JP2002208110A5 - - Google Patents

Download PDF

Info

Publication number
JP2002208110A5
JP2002208110A5 JP2001014950A JP2001014950A JP2002208110A5 JP 2002208110 A5 JP2002208110 A5 JP 2002208110A5 JP 2001014950 A JP2001014950 A JP 2001014950A JP 2001014950 A JP2001014950 A JP 2001014950A JP 2002208110 A5 JP2002208110 A5 JP 2002208110A5
Authority
JP
Japan
Prior art keywords
layer
showing
view
mask
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001014950A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002208110A (ja
JP3943337B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001014950A priority Critical patent/JP3943337B2/ja
Priority claimed from JP2001014950A external-priority patent/JP3943337B2/ja
Priority to US09/985,604 priority patent/US7379268B2/en
Publication of JP2002208110A publication Critical patent/JP2002208110A/ja
Publication of JP2002208110A5 publication Critical patent/JP2002208110A5/ja
Application granted granted Critical
Publication of JP3943337B2 publication Critical patent/JP3943337B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2001014950A 2000-11-10 2001-01-23 薄膜磁気ヘッドの製造方法 Expired - Fee Related JP3943337B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2001014950A JP3943337B2 (ja) 2000-11-10 2001-01-23 薄膜磁気ヘッドの製造方法
US09/985,604 US7379268B2 (en) 2000-11-10 2001-11-05 Thin-film magnetic head including non-magnetic layer for maintaining flatness of the top surface of pole portion layer

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2000344507 2000-11-10
JP2000343245 2000-11-10
JP2000-344507 2000-11-10
JP2000-343245 2000-11-10
JP2001014950A JP3943337B2 (ja) 2000-11-10 2001-01-23 薄膜磁気ヘッドの製造方法

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2004297350A Division JP2005050544A (ja) 2000-11-10 2004-10-12 薄膜磁気ヘッドおよびその製造方法
JP2004297351A Division JP2005063661A (ja) 2000-11-10 2004-10-12 薄膜磁気ヘッドおよびその製造方法

Publications (3)

Publication Number Publication Date
JP2002208110A JP2002208110A (ja) 2002-07-26
JP2002208110A5 true JP2002208110A5 (enExample) 2004-09-30
JP3943337B2 JP3943337B2 (ja) 2007-07-11

Family

ID=27345163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001014950A Expired - Fee Related JP3943337B2 (ja) 2000-11-10 2001-01-23 薄膜磁気ヘッドの製造方法

Country Status (2)

Country Link
US (1) US7379268B2 (enExample)
JP (1) JP3943337B2 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020171975A1 (en) * 2001-05-15 2002-11-21 Plumer Martin L. Writing element with no return path
JP2004094997A (ja) * 2002-08-29 2004-03-25 Tdk Corp 薄膜磁気ヘッドおよびその製造方法
JP2004103092A (ja) * 2002-09-09 2004-04-02 Hitachi Ltd 垂直記録用磁気ヘッド及びその製造方法、並びに垂直記録用磁気ヘッドを搭載した磁気ディスク装置
JP2005182897A (ja) * 2003-12-18 2005-07-07 Fujitsu Ltd 薄膜磁気ヘッドおよびその製造方法
US7271982B2 (en) * 2004-02-13 2007-09-18 Hitachi Global Storage Technologies Netherlands B.V. Perpendicular magnetic recording head built using an air-bearing surface damascene process
US7580222B2 (en) * 2004-06-18 2009-08-25 Headway Technologies, Inc. Thin-film magnetic head, a head gimbal assembly and hard disk drive
US7440229B2 (en) * 2004-06-18 2008-10-21 Headway Technologies, Inc. Thin-film magnetic head having a write shield layer
US7688544B1 (en) * 2005-05-23 2010-03-30 Seagate Technology Llc Magnetic heads disk drives and methods with floating pole tip or shunted pole tip for reduced pole tip erasure
JP4745829B2 (ja) * 2006-01-04 2011-08-10 ヒタチグローバルストレージテクノロジーズネザーランドビーブイ 垂直記録用磁気ヘッドの製造方法
US8325440B2 (en) * 2007-03-26 2012-12-04 Tdk Corporation Magnetic head including a pole layer and an antireflection film sandwiched by two shields
US20090116152A1 (en) * 2007-11-05 2009-05-07 Wen-Chien David Hsiao Multilayer stitched yoke for a high data rate perpendicular write head
US20120262824A1 (en) * 2011-04-14 2012-10-18 International Business Machines Corporation Magnetic write head with structured trailing pole

