JP2003510462A5 - - Google Patents

Download PDF

Info

Publication number
JP2003510462A5
JP2003510462A5 JP2001526462A JP2001526462A JP2003510462A5 JP 2003510462 A5 JP2003510462 A5 JP 2003510462A5 JP 2001526462 A JP2001526462 A JP 2001526462A JP 2001526462 A JP2001526462 A JP 2001526462A JP 2003510462 A5 JP2003510462 A5 JP 2003510462A5
Authority
JP
Japan
Prior art keywords
substrate
reaction chamber
metal
carbon
nanotube layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001526462A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003510462A (ja
JP4718742B2 (ja
Filing date
Publication date
Priority claimed from AT0166799A external-priority patent/AT407754B/de
Application filed filed Critical
Publication of JP2003510462A publication Critical patent/JP2003510462A/ja
Publication of JP2003510462A5 publication Critical patent/JP2003510462A5/ja
Application granted granted Critical
Publication of JP4718742B2 publication Critical patent/JP4718742B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2001526462A 1999-09-29 2000-08-03 基材上にナノチューブ層を生成する方法 Expired - Fee Related JP4718742B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
ATA1667/99 1999-09-29
AT1667/99 1999-09-29
AT0166799A AT407754B (de) 1999-09-29 1999-09-29 Verfahren und vorrichtung zur herstellung einer nanotube-schicht auf einem substrat
PCT/AT2000/000213 WO2001023303A1 (de) 1999-09-29 2000-08-03 Verfahren zur herstellung einer nanotube-schicht auf einem substrat

Publications (3)

Publication Number Publication Date
JP2003510462A JP2003510462A (ja) 2003-03-18
JP2003510462A5 true JP2003510462A5 (https=) 2007-08-16
JP4718742B2 JP4718742B2 (ja) 2011-07-06

Family

ID=3518390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001526462A Expired - Fee Related JP4718742B2 (ja) 1999-09-29 2000-08-03 基材上にナノチューブ層を生成する方法

Country Status (7)

Country Link
US (1) US7033650B2 (https=)
EP (1) EP1227999B1 (https=)
JP (1) JP4718742B2 (https=)
AT (2) AT407754B (https=)
AU (1) AU6548300A (https=)
DE (1) DE50002017D1 (https=)
WO (1) WO2001023303A1 (https=)

