JP2004080038A - 絶縁接着テープを使用するチップ接着装置 - Google Patents
絶縁接着テープを使用するチップ接着装置 Download PDFInfo
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Abstract
【解決手段】 チップ接着装置は、第1チップを有する基板供給部を備える。チップ接着装置は、絶縁接着テープを供給するテープ供給部と、第1チップの電極パッド間の領域に絶縁接着テープを貼付けるテープ貼付手段と、絶縁接着テープに第2チップを貼付けるチップ貼付手段とをさらに備える。
【選択図】 図2
Description
図1は、本発明の一実施形態によるチップ接着装置100の概略ブロック図である。チップ接着装置100は、基板搬送部32に沿って、テープ供給部40、テープ貼付手段59、ウエハーテーブル60、第2チップ貼付手段69、圧着手段37及び硬化部34を備える。第1チップ12(図2)は、基板10上に貼付けられている。絶縁接着テープ20は、第1チップ12上に貼付けられている。第1チップ12と同一または類似したサイズの他のチップを、3次元配列に連続的に絶縁接着テープ20上に貼付ける。
12 第1チップ
16 第2チップ
20 絶縁接着テープ
31 基板カセット
32 基板搬送部
33 ローダ
34 硬化部
35 アンローダ
36 基板収納部
37 圧着手段
40 テープ供給部
41 第1リール
42 第2リール
43 第3リール
44 テープ切断機
45 ローラ
46 テープ吸着手段
47 第1テープ固定手段
48 第2テープ固定手段
49 ガイドブロック
50 テープガイド
60 ウエハーテーブル
69 第2チップ貼付手段
100 チップ接着装置
Claims (18)
- 基板は第1チップを有し、前記第1チップの電極に電気的に接続された複数の基板を含む基板カセットと、
前記基板カセットの近くに一端が位置し、前記基板を搬送する基板搬送部と、
絶縁接着テープを供給するテープ供給部と、
前記テープ供給部と前記基板搬送部との間に位置し、前記第1チップの電極パッド間の領域に絶縁接着テープを貼付けるテープ貼付手段と、
第2チップを有するウエハーを提供するウエハーテーブルと、
前記ウエハーテーブルと前記基板搬送部との間に位置し、前記第1チップ上の絶縁接着テープに前記第2チップを貼付けるチップ貼付手段と、を備えるチップ接着装置であって、
前記テープ供給部は、
前記絶縁接着テープが巻かれているリールと、
前記絶縁接着テープを切断するテープ切断機と、
前記リールから前記テープ切断機に前記絶縁接着テープを供給するローラと、
前記絶縁接着テープを吸着して固定するテープ吸着手段と、
前記テープ吸着手段と噛み合って切断位置に前記絶縁接着テープを固定する第1テープ固定手段と、を有することを特徴とするチップ接着装置。 - 前記絶縁接着テープは、50μm以上の厚さを有することを特徴とする請求項1に記載のチップ接着装置。
- 前記ローラと前記テープ切断機との間を通過する前記絶縁接着テープの下面に設けられたガイドブロックと、
前記ガイドブロックの上部に設けられ、前記ガイドブロックと噛み合って切断位置に前記絶縁接着テープを固定する第2テープ固定手段と、をさらに備えることを特徴とする請求項1に記載のチップ接着装置。 - 前記絶縁接着テープの移送方向に対して前記ローラの前方または後方に設けられ、前記絶縁接着テープの移動を案内するテープガイドをさらに備えることを特徴とする請求項1に記載のチップ接着装置。
- 前記テープガイドは、前記絶縁接着テープの幅に対応する少なくとも1つのガイド溝を有することを特徴とする請求項4に記載のチップ接着装置。
- 前記ガイド溝の深さは、前記絶縁接着テープの厚さより大きく、前記ガイド溝と前記絶縁接着テープの端面との間隔は、絶縁接着テープの幅の最大許容値の3倍以内にすることを特徴とする請求項5に記載のチップ接着装置。
- 前記テープガイドは、
前記絶縁接着テープより広く、一端に前記絶縁接着テープの厚さより高く形成された段を有するガイドプレートと、
前記ガイドプレートに設けられ、前記絶縁接着テープの幅に対応する前記ガイドプレートの使用範囲を調節するガイド調節部とを備え、
前記ガイド調節部は、
前記ガイドプレートの上部から突出し、前記ガイドプレートの段に垂直に形成された少なくとも1つのスロットを有するガイドポストと、
前記ガイドプレートの下面に位置し、前記ガイドポストの他端に接続されたガイドブロックと、
