JP2003506732A5 - - Google Patents

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Publication number
JP2003506732A5
JP2003506732A5 JP2001514437A JP2001514437A JP2003506732A5 JP 2003506732 A5 JP2003506732 A5 JP 2003506732A5 JP 2001514437 A JP2001514437 A JP 2001514437A JP 2001514437 A JP2001514437 A JP 2001514437A JP 2003506732 A5 JP2003506732 A5 JP 2003506732A5
Authority
JP
Japan
Prior art keywords
electromagnetic
reflector
ray
multilayer
curvature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001514437A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003506732A (ja
Filing date
Publication date
Priority claimed from US09/366,028 external-priority patent/US6421417B1/en
Application filed filed Critical
Publication of JP2003506732A publication Critical patent/JP2003506732A/ja
Publication of JP2003506732A5 publication Critical patent/JP2003506732A5/ja
Pending legal-status Critical Current

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JP2001514437A 1999-08-02 2000-08-01 調節可能な使用波長を有する多層光学素子 Pending JP2003506732A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/366,028 1999-08-02
US09/366,028 US6421417B1 (en) 1999-08-02 1999-08-02 Multilayer optics with adjustable working wavelength
PCT/US2000/021060 WO2001009904A2 (en) 1999-08-02 2000-08-01 Multilayer optics with adjustable working wavelength

Publications (2)

Publication Number Publication Date
JP2003506732A JP2003506732A (ja) 2003-02-18
JP2003506732A5 true JP2003506732A5 (enExample) 2005-06-09

Family

ID=23441383

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001514437A Pending JP2003506732A (ja) 1999-08-02 2000-08-01 調節可能な使用波長を有する多層光学素子

Country Status (9)

