AU2001263048A1 - Device for positioning disk-shaped objects - Google Patents

Device for positioning disk-shaped objects

Info

Publication number
AU2001263048A1
AU2001263048A1 AU2001263048A AU6304801A AU2001263048A1 AU 2001263048 A1 AU2001263048 A1 AU 2001263048A1 AU 2001263048 A AU2001263048 A AU 2001263048A AU 6304801 A AU6304801 A AU 6304801A AU 2001263048 A1 AU2001263048 A1 AU 2001263048A1
Authority
AU
Australia
Prior art keywords
positioning disk
shaped objects
objects
shaped
disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001263048A
Other languages
English (en)
Inventor
Manfred Heinze
Steffen Kruger
Bjorn Zimmer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brooks Automation GmbH
Original Assignee
Brooks Automation GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brooks Automation GmbH filed Critical Brooks Automation GmbH
Publication of AU2001263048A1 publication Critical patent/AU2001263048A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
AU2001263048A 2000-06-09 2001-05-10 Device for positioning disk-shaped objects Abandoned AU2001263048A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE2000128569 DE10028569A1 (de) 2000-06-09 2000-06-09 Vorrichtung zum Positionieren scheibenförmiger Objekte
DE10028569 2000-06-09
PCT/US2001/015193 WO2001096836A1 (en) 2000-06-09 2001-05-10 Device for positioning disk-shaped objects

Publications (1)

Publication Number Publication Date
AU2001263048A1 true AU2001263048A1 (en) 2001-12-24

Family

ID=7645228

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001263048A Abandoned AU2001263048A1 (en) 2000-06-09 2001-05-10 Device for positioning disk-shaped objects

Country Status (5)

Country Link
EP (1) EP1311826A1 (enrdf_load_stackoverflow)
JP (1) JP2004503769A (enrdf_load_stackoverflow)
AU (1) AU2001263048A1 (enrdf_load_stackoverflow)
DE (1) DE10028569A1 (enrdf_load_stackoverflow)
WO (1) WO2001096836A1 (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10160521B4 (de) * 2001-12-05 2004-09-30 HSEB Heinze & Süllau Entwicklungsbüro Dresden GmbH Positioniereinrichtungen für Halbleiterobjekte
DE102004017114B4 (de) * 2004-04-07 2012-03-15 Integrated Dynamics Engineering Gmbh Vorrichtung zur Handhabung eines scheibenartigen Elements, insbesondere zur Handhabung eines Wafers
GB0423399D0 (en) * 2004-10-22 2004-11-24 Hamilton & Royce Ltd Display device
DE102005035199A1 (de) 2005-07-27 2007-02-08 Mattson Thermal Products Gmbh Verfahren zum Ermitteln der Ist-Lage einer Drehachse eines Transportmechanismus
JP6024046B2 (ja) * 2012-04-24 2016-11-09 アテル株式会社 マクロ観察装置
KR101654844B1 (ko) * 2016-02-12 2016-09-06 (주)삼영엠아이텍 링형 검사대상물의 x-ray 검사용 지그장치
KR102003729B1 (ko) * 2017-11-15 2019-07-29 주식회사 고영테크놀러지 검사 장치
CN114054397B (zh) * 2021-11-26 2023-07-07 山东融跃肉制品有限公司 一种猪头清洗传送装置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0719815B2 (ja) * 1987-05-29 1995-03-06 東京エレクトロン株式会社 ウエハプローバ
JP3107310B2 (ja) * 1988-11-30 2000-11-06 東京エレクトロン株式会社 処理装置
DE3919611A1 (de) * 1989-06-15 1990-12-20 Wacker Chemitronic Haltevorrichtung zur aufnahme von scheibenfoermigen gegenstaenden, insbesondere halbleiterscheiben, und verfahren zu deren behandlung
US5096291A (en) * 1990-05-16 1992-03-17 Irvine Optical Corporation Inspection systems having rotating motion
JPH04372150A (ja) * 1991-06-20 1992-12-25 Toshiba Corp ウェーハシールリング着脱装置
US5372612A (en) * 1993-06-28 1994-12-13 Motorola, Inc. Semiconductor material contacting member
JP3757430B2 (ja) * 1994-02-22 2006-03-22 株式会社ニコン 基板の位置決め装置及び露光装置
US5880828A (en) * 1996-07-26 1999-03-09 Hitachi Electronics Engineering Co., Ltd. Surface defect inspection device and shading correction method therefor
US5955858A (en) * 1997-02-14 1999-09-21 Applied Materials, Inc. Mechanically clamping robot wrist
JPH10247680A (ja) * 1997-03-04 1998-09-14 Tokyo Electron Ltd 高温炉への搬送用フォークおよび熱処理装置
JPH11142126A (ja) * 1997-04-15 1999-05-28 Matsushita Seiki Kk フォトマスク等の表面検査装置
JPH1197515A (ja) * 1997-09-22 1999-04-09 Toshiba Corp ウエハ支持用回転テーブル
JP2991697B1 (ja) * 1998-07-10 1999-12-20 株式会社ニデック ウェーハ検査装置
JP3298001B2 (ja) * 1998-07-27 2002-07-02 株式会社スーパーシリコン研究所 エピタキシャル成長炉
US6204917B1 (en) * 1998-09-22 2001-03-20 Kla-Tencor Corporation Backside contamination inspection device
US6143147A (en) * 1998-10-30 2000-11-07 Tokyo Electron Limited Wafer holding assembly and wafer processing apparatus having said assembly
AU2041000A (en) * 1998-12-02 2000-06-19 Kensington Laboratories, Inc. Specimen holding robotic arm end effector

Also Published As

Publication number Publication date
DE10028569A1 (de) 2001-12-13
EP1311826A1 (en) 2003-05-21
JP2004503769A (ja) 2004-02-05
WO2001096836A1 (en) 2001-12-20

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