JP2004342210A5 - - Google Patents

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Publication number
JP2004342210A5
JP2004342210A5 JP2003136697A JP2003136697A JP2004342210A5 JP 2004342210 A5 JP2004342210 A5 JP 2004342210A5 JP 2003136697 A JP2003136697 A JP 2003136697A JP 2003136697 A JP2003136697 A JP 2003136697A JP 2004342210 A5 JP2004342210 A5 JP 2004342210A5
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JP
Japan
Prior art keywords
layer
patterned
forming
etching
patterning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003136697A
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English (en)
Japanese (ja)
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JP2004342210A (ja
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Publication date
Application filed filed Critical
Priority to JP2003136697A priority Critical patent/JP2004342210A/ja
Priority claimed from JP2003136697A external-priority patent/JP2004342210A/ja
Priority to US10/832,274 priority patent/US7245454B2/en
Publication of JP2004342210A publication Critical patent/JP2004342210A/ja
Publication of JP2004342210A5 publication Critical patent/JP2004342210A5/ja
Pending legal-status Critical Current

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JP2003136697A 2003-05-15 2003-05-15 垂直磁気記録用磁気ヘッドおよびその製造方法、ヘッドジンバルアセンブリならびにハードディスク装置 Pending JP2004342210A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2003136697A JP2004342210A (ja) 2003-05-15 2003-05-15 垂直磁気記録用磁気ヘッドおよびその製造方法、ヘッドジンバルアセンブリならびにハードディスク装置
US10/832,274 US7245454B2 (en) 2003-05-15 2004-04-27 Magnetic head for vertical magnetic recording including main pole layer having varying width and thickness, head gimbal assembly, and hard disk drive

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003136697A JP2004342210A (ja) 2003-05-15 2003-05-15 垂直磁気記録用磁気ヘッドおよびその製造方法、ヘッドジンバルアセンブリならびにハードディスク装置

Publications (2)

Publication Number Publication Date
JP2004342210A JP2004342210A (ja) 2004-12-02
JP2004342210A5 true JP2004342210A5 (enExample) 2005-06-09

Family

ID=33410750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003136697A Pending JP2004342210A (ja) 2003-05-15 2003-05-15 垂直磁気記録用磁気ヘッドおよびその製造方法、ヘッドジンバルアセンブリならびにハードディスク装置

Country Status (2)

