JP2004538635A5 - - Google Patents
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- JP2004538635A5 JP2004538635A5 JP2003519981A JP2003519981A JP2004538635A5 JP 2004538635 A5 JP2004538635 A5 JP 2004538635A5 JP 2003519981 A JP2003519981 A JP 2003519981A JP 2003519981 A JP2003519981 A JP 2003519981A JP 2004538635 A5 JP2004538635 A5 JP 2004538635A5
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- liquid
- ozone
- jet
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 185
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 150
- 238000000034 method Methods 0.000 claims description 103
- 238000012545 processing Methods 0.000 claims description 100
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 68
- 230000008569 process Effects 0.000 claims description 57
- 238000004140 cleaning Methods 0.000 claims description 56
- 239000000356 contaminant Substances 0.000 claims description 31
- 239000007921 spray Substances 0.000 claims description 19
- 239000007789 gas Substances 0.000 claims description 18
- 238000010438 heat treatment Methods 0.000 claims description 17
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 16
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 15
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 14
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims description 12
- 239000000908 ammonium hydroxide Substances 0.000 claims description 12
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 10
- 238000009833 condensation Methods 0.000 claims description 5
- 230000005494 condensation Effects 0.000 claims description 5
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 4
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 2
- 238000001035 drying Methods 0.000 claims description 2
- 150000008282 halocarbons Chemical class 0.000 claims description 2
- 238000011068 loading method Methods 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims 1
- 150000003839 salts Chemical class 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 61
- 239000010410 layer Substances 0.000 description 58
- 239000000126 substance Substances 0.000 description 46
- 229920002120 photoresistant polymer Polymers 0.000 description 35
- 239000012530 fluid Substances 0.000 description 33
- 239000002245 particle Substances 0.000 description 24
- 229910052751 metal Inorganic materials 0.000 description 20
- 239000002184 metal Substances 0.000 description 20
- 238000006243 chemical reaction Methods 0.000 description 18
- 239000008367 deionised water Substances 0.000 description 18
- 229910021641 deionized water Inorganic materials 0.000 description 18
- 239000000243 solution Substances 0.000 description 18
- 238000011282 treatment Methods 0.000 description 18
- 239000004065 semiconductor Substances 0.000 description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 16
- 229910052710 silicon Inorganic materials 0.000 description 16
- 239000010703 silicon Substances 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 14
- 238000013461 design Methods 0.000 description 13
- 238000009792 diffusion process Methods 0.000 description 13
- 239000000203 mixture Substances 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 238000011109 contamination Methods 0.000 description 9
- 238000003860 storage Methods 0.000 description 9
- 239000000654 additive Substances 0.000 description 8
- 230000008901 benefit Effects 0.000 description 8
- 238000005260 corrosion Methods 0.000 description 8
- 230000007797 corrosion Effects 0.000 description 8
- 230000005855 radiation Effects 0.000 description 8
- 230000002829 reductive effect Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 230000005670 electromagnetic radiation Effects 0.000 description 7
- 230000002209 hydrophobic effect Effects 0.000 description 6
- 150000002739 metals Chemical class 0.000 description 6
- 239000007800 oxidant agent Substances 0.000 description 6
