1281510 九、發明說明： 【發明所屬之技術領域】 本發明係關於_種具高反射率及抗腐蝕性之反射層 濤膜及其濺鍍乾材（SpUUeringfarget)之發明，尤指 一種可以應用在光碟之反射層或半反射層之反射薄膜及 其濺鍍靶材，俾兼具提高雷射光束反射率及抗腐蝕性之 優點及功效者。 【先前技術】 按，所謂光碟（Optical disk)反射原理乃係指一 種利用雷射光束（Laser beam)射入光碟片之後，透過 光碟片上紀錄痕跡（Inf〇rmati〇npit)之幾何形狀的不 同，致使雷射光束產生建設性干涉或破壞性干涉之反射 光，並以此建設性干涉或破壞性干涉之反射光作為數位 化紀錄（0與1)之依據。一般而言，光碟片之結構大都 係以光學級聚碳酸脂（P〇lyCarb〇nate )作為基板 (Substrate)，基板上則預先鍍附有單層或多層反射層 薄膜結構之光紀錄媒體，且依其設計及功能的不同，光 碟片之種類又可分為預錄型光碟片（prerecorded )、燒 錄一次型光碟片（如CD-R、DVD-R等）及可讀寫多次型 光碟片（如匸0-1^、0¥1)-1^111、0¥0-1^等）；另若依照光 碟片反射層薄膜之層數不同加以區分，則光碟片又可分 為早層反射層薄膜之光碟片（如prerecorded及CD-R) 與多層反射層薄膜之光碟片（如DVD、CD-RW、DVD-Ram、 DVD-R及DVD+RW);惟，儘管上述光碟片因為設計上的 不同而導致有不同功能及特性，但無論如何，在任何一 種光碟片之結構上，唯有可以確實反射雷射光束之「高 反射率之反射層薄膜」才是每一光碟片最必須具備也係 1281510 最重要的一環。 在過去多年來的發展中’為確實提昇光碟片 =之反射率，故有業者_運用多種金屬合金材^ 為提向反射率之反射層薄膜材料，如f知的本國公 575674號、第574423號及第550562號發明專°弟 ，國專利第圓889號、第628〇811號、第⑽ 號及第6544616號專利案等皆是，該等專利前案主/ 運用銘（A1)合金及銀（Ag)合金來作為賤鍍乾材’糸 (Sputtering target)並在經過濺鍍製程後而在光 上形成反射層薄膜，是以其光碟片表面之顏色多偏鋁白 色系，而若以金Uu)合金或銅（Cu)合金來二為= 萆巴材，則可使光碟片表面之反射層薄膜呈現金^顏 、 滿足特殊考量。惟，在光碟片之反射層薄膜之製作^ 的選擇上’除了需注意「高反射率」之主要因素之外， 其實材料的抗腐蝕特性也是必須考慮因素之一，因為唯 有一定程度的抗腐餘性才能延長光碟片之保存期限換 言之，「高反射率」與「抗腐祕」已成為目前改善光 碟片品質之最大標的。 有鑑於此’本發明人遂在致力改善光碟片品質之前 提下，針對光碟片之反射層薄膜及其濺鍍靶材S行研’ 發，期提供一種具有高反射率及抗腐蝕性，且成分不同 於上述習知前案之反射層薄膜及其濺鍍靶材，並1經過 不斷研發及測試後而有本發明之問世。 【發明内容】 緣是，本發明之目的係為了提供—種具高反射率及抗 1281510 腐蝕性之反射層薄膜及其濺鍍靶材，主要具有可以提昇光 碟片之雷射光束反射率及抗腐蝕性之優點及功效者。 為達致以上目的，本發明特別提供一種具高反射率及 抗腐蝕性之反射層薄膜，其中，該反射層薄膜係一金屬人 金層，該金屬合金層之組成係為金屬銀（Ag)及主要合: 元素（A)，而該合金元素（A)為金屬鈷（c〇)及金 (Μη)之一或二者；並可視需要或再添加副合金元素（b)， 其中副合金元素（B)可選擇純金（Au)、金屬鈀（'Pd)、 金屬始（Pt)及金屬銅（Cu)等元素中之一種或多種。 【實施方式】 關於本發明人藉以達致上述目的而採用之技術手 段，兹舉若干較佳實施例於下文進行詳細說明，俾供鈞 上深入了解並認同本發明。 本發明之第一種實施例係在提供一種銀合金材料，該 銀合金材料包含純銀金屬（Ag)與金屬鈷（c〇)二種金屬 成分’其中钴（Co)金屬之含量為5% (重量百分比）， 並以此銀合金材料作為第一種濺鍍靶材並用來製備銀合 金薄膜，再實施濺鍍法（Sputtering)以高能量粒子撞擊 濺鍍靶材表面，使銀合金濺鍍靶材表面物質濺出，而後在 基板上沉積而形成一層銀合金薄膜，控制該層薄膜之厚度 為100〜120nm之間，然後取該銀合金薄膜經光學反射率測 喊後，取得如表一所示之反射率數據： 表一 長（nm) 450 500 550 600 650 700 750 800 率（％ ) 89· 5 90. 2 93.4 93· 6 94. 5 95· 0 95· 2 96. 3 由表一可得知，本發明第一種實施例所製備之銀合金 1281510 薄膜在光束波長450nm〜800nm之區段間，係可具備89.5% 至96.3%之高反射率，換言之，本發明之第一種實施例確 實可以提供一種具高反射率而可運用在單層反射層薄膜 之光碟片（如Prerecorded及CD-R)之金屬薄膜。 本發明之第二種實施例亦在提供一種銀合金材料，該 銀合金材料包含銀（Ag)與猛（Μη)二種金屬成分，其中 猛（Μη)金屬之含量為5% (重量百分比），並以此銀合 金材料作為第二種濺鍍靶材並用來製備銀合金薄膜，再實 施減:鍍法（Sputtering)以高能量粒子撞擊濺鍍靶材表 面，使銀合金濺鍍靶材表面物質濺出，而後在基板上沉積 而形成一層銀合金薄膜，控制該層薄膜之厚度為 1〇〇〜120nm之間，然後取該銀合金薄膜經光學反射率測試 後’取得如表二所示之反射率數據： 表二 光束波長（ηπ〇 450 500 550 600 650 700^ 750 800 反射率（％ ) -------- 87· 8 89.4 91· 1 92· 5 93.8 94·「 94. 7 95.3 由表二可得知，本發明第二種實施例所製僑之銀合金 薄膜在光束波長450nm〜800nm之區段間，係可具備87 8% 至95.3%之高反射率，換言之，本發明之第二種實施例同 樣可以提供一種具高反射率而可運用在單層反射層薄膜 之光碟片（如Prerecorded及CD-R)之金屬薄膜。 本發明之第三種實施例亦在提供一種銀合金材料，該 銀合金材料包含銀（Ag)及鈷（Co)與錳（Μη)三種金屬 成分’其中鈷（Co)金屬與錳（Μη)金屬之共同含量為5 % (重里百分比）’並以此銀合金材料作為弟三種濺鍵把 1281510 材並用來製備銀合金薄膜，再實施減:鑛法（Sputtering) 以高能量粒子撞擊濺鍍靶材表面，使銀合金濺鍍靶材表面 物貝錢出’而後在基板上沉積而形成一層銀合金薄膜，控 制該層薄膜之厚度為100〜120nm之間，然後取該銀合金薄 臈經光學反射率測試後，取得如表三所示之反射率數據： 表三 $束波長（nm) 450 500 550 600 650 700 750 800 反射率（％ ) 85. 6 88· 3 89.4 89· 0 91. 3 92· 0 91. 0 89· 8 由表三可得知，本發明第三種實施例所製備之銀合金 薄膜在光束波長45〇11111〜80〇11111之區段間，係可具備85.6% 至92.0%之高反射率，換言之，本發明之第二種實施例同 樣可以提供一種具高反射率而可運用在單層反射層薄膜 之光碟片（如prerecorded&CD_R)之金屬薄膜。 本發明之第四種實施例同樣係在提供一種銀合金材 料：:亥銀合金材料包含銀（Ag)、鈷（c〇)、锰㈤盥 鈀（Pd)(把為副合金材料，亦可由純金、金屬翻、盘金 屬銅來替代，或複合添加） 金屬之含量為2.5% (重量百二屬成其帽(㈤ % (重量百纽），並以此銀合(全才)^屬部分之含量為5 材並用來製備銀合金薄膜，再；=4作為第四種崎 以高能量粒子撞擊濺練材表面，=法（Sputtering) 物質濺出，而後在基板私金濺錄材表面 制該層薄臈之厚度為議〜l2〇n二-層銀合金薄膜，控 膜經光學㈣率職後，取知/ 喊銀合金薄 件如表四所示之反射率數據： l28l51〇 表四 光束波長（nm ) "—— 450 500 550 600 650 700 750 800 反射率（％ ) ^--- 88. 