TW200610831A - Highly reflective and corrosion-resistant reflective layer film and its sputtering target - Google Patents

Highly reflective and corrosion-resistant reflective layer film and its sputtering target

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Publication number
TW200610831A
TW200610831A TW093128666A TW93128666A TW200610831A TW 200610831 A TW200610831 A TW 200610831A TW 093128666 A TW093128666 A TW 093128666A TW 93128666 A TW93128666 A TW 93128666A TW 200610831 A TW200610831 A TW 200610831A
Authority
TW
Taiwan
Prior art keywords
alloy
sputtering target
corrosion
layer film
metallic
Prior art date
Application number
TW093128666A
Other languages
Chinese (zh)
Other versions
TWI281510B (en
Inventor
Wei-Chao Su
Han-Zhang Su
Original Assignee
Leesan Precious Metal Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leesan Precious Metal Co Ltd filed Critical Leesan Precious Metal Co Ltd
Priority to TW93128666A priority Critical patent/TWI281510B/en
Publication of TW200610831A publication Critical patent/TW200610831A/en
Application granted granted Critical
Publication of TWI281510B publication Critical patent/TWI281510B/en

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  • Optical Record Carriers And Manufacture Thereof (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The present invention is to provide a highly reflective and corrosion-resistant reflective layer film and its sputtering target, particularly a silver alloy metallic film used in common optical discs (such as prerecorded CD, CD-R, DVD-R, CD-RW, DVD-R, and DVD+RW) and its sputtering target, wherein a main metallic alloy (A) comprising cobalt (Co) or manganese (Mn) or both and an auxiliary metallic alloy (B) if desired are added into the silver alloy metallic film. The auxiliary metallic alloy (B) is selected from one or more of gold (Au), palladium (Pd), platinum (Pt) and copper (Cu). These metals constitute a silver alloy material, with which the sputtering target is made, and a highly reflective and corrosion-resistant layer film is made on an optical discs by sputtering process. The composition of silver alloy (% by mass) is 80%-99.99% of silver, 0.01%-5% of main metallic alloy (A), and 0.01%-15% of auxiliary metal alloy (B).
TW93128666A 2004-09-22 2004-09-22 Highly reflective and corrosion-resistant reflective layer film and its sputtering target TWI281510B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW93128666A TWI281510B (en) 2004-09-22 2004-09-22 Highly reflective and corrosion-resistant reflective layer film and its sputtering target

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW93128666A TWI281510B (en) 2004-09-22 2004-09-22 Highly reflective and corrosion-resistant reflective layer film and its sputtering target

Publications (2)

Publication Number Publication Date
TW200610831A true TW200610831A (en) 2006-04-01
TWI281510B TWI281510B (en) 2007-05-21

Family

ID=38751571

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93128666A TWI281510B (en) 2004-09-22 2004-09-22 Highly reflective and corrosion-resistant reflective layer film and its sputtering target

Country Status (1)

Country Link
TW (1) TWI281510B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115341187A (en) * 2022-08-26 2022-11-15 中山智隆新材料科技有限公司 Silver alloy target material and preparation method and application thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115341187A (en) * 2022-08-26 2022-11-15 中山智隆新材料科技有限公司 Silver alloy target material and preparation method and application thereof
CN115341187B (en) * 2022-08-26 2024-03-12 中山智隆新材料科技有限公司 Silver alloy target material and preparation method and application thereof

Also Published As

Publication number Publication date
TWI281510B (en) 2007-05-21

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