JP2003172745A5 - - Google Patents

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Publication number
JP2003172745A5
JP2003172745A5 JP2001363371A JP2001363371A JP2003172745A5 JP 2003172745 A5 JP2003172745 A5 JP 2003172745A5 JP 2001363371 A JP2001363371 A JP 2001363371A JP 2001363371 A JP2001363371 A JP 2001363371A JP 2003172745 A5 JP2003172745 A5 JP 2003172745A5
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JP
Japan
Prior art keywords
pairs
elastic
frame
mass
mass part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001363371A
Other languages
English (en)
Japanese (ja)
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JP2003172745A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001363371A priority Critical patent/JP2003172745A/ja
Priority claimed from JP2001363371A external-priority patent/JP2003172745A/ja
Priority to US10/243,650 priority patent/US20030057447A1/en
Priority to EP02021223A priority patent/EP1298442A1/en
Priority to KR1020020057700A priority patent/KR20030026872A/ko
Priority to CN02143502A priority patent/CN1409118A/zh
Publication of JP2003172745A publication Critical patent/JP2003172745A/ja
Publication of JP2003172745A5 publication Critical patent/JP2003172745A5/ja
Pending legal-status Critical Current

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JP2001363371A 2001-09-26 2001-11-28 半導体加速度センサ Pending JP2003172745A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2001363371A JP2003172745A (ja) 2001-09-26 2001-11-28 半導体加速度センサ
US10/243,650 US20030057447A1 (en) 2001-09-26 2002-09-16 Acceleration sensor
EP02021223A EP1298442A1 (en) 2001-09-26 2002-09-18 Acceleration sensor
KR1020020057700A KR20030026872A (ko) 2001-09-26 2002-09-24 가속도 센서
CN02143502A CN1409118A (zh) 2001-09-26 2002-09-26 加速度传感器

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001-293526 2001-09-26
JP2001293526 2001-09-26
JP2001363371A JP2003172745A (ja) 2001-09-26 2001-11-28 半導体加速度センサ

Publications (2)

Publication Number Publication Date
JP2003172745A JP2003172745A (ja) 2003-06-20
JP2003172745A5 true JP2003172745A5 (enExample) 2005-04-07

Family

ID=26622909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001363371A Pending JP2003172745A (ja) 2001-09-26 2001-11-28 半導体加速度センサ

Country Status (5)

Country Link
US (1) US20030057447A1 (enExample)
EP (1) EP1298442A1 (enExample)
JP (1) JP2003172745A (enExample)
KR (1) KR20030026872A (enExample)
CN (1) CN1409118A (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1491901A1 (en) 2003-06-25 2004-12-29 Matsushita Electric Works, Ltd. Semiconductor acceleration sensor and method of manufacturing the same
JP4416460B2 (ja) * 2003-09-16 2010-02-17 トレックス・セミコンダクター株式会社 加速度センサー
JP2006214743A (ja) * 2005-02-01 2006-08-17 Matsushita Electric Works Ltd 半導体加速度センサ
JP2006275896A (ja) * 2005-03-30 2006-10-12 Yokohama Rubber Co Ltd:The 半導体加速度センサ
JP4747677B2 (ja) * 2005-05-27 2011-08-17 大日本印刷株式会社 角速度センサの製造方法
JP4832802B2 (ja) * 2005-05-30 2011-12-07 Ｏｋｉセミコンダクタ株式会社 半導体加速度センサ装置及びその製造方法
ITTO20070033A1 (it) * 2007-01-19 2008-07-20 St Microelectronics Srl Dispositivo microelettromeccanico ad asse z con struttura di arresto perfezionata
JP2009053180A (ja) 2007-07-27 2009-03-12 Hitachi Metals Ltd 加速度センサー
JP5652775B2 (ja) 2009-05-29 2015-01-14 トレックス・セミコンダクター株式会社 加速度センサー素子およびこれを有する加速度センサー
CN102967729A (zh) * 2012-09-18 2013-03-13 华东光电集成器件研究所 一种压阻式mems加速度计
TWI506278B (zh) * 2012-12-06 2015-11-01 Murata Manufacturing Co High Voltage Resistive MEMS Sensors
US10444015B2 (en) 2014-03-20 2019-10-15 Kyocera Corporation Sensor for detecting angular velocity
WO2016120213A1 (en) 2015-01-26 2016-08-04 Cirrus Logic International Semiconductor Limited Mems devices and processes
CN105021846B (zh) * 2015-07-06 2018-04-17 西安交通大学 一种六轴一体式微加速度传感器及其制作方法
CN107963095B (zh) * 2017-11-23 2020-06-02 交控科技股份有限公司 车轮速度传感器、检测装置及车轴状态检测方法
WO2021042316A1 (zh) * 2019-09-05 2021-03-11 深圳市柔宇科技有限公司 加速度传感器

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2940293B2 (ja) * 1992-03-31 1999-08-25 日産自動車株式会社 半導体加速度センサの製造方法
EP0567075B1 (en) * 1992-04-22 2001-10-24 Denso Corporation A method for producing semiconductor device
JP2776142B2 (ja) * 1992-05-15 1998-07-16 株式会社日立製作所 加速度センサ
JPH06148229A (ja) * 1992-11-04 1994-05-27 Fujikura Ltd 半導体加速度センサ
JP2639308B2 (ja) * 1992-11-19 1997-08-13 富士電機株式会社 力センサ，温度センサおよび温度・力センサ装置
JPH08107219A (ja) * 1994-10-04 1996-04-23 Seiko Instr Inc 半導体加速度センサ及び半導体加速度センサの製造方法
JP3305516B2 (ja) * 1994-10-31 2002-07-22 株式会社東海理化電機製作所 静電容量式加速度センサ及びその製造方法
FR2742230B1 (fr) * 1995-12-12 1998-01-09 Sextant Avionique Accelerometre et procede de fabrication
US5894090A (en) * 1996-05-31 1999-04-13 California Institute Of Technology Silicon bulk micromachined, symmetric, degenerate vibratorygyroscope, accelerometer and sensor and method for using the same
AU4722097A (en) * 1997-02-21 1998-09-09 Matsushita Electric Works Ltd. Acceleration sensor element and method of its manufacture
US6196067B1 (en) * 1998-05-05 2001-03-06 California Institute Of Technology Silicon micromachined accelerometer/seismometer and method of making the same

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