2 90· 0 92. 3 92. 6 94. 1 94. 1 94. 6 95· 8 由表四可得知，本發明第四種實施例所製備之銀合金 薄膜在光束波長45〇11111〜80〇11111之區段間，係可具備88.2% 至95.8%之高反射率，換言之，本發明之第四種實施例亦 確實可以提供一種具高反射率而可運用在單層反射層薄 膜之光碟片（如Prerecorded及CD-R)之金屬薄膜。 以上所述之實施例皆在提供一種具有高反射特性之 銀合金金屬薄膜，接下來的第五實施例則係提供一種具半 反射特性之金屬薄膜；本發明之第五種實施例係採用與上 述第四種實施例相同成分之銀合金材料作為本發明之第 五種濺鍍靶材，並用來製備銀合金薄膜，同樣實施濺鍍法 (Sputtering)俾在基板上沉積形成一層厚度僅有812nm ，，合金薄膜，且該銀合金薄膜在經過光學反射率測試後 證貫，該銀合金薄膜在光束波長為65〇11111之測試條件下， 其反射率將會降低為20〜30% ，換言之，本發明之第五種 實施例確實可以提供-種具半反射特性而可運用在多層 反射層薄膜之光碟片（如_—9單面雙層光碟片）之半反 射層之金屬薄膜； :二士發明之第六種實施例則係提供一種具抗腐蝕 金屬薄膜’首先需在基板上先行鍍上適當厚力 之V化鋅-二氧化石夕（Zns—Si02)、銀-銦_録一碑 (Ag-In-Sb-Te)及硫峰二 薄膜’然後採用與本發明第四種實施例相同成二 10 1281510 材料作為第六種實施例之滅鑛輕材’本發明之第六種實施 例主要係利用磁控濺鍍法（Magnetron Sputtering)俾再 上述三層薄膜上方濺鍍一層厚度約150nm之銀合金薄膜， 即製作完成一種可讀寫多次型光碟片（如CD-RW、 DVD-Ram、DVD-RW及DVD+RW);接下來取該可讀寫多次型 光碟片進行標準之寫入-擦拭測試（Record and Erase cycles test)，測試後獲得合於規格要求之結果；續將 此一光碟片置於溼度為85%之環境中置放1〇天，此—光碟 片仍維持相同之性能表現，換言之，本發明之第六種實施 例確實可以提供一種可重複寫入、擦拭且具抗腐蝕性而可 運用在可讀寫多次型光碟片（如CD-RW、DVD-Ram、DVDJW 及DVD+RW)之金屬薄膜。 為使鈞上深入了解本發明實施例搭配不同類型光 碟片之製作程序，特舉若干較具代表性之光碟片於下文作 一詳細說明： 1、 預錄型光碟片：首先在光學級聚碳酸脂 (polycarbonate)之基板上預先製作完成數位圖形 (pattern)，然後以本發明之銀合金濺鍍靶材在上述圖 形上鍍上一層銀合金薄膜，該層銀合金薄膜具備高反射特 性且其成分為Agw-C〇x-Mny-Pdz，其中，go% <w〈g9 gg%、 0·01% <x<5% 、0·01% <y<5% 、〇·〇ι% <z<i5% ，如此即 可製作預錄型光碟。 2、 可燒錄一-人型光碟片：首先在光學級聚碳酸之之 基板上以旋鍵（Spin Coating)技術鑛上一層特殊設計之 有機染料（Organic dye)’待此一有機染料乾燥之後，再 1281510 以本發明之銀合金濺鍍乾材在上述有機染料上鍍上一層 銀合金薄膜，該層銀合金薄膜具備高反射特性且其成分為1281510 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to the invention of a reflective layer film having high reflectivity and corrosion resistance and a sputter dry material thereof (SpUUeringfarget), especially one which can be applied to The reflective film of the reflective layer or the semi-reflective layer of the optical disc and the sputtering target thereof have the advantages and functions of improving the reflectance and corrosion resistance of the laser beam. [Prior Art] According to the principle of optical disk reflection, it refers to a difference in the geometry of a recording mark (Inf〇rmati〇npit) transmitted through a disk after being injected into a disk by a laser beam. The reflected light of the laser beam is caused by constructive interference or destructive interference, and the reflected light of constructive interference or destructive interference is used as the basis for the digital recording (0 and 1). In general, the structure of the optical disc is mostly made of optical grade polycarbonate (P〇lyCarb〇nate) as a substrate, and the substrate is pre-plated with a single layer or a multilayer reflective layer film structure optical recording medium, and Depending on its design and function, the types of optical discs can be divided into pre-recorded discs (prerecorded), burn-in discs (such as CD-R, DVD-R, etc.) and readable and writable discs. Film (such as 匸0-1^, 0¥1)-1^111, 0¥0-1^, etc.); otherwise, according to the difference in the number of layers of the reflective film of the optical disc, the optical disc can be divided into early a layer of reflective film (such as prerecorded and CD-R) and a multilayer reflective film (such as DVD, CD-RW, DVD-Ram, DVD-R and DVD+RW); however, despite the above-mentioned disc Because of the difference in