JP3943337B2 - 薄膜磁気ヘッドの製造方法 - Google Patents

薄膜磁気ヘッドの製造方法 Download PDF

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Publication number
JP3943337B2
JP3943337B2 JP2001014950A JP2001014950A JP3943337B2 JP 3943337 B2 JP3943337 B2 JP 3943337B2 JP 2001014950 A JP2001014950 A JP 2001014950A JP 2001014950 A JP2001014950 A JP 2001014950A JP 3943337 B2 JP3943337 B2 JP 3943337B2
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JP
Japan
Prior art keywords
layer
magnetic
thin film
pole portion
facing surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2001014950A
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English (en)
Japanese (ja)
Other versions
JP2002208110A (ja
JP2002208110A5 (enExample
Inventor
慶一 佐藤
哲也 六本木
裕一 渡部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP2001014950A priority Critical patent/JP3943337B2/ja
Priority to US09/985,604 priority patent/US7379268B2/en
Publication of JP2002208110A publication Critical patent/JP2002208110A/ja
Publication of JP2002208110A5 publication Critical patent/JP2002208110A5/ja
Application granted granted Critical
Publication of JP3943337B2 publication Critical patent/JP3943337B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/313—Disposition of layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
    • G11B5/3909—Arrangements using a magnetic tunnel junction
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3967—Composite structural arrangements of transducers, e.g. inductive write and magnetoresistive read
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B2005/3996—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects large or giant magnetoresistive effects [GMR], e.g. as generated in spin-valve [SV] devices
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/313—Disposition of layers
    • G11B5/3143—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding
    • G11B5/3146—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
    • Y10T29/49043—Depositing magnetic layer or coating
    • Y10T29/49046—Depositing magnetic layer or coating with etching or machining of magnetic material

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Magnetic Heads (AREA)
JP2001014950A 2000-11-10 2001-01-23 薄膜磁気ヘッドの製造方法 Expired - Fee Related JP3943337B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2001014950A JP3943337B2 (ja) 2000-11-10 2001-01-23 薄膜磁気ヘッドの製造方法
US09/985,604 US7379268B2 (en) 2000-11-10 2001-11-05 Thin-film magnetic head including non-magnetic layer for maintaining flatness of the top surface of pole portion layer

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2000344507 2000-11-10
JP2000343245 2000-11-10
JP2000-344507 2000-11-10
JP2000-343245 2000-11-10
JP2001014950A JP3943337B2 (ja) 2000-11-10 2001-01-23 薄膜磁気ヘッドの製造方法

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2004297350A Division JP2005050544A (ja) 2000-11-10 2004-10-12 薄膜磁気ヘッドおよびその製造方法
JP2004297351A Division JP2005063661A (ja) 2000-11-10 2004-10-12 薄膜磁気ヘッドおよびその製造方法

Publications (3)

Publication Number Publication Date
JP2002208110A JP2002208110A (ja) 2002-07-26
JP2002208110A5 JP2002208110A5 (enExample) 2004-09-30
JP3943337B2 true JP3943337B2 (ja) 2007-07-11

Family

ID=27345163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001014950A Expired - Fee Related JP3943337B2 (ja) 2000-11-10 2001-01-23 薄膜磁気ヘッドの製造方法

Country Status (2)

Country Link
US (1) US7379268B2 (enExample)
JP (1) JP3943337B2 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020171975A1 (en) * 2001-05-15 2002-11-21 Plumer Martin L. Writing element with no return path
JP2004094997A (ja) * 2002-08-29 2004-03-25 Tdk Corp 薄膜磁気ヘッドおよびその製造方法
JP2004103092A (ja) * 2002-09-09 2004-04-02 Hitachi Ltd 垂直記録用磁気ヘッド及びその製造方法、並びに垂直記録用磁気ヘッドを搭載した磁気ディスク装置
JP2005182897A (ja) * 2003-12-18 2005-07-07 Fujitsu Ltd 薄膜磁気ヘッドおよびその製造方法
US7271982B2 (en) * 2004-02-13 2007-09-18 Hitachi Global Storage Technologies Netherlands B.V. Perpendicular magnetic recording head built using an air-bearing surface damascene process
US7580222B2 (en) * 2004-06-18 2009-08-25 Headway Technologies, Inc. Thin-film magnetic head, a head gimbal assembly and hard disk drive
US7440229B2 (en) * 2004-06-18 2008-10-21 Headway Technologies, Inc. Thin-film magnetic head having a write shield layer
US7688544B1 (en) * 2005-05-23 2010-03-30 Seagate Technology Llc Magnetic heads disk drives and methods with floating pole tip or shunted pole tip for reduced pole tip erasure
JP4745829B2 (ja) * 2006-01-04 2011-08-10 ヒタチグローバルストレージテクノロジーズネザーランドビーブイ 垂直記録用磁気ヘッドの製造方法
US8325440B2 (en) * 2007-03-26 2012-12-04 Tdk Corporation Magnetic head including a pole layer and an antireflection film sandwiched by two shields
US20090116152A1 (en) * 2007-11-05 2009-05-07 Wen-Chien David Hsiao Multilayer stitched yoke for a high data rate perpendicular write head
US20120262824A1 (en) * 2011-04-14 2012-10-18 International Business Machines Corporation Magnetic write head with structured trailing pole

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57189320A (en) * 1981-05-15 1982-11-20 Comput Basic Mach Technol Res Assoc Thin film magnetic head
JPS59231722A (ja) * 1983-06-13 1984-12-26 Matsushita Electric Ind Co Ltd 薄膜磁気ヘッドの製造方法
US4589042A (en) * 1983-06-27 1986-05-13 International Business Machines Corporation Composite thin film transducer head
JPS60133516A (ja) 1983-12-22 1985-07-16 Hitachi Ltd 薄膜磁気ヘツドの製造方法
JPH0695369B2 (ja) 1987-02-09 1994-11-24 住友金属工業株式会社 垂直磁気記録再生薄膜ヘッドの製造方法
JPH03252906A (ja) * 1990-02-28 1991-11-12 Sumitomo Special Metals Co Ltd 垂直磁気記録再生薄膜ヘッド
JPH04137209A (ja) * 1990-04-19 1992-05-12 Sumitomo Special Metals Co Ltd 垂直磁気記録再生用薄膜ヘッド
US5218499A (en) * 1990-06-21 1993-06-08 Sumitomo Special Metals Co., Ltd. Thin-film magnetic head for perpendicular magnetic recording having a magnetic member with grooves crossing at right angles formed in a principal surface thereof
DE69321930T2 (de) * 1993-01-15 1999-07-01 International Business Machines Corp., Armonk, N.Y. Geschichtete magnetische Struktur zum Gebrauch in einem Magnetkopf
US5872693A (en) * 1993-08-10 1999-02-16 Kabushiki Kaisha Toshiba Thin-film magnetic head having a portion of the upper magnetic core coplanar with a portion of the lower magnetic core
JP3367877B2 (ja) 1997-09-29 2003-01-20 株式会社日立製作所 薄膜磁気ヘッド及びその製造方法
JP2000057522A (ja) * 1998-08-06 2000-02-25 Tdk Corp 薄膜磁気ヘッド及びその製造方法
US6337783B1 (en) 1998-08-12 2002-01-08 International Business Machines Corporation Write head with multi-stitched second pole piece
JP2002208111A (ja) * 2000-11-10 2002-07-26 Tdk Corp 薄膜磁気ヘッドおよびその製造方法

Also Published As

Publication number Publication date
US20020109946A1 (en) 2002-08-15
JP2002208110A (ja) 2002-07-26
US7379268B2 (en) 2008-05-27

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