JP2004503769A5 - - Google Patents

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Publication number
JP2004503769A5
JP2004503769A5 JP2002510916A JP2002510916A JP2004503769A5 JP 2004503769 A5 JP2004503769 A5 JP 2004503769A5 JP 2002510916 A JP2002510916 A JP 2002510916A JP 2002510916 A JP2002510916 A JP 2002510916A JP 2004503769 A5 JP2004503769 A5 JP 2004503769A5
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JP
Japan
Prior art keywords
edge portion
holder
contact
support
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002510916A
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English (en)
Japanese (ja)
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JP2004503769A (ja
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Publication date
Priority claimed from DE2000128569 external-priority patent/DE10028569A1/de
Application filed filed Critical
Publication of JP2004503769A publication Critical patent/JP2004503769A/ja
Publication of JP2004503769A5 publication Critical patent/JP2004503769A5/ja
Pending legal-status Critical Current

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JP2002510916A 2000-06-09 2001-05-10 ディスク形状物体の位置決め装置 Pending JP2004503769A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2000128569 DE10028569A1 (de) 2000-06-09 2000-06-09 Vorrichtung zum Positionieren scheibenförmiger Objekte
PCT/US2001/015193 WO2001096836A1 (en) 2000-06-09 2001-05-10 Device for positioning disk-shaped objects

Publications (2)

Publication Number Publication Date
JP2004503769A JP2004503769A (ja) 2004-02-05
JP2004503769A5 true JP2004503769A5 (enrdf_load_stackoverflow) 2005-02-24

Family

ID=7645228

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002510916A Pending JP2004503769A (ja) 2000-06-09 2001-05-10 ディスク形状物体の位置決め装置

Country Status (5)

Country Link
EP (1) EP1311826A1 (enrdf_load_stackoverflow)
JP (1) JP2004503769A (enrdf_load_stackoverflow)
AU (1) AU2001263048A1 (enrdf_load_stackoverflow)
DE (1) DE10028569A1 (enrdf_load_stackoverflow)
WO (1) WO2001096836A1 (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10160521B4 (de) * 2001-12-05 2004-09-30 HSEB Heinze & Süllau Entwicklungsbüro Dresden GmbH Positioniereinrichtungen für Halbleiterobjekte
DE102004017114B4 (de) * 2004-04-07 2012-03-15 Integrated Dynamics Engineering Gmbh Vorrichtung zur Handhabung eines scheibenartigen Elements, insbesondere zur Handhabung eines Wafers
GB0423399D0 (en) * 2004-10-22 2004-11-24 Hamilton & Royce Ltd Display device
DE102005035199A1 (de) 2005-07-27 2007-02-08 Mattson Thermal Products Gmbh Verfahren zum Ermitteln der Ist-Lage einer Drehachse eines Transportmechanismus
JP6024046B2 (ja) * 2012-04-24 2016-11-09 アテル株式会社 マクロ観察装置
KR101654844B1 (ko) * 2016-02-12 2016-09-06 (주)삼영엠아이텍 링형 검사대상물의 x-ray 검사용 지그장치
KR102003729B1 (ko) * 2017-11-15 2019-07-29 주식회사 고영테크놀러지 검사 장치
CN114054397B (zh) * 2021-11-26 2023-07-07 山东融跃肉制品有限公司 一种猪头清洗传送装置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0719815B2 (ja) * 1987-05-29 1995-03-06 東京エレクトロン株式会社 ウエハプローバ
JP3107310B2 (ja) * 1988-11-30 2000-11-06 東京エレクトロン株式会社 処理装置
DE3919611A1 (de) * 1989-06-15 1990-12-20 Wacker Chemitronic Haltevorrichtung zur aufnahme von scheibenfoermigen gegenstaenden, insbesondere halbleiterscheiben, und verfahren zu deren behandlung
US5096291A (en) * 1990-05-16 1992-03-17 Irvine Optical Corporation Inspection systems having rotating motion
JPH04372150A (ja) * 1991-06-20 1992-12-25 Toshiba Corp ウェーハシールリング着脱装置
US5372612A (en) * 1993-06-28 1994-12-13 Motorola, Inc. Semiconductor material contacting member
JP3757430B2 (ja) * 1994-02-22 2006-03-22 株式会社ニコン 基板の位置決め装置及び露光装置
US5880828A (en) * 1996-07-26 1999-03-09 Hitachi Electronics Engineering Co., Ltd. Surface defect inspection device and shading correction method therefor
US5955858A (en) * 1997-02-14 1999-09-21 Applied Materials, Inc. Mechanically clamping robot wrist
JPH10247680A (ja) * 1997-03-04 1998-09-14 Tokyo Electron Ltd 高温炉への搬送用フォークおよび熱処理装置
JPH11142126A (ja) * 1997-04-15 1999-05-28 Matsushita Seiki Kk フォトマスク等の表面検査装置
JPH1197515A (ja) * 1997-09-22 1999-04-09 Toshiba Corp ウエハ支持用回転テーブル
JP2991697B1 (ja) * 1998-07-10 1999-12-20 株式会社ニデック ウェーハ検査装置
JP3298001B2 (ja) * 1998-07-27 2002-07-02 株式会社スーパーシリコン研究所 エピタキシャル成長炉
US6204917B1 (en) * 1998-09-22 2001-03-20 Kla-Tencor Corporation Backside contamination inspection device
US6143147A (en) * 1998-10-30 2000-11-07 Tokyo Electron Limited Wafer holding assembly and wafer processing apparatus having said assembly
AU2041000A (en) * 1998-12-02 2000-06-19 Kensington Laboratories, Inc. Specimen holding robotic arm end effector

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