design, there are different functions and characteristics. However, in any structure of the optical disc, only the "reflective film with high reflectivity" that can accurately reflect the laser beam is each optical disc. Most must have the most important part of 1281510. In the development of the past years, in order to improve the reflectivity of the optical discs, the manufacturer has used a variety of metal alloy materials to provide a reflective layer film material with improved reflectivity, such as the national public 575674, 574423 No. 550562, the invention of the patent, the national patents No. 889, No. 628〇811, No. (10) and No. 6544616, etc., the patents of the former / use Ming (A1) alloy and The silver (Ag) alloy is used as a sputtering material and a reflective layer film is formed on the light after the sputtering process, because the color of the surface of the optical disk is mostly aluminum-white, and If the gold Uu alloy or the copper (Cu) alloy is used as the second material, the reflective film on the surface of the optical disc can be made into a golden film to meet special considerations. However, in addition to the main factors of the "high reflectivity" in the selection of the reflective film of the optical disc, the corrosion resistance of the material is also one of the factors that must be considered, because only a certain degree of resistance is required. Corrosion can extend the shelf life of optical discs. In other words, "high reflectivity" and "anti-corruption" have become the biggest targets for improving the quality of optical discs. In view of the fact that the present inventors have made efforts to improve the quality of the optical disc, the reflective layer film of the optical disc and the sputtering target S thereof are provided with a high reflectivity and corrosion resistance, and The composition is different from the reflective layer film of the prior art and the sputtering target thereof, and the invention has been developed after continuous research and development. SUMMARY OF THE INVENTION The purpose of the present invention is to provide a reflective film with high reflectivity and resistance to 1281510 corrosion and a sputtering target thereof, which mainly have the laser beam reflectivity and resistance which can enhance the optical disk. The advantages and functions of corrosiveness. In order to achieve the above object, the present invention particularly provides a reflective layer film having high reflectivity and corrosion resistance, wherein the reflective layer film is a metal human gold layer, and the metal alloy layer is composed of metallic silver (Ag). And the main combination: element (A), and the alloying element (A) is one or both of metallic cobalt (c〇) and gold (Μη); and optionally adding or adding a secondary alloying element (b), wherein the secondary alloy The element (B) may be one or more selected from the group consisting of pure gold (Au), metallic palladium ('Pd), metallic start (Pt), and metallic copper (Cu). [Embodiment] The present invention has been described in detail below with reference to the preferred embodiments of the present invention. A first embodiment of the present invention provides a silver alloy material comprising two metal components