JP2004139712A5 - - Google Patents
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- Publication number
- JP2004139712A5 JP2004139712A5 JP2002361117A JP2002361117A JP2004139712A5 JP 2004139712 A5 JP2004139712 A5 JP 2004139712A5 JP 2002361117 A JP2002361117 A JP 2002361117A JP 2002361117 A JP2002361117 A JP 2002361117A JP 2004139712 A5 JP2004139712 A5 JP 2004139712A5
- Authority
- JP
- Japan
- Prior art keywords
- reflective film
- information recording
- optical information
- based alloy
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000956 alloy Substances 0.000 claims 20
- 229910045601 alloy Inorganic materials 0.000 claims 20
- 230000003287 optical effect Effects 0.000 claims 13
- 229910052761 rare earth metal Inorganic materials 0.000 claims 7
- 150000002910 rare earth metals Chemical class 0.000 claims 7
- 229910052802 copper Inorganic materials 0.000 claims 2
- 229910052737 gold Inorganic materials 0.000 claims 2
- 229910052763 palladium Inorganic materials 0.000 claims 2
- 229910052697 platinum Inorganic materials 0.000 claims 2
- 229910052703 rhodium Inorganic materials 0.000 claims 2
- 238000005477 sputtering target Methods 0.000 claims 2
Priority Applications (21)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002361117A JP3655907B2 (ja) | 2002-08-20 | 2002-12-12 | 光情報記録媒体用反射膜と半透過反射膜、および光情報記録媒体 |
| US10/633,550 US7514037B2 (en) | 2002-08-08 | 2003-08-05 | AG base alloy thin film and sputtering target for forming AG base alloy thin film |
| SG200304812A SG103935A1 (en) | 2002-08-08 | 2003-08-06 | Ag base alloy thin film and sputtering target for forming ag base alloy thin film |
| TW94121903A TWI265976B (en) | 2002-08-08 | 2003-08-07 | Ag base alloy thin film and sputtering target for forming Ag base alloy thin film |
| TW92121689A TWI263689B (en) | 2002-08-08 | 2003-08-07 | Ag base alloy thin film and sputtering target for forming Ag base alloy thin film |
| DE10336228A DE10336228B4 (de) | 2002-08-08 | 2003-08-07 | Dünner Film auf Ag-Legierungsbasis, Verwendung dieses Films und Herstellungsverfahren für diesen Film |
| DE10362302.7A DE10362302B4 (de) | 2002-08-08 | 2003-08-07 | Produkt mit zur elektromagnetischen Abschirmung dienendem Film und Herstellungsverfahren dafür |
| DE10362283.7A DE10362283B4 (de) | 2002-08-08 | 2003-08-07 | Herstellungsverfahren für einen Film auf Ag-Legierungsbasis und Sputtertarget |
| CNB031274617A CN1256461C (zh) | 2002-08-08 | 2003-08-07 | Ag基合金薄膜及Ag基合金薄膜形成用溅射靶 |
| KR1020030055105A KR100605840B1 (ko) | 2002-08-08 | 2003-08-08 | Ag계 합금 박막, 및 Ag계 합금 박막 형성용 스퍼터링 타겟 |
| US11/313,815 US7419711B2 (en) | 2002-08-08 | 2005-12-22 | Ag base alloy thin film and sputtering target for forming Ag base alloy thin film |
| US11/353,168 US7566417B2 (en) | 2002-08-08 | 2006-02-14 | Ag base alloy thin film and sputtering target for forming Ag base alloy thin film |
| KR1020060017733A KR20060021939A (ko) | 2002-08-08 | 2006-02-23 | Ag계 합금 박막, 및 Ag계 합금 박막 형성용 스퍼터링타겟 |
| US11/395,227 US20060171842A1 (en) | 2002-08-08 | 2006-04-03 | Ag base alloy thin film and sputtering target for forming Ag base alloy thin film |
| US11/401,853 US7722942B2 (en) | 2002-08-08 | 2006-04-12 | Ag base alloy thin film and sputtering target for forming Ag base alloy thin film |
| US12/100,823 US7758942B2 (en) | 2002-08-08 | 2008-04-10 | Ag base alloy thin film and sputtering target for forming Ag base alloy thin film |
| KR1020080066739A KR100895759B1 (ko) | 2002-08-08 | 2008-07-09 | Ag계 합금으로 이루어진 광반사막을 구비한 액정표시 소자 |
| US12/183,700 US7871686B2 (en) | 2002-08-08 | 2008-07-31 | Ag base alloy thin film and sputtering target for forming Ag base alloy thin film |
| US12/342,507 US7776420B2 (en) | 2002-08-08 | 2008-12-23 | Ag base alloy thin film and sputtering target for forming Ag base alloy thin film |
| US12/915,138 US8178174B2 (en) | 2002-08-08 | 2010-10-29 | Ag base alloy thin film and sputtering target for forming Ag base alloy thin film |