Families Citing this family (70)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100382879B1 (ko) * 2000-09-22 2003-05-09 일진나노텍 주식회사 탄소 나노튜브 합성 방법 및 이에 이용되는 탄소 나노튜브합성장치.
US20040151835A1 (en) * 2001-02-26 2004-08-05 Mirko Croci Method for forming a coating film, consisting of carbon nanotubes, on the surface of a substrate
AUPR421701A0 (en) 2001-04-04 2001-05-17 Commonwealth Scientific And Industrial Research Organisation Process and apparatus for the production of carbon nanotubes
AU2002245939B2 (en) * 2001-04-04 2006-05-11 Commonwealth Scientific And Industrial Research Organisation Process and apparatus for the production of carbon nanotubes
US7341498B2 (en) 2001-06-14 2008-03-11 Hyperion Catalysis International, Inc. Method of irradiating field emission cathode having nanotubes
WO2003084865A2 (en) 2001-06-14 2003-10-16 Hyperion Catalysis International, Inc. Field emission devices using modified carbon nanotubes
WO2002103737A2 (en) 2001-06-14 2002-12-27 Hyperion Catalysis International, Inc. Field emission devices using ion bombarded carbon nanotubes
US7259410B2 (en) 2001-07-25 2007-08-21 Nantero, Inc. Devices having horizontally-disposed nanofabric articles and methods of making the same
US6924538B2 (en) 2001-07-25 2005-08-02 Nantero, Inc. Devices having vertically-disposed nanofabric articles and methods of making the same
US6574130B2 (en) 2001-07-25 2003-06-03 Nantero, Inc. Hybrid circuit having nanotube electromechanical memory
US6643165B2 (en) 2001-07-25 2003-11-04 Nantero, Inc. Electromechanical memory having cell selection circuitry constructed with nanotube technology
US6919592B2 (en) 2001-07-25 2005-07-19 Nantero, Inc. Electromechanical memory array using nanotube ribbons and method for making same
US6911682B2 (en) 2001-12-28 2005-06-28 Nantero, Inc. Electromechanical three-trace junction devices
US6835591B2 (en) 2001-07-25 2004-12-28 Nantero, Inc. Methods of nanotube films and articles
US6706402B2 (en) 2001-07-25 2004-03-16 Nantero, Inc. Nanotube films and articles
US7566478B2 (en) 2001-07-25 2009-07-28 Nantero, Inc. Methods of making carbon nanotube films, layers, fabrics, ribbons, elements and articles
US7176505B2 (en) 2001-12-28 2007-02-13 Nantero, Inc. Electromechanical three-trace junction devices
US6784028B2 (en) 2001-12-28 2004-08-31 Nantero, Inc. Methods of making electromechanical three-trace junction devices
US7115305B2 (en) * 2002-02-01 2006-10-03 California Institute Of Technology Method of producing regular arrays of nano-scale objects using nano-structured block-copolymeric materials
US7412428B2 (en) 2002-03-12 2008-08-12 Knowmtech, Llc. Application of hebbian and anti-hebbian learning to nanotechnology-based physical neural networks
US9269043B2 (en) 2002-03-12 2016-02-23 Knowm Tech, Llc Memristive neural processor utilizing anti-hebbian and hebbian technology
US7398259B2 (en) 2002-03-12 2008-07-08 Knowmtech, Llc Training of a physical neural network
US7392230B2 (en) * 2002-03-12 2008-06-24 Knowmtech, Llc Physical neural network liquid state machine utilizing nanotechnology
US6889216B2 (en) * 2002-03-12 2005-05-03 Knowm Tech, Llc Physical neural network design incorporating nanotechnology
US20040039717A1 (en) * 2002-08-22 2004-02-26 Alex Nugent High-density synapse chip using nanoparticles
US8156057B2 (en) * 2003-03-27 2012-04-10 Knowm Tech, Llc Adaptive neural network utilizing nanotechnology-based components
US7335395B2 (en) 2002-04-23 2008-02-26 Nantero, Inc. Methods of using pre-formed nanotubes to make carbon nanotube films, layers, fabrics, ribbons, elements and articles
US7752151B2 (en) * 2002-06-05 2010-07-06 Knowmtech, Llc Multilayer training in a physical neural network formed utilizing nanotechnology
US7827131B2 (en) * 2002-08-22 2010-11-02 Knowm Tech, Llc High density synapse chip using nanoparticles
CN1239387C (zh) * 2002-11-21 2006-02-01 清华大学 碳纳米管阵列及其生长方法
US7560136B2 (en) 2003-01-13 2009-07-14 Nantero, Inc. Methods of using thin metal layers to make carbon nanotube films, layers, fabrics, ribbons, elements and articles
CN1286716C (zh) * 2003-03-19 2006-11-29 清华大学 一种生长碳纳米管的方法
KR100746311B1 (ko) * 2003-04-02 2007-08-06 한국화학연구원 액상법에 의한 탄소나노튜브의 제조방법
US7097906B2 (en) * 2003-06-05 2006-08-29 Lockheed Martin Corporation Pure carbon isotropic alloy of allotropic forms of carbon including single-walled carbon nanotubes and diamond-like carbon
US7833580B2 (en) * 2003-07-04 2010-11-16 Samsung Electronics Co., Ltd. Method of forming a carbon nano-material layer using a cyclic deposition technique
US7426501B2 (en) 2003-07-18 2008-09-16 Knowntech, Llc Nanotechnology neural network methods and systems
JP2005239504A (ja) * 2004-02-27 2005-09-08 National Institute For Materials Science 加熱体からの伝熱による繊維状炭素の製造方法および製造装置
US20050207964A1 (en) * 2004-03-22 2005-09-22 Dojin Kim Method for synthesizing carbon nanotubes
US7144563B2 (en) * 2004-04-22 2006-12-05 Clemson University Synthesis of branched carbon nanotubes
US7365289B2 (en) * 2004-05-18 2008-04-29 The United States Of America As Represented By The Department Of Health And Human Services Production of nanostructures by curie point induction heating
TW200609371A (en) * 2004-05-18 2006-03-16 Univ Arkansas Apparatus and methods of making nanostructures by inductive heating
US7473873B2 (en) * 2004-05-18 2009-01-06 The Board Of Trustees Of The University Of Arkansas Apparatus and methods for synthesis of large size batches of carbon nanostructures
CN100582033C (zh) * 2004-08-04 2010-01-20 鸿富锦精密工业（深圳）有限公司 陶瓷模仁
CN100582032C (zh) * 2004-12-08 2010-01-20 鸿富锦精密工业（深圳）有限公司 模造玻璃透镜模仁
US7409375B2 (en) * 2005-05-23 2008-08-05 Knowmtech, Llc Plasticity-induced self organizing nanotechnology for the extraction of independent components from a data stream
US7502769B2 (en) * 2005-01-31 2009-03-10 Knowmtech, Llc Fractal memory and computational methods and systems based on nanotechnology
US20060198956A1 (en) * 2005-03-04 2006-09-07 Gyula Eres Chemical vapor deposition of long vertically aligned dense carbon nanotube arrays by external control of catalyst composition
US7754183B2 (en) 2005-05-20 2010-07-13 Clemson University Research Foundation Process for preparing carbon nanostructures with tailored properties and products utilizing same
US7420396B2 (en) * 2005-06-17 2008-09-02 Knowmtech, Llc Universal logic gate utilizing nanotechnology
US7599895B2 (en) 2005-07-07 2009-10-06 Knowm Tech, Llc Methodology for the configuration and repair of unreliable switching elements
CN100482585C (zh) * 2005-10-24 2009-04-29 鸿富锦精密工业（深圳）有限公司 碳纳米管制备装置
TWI320432B (en) * 2006-06-16 2010-02-11 Hon Hai Prec Ind Co Ltd Apparatus and method for synthesizing carbon nanotube film
US7930257B2 (en) 2007-01-05 2011-04-19 Knowm Tech, Llc Hierarchical temporal memory utilizing nanotechnology
DE102007004953A1 (de) 2007-01-26 2008-07-31 Tesa Ag Heizelement
KR20080113805A (ko) * 2007-06-26 2008-12-31 주식회사 비코 고주파 가열로를 이용한 탄소나노튜브의 대량 합성 장치
KR100956352B1 (ko) * 2007-09-06 2010-05-07 세메스 주식회사 탄소나노튜브 제조장치 및 그 방법
CN101861282A (zh) * 2007-11-15 2010-10-13 纳幕尔杜邦公司 碳纳米管的保护
JP5246765B2 (ja) * 2008-10-29 2013-07-24 国立大学法人 東京大学 カーボンナノチューブ形成方法
JP5562188B2 (ja) * 2010-09-16 2014-07-30 株式会社日立国際電気 基板処理装置及び半導体装置の製造方法
WO2014039509A2 (en) 2012-09-04 2014-03-13 Ocv Intellectual Capital, Llc Dispersion of carbon enhanced reinforcement fibers in aqueous or non-aqueous media
WO2016158286A1 (ja) * 2015-03-30 2016-10-06 日本電気硝子株式会社 カーボンナノチューブ製造用基材およびカーボンナノチューブ製造方法
JP2016190780A (ja) * 2015-03-30 2016-11-10 日本電気硝子株式会社 カーボンナノチューブ製造用基材およびカーボンナノチューブ製造方法
US11447391B2 (en) * 2015-06-23 2022-09-20 Polyvalor, Limited Partnership Method of growing a graphene coating or carbon nanotubes on a catalytic substrate
KR101828491B1 (ko) * 2016-04-28 2018-03-29 연세대학교 산학협력단 마이크로 구조물을 위한 쿨롱 감쇠 기반 충격 방지 구조
FR3068028B1 (fr) * 2017-06-26 2021-06-11 Nawatechnologies Procede de fabrication de nanotubes de carbone fixes sur un substrat
US11555473B2 (en) 2018-05-29 2023-01-17 Kontak LLC Dual bladder fuel tank
US11638331B2 (en) 2018-05-29 2023-04-25 Kontak LLC Multi-frequency controllers for inductive heating and associated systems and methods
US11444053B2 (en) * 2020-02-25 2022-09-13 Yield Engineering Systems, Inc. Batch processing oven and method
EP3988207A1 (en) 2020-10-22 2022-04-27 Bestrong International Limited Supported metal structure
US11688621B2 (en) 2020-12-10 2023-06-27 Yield Engineering Systems, Inc. Batch processing oven and operating methods