of pure silver metal (Ag) and metallic cobalt (c), wherein the content of cobalt (Co) metal is 5% ( Weight percent), and using this silver alloy material as the first sputtering target and used to prepare the silver alloy film, and then sputtering (Sputtering) to impact the surface of the sputtering target with high energy particles, so that the silver alloy sputtering target The surface material of the material is splashed, and then deposited on the substrate to form a silver alloy film, and the thickness of the film is controlled to be between 100 and 120 nm, and then the silver alloy film is subjected to optical reflectance detection, and then obtained as shown in Table 1. Reflectance data shown: Table 1 Length (nm) 450 500 550 600 650 700 750 800 Rate (%) 89· 5 90. 2 93.4 93· 6 94. 5 95· 0 95· 2 96. 3 From Table 1 It is understood that the silver alloy 1281510 film prepared by the first embodiment of the present invention can have a high reflectance of 89.5% to 96.3% between the sections of the beam wavelength of 450 nm to 800 nm, in other words, the first implementation of the present invention. Examples can indeed provide a high reflectivity A metal film used in a single-layer reflective film (such as Prerecorded and CD-R). A second embodiment of the present invention also provides a silver alloy material comprising two metal components of silver (Ag) and sputum, wherein the content of the metal is 5% by weight. And using the silver alloy material as the second sputtering target and used to prepare the silver alloy film, and then performing the subtraction: sputtering method to hit the surface of the sputtering target with high energy particles, so that the silver alloy splashes the surface of the target The material is splashed, and then deposited on the substrate to form a silver alloy film, and the thickness of the film is controlled to be between 1 〇〇 and 120 nm, and then the silver alloy film is subjected to optical reflectance test and then obtained as shown in Table 2. Reflectance data: Table 2 Beam wavelength (ηπ〇450 500 550 600 650 700^ 750 800 Reflectance (%) -------- 87· 8 89.4 91· 1 92· 5 93.8 94·” 94. 7 95.3 It can be seen from Table 2 that the silver alloy film of the overseas Chinese made by the second embodiment of the present invention has a high reflectance of 87 8% to 95.3% in a section of a wavelength of 450 nm to 800 nm, in other words, The second embodiment of the present invention can also provide a high anti- A metal film which can be applied to a disc of a single-layer reflective layer film (such as Prerecorded and CD-R). The third embodiment of the present invention also provides a silver alloy material containing silver (Ag) And cobalt (Co) and manganese (Μη) three metal components 'cobalt (Co) metal and manganese (Μη) metal co-content is 5% (% by weight) 'and this silver alloy material as the brother three kinds of splash keys 1281510 material is used to prepare silver alloy film, and then subtraction: Sputtering. High-energy particles impact the surface of the sputter target, so that the surface of the silver alloy sputter target is deposited and then deposited on the substrate to form a layer. The silver alloy film is controlled to have a thickness of 100 to 120 nm, and then the optical reflectance of the silver alloy is measured by optical reflectance, and the reflectance data as shown in Table 3 is obtained: Table 3: Beam wavelength (nm) 450 500 550 600 650 700 750 800 Reflectance (%) 85. 