JP2004511414A5 - - Google Patents

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Publication number
JP2004511414A5
JP2004511414A5 JP2002535847A JP2002535847A JP2004511414A5 JP 2004511414 A5 JP2004511414 A5 JP 2004511414A5 JP 2002535847 A JP2002535847 A JP 2002535847A JP 2002535847 A JP2002535847 A JP 2002535847A JP 2004511414 A5 JP2004511414 A5 JP 2004511414A5
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JP
Japan
Prior art keywords
glass material
mirror
create
blank
top surface
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JP2002535847A
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English (en)
Japanese (ja)
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JP5142444B2 (ja
JP2004511414A (ja
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Priority claimed from PCT/US2001/029100 external-priority patent/WO2002032622A1/en
Publication of JP2004511414A publication Critical patent/JP2004511414A/ja
Publication of JP2004511414A5 publication Critical patent/JP2004511414A5/ja
Application granted granted Critical
Publication of JP5142444B2 publication Critical patent/JP5142444B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2002535847A 2000-10-13 2001-09-18 Ｅｕｖリソグラフィミラーにおいて脈理を回避する方法 Expired - Lifetime JP5142444B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US24030300P 2000-10-13 2000-10-13
US60/240,303 2000-10-13
PCT/US2001/029100 WO2002032622A1 (en) 2000-10-13 2001-09-18 A method to avoid striae in euv lithography mirrors

Publications (3)

Publication Number Publication Date
JP2004511414A JP2004511414A (ja) 2004-04-15
JP2004511414A5 true JP2004511414A5 (enExample) 2008-07-24
JP5142444B2 JP5142444B2 (ja) 2013-02-13

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Family Applications (1)

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JP2002535847A Expired - Lifetime JP5142444B2 (ja) 2000-10-13 2001-09-18 Ｅｕｖリソグラフィミラーにおいて脈理を回避する方法

Country Status (4)

Country Link
US (1) US6776006B2 (enExample)
EP (1) EP1324857A4 (enExample)
JP (1) JP5142444B2 (enExample)
WO (1) WO2002032622A1 (enExample)

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JP6241276B2 (ja) 2013-01-22 2017-12-06 信越化学工業株式会社 Ｅｕｖリソグラフィ用部材の製造方法
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CN103949952B (zh) * 2014-02-26 2016-04-13 四川欧瑞特光电科技有限公司 一种大外径变形镜主镜的加工方法
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