JP2004503769A - ディスク形状物体の位置決め装置 - Google Patents

ディスク形状物体の位置決め装置 Download PDF

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Publication number
JP2004503769A
JP2004503769A JP2002510916A JP2002510916A JP2004503769A JP 2004503769 A JP2004503769 A JP 2004503769A JP 2002510916 A JP2002510916 A JP 2002510916A JP 2002510916 A JP2002510916 A JP 2002510916A JP 2004503769 A JP2004503769 A JP 2004503769A
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JP
Japan
Prior art keywords
holder
frame
shaped
fork
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002510916A
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English (en)
Japanese (ja)
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JP2004503769A5 (https=
Inventor
コニ　ジョーチム
クルーガー　ステッフェン
ツィマー　ジョーン
ヘインツ　マンフレッド
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brooks Automation Germany GmbH
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Brooks Automation Germany GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brooks Automation Germany GmbH filed Critical Brooks Automation Germany GmbH
Publication of JP2004503769A publication Critical patent/JP2004503769A/ja
Publication of JP2004503769A5 publication Critical patent/JP2004503769A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2002510916A 2000-06-09 2001-05-10 ディスク形状物体の位置決め装置 Pending JP2004503769A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10028569A DE10028569A1 (de) 2000-06-09 2000-06-09 Vorrichtung zum Positionieren scheibenförmiger Objekte
PCT/US2001/015193 WO2001096836A1 (en) 2000-06-09 2001-05-10 Device for positioning disk-shaped objects

Publications (2)

Publication Number Publication Date
JP2004503769A true JP2004503769A (ja) 2004-02-05
JP2004503769A5 JP2004503769A5 (https=) 2005-02-24

Family

ID=7645228

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002510916A Pending JP2004503769A (ja) 2000-06-09 2001-05-10 ディスク形状物体の位置決め装置

Country Status (5)

Country Link
EP (1) EP1311826A1 (https=)
JP (1) JP2004503769A (https=)
AU (1) AU2001263048A1 (https=)
DE (1) DE10028569A1 (https=)
WO (1) WO2001096836A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013228214A (ja) * 2012-04-24 2013-11-07 Atel Corp マクロ観察装置
KR101654844B1 (ko) * 2016-02-12 2016-09-06 (주)삼영엠아이텍 링형 검사대상물의 x-ray 검사용 지그장치

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10160521B4 (de) * 2001-12-05 2004-09-30 HSEB Heinze & Süllau Entwicklungsbüro Dresden GmbH Positioniereinrichtungen für Halbleiterobjekte
DE102004017114B4 (de) * 2004-04-07 2012-03-15 Integrated Dynamics Engineering Gmbh Vorrichtung zur Handhabung eines scheibenartigen Elements, insbesondere zur Handhabung eines Wafers
GB0423399D0 (en) * 2004-10-22 2004-11-24 Hamilton & Royce Ltd Display device
DE102005035199A1 (de) * 2005-07-27 2007-02-08 Mattson Thermal Products Gmbh Verfahren zum Ermitteln der Ist-Lage einer Drehachse eines Transportmechanismus
KR102003729B1 (ko) * 2017-11-15 2019-07-29 주식회사 고영테크놀러지 검사 장치
CN114054397B (zh) * 2021-11-26 2023-07-07 山东融跃肉制品有限公司 一种猪头清洗传送装置

