JP2005093477A - Cvdエピタキシャル成長方法 - Google Patents
Cvdエピタキシャル成長方法 Download PDFInfo
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- JP2005093477A JP2005093477A JP2003320819A JP2003320819A JP2005093477A JP 2005093477 A JP2005093477 A JP 2005093477A JP 2003320819 A JP2003320819 A JP 2003320819A JP 2003320819 A JP2003320819 A JP 2003320819A JP 2005093477 A JP2005093477 A JP 2005093477A
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- 238000000034 method Methods 0.000 title claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 73
- 239000013078 crystal Substances 0.000 claims abstract description 45
- 238000011144 upstream manufacturing Methods 0.000 claims description 28
- 238000000151 deposition Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 6
- 239000007789 gas Substances 0.000 description 76
- 238000009826 distribution Methods 0.000 description 22
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 20
- 238000005229 chemical vapour deposition Methods 0.000 description 19
- 229910010271 silicon carbide Inorganic materials 0.000 description 19
- 239000012535 impurity Substances 0.000 description 14
- 238000006243 chemical reaction Methods 0.000 description 8
- 238000004088 simulation Methods 0.000 description 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 239000012159 carrier gas Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000002076 thermal analysis method Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
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- 230000017525 heat dissipation Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
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- 238000011835 investigation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
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- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
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Abstract
【解決手段】 本発明のCVDエピタキシャル成長方法によれば、SiCのCVDエピタキシャル成長方法において、原料ガスとして、該ガス1mol中にSiをxmol含むガスを用いるに際し、該ガスの分圧を33.33/x(Pa)以上にすることを特徴とし、基板上に存在するガスの中心温度と基板温度との差が200℃以下であり、かつ、該ガスの中心温度が1300℃以上であることが好ましい。
【選択図】 図4
Description
Claims (7)
- SiCのDVDエピタキシャル成長方法において、基板上に原料ガスのクラスタを発生させ、該クラスタを熱分解することによって発生した活性種を前記基板上に沈着させることを特徴とする、CVDエピタキシャル成長方法。
- 前記原料ガスとして、該ガスの1mol中にSiをXmol含むガスを用い、該原料ガスの分圧を33.33/x(Pa)以上にすることを特徴とする、請求項1に記載のCVDエピタキシャル成長方法。
- 基板上に存在するガスの中心温度と基板温度との差が200℃以下であり、かつ、該ガスの中心温度が1300℃以上であることを特徴とする、請求項1または2に記載のCVDエピタキシャル成長方法。
- 前記ガスの中心温度は、基板に到達するまでに加熱されることによって達成されることを特徴とする、請求項3に記載のCVDエピタキシャル成長方法。
- 基板の上流側にあるガス温度と基板の下流側にあるガス温度との差が、0〜200℃の範囲内であることを特徴とする、請求項1〜4のいずれかに記載のCVDエピタキシャル成長方法。
- 基板温度を1400〜1700℃の範囲内にすることを特徴とする、請求項1〜5のいずれかに記載のCVDエピタキシャル成長方法。
- 請求項1〜6のいずれかに記載のCVDエピタキシャル成長方法によって製造された結晶成長基板。
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JP2003320819A JP4396195B2 (ja) | 2003-09-12 | 2003-09-12 | Cvdエピタキシャル成長方法 |
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JP2003320819A JP4396195B2 (ja) | 2003-09-12 | 2003-09-12 | Cvdエピタキシャル成長方法 |
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JP2005093477A true JP2005093477A (ja) | 2005-04-07 |
JP2005093477A5 JP2005093477A5 (ja) | 2006-04-13 |
JP4396195B2 JP4396195B2 (ja) | 2010-01-13 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010087518A1 (ja) * | 2009-01-30 | 2010-08-05 | 新日本製鐵株式会社 | エピタキシャル炭化珪素単結晶基板及びその製造方法 |
JP2013038152A (ja) * | 2011-08-05 | 2013-02-21 | Showa Denko Kk | エピタキシャルウェハの製造装置及び製造方法 |
JP2013038153A (ja) * | 2011-08-05 | 2013-02-21 | Showa Denko Kk | エピタキシャルウェハの製造装置及び製造方法 |
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2003
- 2003-09-12 JP JP2003320819A patent/JP4396195B2/ja not_active Expired - Lifetime
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010087518A1 (ja) * | 2009-01-30 | 2010-08-05 | 新日本製鐵株式会社 | エピタキシャル炭化珪素単結晶基板及びその製造方法 |
JP4719314B2 (ja) * | 2009-01-30 | 2011-07-06 | 新日本製鐵株式会社 | エピタキシャル炭化珪素単結晶基板及びその製造方法 |
CN102301043A (zh) * | 2009-01-30 | 2011-12-28 | 新日本制铁株式会社 | 外延碳化硅单晶基板及其制造方法 |
JPWO2010087518A1 (ja) * | 2009-01-30 | 2012-08-02 | 新日本製鐵株式会社 | エピタキシャル炭化珪素単結晶基板及びその製造方法 |
JP2013038152A (ja) * | 2011-08-05 | 2013-02-21 | Showa Denko Kk | エピタキシャルウェハの製造装置及び製造方法 |
JP2013038153A (ja) * | 2011-08-05 | 2013-02-21 | Showa Denko Kk | エピタキシャルウェハの製造装置及び製造方法 |
US9607832B2 (en) | 2011-08-05 | 2017-03-28 | Showa Denko K.K. | Epitaxial wafer manufacturing device and manufacturing method |
US9624602B2 (en) | 2011-08-05 | 2017-04-18 | Showa Denko K.K. | Epitaxial wafer manufacturing device and manufacturing method |
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