前記ガイドブロックに接続され、前記ガイドプレートのスロットに沿って前記ガイドポストを水平に移動させ、前記ガイドプレートの段に絶縁接着テープを近接させるガイドブロック移送手段とを有することを特徴とする請求項4に記載のチップ接着装置。 - 前記テープ吸着手段は、前記基板搬送部より高く位置し、前記テープ貼付手段は、前記基板搬送部のすぐ上に位置し、
絶縁接着テープを吸着する前記テープ吸着手段は、前記基板搬送部上に移動させ、テープ貼付手段を下側に押し付けてテープ吸着手段の絶縁接着テープを吸着し、その後、テープ吸着手段を元の位置に戻し、テープ貼付手段をさらに下側に押し付けて、前記第1チップの電極パッド間の領域に前記絶縁接着テープを貼付けることを特徴とする請求項1に記載のチップ接着装置。 - 前記基板搬送部の他側の端面の近くに位置し、前記第2チップを有する前記基板を収納する基板収納部をさらに備えることを特徴とする請求項1に記載のチップ接着装置。
- 前記チップ貼付手段と前記基板収納部との間に位置し、前記第1チップ上に前記第2チップを圧着する圧着手段を備え、
前記圧着手段は、常温〜400℃の熱、100〜3,000gf/mm2の圧力、10ミリ秒〜10秒の間という条件下で圧着することを特徴とする請求項9に記載のチップ接着装置。 - 前記テープ貼付手段は、90度回転が可能であることを特徴とする請求項1に記載のチップ接着装置。
- 電極を有する第1チップを含む基板供給部と、
絶縁接着テープを供給するテープ供給部と、
前記第1チップの電極パッド間の領域に前記絶縁接着テープを貼付けるテープ貼付手段と、
前記絶縁接着テープに第2チップを貼付けるチップ貼付手段と、
を備えることを特徴とするチップ接着装置。 - 前記テープ供給部は、
前記絶縁接着テープが巻かれているリールと、
前記絶縁接着テープを切断するテープ切断機と、
前記リールから前記テープ切断機に前記絶縁接着テープを供給するローラと、
前記絶縁接着テープを吸着して固定するテープ吸着手段と、
前記テープ吸着手段と噛み合って切断位置に前記絶縁接着テープを固定する第1テープ固定手段と、
を備えることを特徴とする請求項12に記載のチップ接着装置。 - 前記基板供給部は、基板カセットを備えることを特徴とする請求項12に記載のチップ接着装置。
- 前記基板カセットの近くに一端が位置し、前記基板を搬送する基板搬送部をさらに備えることを特徴とする請求項14に記載のチップ接着装置。
- 前記テープ貼付手段は、前記テープ供給部と前記基板搬送部との間に位置していることを特徴とする請求項15に記載のチップ接着装置。
- 前記第2チップを有するウエハーを供給するウエハーテーブルをさらに備えることを特徴とする請求項12に記載のチップ接着装置。
- 前記チップ貼付手段は、前記ウエハーテーブルと前記基板搬送部との間に位置していることを特徴とする請求項17に記載のチップ接着装置。
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JP2008172114A (ja) * | 2007-01-15 | 2008-07-24 | Shinkawa Ltd | ダイボンダとダイボンダの熱圧着テープ片切り出し及び貼り付け方法及びプログラム |
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KR100600532B1 (ko) | 2004-12-10 | 2006-07-13 | 주식회사 쎄크 | 칩본딩용 테이프 부착장치 |
JP4795772B2 (ja) * | 2005-10-24 | 2011-10-19 | リンテック株式会社 | シート切断用テーブル及びシート貼付装置 |
US20070137773A1 (en) * | 2005-12-16 | 2007-06-21 | Yung-Fong Chen | Die bonding apparatus and method of operating the same |
US20100155964A1 (en) * | 2006-04-27 | 2010-06-24 | Sumitomo Bakelite Co., Ltd. | Adhesive Tape, Semiconductor Package and Electronics |
WO2008038557A1 (fr) * | 2006-09-28 | 2008-04-03 | Panasonic Corporation | Dispositif de collage de feuilles adhésives et procédé de collage |
JP2008159913A (ja) * | 2006-12-25 | 2008-07-10 | Shinkawa Ltd | テープ搬送装置、方法、及びプログラム |