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63299354A (ja) * 1987-05-29 1988-12-06 Tokyo Electron Ltd ウエハプローバ
JPH0325949A (ja) * 1989-06-15 1991-02-04 Wacker Chemitronic Ges Elektron Grundstoffe Mbh 薄板状の物体を受容するための保持装置および半導体ウェーハを処理する方法
JPH03101247A (ja) * 1988-11-30 1991-04-26 Tokyo Electron Ltd 処理装置
JPH04372150A (ja) * 1991-06-20 1992-12-25 Toshiba Corp ウェーハシールリング着脱装置
US5372612A (en) * 1993-06-28 1994-12-13 Motorola, Inc. Semiconductor material contacting member
JPH07288276A (ja) * 1994-02-22 1995-10-31 Nikon Corp 基板の位置決め装置
JPH10247680A (ja) * 1997-03-04 1998-09-14 Tokyo Electron Ltd 高温炉への搬送用フォークおよび熱処理装置
JPH10249782A (ja) * 1997-02-14 1998-09-22 Applied Materials Inc 機械的にクランプするロボットリスト
JPH1197515A (ja) * 1997-09-22 1999-04-09 Toshiba Corp ウエハ支持用回転テーブル
JP2000028538A (ja) * 1998-07-10 2000-01-28 Nidek Co Ltd ウェーハ検査装置
JP2000049098A (ja) * 1998-07-27 2000-02-18 Super Silicon Kenkyusho:Kk エピタキシャル成長炉
WO2000026943A1 (en) * 1998-10-30 2000-05-11 Tokyo Electron Limited Vacuum processing apparatus with low particle generating wafer holder
WO2000033359A2 (en) * 1998-12-02 2000-06-08 Kensington Laboratories, Inc. Specimen holding robotic arm end effector

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5096291A (en) * 1990-05-16 1992-03-17 Irvine Optical Corporation Inspection systems having rotating motion
US5880828A (en) * 1996-07-26 1999-03-09 Hitachi Electronics Engineering Co., Ltd. Surface defect inspection device and shading correction method therefor
JPH11142126A (ja) * 1997-04-15 1999-05-28 Matsushita Seiki Kk フォトマスク等の表面検査装置
US6204917B1 (en) * 1998-09-22 2001-03-20 Kla-Tencor Corporation Backside contamination inspection device

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63299354A (ja) * 1987-05-29 1988-12-06 Tokyo Electron Ltd ウエハプローバ
JPH03101247A (ja) * 1988-11-30 1991-04-26 Tokyo Electron Ltd 処理装置
JPH0325949A (ja) * 1989-06-15 1991-02-04 Wacker Chemitronic Ges Elektron Grundstoffe Mbh 薄板状の物体を受容するための保持装置および半導体ウェーハを処理する方法
JPH04372150A (ja) * 1991-06-20 1992-12-25 Toshiba Corp ウェーハシールリング着脱装置
US5372612A (en) * 1993-06-28 1994-12-13 Motorola, Inc. Semiconductor material contacting member
JPH07288276A (ja) * 1994-02-22 1995-10-31 Nikon Corp 基板の位置決め装置
JPH10249782A (ja) * 1997-02-14 1998-09-22 Applied Materials Inc 機械的にクランプするロボットリスト
JPH10247680A (ja) * 1997-03-04 1998-09-14 Tokyo Electron Ltd 高温炉への搬送用フォークおよび熱処理装置
JPH1197515A (ja) * 1997-09-22 1999-04-09 Toshiba Corp ウエハ支持用回転テーブル
JP2000028538A (ja) * 1998-07-10 2000-01-28 Nidek Co Ltd ウェーハ検査装置
JP2000049098A (ja) * 1998-07-27 2000-02-18 Super Silicon Kenkyusho:Kk エピタキシャル成長炉
WO2000026943A1 (en) * 1998-10-30 2000-05-11 Tokyo Electron Limited Vacuum processing apparatus with low particle generating wafer holder
WO2000033359A2 (en) * 1998-12-02 2000-06-08 Kensington Laboratories, Inc. Specimen holding robotic arm end effector

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013228214A (ja) * 2012-04-24 2013-11-07 Atel Corp マクロ観察装置
KR101654844B1 (ko) * 2016-02-12 2016-09-06 (주)삼영엠아이텍 링형 검사대상물의 x-ray 검사용 지그장치

Also Published As

Publication number Publication date
EP1311826A1 (en) 2003-05-21
WO2001096836A1 (en) 2001-12-20
AU2001263048A1 (en) 2001-12-24
DE10028569A1 (de) 2001-12-13

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