Country Link
US (1) US6421417B1 (enExample)
EP (1) EP1200967B1 (enExample)
JP (1) JP2003506732A (enExample)
AT (1) ATE280993T1 (enExample)
AU (1) AU6511100A (enExample)
CA (2) CA2642736A1 (enExample)
CZ (1) CZ301738B6 (enExample)
DE (1) DE60015346T2 (enExample)
WO (1) WO2001009904A2 (enExample)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6870896B2 (en) 2000-12-28 2005-03-22 Osmic, Inc. Dark-field phase contrast imaging
US6804324B2 (en) * 2001-03-01 2004-10-12 Osmo, Inc. X-ray phase contrast imaging using a fabry-perot interferometer concept
JP4657506B2 (ja) * 2001-06-27 2011-03-23 株式会社リガク Ｘ線分光方法及びｘ線分光装置
US6510200B1 (en) 2001-06-29 2003-01-21 Osmic, Inc. Multi-layer structure with variable bandpass for monochromatization and spectroscopy
US6643353B2 (en) 2002-01-10 2003-11-04 Osmic, Inc. Protective layer for multilayers exposed to x-rays
JP3629520B2 (ja) * 2002-03-05 2005-03-16 理学電機工業株式会社 Ｘ線分光素子およびそれを用いた蛍光ｘ線分析装置
JP2003255089A (ja) * 2002-03-05 2003-09-10 Rigaku Industrial Co Ｘ線分光素子およびそれを用いた蛍光ｘ線分析装置
US6917667B2 (en) * 2002-09-03 2005-07-12 Rigaku Corporation Method and apparatus for making parallel X-ray beam and X-ray diffraction apparatus
DE10254026C5 (de) * 2002-11-20 2009-01-29 Incoatec Gmbh Reflektor für Röntgenstrahlung
US7280634B2 (en) 2003-06-13 2007-10-09 Osmic, Inc. Beam conditioning system with sequential optic
US7076026B2 (en) 2003-06-13 2006-07-11 Osmic, Inc. Beam conditioning system
WO2006014376A1 (en) * 2004-07-02 2006-02-09 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Naval Research Laboratory Deformable mirror apparatus
JP4432822B2 (ja) * 2005-04-19 2010-03-17 船井電機株式会社 形状可変ミラー及びそれを備えた光ピックアップ装置
US7425193B2 (en) * 2005-04-21 2008-09-16 Michigan State University Tomographic imaging system using a conformable mirror
DE102006015933B3 (de) * 2006-04-05 2007-10-31 Incoatec Gmbh Vorrichtung und Verfahren zum Justieren eines optischen Elements
JP4278108B2 (ja) * 2006-07-07 2009-06-10 株式会社リガク 超小角ｘ線散乱測定装置
US7555098B2 (en) * 2007-05-02 2009-06-30 HD Technologies Inc. Method and apparatus for X-ray fluorescence analysis and detection
US7920676B2 (en) * 2007-05-04 2011-04-05 Xradia, Inc. CD-GISAXS system and method
US8130902B2 (en) * 2007-07-31 2012-03-06 Uchicago Argonne, Llc High-resolution, active-optic X-ray fluorescence analyzer
DE102007048743B4 (de) * 2007-10-08 2010-06-24 Ifg - Institute For Scientific Instruments Gmbh Verfahren und Vorrichtung zur Bestimmung der energetischen Zusammensetzung von elektromagnetischen Wellen
AU2009208996B2 (en) * 2008-01-30 2013-04-18 Reflective X-Ray Optics Llc Mirror mounting, alignment and scanning mechanism and scanning method for radiographic X-ray imaging, and X-ray imaging device having same
US7848483B2 (en) * 2008-03-07 2010-12-07 Rigaku Innovative Technologies Magnesium silicide-based multilayer x-ray fluorescence analyzers
US8126117B2 (en) * 2010-02-03 2012-02-28 Rigaku Innovative Technologies, Inc. Multi-beam X-ray system
JP4974391B2 (ja) * 2010-02-21 2012-07-11 株式会社リガク Ｘ線分光方法及びｘ線分光装置
US8406374B2 (en) 2010-06-25 2013-03-26 Rigaku Innovative Technologies, Inc. X-ray optical systems with adjustable convergence and focal spot size
US9008271B2 (en) 2010-08-19 2015-04-14 Convergent R.N.R. Ltd System for X-ray irradiation of target volume
CN102525492A (zh) * 2010-12-31 2012-07-04 上海西门子医疗器械有限公司 一种x射线能谱选择装置
KR101332502B1 (ko) * 2011-06-14 2013-11-26 전남대학교산학협력단 국부적 방사선 치료용 ｘ―선 바늘 모듈
US20130182827A1 (en) * 2011-12-02 2013-07-18 Canon Kabushiki Kaisha X-ray waveguide and x-ray waveguide system
JP6343621B2 (ja) * 2012-11-29 2018-06-13 ヘルムート・フィッシャー・ゲーエムベーハー・インスティテュート・フューア・エレクトロニク・ウント・メステクニク 蛍光ｘ線分析を実施するための方法及びデバイス
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
JP6025211B2 (ja) * 2013-11-28 2016-11-16 株式会社リガク Ｘ線トポグラフィ装置
JP6533006B2 (ja) * 2015-07-14 2019-06-19 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 強化されたｘ線放射を用いた撮像
DE102017202802A1 (de) * 2017-02-21 2018-08-23 Carl Zeiss Smt Gmbh Objektiv und optisches System mit einem solchen Objektiv
WO2019236384A1 (en) 2018-06-04 2019-12-12 Sigray, Inc. Wavelength dispersive x-ray spectrometer
CN112470245B (zh) 2018-07-26 2025-03-18 斯格瑞公司 高亮度x射线反射源
EP3603516A1 (de) * 2018-08-02 2020-02-05 Siemens Healthcare GmbH Röntgenvorrichtung und verfahren zum betrieb der röntgenvorrichtung
WO2020051061A1 (en) 2018-09-04 2020-03-12 Sigray, Inc. System and method for x-ray fluorescence with filtering
US11056308B2 (en) 2018-09-07 2021-07-06 Sigray, Inc. System and method for depth-selectable x-ray analysis
CN109799612B (zh) * 2019-03-15 2020-03-31 重庆大学 曲面反射镜制造方法及变曲率半径点光源线聚焦成像系统
WO2021162947A1 (en) 2020-02-10 2021-08-19 Sigray, Inc. X-ray mirror optics with multiple hyperboloidal / hyperbolic surface profiles