FR2925969B1 (fr) * | 2007-12-26 | 2010-01-22 | Datacard Corp | Procede et dispositif d'encartage d'un module ou puce. |
WO2009092646A2 (en) * | 2008-01-25 | 2009-07-30 | Oerlikon Assembly Equipment Ag, Steinhausen | Method and apparatus for mounting a piece of foil on a substrate |
US8430264B2 (en) * | 2009-05-20 | 2013-04-30 | The Bergquist Company | Method for packaging thermal interface materials |
US8205766B2 (en) * | 2009-05-20 | 2012-06-26 | The Bergquist Company | Method for packaging thermal interface materials |
DE102016119940A1 (de) * | 2016-10-19 | 2018-04-19 | Dieffenbacher GmbH Maschinen- und Anlagenbau | Tapelegevorrichtung und Tapelegeverfahren zum flexiblen und schnellen Legen von Tapes mit unterschiedlicher Breite |
CN109637968B (zh) * | 2018-12-27 | 2020-12-01 | 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) | 晶圆防脱落装置 |
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JP2613989B2 (ja) | 1991-06-13 | 1997-05-28 | 山口日本電気株式会社 | ダイボンダー |
US5431767A (en) * | 1993-08-27 | 1995-07-11 | Minnesota Mining And Manufacturing Company | Apparatus for applying adhesive tape |
JP3223780B2 (ja) * | 1996-01-19 | 2001-10-29 | 松下電器産業株式会社 | チップの実装装置 |
AU2629197A (en) * | 1996-05-09 | 1997-12-05 | Choquette, Robert | Display frame for photographs and the like and typically credit card-sized |
KR100317648B1 (ko) * | 1998-08-26 | 2002-02-19 | 윤종용 | 절연접착테이프에의하여다이접착되는반도체소자및다이접착방법그리고그장치 |
KR100276585B1 (ko) * | 1998-12-18 | 2000-12-15 | 김무 | 캐리어 프레임에 테이프 비지에이 기판을 자동접착하는 방법 |
KR200224075Y1 (ko) * | 1999-04-26 | 2001-05-15 | 한효용 | 아이.씨. 회로필름 접착장치 |
KR100484088B1 (ko) * | 2002-12-06 | 2005-04-20 | 삼성전자주식회사 | 멀티 칩 패키지용 다이 어태치와 경화 인라인 장치 |
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JP2008172114A (ja) * | 2007-01-15 | 2008-07-24 | Shinkawa Ltd | ダイボンダとダイボンダの熱圧着テープ片切り出し及び貼り付け方法及びプログラム |
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US20040031570A1 (en) | 2004-02-19 |
KR20040015929A (ko) | 2004-02-21 |
US7096914B2 (en) | 2006-08-29 |
JP4372486B2 (ja) | 2009-11-25 |
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