JP2004531061A5 - - Google Patents

Download PDF

Info

Publication number
JP2004531061A5
JP2004531061A5 JP2002586378A JP2002586378A JP2004531061A5 JP 2004531061 A5 JP2004531061 A5 JP 2004531061A5 JP 2002586378 A JP2002586378 A JP 2002586378A JP 2002586378 A JP2002586378 A JP 2002586378A JP 2004531061 A5 JP2004531061 A5 JP 2004531061A5
Authority
JP
Japan
Prior art keywords
electronic component
composite structure
separating
structure according
adhesive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002586378A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004531061A (ja
Filing date
Publication date
Priority claimed from DE10117880A external-priority patent/DE10117880B4/de
Application filed filed Critical
Publication of JP2004531061A publication Critical patent/JP2004531061A/ja
Publication of JP2004531061A5 publication Critical patent/JP2004531061A5/ja
Pending legal-status Critical Current

Links

JP2002586378A 2001-04-10 2002-04-10 複合体から電子部品を分割する方法 Pending JP2004531061A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10117880A DE10117880B4 (de) 2001-04-10 2001-04-10 Verfahren zum Vereinzeln von elektronischen Bauteilen aus einem Verbund
PCT/EP2002/004001 WO2002089176A2 (de) 2001-04-10 2002-04-10 Verfahren zum vereinzeln von elektronischen bauteilen aus einem verbund

Publications (2)

Publication Number Publication Date
JP2004531061A JP2004531061A (ja) 2004-10-07
JP2004531061A5 true JP2004531061A5 (enExample) 2005-07-28

Family

ID=7681089

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002586378A Pending JP2004531061A (ja) 2001-04-10 2002-04-10 複合体から電子部品を分割する方法

Country Status (5)

Country Link
US (1) US20050164472A1 (enExample)
EP (1) EP1419524A2 (enExample)
JP (1) JP2004531061A (enExample)
DE (1) DE10117880B4 (enExample)
WO (1) WO2002089176A2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10323857A1 (de) 2003-05-26 2005-01-27 Osram Opto Semiconductors Gmbh Gehäuse für ein Laserdiodenbauelement, Laserdiodenbauelement und Verfahren zum Herstellen eines Laserdiodenbauelements
JP2005019571A (ja) * 2003-06-24 2005-01-20 Canon Inc チップの実装方法及び実装基板の製造装置
DE10334576B4 (de) * 2003-07-28 2007-04-05 Infineon Technologies Ag Verfahren zum Herstellen eines Halbleiterbauelements mit einem Kunststoffgehäuse
CN102422406B (zh) * 2009-05-06 2014-07-09 康宁股份有限公司 用于玻璃基片的支承件
DE102009035099B4 (de) * 2009-07-29 2017-09-28 Asm Assembly Systems Gmbh & Co. Kg Vorrichtung und Verfahren zum Abheben von Bauteilen von einem Träger
EP2434528A1 (en) 2010-09-28 2012-03-28 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO An active carrier for carrying a wafer and method for release
DE102016001602A1 (de) 2016-02-11 2017-08-17 Mühlbauer Gmbh & Co. Kg Vorrichtung und Verfahren zum Lösen auf einem Substral bereitgestellter elektronischer Bauteile mittels einer Strahlenquelle
DE102023109165B4 (de) 2023-04-12 2025-10-09 Infineon Technologies Ag Verfahren und Apparatur zum Lösen einer haftfähigen Basisstruktur zum Ablösen einer elektronischen Komponente

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2492164B1 (fr) * 1980-10-15 1987-01-23 Radiotechnique Compelec Procede de realisation simultanee de liaisons electriques multiples, notamment pour le raccordement electrique d'une micro-plaquette de semiconducteurs
JPS62267384A (ja) * 1986-05-15 1987-11-20 Sun A Chem Ind Co Ltd ダイシングテ−プ
JPS6351273A (ja) * 1986-08-19 1988-03-04 Mitsubishi Electric Corp 半導体基板の切り出し用テ−プ接着方法およびその装置
JPH067571B2 (ja) * 1988-07-28 1994-01-26 株式会社東芝 半導体チップの剥離装置
US4934582A (en) * 1989-09-20 1990-06-19 Microelectronics And Computer Technology Corporation Method and apparatus for removing solder mounted electronic components
JPH0492450A (ja) * 1990-08-08 1992-03-25 Sumitomo Electric Ind Ltd チップ状部品のピックアップ方法及びその装置
US5072874A (en) * 1991-01-31 1991-12-17 Microelectronics And Computer Technology Corporation Method and apparatus for using desoldering material
JPH04336448A (ja) * 1991-05-13 1992-11-24 Oki Electric Ind Co Ltd 半導体装置の製造方法
JP3217539B2 (ja) * 1993-04-30 2001-10-09 キヤノン株式会社 多色画像形成装置
DE19850873A1 (de) * 1998-11-05 2000-05-11 Philips Corp Intellectual Pty Verfahren zum Bearbeiten eines Erzeugnisses der Halbleitertechnik
DE19921230B4 (de) * 1999-05-07 2009-04-02 Giesecke & Devrient Gmbh Verfahren zum Handhaben von gedünnten Chips zum Einbringen in Chipkarten
DE19962763C2 (de) * 1999-07-01 2001-07-26 Fraunhofer Ges Forschung Verfahren zum Vereinzeln eines Wafers

Similar Documents

Publication Publication Date Title
US7202107B2 (en) Method for producing a semiconductor component with a plastic housing and carrier plate for performing the method
TWI239606B (en) Heat spreader and semiconductor device and package using the same
TW200503235A (en) Semiconductor device and method of manufacturing semiconductor device
US20080237844A1 (en) Microelectronic package and method of manufacturing same
WO2015064430A1 (ja) 積層体、絶縁性冷却板、パワーモジュールおよび積層体の製造方法
JP2006066899A5 (enExample)
TW200727446A (en) Stack type semiconductor device manufacturing method and stack type electronic component manufacturing method
JP2005109043A (ja) エキスパンド方法
JP2013505559A (ja) ウエハにチップを結合する方法
JP2004531061A5 (enExample)
TWI256112B (en) Dicing film having shrinkage release film and method of manufacturing semiconductor package using the same
CN114630746B (zh) 用于接合热塑性膜与金属构件的方法
JP7507921B2 (ja) 焼結準備済み銀フィルム
KR102361626B1 (ko) 세라믹 dbc 기판 및 그 제조 방법
US20050164472A1 (en) Method for separating electronic components from a composite
JP2009004609A5 (enExample)
TW200417101A (en) Carrier, holder, laser cutting device and method for separating semiconductor products using laser light
JP2006278520A5 (enExample)
TWI902086B (zh) 扇出型封裝體的製備方法
JP2006114636A (ja) 半導体装置の製造方法及び半導体装置
JP7289247B2 (ja) チップの製造方法
TW530399B (en) Method using releasing film for heating and curing IC substrate and the leaving-mold film structure
KR102729281B1 (ko) 방열 기판 및 그 제조 방법
JP5962705B2 (ja) 半導体装置の製造方法
JPH10233475A (ja) シリコンウェハーと炭素材との複合材