JP2004063717A5 - - Google Patents
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- Publication number
- JP2004063717A5 JP2004063717A5 JP2002219201A JP2002219201A JP2004063717A5 JP 2004063717 A5 JP2004063717 A5 JP 2004063717A5 JP 2002219201 A JP2002219201 A JP 2002219201A JP 2002219201 A JP2002219201 A JP 2002219201A JP 2004063717 A5 JP2004063717 A5 JP 2004063717A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- forming
- semiconductor
- gate insulating
- semiconductor film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010408 film Substances 0.000 claims 71
- 239000004065 semiconductor Substances 0.000 claims 36
- 239000012535 impurity Substances 0.000 claims 22
- 238000000034 method Methods 0.000 claims 17
- 229910021419 crystalline silicon Inorganic materials 0.000 claims 14
- 230000015572 biosynthetic process Effects 0.000 claims 11
- 238000004519 manufacturing process Methods 0.000 claims 9
- 239000010409 thin film Substances 0.000 claims 7
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000005468 ion implantation Methods 0.000 claims 2
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002219201A JP4159820B2 (ja) | 2001-07-27 | 2002-07-29 | 半導体装置の作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001228222 | 2001-07-27 | ||
| JP2001228222 | 2001-07-27 | ||
| JP2002219201A JP4159820B2 (ja) | 2001-07-27 | 2002-07-29 | 半導体装置の作製方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002219107A Division JP3512781B2 (ja) | 2001-07-27 | 2002-07-29 | 薄膜トランジスタ |
Publications (4)
| Publication Number | Publication Date |
|---|---|
| JP2004063717A JP2004063717A (ja) | 2004-02-26 |
| JP2004063717A5 true JP2004063717A5 (enExample) | 2005-10-27 |
| JP2004063717A6 JP2004063717A6 (ja) | 2006-10-12 |
| JP4159820B2 JP4159820B2 (ja) | 2008-10-01 |
Family
ID=31940160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002219201A Expired - Fee Related JP4159820B2 (ja) | 2001-07-27 | 2002-07-29 | 半導体装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4159820B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101209041B1 (ko) | 2005-11-25 | 2012-12-06 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그 제조 방법 |
| KR101240648B1 (ko) | 2006-01-10 | 2013-03-08 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그 제조 방법 |
| KR101293562B1 (ko) | 2006-06-21 | 2013-08-06 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그 제조 방법 |
| WO2011105200A1 (en) * | 2010-02-26 | 2011-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Display device and driving method thereof |
| CN112993041B (zh) * | 2021-02-03 | 2023-03-24 | 重庆先进光电显示技术研究院 | 一种液晶显示面板、薄膜晶体管及其制作方法 |
-
2002
- 2002-07-29 JP JP2002219201A patent/JP4159820B2/ja not_active Expired - Fee Related
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