JP2003173970A5 - - Google Patents
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- Publication number
- JP2003173970A5 JP2003173970A5 JP2002201265A JP2002201265A JP2003173970A5 JP 2003173970 A5 JP2003173970 A5 JP 2003173970A5 JP 2002201265 A JP2002201265 A JP 2002201265A JP 2002201265 A JP2002201265 A JP 2002201265A JP 2003173970 A5 JP2003173970 A5 JP 2003173970A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor film
- manufacturing
- rare gas
- amorphous structure
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 32
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 16
- 239000007789 gas Substances 0.000 claims 15
- 238000004519 manufacturing process Methods 0.000 claims 15
- 238000000034 method Methods 0.000 claims 13
- 229910052757 nitrogen Inorganic materials 0.000 claims 8
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 4
- 238000000151 deposition Methods 0.000 claims 4
- 230000008021 deposition Effects 0.000 claims 4
- 239000002184 metal Substances 0.000 claims 4
- 229910052751 metal Inorganic materials 0.000 claims 4
- 229910052786 argon Inorganic materials 0.000 claims 2
- 230000004888 barrier function Effects 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 2
- 229910052734 helium Inorganic materials 0.000 claims 2
- 229910052743 krypton Inorganic materials 0.000 claims 2
- 229910052754 neon Inorganic materials 0.000 claims 2
- 229910052756 noble gas Inorganic materials 0.000 claims 2
- 229910052724 xenon Inorganic materials 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 229910052741 iridium Inorganic materials 0.000 claims 1
- 229910052742 iron Inorganic materials 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 229910052762 osmium Inorganic materials 0.000 claims 1
- 229910052763 palladium Inorganic materials 0.000 claims 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- 229910052703 rhodium Inorganic materials 0.000 claims 1
- 229910052707 ruthenium Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002201265A JP4212844B2 (ja) | 2001-07-10 | 2002-07-10 | 半導体装置の作製方法 |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001209239 | 2001-07-10 | ||
| JP2001-209239 | 2001-07-10 | ||
| JP2001-295341 | 2001-09-27 | ||
| JP2001295341 | 2001-09-27 | ||
| JP2002201265A JP4212844B2 (ja) | 2001-07-10 | 2002-07-10 | 半導体装置の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003173970A JP2003173970A (ja) | 2003-06-20 |
| JP2003173970A5 true JP2003173970A5 (enExample) | 2005-10-13 |
| JP4212844B2 JP4212844B2 (ja) | 2009-01-21 |
Family
ID=27347125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002201265A Expired - Fee Related JP4212844B2 (ja) | 2001-07-10 | 2002-07-10 | 半導体装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4212844B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2012172617A1 (ja) * | 2011-06-17 | 2015-02-23 | パナソニック株式会社 | 薄膜トランジスタ及び薄膜トランジスタの製造方法 |
| WO2012172617A1 (ja) | 2011-06-17 | 2012-12-20 | パナソニック株式会社 | 薄膜トランジスタ及び薄膜トランジスタの製造方法 |
| JP5955658B2 (ja) | 2012-06-15 | 2016-07-20 | 株式会社Ｓｃｒｅｅｎホールディングス | 熱処理方法および熱処理装置 |
| JP5739048B2 (ja) * | 2013-09-30 | 2015-06-24 | 積水フィルム株式会社 | 農業用多層フィルム |
-
2002
- 2002-07-10 JP JP2002201265A patent/JP4212844B2/ja not_active Expired - Fee Related
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