Country Link
US (1) US7245454B2 (enExample)
JP (1) JP2004342210A (enExample)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7508624B1 (en) 2003-08-01 2009-03-24 Lauer Mark A Transducers for perpendicular recording with write pole tip angled toward media
JP4118246B2 (ja) * 2004-03-31 2008-07-16 Ｔｄｋ株式会社 垂直磁気記録ヘッド及びその製造方法
US7440229B2 (en) * 2004-06-18 2008-10-21 Headway Technologies, Inc. Thin-film magnetic head having a write shield layer
US7580222B2 (en) * 2004-06-18 2009-08-25 Headway Technologies, Inc. Thin-film magnetic head, a head gimbal assembly and hard disk drive
US7394621B2 (en) * 2004-06-30 2008-07-01 Headway Technologies, Inc. Using bilayer lithography process to define neck height for PMR
US7296338B2 (en) * 2004-07-30 2007-11-20 Hitachi Global Storage Technologies Netherlands B.V. Method and apparatus for providing a reverse air bearing surface head with trailing shield design for perpendicular recording
JP3892023B2 (ja) * 2004-11-05 2007-03-14 Ｔｄｋ株式会社 垂直磁気記録ヘッドおよびその製造方法、ならびに磁気記録装置
JP4711388B2 (ja) * 2004-11-10 2011-06-29 Ｔｄｋ株式会社 垂直磁気記録用磁気ヘッド、ヘッドジンバルアセンブリ、ヘッドアームアセンブリおよび磁気ディスク装置
JP2006244671A (ja) * 2005-03-07 2006-09-14 Hitachi Global Storage Technologies Netherlands Bv 磁気ヘッド及びその製造方法
KR100718127B1 (ko) * 2005-04-28 2007-05-14 삼성전자주식회사 수직 자기 기록헤드
US7375925B2 (en) 2005-05-27 2008-05-20 Headway Technologies, Inc. Magnetic head for perpendicular magnetic recording and method of manufacturing same
KR100745762B1 (ko) * 2006-02-15 2007-08-02 삼성전자주식회사 수직 자기 헤드 및 그 제조방법
JP2007294059A (ja) * 2006-04-27 2007-11-08 Hitachi Global Storage Technologies Netherlands Bv 垂直記録磁気ヘッド
JP2008287790A (ja) * 2007-05-16 2008-11-27 Tdk Corp 垂直磁気記録ヘッド
US7990652B2 (en) * 2007-12-03 2011-08-02 Hitachi Global Storage Technologies Netherlands B.V. Perpendicular magnetic write head with stepped write pole for reduced MCW dependency on skew angle
US8179636B1 (en) 2008-03-05 2012-05-15 Western Digital (Fremont), Llc Method and system for providing a perpendicular magnetic recording writer
US7883607B2 (en) * 2008-08-19 2011-02-08 International Business Machines Corporation Methods of ion milling for magnetic heads and systems formed thereby
US8233234B2 (en) * 2008-12-23 2012-07-31 Hitachi Global Storage Technologies Netherlands B.V. Stepped main pole for perpendicular write heads in hard disk drives and method of making same
US8189292B2 (en) * 2008-12-24 2012-05-29 Hitachi Global Storage Technologies Netherlands B.V. Method for manufacturing a magnetic write head having a write pole with a trailing edge taper using a Rieable hard mask
US20100155364A1 (en) * 2008-12-24 2010-06-24 Aron Pentek Magnetic write head having a stepped trailing shield and write pole with a sloped trailing edge
US20110075299A1 (en) * 2009-09-30 2011-03-31 Olson Trevor W Magnetic write heads for hard disk drives and method of forming same
US8449752B2 (en) * 2009-09-30 2013-05-28 HGST Netherlands B.V. Trailing plated step
US8724258B2 (en) * 2009-09-30 2014-05-13 HGST Netherlands B.V. Slanted bump design for magnetic shields in perpendicular write heads and method of making same
US8498078B2 (en) * 2009-12-09 2013-07-30 HGST Netherlands B.V. Magnetic head with flared write pole having multiple tapered regions
US8233235B2 (en) * 2009-12-09 2012-07-31 Hitachi Global Storage Technologies Netherlands B.V. PMR writer having a tapered write pole and bump layer and method of fabrication
US8553360B2 (en) * 2009-12-09 2013-10-08 HGST Netherlands B.V. Magnetic recording head having write pole with higher magnetic moment towards trailing edge
US8451560B2 (en) * 2009-12-09 2013-05-28 HGST Netherlands B.V. Magnetic head with flared write pole with multiple non-magnetic layers thereover
US8287748B2 (en) * 2009-12-23 2012-10-16 Headway Technologies, Inc. Method of manufacturing magnetic head for perpendicular magnetic recording
US8353098B2 (en) 2010-03-12 2013-01-15 Sae Magnetics (H.K.) Ltd. Method of manufacturing perpendicular magnetic write head
KR101391091B1 (ko) 2011-06-01 2014-04-30 제이-오일 밀스, 인코포레이티드 유지 가공 전분 및 그의 제조방법
US8804283B2 (en) * 2011-06-22 2014-08-12 Seagate Technology Llc Chamfered magnetic write pole
US8705205B1 (en) * 2011-06-27 2014-04-22 Western Digital (Fremont), Llc Magnetic recording head having a dual sidewall angle
US9478236B1 (en) 2012-09-28 2016-10-25 Western Digital (Fremont), Llc Perpendicular magnetic recording write head
US9263067B1 (en) 2013-05-29 2016-02-16 Western Digital (Fremont), Llc Process for making PMR writer with constant side wall angle
US9275657B1 (en) 2013-08-14 2016-03-01 Western Digital (Fremont), Llc Process for making PMR writer with non-conformal side gaps
US9343086B1 (en) 2013-09-11 2016-05-17 Western Digital (Fremont), Llc Magnetic recording write transducer having an improved sidewall angle profile
US9280990B1 (en) 2013-12-11 2016-03-08 Western Digital (Fremont), Llc Method for fabricating a magnetic writer using multiple etches
US9305583B1 (en) 2014-02-18 2016-04-05 Western Digital (Fremont), Llc Method for fabricating a magnetic writer using multiple etches of damascene materials
US8988825B1 (en) 2014-02-28 2015-03-24 Western Digital (Fremont, LLC Method for fabricating a magnetic writer having half-side shields