6 88· 3 89.4 89· 0 91. 3 92· 0 91. 0 89· 8 As can be seen from Table 3, the third embodiment of the present invention The prepared silver alloy film has a beam wavelength of 45〇11111~80〇111 Between the sections of 11 , a high reflectance of 85.6% to 92.0% can be obtained. In other words, the second embodiment of the present invention can also provide an optical disc having a high reflectivity and can be applied to a single-layer reflective layer film ( A metal film such as prerecorded & CD_R. The fourth embodiment of the present invention is also provided with a silver alloy material: a silver alloy material comprising silver (Ag), cobalt (c), manganese (penta) palladium (Pd) (It is a sub-alloy material, which can also be replaced by pure gold, metal, metal copper, or composite). The metal content is 2.5% (the weight of one hundred is its cap ((f)% (weight 100), and The content of the silver (all-round) ^ part is 5 materials and is used to prepare the silver alloy film, and then; = 4 as the fourth kind of high-energy particles hit the surface of the splashing material, the Sputtering substance splashes, and then The thickness of the thin layer of the substrate is made up of the surface of the substrate, and the thickness of the layer is 〜2 〇n two-layer silver alloy film. After the film is controlled by the optical (4), the thin metal parts of the silver alloy are as shown in Table 4. Reflectance data: l28l51〇 Four beam wavelengths (nm) "—— 450 500 550 60 0 650 700 750 800 Reflectance (%) ^--- 88. 2 90· 0 92. 3 92. 6 94. 1 94. 1 94. 6 95· 8 As can be seen from Table 4, the fourth type of the present invention The silver alloy film prepared in the embodiment can have a high reflectance of 88.2% to 95.8% between the sections of the beam wavelength of 45〇11111~80〇11111. In other words, the fourth embodiment of the present invention can indeed provide A metal film having a high reflectivity and which can be applied to a single-layer reflective film (such as Prerecorded and CD-R). The embodiments described above all provide a silver alloy metal film having high reflection characteristics, and the fifth embodiment provides a metal film having semi-reflective characteristics; the fifth embodiment of the present invention adopts The silver alloy material of the same composition in the fourth embodiment is used as the fifth sputtering target of the present invention, and is used for preparing a silver alloy film, and is also deposited by sputtering on a substrate to form a layer having a thickness of only 812 nm. , the alloy film, and the silver alloy film after the optical reflectivity test, the silver alloy film under the test condition of the beam wavelength of 65 〇 11111, the reflectivity will be reduced to 20~30%, in other words, The fifth embodiment of the present invention can provide a metal thin film having a semi-reflective property and can be applied to a semi-reflective layer of a multi-layer reflective layer film (such as a _-9 single-sided double-layer optical disc); The sixth embodiment of the invention is to