- 230000001590 oxidative effect Effects 0.000 description 6
- 150000002430 hydrocarbons Chemical class 0.000 description 5
- 238000006385 ozonation reaction Methods 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- 238000005507 spraying Methods 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 239000006117 anti-reflective coating Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 229930195733 hydrocarbon Natural products 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 238000004377 microelectronic Methods 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 3
- 238000004090 dissolution Methods 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
- 238000009533 lab test Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 239000004094 surface-active agent Substances 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- 241000252506 Characiformes Species 0.000 description 2
- -1 HF or HCl Chemical class 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 230000008929 regeneration Effects 0.000 description 2
- 238000011069 regeneration method Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 1
- 239000005751 Copper oxide Substances 0.000 description 1
- 102100021765 E3 ubiquitin-protein ligase RNF139 Human genes 0.000 description 1
- 101001106970 Homo sapiens E3 ubiquitin-protein ligase RNF139 Proteins 0.000 description 1
- 101100247596 Larrea tridentata RCA2 gene Proteins 0.000 description 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000002318 adhesion promoter Substances 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000004630 atomic force microscopy Methods 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 150000001722 carbon compounds Chemical class 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000015271 coagulation Effects 0.000 description 1
- 238000005345 coagulation Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 229910000431 copper oxide Inorganic materials 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 238000005202 decontamination Methods 0.000 description 1
- 230000003588 decontaminative effect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- JEGUKCSWCFPDGT-UHFFFAOYSA-N h2o hydrate Chemical compound O.O JEGUKCSWCFPDGT-UHFFFAOYSA-N 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 230000003301 hydrolyzing effect Effects 0.000 description 1
- 230000005660 hydrophilic surface Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000006193 liquid solution Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000012457 nonaqueous media Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000003134 recirculating effect Effects 0.000 description 1
- 238000010405 reoxidation reaction Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000006557 surface reaction Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/925,884 US20020157686A1 (en) | 1997-05-09 | 2001-08-06 | Process and apparatus for treating a workpiece such as a semiconductor wafer |
| PCT/US2002/023515 WO2003015146A1 (en) | 2001-08-06 | 2002-07-23 | Process and apparatus for treating a workpiece such as a semiconductor wafer |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004538635A JP2004538635A (ja) | 2004-12-24 |
| JP2004538635A5 true JP2004538635A5 (enExample) | 2005-12-22 |
| JP3977807B2 JP3977807B2 (ja) | 2007-09-19 |
Family
ID=25452388
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003519981A Expired - Fee Related JP3977807B2 (ja) | 2001-08-06 | 2002-07-23 | 半導体ウエハなどのワークピースを取り扱う処理および装置 |
Country Status (9)
| Country | Link |
|---|---|
| US (2) | US20020157686A1 (enExample) |
| EP (1) | EP1421609B1 (enExample) |
| JP (1) | JP3977807B2 (enExample) |
| KR (1) | KR20040035721A (enExample) |
| CN (1) | CN1319131C (enExample) |
| AT (1) | ATE390706T1 (enExample) |
| DE (1) | DE60225817T2 (enExample) |
| TW (1) | TW559940B (enExample) |
| WO (1) | WO2003015146A1 (enExample) |