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57189320A (en) * 1981-05-15 1982-11-20 Comput Basic Mach Technol Res Assoc Thin film magnetic head
JPS59231722A (ja) * 1983-06-13 1984-12-26 Matsushita Electric Ind Co Ltd 薄膜磁気ヘッドの製造方法
US4589042A (en) * 1983-06-27 1986-05-13 International Business Machines Corporation Composite thin film transducer head
JPS60133516A (ja) 1983-12-22 1985-07-16 Hitachi Ltd 薄膜磁気ヘツドの製造方法
JPH0695369B2 (ja) 1987-02-09 1994-11-24 住友金属工業株式会社 垂直磁気記録再生薄膜ヘッドの製造方法
JPH03252906A (ja) * 1990-02-28 1991-11-12 Sumitomo Special Metals Co Ltd 垂直磁気記録再生薄膜ヘッド
JPH04137209A (ja) * 1990-04-19 1992-05-12 Sumitomo Special Metals Co Ltd 垂直磁気記録再生用薄膜ヘッド
US5218499A (en) * 1990-06-21 1993-06-08 Sumitomo Special Metals Co., Ltd. Thin-film magnetic head for perpendicular magnetic recording having a magnetic member with grooves crossing at right angles formed in a principal surface thereof
DE69321930T2 (de) * 1993-01-15 1999-07-01 International Business Machines Corp., Armonk, N.Y. Geschichtete magnetische Struktur zum Gebrauch in einem Magnetkopf
US5872693A (en) * 1993-08-10 1999-02-16 Kabushiki Kaisha Toshiba Thin-film magnetic head having a portion of the upper magnetic core coplanar with a portion of the lower magnetic core
JP3367877B2 (ja) 1997-09-29 2003-01-20 株式会社日立製作所 薄膜磁気ヘッド及びその製造方法
JP2000057522A (ja) * 1998-08-06 2000-02-25 Tdk Corp 薄膜磁気ヘッド及びその製造方法
US6337783B1 (en) 1998-08-12 2002-01-08 International Business Machines Corporation Write head with multi-stitched second pole piece
JP2002208111A (ja) * 2000-11-10 2002-07-26 Tdk Corp 薄膜磁気ヘッドおよびその製造方法

Similar Documents

Publication Publication Date Title
JP2002208110A5 (enExample)
JP3875019B2 (ja) 垂直磁気記録ヘッドおよびその製造方法
US20070159719A1 (en) Thin film magnetic head and method for manufacturing the same
JP2002092821A5 (enExample)
JP2000163713A (ja) 薄膜磁気ヘッドの上部磁極層の形成方法、段差を有する表面の段差底部上に高アスペクト比微細ブロックパターンを形成する方法、並びに、薄膜磁気ヘッド
US6198600B1 (en) Thin film magnetic head and manufacturing method thereof
JP2007087506A (ja) 垂直磁気記録ヘッド及びその製造方法
WO1998044487A3 (en) Method of manufacturing a magnetic head having a structure of layers
JPH11175913A (ja) 薄膜磁気ヘッドおよびその製造方法
JP3384366B2 (ja) 薄膜磁気ヘッドの製造方法
US6901651B2 (en) Method of manufacturing thin-film magnetic head
US7167340B2 (en) Thin-film magnetic head appropriately suppressing side fringing and method for fabricating the same
US7111384B2 (en) Method for manufacturing magnetic head including coil
JPH10302219A (ja) 薄膜磁気ヘッドおよび製造方法
JPH117609A5 (enExample)
JP3831652B2 (ja) 薄膜磁気ヘッド及びその製造方法
WO2009101689A1 (ja) 磁気記録ヘッドの製造方法
EP1780044A4 (en) MAGNETIC RECORDING MEDIUM AND METHOD FOR PRODUCING A MAGNETIC RECORDING MEDIUM
JP2007149293A (ja) 薄膜磁気ヘッド
JP2007149292A (ja) 薄膜磁気ヘッド及びそのコイル形成方法
JP3919926B2 (ja) 薄膜磁気ヘッドの製造方法
CN100440318C (zh) 磁记录头及制造该磁记录头的方法
US20070109684A1 (en) Thin film magnetic head for perpendicular recording
JP3837269B2 (ja) 磁気ヘッドスライダー及びその製造方法
JP2007019288A (ja) 薄膜形成方法およびマイクロデバイスの製造方法