provide a corrosion-resistant metal film, which first needs to be plated with a suitable thick force of V-zinc-manganese oxide (Zns-SiO2) and silver on the substrate. _ Recording a tablet (Ag-In-Sb-Te) and a sulfur peak film 'and then using the same material as the fourth embodiment of the present invention to form a 12 1281510 material as the sixth embodiment of the metallurgical light material 'the invention The sixth embodiment mainly uses a magnetron sputtering method to deposit a silver alloy film having a thickness of about 150 nm over the above three layers of film, thereby fabricating a readable and writable multi-disc film (such as a CD). -RW, DVD-Ram, DVD-RW, and DVD+RW); next, the readable and readable multi-disc disc is subjected to the Standard and Erase cycles test, and the test is obtained after the test. The result of the request; the optical disc is placed in an environment with a humidity of 85% for one day, and the optical disc still maintains the same performance. In other words, the sixth embodiment of the present invention can provide a kind of It can be repeatedly written, wiped and corrosion-resistant and can be applied to metal films that can read and write multiple types of optical discs (such as CD-RW, DVD-Ram, DVDJW and DVD+RW). In order to make a detailed understanding of the production procedure of the embodiment of the present invention with different types of optical discs, a number of representative optical discs are described in detail below: 1. Pre-recorded optical discs: firstly in the optical grade polycarbonate A digital pattern is preliminarily formed on a substrate of a polycarbonate, and then a silver alloy film is deposited on the pattern by using the silver alloy sputtering target of the present invention. The silver alloy film has high reflection characteristics and a composition thereof. Agw-C〇x-Mny-Pdz, where go% <w<g9 gg%, 0·01% <x<5%, 0·01% <y<5%, 〇·〇ι% <z<i5%, so you can make a pre-recorded disc. 2, can burn a - human-type disc: first on the substrate of optical grade polycarbonate with spin coating (Spin Coating technology) a special design of organic dye (Organic dye) after the drying of an organic dye And 1281510, the silver alloy sputtering dry material of the invention is coated with a silver alloy film on the organic dye, the silver alloy film has high reflection characteristics and the composition thereof is
Agw-C〇x-Mny-Pdz，其中，80°/〇<w<99.99%、0·01%<χ<5%、 0.01% <y<5%、0.01% <ζ<15% ，如此即可製作可燒錄一 次型光碟片（如CD-R)。 3、 雙層型光碟片：單片雙層型DVD ( D-dual layer disc)具備二層光學紀錄層，且二層之資訊資料皆透過同 一側之雷射光束予以寫入及讀取，此二層紀錄包含第一層 之「高反射層」銀合金薄膜與第二層之「半反射層 (Semi-Reflective Layer)」銀合金薄膜，其中，第一 層之「高反射層」銀合金薄膜之製作方法與前述兩種方式 相同，不予贅述；而第二層之「半反射層」之反射率相對 低於第一層銀合金薄膜之反射率，其主要係以本發明之銀 合金濺鍍靶材在第一層高反射銀合金薄膜上再鍍上第二 層銀合金薄膜，該第二層銀合金薄膜之厚度通常僅在數十 個nm左右，故其反射率亦僅約為18〜30%左右，又，第二 層銀合金薄膜之成分為Agw-C〇x-Mny-Pdz，其中，80% <w<99.99%、0·01% <x<5%、0·01% <y<5%、0·01% <z<15 % ，如此即可製作單片雙層型光碟片（如DVD、DVD-R)。 4、 可讀寫多次型光碟片：可讀寫多次型光碟片發展 至目前概可分為CD-RW、DVD-Ram、DVD-R及DVD+RW等數種 產品，其設計原理主要都是利用光碟片中特殊的r相變化 (Phase Change)層」作為可以多次讀寫之材料層，在相 變化材料方面多以銀-銦-銻-碲（Ag-In-Sb-Te)或鍺-石帝— 銻（Ge-Te-Sb)等合金系列為主，除了相變化層之外，還 12 1281510Agw-C〇x-Mny-Pdz, where 80°/〇<w<99.99%, 0·01%<χ<5%, 0.01% <y<5%, 0.01% <ζ<15 %, so you can make a recordable disc (such as CD-R). 