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4089992A (en) * 1965-10-11 1978-05-16 International Business Machines Corporation Method for depositing continuous pinhole free silicon nitride films and products produced thereby
US3892890A (en) * 1972-05-12 1975-07-01 Hitachi Ltd Process for forming carbon coatings
JPS53145832A (en) * 1977-05-26 1978-12-19 Central Glass Co Ltd Method of bending glass plate
GB2129018B (en) * 1982-08-30 1986-01-29 Ricoh Kk Vacuum evaporation apparatus
US4525375A (en) * 1983-03-28 1985-06-25 Rca Corporation Method of controllong the deposition of hydrogenated amorphous silicon and apparatus therefor
US4545368A (en) * 1983-04-13 1985-10-08 Rand Robert W Induction heating method for use in causing necrosis of neoplasm
US5165909A (en) * 1984-12-06 1992-11-24 Hyperion Catalysis Int'l., Inc. Carbon fibrils and method for producing same
US5707916A (en) * 1984-12-06 1998-01-13 Hyperion Catalysis International, Inc. Carbon fibrils
US5597611A (en) * 1990-10-01 1997-01-28 Fiber Materials, Inc. Reinforced carbon composites
JP2705447B2 (ja) * 1992-04-27 1998-01-28 日本電気株式会社 円筒状黒鉛繊維と製造方法
US5424054A (en) * 1993-05-21 1995-06-13 International Business Machines Corporation Carbon fibers and method for their production
US5348774A (en) * 1993-08-11 1994-09-20 Alliedsignal Inc. Method of rapidly densifying a porous structure
US5690997A (en) * 1993-10-04 1997-11-25 Sioux Manufacturing Corporation Catalytic carbon--carbon deposition process
FR2711647B1 (fr) * 1993-10-27 1996-01-19 Europ Propulsion Procédé d'infiltration chimique en phase vapeur d'un matériau au sein d'un substrat poreux à température de surface contrôlée.
IL108883A (en) * 1994-03-07 1998-03-10 Rotem Ind Ltd Process for the production of hollow carbon fiber membranes
JP3061755B2 (ja) * 1996-06-18 2000-07-10 三菱電機株式会社 Ｃｖｄ装置用サセプタ及び高周波誘導加熱装置を有するｃｖｄ装置
ATE299474T1 (de) * 1997-03-07 2005-07-15 Univ Rice William M Kohlenstofffasern ausgehend von einwandigen kohlenstoffnanoröhren
JPH11116218A (ja) * 1997-10-17 1999-04-27 Osaka Gas Co Ltd 単層ナノチューブの製造方法
WO1999066523A1 (en) * 1998-06-18 1999-12-23 Matsushita Electric Industrial Co., Ltd. Electron emitting device, electron emitting source, image display, and method for producing them
AU2001258109A1 (en) * 2000-05-11 2001-11-20 Her Majesty The Queen In Right Of Canada, As Represented By The Minister Of National Defence Process for preparing carbon nanotubes