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5619513A (en) 1979-07-25 1981-02-24 Matsushita Electric Ind Co Ltd Magnetic head for vertical recording
JPS60133516A (ja) 1983-12-22 1985-07-16 Hitachi Ltd 薄膜磁気ヘツドの製造方法
DE3420746A1 (de) * 1984-06-04 1985-12-05 Siemens AG, 1000 Berlin und 8000 München Schichtweise aufgebauter magnetkopf fuer ein senkrecht zu magnetisierendes aufzeichnungsmedium
DE3513431A1 (de) * 1985-04-15 1986-10-23 Siemens AG, 1000 Berlin und 8000 München Verfahren zur herstellung mindestens eines magnetkopfes in duennfilmtechnik
JPH0693289B2 (ja) * 1986-07-22 1994-11-16 アルプス電気株式会社 垂直磁気記録用薄膜磁気ヘツド
EP0320687A1 (de) * 1987-12-11 1989-06-21 Siemens Aktiengesellschaft Dünnfilm-Magnetkopf zur vertikalen Magnetisierung
JPH03147507A (ja) 1989-11-01 1991-06-24 Fujitsu Ltd 垂直磁気薄膜ヘッドとその製造方法
KR930010862A (ko) * 1991-11-12 1993-06-23 씨릴 제이. 얀순이 좁은 요크(yoke)를 갖는 박막자기헤드
JP2001209909A (ja) 2000-01-27 2001-08-03 Hitachi Metals Ltd 記録再生分離型磁気ヘッド
JP3740361B2 (ja) 2000-10-23 2006-02-01 株式会社日立グローバルストレージテクノロジーズ 垂直記録用磁気ヘッド及びそれを搭載した磁気ディスク装置
US6710973B2 (en) 2000-09-18 2004-03-23 Hitachi, Ltd. Single pole type recording head including tapered edges
JP2002092821A (ja) 2000-09-18 2002-03-29 Hitachi Ltd 単磁極型磁気ヘッド及びそれを搭載した磁気ディスク装置
JP3875019B2 (ja) 2000-12-26 2007-01-31 アルプス電気株式会社 垂直磁気記録ヘッドおよびその製造方法
US6791793B1 (en) * 2001-09-14 2004-09-14 Western Digital (Fremont), Inc. Perpendicular recording write head having a recessed magnetic adjunct pole and method of making the same
JP3869766B2 (ja) * 2001-12-14 2007-01-17 Ｔｄｋ株式会社 垂直磁気記録ヘッドおよびその製造方法
US7002775B2 (en) * 2003-09-30 2006-02-21 Hitachi Global Storage Technologies Netherlands B.V. Head for perpendicular magnetic recording with a shield structure connected to the return pole piece
US7212379B2 (en) * 2004-03-31 2007-05-01 Hitachi Global Storage Technologies Netherlands B.V. Perpendicular magnetic recording head with flare and taper configurations

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