JP2004505433A - 製品歩留まり予測用のシステムおよび方法 - Google Patents

製品歩留まり予測用のシステムおよび方法 Download PDF

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Publication number
JP2004505433A
JP2004505433A JP2001537527A JP2001537527A JP2004505433A JP 2004505433 A JP2004505433 A JP 2004505433A JP 2001537527 A JP2001537527 A JP 2001537527A JP 2001537527 A JP2001537527 A JP 2001537527A JP 2004505433 A JP2004505433 A JP 2004505433A
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Japan
Prior art keywords
layout
yield
characterization
vehicle
characterization vehicle
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Pending
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JP2001537527A
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English (en)
Japanese (ja)
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JP2004505433A5 (enExample
Inventor
ブライアン　イー　スタイン
ジヤン　カイバリアン
カイモン　マイケルズ
ジヨー　デイビス
ピー　ケイ　モザンダー
シエリー　リー
クリストフアー　ヘス
ラーグ　ウエイランド
デニス　ジエイ　サイプリツカス
デイビツド　エム　スタシヤウアー
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PDF Solutions Inc
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PDF Solutions Inc
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Publication of JP2004505433A publication Critical patent/JP2004505433A/ja
Publication of JP2004505433A5 publication Critical patent/JP2004505433A5/ja
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B15/00—Systems controlled by a computer
    • G05B15/02—Systems controlled by a computer electric
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00—Computer-aided design [CAD]
    • G06F30/30—Circuit design
    • G06F30/39—Circuit design at the physical level
    • G06F30/398—Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • H01L22/34—Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Theoretical Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Evolutionary Computation (AREA)
  • Geometry (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP2001537527A 1999-11-18 2000-11-17 製品歩留まり予測用のシステムおよび方法 Pending JP2004505433A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/442,699 US6449749B1 (en) 1999-11-18 1999-11-18 System and method for product yield prediction
PCT/US2000/031665 WO2001035718A2 (en) 1999-11-18 2000-11-17 System and method for product yield prediction

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007095740A Division JP2007201497A (ja) 1999-11-18 2007-03-30 製品歩留まり予測用のシステムおよび方法

Publications (2)

Publication Number Publication Date
JP2004505433A true JP2004505433A (ja) 2004-02-19
JP2004505433A5 JP2004505433A5 (enExample) 2007-06-07

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JP2001537527A Pending JP2004505433A (ja) 1999-11-18 2000-11-17 製品歩留まり予測用のシステムおよび方法
JP2007095740A Pending JP2007201497A (ja) 1999-11-18 2007-03-30 製品歩留まり予測用のシステムおよび方法

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JP2007095740A Pending JP2007201497A (ja) 1999-11-18 2007-03-30 製品歩留まり予測用のシステムおよび方法

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US (6) US6449749B1 (enExample)
EP (1) EP1384179A4 (enExample)
JP (2) JP2004505433A (enExample)
CN (2) CN100336063C (enExample)
AU (1) AU1774401A (enExample)
WO (2) WO2001037150A1 (enExample)

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