜との間に、SrRuO3あるいはLaNiO3から成る中間層(50)を成膜する中間層成膜工程を有することを特徴とする請求項2に記載の圧電素子の製造方法。
- 前記下部電極成膜工程において、SrRuO3またはLaNiO3を用いて前記下部電極を形成することを特徴とする請求項1に記載の圧電素子の製造方法。
- 前記圧電体の主成分としてのPZTは、その組成式Pb(ZrxTi1−x)O3において、0.4≦x<1であることを特徴とする請求項1〜4のいずれか1項に記載の圧電素子の製造方法。
- 前記上部電極成膜工程において、前記上部電極が入射光を反射するミラー部を兼用するように、金属膜を用いて前記上部電極を形成することを特徴とする請求項1〜5のいずれか1項に記載の圧電素子の製造方法。
- 前記圧電薄膜成膜工程は、前記圧電薄膜を成膜する工程として、
PVDもしくはCVDを用いて第1エピタキシャル膜(31)を成膜する第1エピタキシャル膜成膜工程と、
ゾルゲル法を用いて前記第1エピタキシャル膜上に第2エピタキシャル膜(32)を成膜する第2エピタキシャル膜成膜工程と、を備えることを特徴とする請求項1〜6のいずれか1項に記載の圧電素子の製造方法。
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US14/327,890 US9444032B2 (en) | 2013-07-31 | 2014-07-10 | Piezoelectric element and method of producing the same |
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JP6390508B2 (ja) * | 2015-05-07 | 2018-09-19 | 株式会社デンソー | 光走査装置 |
CN107924647A (zh) * | 2015-08-07 | 2018-04-17 | 株式会社村田制作所 | 显示装置 |
US10864640B1 (en) | 2017-12-26 | 2020-12-15 | AGI Engineering, Inc. | Articulating arm programmable tank cleaning nozzle |
US11267024B2 (en) | 2018-06-11 | 2022-03-08 | AGI Engineering, Inc. | Programmable tank cleaning nozzle |
US11571723B1 (en) | 2019-03-29 | 2023-02-07 | AGI Engineering, Inc. | Mechanical dry waste excavating end effector |
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JP3047316B2 (ja) * | 1994-11-11 | 2000-05-29 | 富士ゼロックス株式会社 | エピタキシャル強誘電体薄膜素子およびその作製方法 |
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KR100645640B1 (ko) * | 2003-11-03 | 2006-11-15 | 삼성전기주식회사 | 회절형 박막 압전 마이크로 미러 및 그 제조 방법 |
JP2005294452A (ja) * | 2004-03-31 | 2005-10-20 | Fujitsu Ltd | 薄膜積層体、その薄膜積層体を用いたアクチュエータ素子、フィルター素子、強誘電体メモリ、および光偏向素子 |
US8082640B2 (en) * | 2004-08-31 | 2011-12-27 | Canon Kabushiki Kaisha | Method for manufacturing a ferroelectric member element structure |
JP4290151B2 (ja) * | 2004-08-31 | 2009-07-01 | キヤノン株式会社 | 圧電/電歪体素子構造体及び圧電/電歪体素子構造体の製造方法、並びに液体噴射ヘッドの製造方法 |
JP4299214B2 (ja) * | 2004-09-06 | 2009-07-22 | Tdk株式会社 | 電子デバイスの製造方法、電子デバイス及び圧電デバイス |
JP4240087B2 (ja) * | 2006-08-09 | 2009-03-18 | 船井電機株式会社 | 形状可変ミラーの製造方法 |
JP2008206333A (ja) | 2007-02-21 | 2008-09-04 | Funai Electric Co Ltd | 圧電薄膜デバイスおよび圧電薄膜デバイスの製造方法 |
JP5228188B2 (ja) * | 2007-03-15 | 2013-07-03 | 国立大学法人豊橋技術科学大学 | 半導体基板上の積層構造 |
WO2008111274A1 (ja) * | 2007-03-15 | 2008-09-18 | National University Corporation Toyohashi University Of Technology | 半導体基板上の積層構造 |
JP2008233405A (ja) | 2007-03-19 | 2008-10-02 | Yamagata Prefecture | 可変曲率ミラーデバイス及びその製造方法 |
JP4299360B2 (ja) * | 2007-08-21 | 2009-07-22 | 富士フイルム株式会社 | 圧電素子及びそれを用いた液体吐出装置 |
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JP5592104B2 (ja) * | 2009-02-17 | 2014-09-17 | 富士フイルム株式会社 | 圧電体膜並びにそれを備えた圧電素子及び液体吐出装置 |
JP2010238856A (ja) * | 2009-03-31 | 2010-10-21 | Tdk Corp | 圧電体素子及びジャイロセンサ |
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