| US13/437,350 US8936856B2 (en) | 2002-08-08 | 2012-04-02 | AG base alloy thin film and sputtering target for forming AG base alloy thin film |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002239972 | 2002-08-20 | ||
| JP2002361117A JP3655907B2 (ja) | 2002-08-20 | 2002-12-12 | 光情報記録媒体用反射膜と半透過反射膜、および光情報記録媒体 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004367547A Division JP4153484B2 (ja) | 2002-08-20 | 2004-12-20 | 光情報記録媒体用Ag基合金スパッタリングターゲット |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004139712A JP2004139712A (ja) | 2004-05-13 |
| JP2004139712A5 true JP2004139712A5 (enExample) | 2005-04-07 |
| JP3655907B2 JP3655907B2 (ja) | 2005-06-02 |
Family
ID=32472536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002361117A Expired - Lifetime JP3655907B2 (ja) | 2002-08-08 | 2002-12-12 | 光情報記録媒体用反射膜と半透過反射膜、および光情報記録媒体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3655907B2 (enExample) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3993530B2 (ja) * | 2003-05-16 | 2007-10-17 | 株式会社神戸製鋼所 | Ag−Bi系合金スパッタリングターゲットおよびその製造方法 |
| JP3907666B2 (ja) | 2004-07-15 | 2007-04-18 | 株式会社神戸製鋼所 | レーザーマーキング用再生専用光情報記録媒体 |
| JP4575211B2 (ja) | 2005-03-31 | 2010-11-04 | 株式会社東芝 | 記憶媒体、再生方法及び記録方法 |
| JP2006294195A (ja) | 2005-04-14 | 2006-10-26 | Kobe Steel Ltd | 光情報記録用Ag合金反射膜、光情報記録媒体および光情報記録用Ag合金反射膜の形成用のAg合金スパッタリングターゲット |
| JP2007003624A (ja) * | 2005-06-21 | 2007-01-11 | Ishifuku Metal Ind Co Ltd | 半反射型半透過膜 |
| JP4527624B2 (ja) * | 2005-07-22 | 2010-08-18 | 株式会社神戸製鋼所 | Ag合金反射膜を有する光情報媒体 |
| JP2007035104A (ja) | 2005-07-22 | 2007-02-08 | Kobe Steel Ltd | 光情報記録媒体用Ag合金反射膜、光情報記録媒体および光情報記録媒体用Ag合金反射膜の形成用のAg合金スパッタリングターゲット |
| US7790064B2 (en) | 2005-12-22 | 2010-09-07 | Pioneer Corporation | Polycrystalline aluminum thin film and optical recording medium |
| JP4864586B2 (ja) * | 2006-08-01 | 2012-02-01 | 新明和工業株式会社 | 真空成膜装置および真空成膜方法 |
| US8092889B2 (en) | 2006-08-28 | 2012-01-10 | Kobe Steel, Ltd. | Silver alloy reflective film for optical information storage media, optical information storage medium, and sputtering target for the deposition of silver alloy reflective film for optical information storage media |
| JP2008066069A (ja) * | 2006-09-06 | 2008-03-21 | Ichikoh Ind Ltd | 車両用ランプ装置 |
| JP2008066068A (ja) * | 2006-09-06 | 2008-03-21 | Ichikoh Ind Ltd | 車両用ランプ装置 |
| WO2008035617A1 (en) * | 2006-09-21 | 2008-03-27 | Kabushiki Kaisha Kobe Seiko Sho | Ag ALLOY THIN FILM, AND Ag ALLOY SPUTTERING TARGET FOR FORMATION OF THE Ag ALLOY THIN FILM |
| JP4176136B2 (ja) * | 2006-09-21 | 2008-11-05 | 株式会社神戸製鋼所 | Ag合金薄膜 |
| JP2008117470A (ja) | 2006-11-02 | 2008-05-22 | Sony Corp | 光情報記録媒体および光情報記録媒体の製造方法、BCA(BurstCuttingArea)マーキング方法 |
| US7833604B2 (en) | 2006-12-01 | 2010-11-16 | Kobe Steel, Ltd. | Ag alloy reflective layer for optical information recording medium, optical information recording medium, and sputtering target for forming Ag alloy reflective layer for optical information recording medium |
| JP4540687B2 (ja) | 2007-04-13 | 2010-09-08 | 株式会社ソニー・ディスクアンドデジタルソリューションズ | 読み出し専用の光情報記録媒体 |
| US8399100B2 (en) | 2007-09-25 | 2013-03-19 | Kobe Steel, Ltd. | Reflection film, reflection film laminate, LED, organic EL display, and organic EL illuminating instrument |
| JP5103462B2 (ja) * | 2009-11-18 | 2012-12-19 | 株式会社神戸製鋼所 | Ag合金熱拡散制御膜およびこれを備えた熱アシスト記録用磁気記録媒体 |
| JP2012108440A (ja) * | 2010-11-19 | 2012-06-07 | Seiko Epson Corp | 干渉フィルター、光モジュール、及び光分析装置 |
| JP5742615B2 (ja) * | 2011-09-15 | 2015-07-01 | 三菱マテリアル株式会社 | 導電性膜及びその製造方法並びに導電性膜形成用銀合金スパッタリングターゲット及びその製造方法 |
| JP5910099B2 (ja) * | 2012-01-18 | 2016-04-27 | セイコーエプソン株式会社 | 干渉フィルター、光学モジュールおよび電子機器 |
| WO2014208341A1 (ja) | 2013-06-26 | 2014-12-31 | 株式会社神戸製鋼所 | 反射電極用または配線電極用Ag合金膜、反射電極または配線電極、およびAg合金スパッタリングターゲット |
-
2002
- 2002-12-12 JP JP2002361117A patent/JP3655907B2/ja not_active Expired - Lifetime
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