Families Citing this family (120)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050194356A1 (en) * | 1997-05-09 | 2005-09-08 | Semitool, Inc. | Removing photoresist from a workpiece using water and ozone and a photoresist penetrating additive |
| US7404863B2 (en) * | 1997-05-09 | 2008-07-29 | Semitool, Inc. | Methods of thinning a silicon wafer using HF and ozone |
| US6758938B1 (en) * | 1999-08-31 | 2004-07-06 | Micron Technology, Inc. | Delivery of dissolved ozone |
| US6774056B2 (en) | 1999-11-10 | 2004-08-10 | Semitool, Inc. | Sonic immersion process system and methods |
| WO2002027775A1 (en) * | 2000-09-28 | 2002-04-04 | Mitsubishi Denki Kabushiki Kaisha | Method and apparatus for treating wafer |
| US20090029560A1 (en) * | 2001-12-07 | 2009-01-29 | Applied Materials, Inc. | Apparatus and method for single substrate processing |
| US6726848B2 (en) * | 2001-12-07 | 2004-04-27 | Scp Global Technologies, Inc. | Apparatus and method for single substrate processing |
| US20080000495A1 (en) * | 2001-12-07 | 2008-01-03 | Eric Hansen | Apparatus and method for single substrate processing |
| US20070079932A1 (en) * | 2001-12-07 | 2007-04-12 | Applied Materials, Inc. | Directed purge for contact free drying of wafers |
| JP3979464B2 (ja) * | 2001-12-27 | 2007-09-19 | 株式会社荏原製作所 | 無電解めっき前処理装置及び方法 |
| US6955485B2 (en) * | 2002-03-01 | 2005-10-18 | Tokyo Electron Limited | Developing method and developing unit |
| US20030192577A1 (en) * | 2002-04-11 | 2003-10-16 | Applied Materials, Inc. | Method and apparatus for wafer cleaning |
| US20030192570A1 (en) * | 2002-04-11 | 2003-10-16 | Applied Materials, Inc. | Method and apparatus for wafer cleaning |
| US6848455B1 (en) * | 2002-04-22 | 2005-02-01 | Novellus Systems, Inc. | Method and apparatus for removing photoresist and post-etch residue from semiconductor substrates by in-situ generation of oxidizing species |
| US20040159335A1 (en) * | 2002-05-17 | 2004-08-19 | P.C.T. Systems, Inc. | Method and apparatus for removing organic layers |
| WO2004021420A2 (en) * | 2002-08-29 | 2004-03-11 | Massachusetts Institute Of Technology | Fabrication method for a monocrystalline semiconductor layer on a substrate |
| JPWO2004027849A1 (ja) * | 2002-09-20 | 2006-01-19 | 株式会社日立国際電気 | 半導体装置の製造方法および基板処理装置 |
| EP1408534B1 (en) * | 2002-10-11 | 2007-02-07 | S.O.I. Tec Silicon on Insulator Technologies S.A. | A method and a device for producing an adhesive surface of a substrate |
| US7022193B2 (en) * | 2002-10-29 | 2006-04-04 | In Kwon Jeong | Apparatus and method for treating surfaces of semiconductor wafers using ozone |
| US7163018B2 (en) * | 2002-12-16 | 2007-01-16 | Applied Materials, Inc. | Single wafer cleaning method to reduce particle defects on a wafer surface |
| US6933733B2 (en) | 2003-03-14 | 2005-08-23 | Steris Inc. | Method and apparatus for measuring the concentration of hydrogen peroxide in a fluid |
| US6897661B2 (en) * | 2003-03-14 | 2005-05-24 | Steris Inc. | Method and apparatus for detection of contaminants in a fluid |
| US6992494B2 (en) * | 2003-03-14 | 2006-01-31 | Steris Inc. | Method and apparatus for monitoring the purity and/or quality of steam |
| US6946852B2 (en) * | 2003-03-14 | 2005-09-20 | Steris Inc. | Method and apparatus for measuring concentration of a chemical component in a gas mixture |
| US6930493B2 (en) * | 2003-03-14 | 2005-08-16 | Steris Inc. | Method and apparatus for monitoring detergent concentration in a decontamination process |
| US6927582B2 (en) * | 2003-03-14 | 2005-08-09 | Steris Inc. | Method and apparatus for monitoring the state of a chemical solution for decontamination of chemical and biological warfare agents |
| US6960921B2 (en) | 2003-03-14 | 2005-11-01 | Steris Inc. | Method and apparatus for real time monitoring of metallic cation concentrations in a solution |
| WO2004112093A2 (en) | 2003-06-06 | 2004-12-23 | P.C.T. Systems, Inc. | Method and apparatus to process substrates with megasonic energy |