3. Double-layer optical disc: The D-dual layer disc has a two-layer optical recording layer, and the information of the second layer is written and read through the laser beam on the same side. The second layer record contains the first layer of "high-reflection layer" silver alloy film and the second layer of "Semi-Reflective Layer" silver alloy film, wherein the first layer of "high-reflection layer" silver alloy film The manufacturing method is the same as the above two methods, and is not described in detail; and the reflectivity of the "semi-reflective layer" of the second layer is relatively lower than that of the first silver alloy film, which is mainly caused by the silver alloy splash of the present invention. The plating target is further plated with a second silver alloy film on the first high-reflection silver alloy film, and the thickness of the second silver alloy film is usually only about several tens of nm, so the reflectance is only about 18 ~30% or so, and the composition of the second silver alloy film is Agw-C〇x-Mny-Pdz, wherein 80% <w<99.99%, 0·01% <x<5%, 0· 01% <y<5%, 0·01% <z<15%, so that a single-layer double-layer disc (such as DVD, DVD-R) can be produced. 4, can read and write multiple types of optical discs: can read and write multiple types of optical discs to the present can be divided into CD-RW, DVD-Ram, DVD-R and DVD+RW and other products, the design principle is mainly Both use the special phase change layer in the optical disc as the material layer that can be read and written multiple times. In the phase change material, silver-indium-tellurium-tellurium (Ag-In-Sb-Te) is often used. Or alloys such as 锗-石帝-锑(Ge-Te-Sb), mainly in addition to the phase change layer, 12 1281510
需另外使用一介電層材料作為熱沉（Heat Sink)之用， 其材料為硫化鋅-二氧化矽（ZnS_Si〇2)，再者，除了上述 兩種不同材料之薄膜之外，相變化型可讀寫多次光碟片同 樣必須使用據高反射率之高反射層，所以最後仍需在上述 薄膜上再濺鍍一層本發明之銀合金薄膜，該層銀合金薄膜 具備高反射特性且其成分為Agw-C〇x-Mny-Pdz，其中，80% <w<99· 99%、0·01% <χ<5%、〇·〇1% <y<5%、〇·〇1% <z<15 % ，如此即可製作相變化型之可讀寫多次髮光碟片（如 CD-RW、DVD-Ram、DVD-R及DVD+RW)。 綜上所述，本發明所提供之反射層薄膜及其满 兼具有高反射率及抗腐蝕性之優點及功效’且申請前未^ 諸於刊物亦未曾公開使用，實屬利用自然法則之技，思^ 之高度創作而為專利法所稱之發明無誤，爰依 請，懇祈鈞上惠予詳審並賜准專利，至感德馨。 【圖式簡單說明】A dielectric layer material is additionally used as a heat sink, the material of which is zinc sulfide-cerium oxide (ZnS_Si〇2), and in addition to the films of the above two different materials, the phase change type The readable and writable optical disc must also use a highly reflective layer with high reflectivity. Therefore, it is still necessary to sputter a layer of the silver alloy film of the present invention on the film. The silver alloy film has high reflection characteristics and its composition. Agw-C〇x-Mny-Pdz, where 80% <w<99·99%, 0·01% <χ<5%, 〇·〇1% <y<5%, 〇·〇 1% <z<15 %, so that phase-changeable readable and writable multiple-lit discs (such as CD-RW, DVD-Ram, DVD-R and DVD+RW) can be produced. In summary, the reflective layer film provided by the present invention and its advantages and effects of high reflectivity and corrosion resistance are not used publicly before the application, and the natural law is utilized. Technology, thinking of the high degree of creation and patent law, the invention is correct, 爰 请, 恳 钧 钧 钧 详 详 详 详 详 详 详 详 详 详 详 详 详 详 详 详 详 详 详 详 详 详 详 详[Simple description of the map]
【主要元件符號說明】 13[Main component symbol description] 13