JP2005109331A5 - - Google Patents

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Publication number
JP2005109331A5
JP2005109331A5 JP2003343229A JP2003343229A JP2005109331A5 JP 2005109331 A5 JP2005109331 A5 JP 2005109331A5 JP 2003343229 A JP2003343229 A JP 2003343229A JP 2003343229 A JP2003343229 A JP 2003343229A JP 2005109331 A5 JP2005109331 A5 JP 2005109331A5
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JP
Japan
Prior art keywords
temperature
guide portion
stage apparatus
bearing
movable part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003343229A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005109331A (ja
JP4510419B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2003343229A priority Critical patent/JP4510419B2/ja
Priority claimed from JP2003343229A external-priority patent/JP4510419B2/ja
Publication of JP2005109331A publication Critical patent/JP2005109331A/ja
Publication of JP2005109331A5 publication Critical patent/JP2005109331A5/ja
Application granted granted Critical
Publication of JP4510419B2 publication Critical patent/JP4510419B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003343229A 2003-10-01 2003-10-01 ステージ装置、露光装置およびデバイス製造方法 Expired - Fee Related JP4510419B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003343229A JP4510419B2 (ja) 2003-10-01 2003-10-01 ステージ装置、露光装置およびデバイス製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003343229A JP4510419B2 (ja) 2003-10-01 2003-10-01 ステージ装置、露光装置およびデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2005109331A JP2005109331A (ja) 2005-04-21
JP2005109331A5 true JP2005109331A5 (enExample) 2006-11-16
JP4510419B2 JP4510419B2 (ja) 2010-07-21

Family

ID=34537271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003343229A Expired - Fee Related JP4510419B2 (ja) 2003-10-01 2003-10-01 ステージ装置、露光装置およびデバイス製造方法

Country Status (1)

Country Link
JP (1) JP4510419B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4546881B2 (ja) * 2005-06-15 2010-09-22 住友重機械工業株式会社 温調機能付きステージ
JP2012032666A (ja) * 2010-07-30 2012-02-16 Hitachi High-Technologies Corp 露光装置、露光方法、及び表示用パネル基板の製造方法
JP7227834B2 (ja) * 2019-04-16 2023-02-22 キヤノン株式会社 基板処理装置及び物品の製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2510874B2 (ja) * 1988-01-29 1996-06-26 キヤノン株式会社 精密移動テ―ブル
JPH05203773A (ja) * 1991-07-09 1993-08-10 Nikon Corp ステ−ジ装置の調整方法、およびステ−ジ装置
JPH10127035A (ja) * 1996-10-16 1998-05-15 Canon Inc リニアモータおよびこれを用いたステージ装置ならびに露光装置
JP4088728B2 (ja) * 1998-07-09 2008-05-21 株式会社ニコン 平面モータ装置、駆動装置及び露光装置
TW439116B (en) * 1998-12-16 2001-06-07 Nippon Kogaku Kk Platen motor device and assembly method thereof, platen motor device driving method, stage device and driving method thereof, exposure device and method thereof, and device and production method thereof
JP2002118050A (ja) * 2000-10-10 2002-04-19 Canon Inc ステージ装置、露光装置、半導体デバイス製造方法、半導体製造工場、および露光装置の保守方法
JP2002217082A (ja) * 2001-01-12 2002-08-02 Nikon Corp ステージ装置及び露光装置

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