Similar Documents

Publication Publication Date Title
JP2003510462A5 (https=)
JP4718742B2 (ja) 基材上にナノチューブ層を生成する方法
CN102958832B (zh) 石墨烯制造设备及方法
CN108977795B (zh) 一种电耦合化学气相沉积法制备碳化硅涂层的装置和方法
Lee et al. Facile fabrication and field emission of metal-particle-decorated vertical N-doped carbon nanotube/graphene hybrid films
WO2001085612A3 (en) Process for preparing carbon nanotubes
CN102745678B (zh) 一种利用等离子溅射制作掺氮石墨烯的方法
JP5574257B2 (ja) カーボンナノチューブ生成用再利用基材及びカーボンナノチューブ生成用基材並びにその製造方法
JPS6232157B2 (https=)
CN102994980B (zh) 高导电碳纳米管薄膜的制备方法及装置
JP2005508097A (ja) 物品を制御可能に加熱するための加熱装置及びその加熱方法
EP3484816A1 (en) Apparatus and method for large-scale production of graphene
JP2003331711A (ja) 炭素との親和度が高い金属を電極として備える電子素子
CN106379890B (zh) 石墨烯花与其形成方法及复合材料
CN102181843A (zh) 多晶石墨烯薄膜制备工艺及透明电极和制备石墨烯基器件
JP2004536448A5 (https=)
JP2000294542A5 (https=)
CN1198777C (zh) 使用液态前体密化预型件的方法
EP2262726A2 (en) System and method for low-power nanotube growth using direct resistive heating
WO2007010191A1 (en) Method and apparatus for the production of nanostructures
JPH0891816A (ja) カーボンシングルチューブの精製法
CN1696340A (zh) 一种化学气相沉积装置及其沉积方法
TWI246092B (en) Manufacturing method of metallic thin film chip and manufacturing device of metallic thin film chip
CN222948468U (zh) 化学气相沉积装置
CN111501010A (zh) 一种金属纤维增强复合薄膜的原位制备方法