JP2002208110A5 - - Google Patents
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- Publication number
- JP2002208110A5 JP2002208110A5 JP2001014950A JP2001014950A JP2002208110A5 JP 2002208110 A5 JP2002208110 A5 JP 2002208110A5 JP 2001014950 A JP2001014950 A JP 2001014950A JP 2001014950 A JP2001014950 A JP 2001014950A JP 2002208110 A5 JP2002208110 A5 JP 2002208110A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- showing
- view
- mask
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001014950A JP3943337B2 (ja) | 2000-11-10 | 2001-01-23 | 薄膜磁気ヘッドの製造方法 |
| US09/985,604 US7379268B2 (en) | 2000-11-10 | 2001-11-05 | Thin-film magnetic head including non-magnetic layer for maintaining flatness of the top surface of pole portion layer |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000344507 | 2000-11-10 | ||
| JP2000343245 | 2000-11-10 | ||
| JP2000-344507 | 2000-11-10 | ||
| JP2000-343245 | 2000-11-10 | ||
| JP2001014950A JP3943337B2 (ja) | 2000-11-10 | 2001-01-23 | 薄膜磁気ヘッドの製造方法 |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004297350A Division JP2005050544A (ja) | 2000-11-10 | 2004-10-12 | 薄膜磁気ヘッドおよびその製造方法 |
| JP2004297351A Division JP2005063661A (ja) | 2000-11-10 | 2004-10-12 | 薄膜磁気ヘッドおよびその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002208110A JP2002208110A (ja) | 2002-07-26 |
| JP2002208110A5 true JP2002208110A5 (enExample) | 2004-09-30 |
| JP3943337B2 JP3943337B2 (ja) | 2007-07-11 |
Family
ID=27345163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001014950A Expired - Fee Related JP3943337B2 (ja) | 2000-11-10 | 2001-01-23 | 薄膜磁気ヘッドの製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7379268B2 (enExample) |
| JP (1) | JP3943337B2 (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020171975A1 (en) * | 2001-05-15 | 2002-11-21 | Plumer Martin L. | Writing element with no return path |
| JP2004094997A (ja) * | 2002-08-29 | 2004-03-25 | Tdk Corp | 薄膜磁気ヘッドおよびその製造方法 |
| JP2004103092A (ja) * | 2002-09-09 | 2004-04-02 | Hitachi Ltd | 垂直記録用磁気ヘッド及びその製造方法、並びに垂直記録用磁気ヘッドを搭載した磁気ディスク装置 |
| JP2005182897A (ja) * | 2003-12-18 | 2005-07-07 | Fujitsu Ltd | 薄膜磁気ヘッドおよびその製造方法 |
| US7271982B2 (en) * | 2004-02-13 | 2007-09-18 | Hitachi Global Storage Technologies Netherlands B.V. | Perpendicular magnetic recording head built using an air-bearing surface damascene process |
| US7580222B2 (en) * | 2004-06-18 | 2009-08-25 | Headway Technologies, Inc. | Thin-film magnetic head, a head gimbal assembly and hard disk drive |
| US7440229B2 (en) * | 2004-06-18 | 2008-10-21 | Headway Technologies, Inc. | Thin-film magnetic head having a write shield layer |
| US7688544B1 (en) * | 2005-05-23 | 2010-03-30 | Seagate Technology Llc | Magnetic heads disk drives and methods with floating pole tip or shunted pole tip for reduced pole tip erasure |
| JP4745829B2 (ja) * | 2006-01-04 | 2011-08-10 | ヒタチグローバルストレージテクノロジーズネザーランドビーブイ | 垂直記録用磁気ヘッドの製造方法 |
| US8325440B2 (en) * | 2007-03-26 | 2012-12-04 | Tdk Corporation | Magnetic head including a pole layer and an antireflection film sandwiched by two shields |
| US20090116152A1 (en) * | 2007-11-05 | 2009-05-07 | Wen-Chien David Hsiao | Multilayer stitched yoke for a high data rate perpendicular write head |
| US20120262824A1 (en) * | 2011-04-14 | 2012-10-18 | International Business Machines Corporation | Magnetic write head with structured trailing pole |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57189320A (en) * | 1981-05-15 | 1982-11-20 | Comput Basic Mach Technol Res Assoc | Thin film magnetic head |
| JPS59231722A (ja) * | 1983-06-13 | 1984-12-26 | Matsushita Electric Ind Co Ltd | 薄膜磁気ヘッドの製造方法 |
| US4589042A (en) * | 1983-06-27 | 1986-05-13 | International Business Machines Corporation | Composite thin film transducer head |
| JPS60133516A (ja) | 1983-12-22 | 1985-07-16 | Hitachi Ltd | 薄膜磁気ヘツドの製造方法 |
| JPH0695369B2 (ja) | 1987-02-09 | 1994-11-24 | 住友金属工業株式会社 | 垂直磁気記録再生薄膜ヘッドの製造方法 |
| JPH03252906A (ja) * | 1990-02-28 | 1991-11-12 | Sumitomo Special Metals Co Ltd | 垂直磁気記録再生薄膜ヘッド |
| JPH04137209A (ja) * | 1990-04-19 | 1992-05-12 | Sumitomo Special Metals Co Ltd | 垂直磁気記録再生用薄膜ヘッド |
| US5218499A (en) * | 1990-06-21 | 1993-06-08 | Sumitomo Special Metals Co., Ltd. | Thin-film magnetic head for perpendicular magnetic recording having a magnetic member with grooves crossing at right angles formed in a principal surface thereof |
| DE69321930T2 (de) * | 1993-01-15 | 1999-07-01 | International Business Machines Corp., Armonk, N.Y. | Geschichtete magnetische Struktur zum Gebrauch in einem Magnetkopf |
| US5872693A (en) * | 1993-08-10 | 1999-02-16 | Kabushiki Kaisha Toshiba | Thin-film magnetic head having a portion of the upper magnetic core coplanar with a portion of the lower magnetic core |
| JP3367877B2 (ja) | 1997-09-29 | 2003-01-20 | 株式会社日立製作所 | 薄膜磁気ヘッド及びその製造方法 |
| JP2000057522A (ja) * | 1998-08-06 | 2000-02-25 | Tdk Corp | 薄膜磁気ヘッド及びその製造方法 |
| US6337783B1 (en) | 1998-08-12 | 2002-01-08 | International Business Machines Corporation | Write head with multi-stitched second pole piece |
| JP2002208111A (ja) * | 2000-11-10 | 2002-07-26 | Tdk Corp | 薄膜磁気ヘッドおよびその製造方法 |
-
2001
- 2001-01-23 JP JP2001014950A patent/JP3943337B2/ja not_active Expired - Fee Related
- 2001-11-05 US US09/985,604 patent/US7379268B2/en not_active Expired - Fee Related
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