| US6909972B2 (en) * | 2003-06-06 | 2005-06-21 | Steris Inc. | Method and apparatus for formulating and controlling chemical concentrations in a solution |
| US6917885B2 (en) * | 2003-06-06 | 2005-07-12 | Steris Inc. | Method and apparatus for formulating and controlling chemical concentration in a gas mixture |
| TWI377453B (en) * | 2003-07-31 | 2012-11-21 | Akrion Technologies Inc | Process sequence for photoresist stripping and/or cleaning of photomasks for integrated circuit manufacturing |
| JPWO2005059976A1 (ja) * | 2003-12-18 | 2007-07-12 | 東京エレクトロン株式会社 | 基板処理方法、基板処理装置およびコンピュータ読み取り可能な記録媒体 |
| TWI282586B (en) * | 2004-02-24 | 2007-06-11 | Innolux Display Corp | Etching system and de-ion water adding set |
| SE0400551L (sv) * | 2004-03-08 | 2005-06-07 | Scania Cv Abp | Förfarande och anordning för konditionering av ett föremål |
| US7337663B2 (en) * | 2004-03-12 | 2008-03-04 | Semitool, Inc. | Sonic energy process chamber |
| FR2868599B1 (fr) * | 2004-03-30 | 2006-07-07 | Soitec Silicon On Insulator | Traitement chimique optimise de type sc1 pour le nettoyage de plaquettes en materiau semiconducteur |
| US7448395B2 (en) * | 2004-07-19 | 2008-11-11 | Texas Instruments Incorporated | Process method to facilitate silicidation |
| US7431886B2 (en) | 2004-09-24 | 2008-10-07 | Steris Corporation | Method of monitoring operational status of sensing devices for determining the concentration of chemical components in a fluid |
| JP4407944B2 (ja) * | 2004-12-21 | 2010-02-03 | 大日本スクリーン製造株式会社 | 基板処理装置および基板処理方法 |
| KR20060072498A (ko) * | 2004-12-23 | 2006-06-28 | 동부일렉트로닉스 주식회사 | 반도체 소자와 그의 제조방법 |
| JP4553939B2 (ja) * | 2005-06-28 | 2010-09-29 | カナン精機株式会社 | 表面改質された部材、表面処理方法および表面処理装置 |
| US20070068558A1 (en) * | 2005-09-06 | 2007-03-29 | Applied Materials, Inc. | Apparatus and methods for mask cleaning |
| JP4728402B2 (ja) | 2005-11-23 | 2011-07-20 | エフエスアイ インターナショナル インコーポレーテッド | 支持体から物質を除去する方法 |
| KR101079323B1 (ko) | 2005-12-21 | 2011-11-04 | 주식회사 엘지실트론 | 오존을 이용한 웨이퍼 세정 시스템 |
| SG154438A1 (en) * | 2005-12-30 | 2009-08-28 | Lam Res Corp | Cleaning compound and method and system for using the cleaning compound |
| US8480810B2 (en) * | 2005-12-30 | 2013-07-09 | Lam Research Corporation | Method and apparatus for particle removal |
| US7849916B2 (en) * | 2006-02-02 | 2010-12-14 | Noah Precision, Llc | Temperature control apparatus and method |
| CN101389415A (zh) * | 2006-02-22 | 2009-03-18 | 赛迈有限公司 | 单侧工件处理 |
| GB2436453A (en) * | 2006-03-24 | 2007-09-26 | Mecwash Systems Ltd | An aqueous washing system and method |
| US20080029123A1 (en) * | 2006-08-02 | 2008-02-07 | Brian Aegerter | Sonic and chemical wafer processor |
| US20080057678A1 (en) * | 2006-08-31 | 2008-03-06 | Kishor Purushottam Gadkaree | Semiconductor on glass insulator made using improved hydrogen reduction process |
| US20080060683A1 (en) * | 2006-09-08 | 2008-03-13 | Arvidson Aaron W | Apparatus and methods for cleaning a wafer edge |
| US8741066B2 (en) | 2007-02-16 | 2014-06-03 | Akrion Systems, Llc | Method for cleaning substrates utilizing surface passivation and/or oxide layer growth to protect from pitting |
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2002
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- 2002-07-23 DE DE60225817T patent/DE60225817T2/de not_active Expired - Lifetime
- 2002-07-23 CN CNB028154878A patent/CN1319131C/zh not_active Expired - Fee Related
- 2002-07-23 WO PCT/US2002/023515 patent/WO2003015146A1/en not_active Ceased
- 2002-07-23 KR KR10-2004-7001913A patent/KR20040035721A/ko not_active Abandoned
- 2002-07-23 EP EP02750283A patent/EP1421609B1/en not_active Expired - Lifetime
- 2002-07-23 AT AT02750283T patent/ATE390706T1/de active
- 2002-08-05 TW TW091117558A patent/TW559940B/zh not_active IP Right Cessation
-
2003
- 2003-11-25 US US10/721,495 patent/US20040103919A1/en not_active Abandoned
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