Family Cites Families (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4727000A (en) 1983-06-06 1988-02-23 Ovonic Synthetic Materials Co., Inc. X-ray dispersive and reflective structures
US4693933A (en) 1983-06-06 1987-09-15 Ovonic Synthetic Materials Company, Inc. X-ray dispersive and reflective structures and method of making the structures
US4717632A (en) 1983-08-22 1988-01-05 Ovonic Synthetic-Materials Company, Inc. Adhesion and composite wear resistant coating and method
US4716083A (en) 1983-09-23 1987-12-29 Ovonic Synthetic Materials Company Disordered coating
US4525853A (en) 1983-10-17 1985-06-25 Energy Conversion Devices, Inc. Point source X-ray focusing device
US4785470A (en) 1983-10-31 1988-11-15 Ovonic Synthetic Materials Company, Inc. Reflectivity and resolution X-ray dispersive and reflective structures for carbon, beryllium and boron analysis
US4643951A (en) 1984-07-02 1987-02-17 Ovonic Synthetic Materials Company, Inc. Multilayer protective coating and method
US4724169A (en) 1984-10-09 1988-02-09 Ovonic Synthetic Materials Company, Inc. Method of producing multilayer coatings on a substrate
US4675889A (en) 1985-07-08 1987-06-23 Ovonic Synthetic Materials Company, Inc. Multiple wavelength X-ray dispersive devices and method of making the devices
US4969175A (en) * 1986-08-15 1990-11-06 Nelson Robert S Apparatus for narrow bandwidth and multiple energy x-ray imaging
US4958363A (en) 1986-08-15 1990-09-18 Nelson Robert S Apparatus for narrow bandwidth and multiple energy x-ray imaging
US4777090A (en) 1986-11-03 1988-10-11 Ovonic Synthetic Materials Company Coated article and method of manufacturing the article
US4783374A (en) 1987-11-16 1988-11-08 Ovonic Synthetic Materials Company Coated article and method of manufacturing the article
EP0403561B1 (en) * 1988-03-11 1995-04-19 Btg International Limited Optical devices and methods of fabrication thereof
US4867785A (en) 1988-05-09 1989-09-19 Ovonic Synthetic Materials Company, Inc. Method of forming alloy particulates having controlled submicron crystallite size distributions
JP2569447B2 (ja) * 1988-11-28 1997-01-08 株式会社ニコン 多層膜反射鏡の製造方法
JPH02210299A (ja) 1989-02-10 1990-08-21 Olympus Optical Co Ltd Ｘ線用光学系及びそれに用いる多層膜反射鏡
US5027377A (en) 1990-01-09 1991-06-25 The United States Of America As Represented By The United States Department Of Energy Chromatic X-ray magnifying method and apparatus by Bragg reflective planes on the surface of Abbe sphere
FR2658619B1 (fr) 1990-02-19 1993-04-02 Megademini Taoufik Miroirs interferentiels multifractals de dimensions fractales entre 0 et 1.
US5082621A (en) 1990-07-31 1992-01-21 Ovonic Synthetic Materials Company, Inc. Neutron reflecting supermirror structure
US5167912A (en) 1990-07-31 1992-12-01 Ovonic Synthetic Materials Company, Inc. Neutron reflecting supermirror structure
US5044736A (en) * 1990-11-06 1991-09-03 Motorola, Inc. Configurable optical filter or display
RU1820354C (ru) * 1990-11-11 1993-06-07 Ленинградский Институт Точной Механики И Оптики Оптический элемент с регулируемой кривизной
FR2681720A1 (fr) 1991-09-25 1993-03-26 Philips Electronique Lab Dispositif incluant un miroir fonctionnant dans le domaine des rayons x ou des neutrons.
US5265143A (en) * 1993-01-05 1993-11-23 At&T Bell Laboratories X-ray optical element including a multilayer coating
US5384817A (en) 1993-07-12 1995-01-24 Ovonic Synthetic Materials Company X-ray optical element and method for its manufacture
US5646976A (en) * 1994-08-01 1997-07-08 Osmic, Inc. Optical element of multilayered thin film for X-rays and neutrons
JPH08179099A (ja) * 1994-12-22 1996-07-12 Ishikawajima Harima Heavy Ind Co Ltd Ｘ線ミラー装置
JP3278317B2 (ja) 1995-03-24 2002-04-30 キヤノン株式会社 露光装置及びデバイス製造方法
US5757882A (en) 1995-12-18 1998-05-26 Osmic, Inc. Steerable x-ray optical system
US5923720A (en) * 1997-06-17 1999-07-13 Molecular Metrology, Inc. Angle dispersive x-ray spectrometer
US6038285A (en) * 1998-02-02 2000-03-14 Zhong; Zhong Method and apparatus for producing monochromatic radiography with a bent laue crystal
US6014423A (en) 1998-02-19 2000-01-11 Osmic, Inc. Multiple corner Kirkpatrick-Baez beam conditioning optic assembly
US6041099A (en) 1998-02-19 2000-03-21 Osmic, Inc. Single corner kirkpatrick-baez beam conditioning optic assembly
US6069934A (en) 1998-04-07 2000-05-30 Osmic, Inc. X-ray diffractometer with adjustable image distance

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