CN1409118A - 加速度传感器 - Google Patents

加速度传感器 Download PDF

Info

Publication number
CN1409118A
CN1409118A CN02143502A CN02143502A CN1409118A CN 1409118 A CN1409118 A CN 1409118A CN 02143502 A CN02143502 A CN 02143502A CN 02143502 A CN02143502 A CN 02143502A CN 1409118 A CN1409118 A CN 1409118A
Authority
CN
China
Prior art keywords
support arms
resilient support
mass fraction
acceleration transducer
acceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN02143502A
Other languages
English (en)
Chinese (zh)
Inventor
斎藤正勝
田中茂德
池田由夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Publication of CN1409118A publication Critical patent/CN1409118A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0078—Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0109—Bridges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/053—Translation according to an axis perpendicular to the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Pressure Sensors (AREA)
CN02143502A 2001-09-26 2002-09-26 加速度传感器 Pending CN1409118A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP293526/2001 2001-09-26
JP2001293526 2001-09-26
JP363371/2001 2001-11-28
JP2001363371A JP2003172745A (ja) 2001-09-26 2001-11-28 半導体加速度センサ

Publications (1)

Publication Number Publication Date
CN1409118A true CN1409118A (zh) 2003-04-09

Family

ID=26622909

Family Applications (1)

Application Number Title Priority Date Filing Date
CN02143502A Pending CN1409118A (zh) 2001-09-26 2002-09-26 加速度传感器

Country Status (5)

Country Link
US (1) US20030057447A1 (enExample)
EP (1) EP1298442A1 (enExample)
JP (1) JP2003172745A (enExample)
KR (1) KR20030026872A (enExample)
CN (1) CN1409118A (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100373161C (zh) * 2003-09-16 2008-03-05 日立金属株式会社 加速度传感器
CN100554970C (zh) * 2005-02-01 2009-10-28 松下电工株式会社 半导体加速度传感器
CN1873421B (zh) * 2005-05-30 2010-06-02 冲电气工业株式会社 半导体加速度传感器装置及其制造方法
CN102967729A (zh) * 2012-09-18 2013-03-13 华东光电集成器件研究所 一种压阻式mems加速度计
CN104919293A (zh) * 2012-12-06 2015-09-16 株式会社村田制作所 压阻式mems传感器
CN107963095A (zh) * 2017-11-23 2018-04-27 交控科技股份有限公司 车轮速度传感器、检测装置及车轴状态检测方法
WO2021042316A1 (zh) * 2019-09-05 2021-03-11 深圳市柔宇科技有限公司 加速度传感器

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1491901A1 (en) 2003-06-25 2004-12-29 Matsushita Electric Works, Ltd. Semiconductor acceleration sensor and method of manufacturing the same
JP2006275896A (ja) * 2005-03-30 2006-10-12 Yokohama Rubber Co Ltd:The 半導体加速度センサ
JP4747677B2 (ja) * 2005-05-27 2011-08-17 大日本印刷株式会社 角速度センサの製造方法
ITTO20070033A1 (it) * 2007-01-19 2008-07-20 St Microelectronics Srl Dispositivo microelettromeccanico ad asse z con struttura di arresto perfezionata
JP2009053180A (ja) 2007-07-27 2009-03-12 Hitachi Metals Ltd 加速度センサー
JP5652775B2 (ja) 2009-05-29 2015-01-14 トレックス・セミコンダクター株式会社 加速度センサー素子およびこれを有する加速度センサー
US10444015B2 (en) 2014-03-20 2019-10-15 Kyocera Corporation Sensor for detecting angular velocity
WO2016120213A1 (en) 2015-01-26 2016-08-04 Cirrus Logic International Semiconductor Limited Mems devices and processes
CN105021846B (zh) * 2015-07-06 2018-04-17 西安交通大学 一种六轴一体式微加速度传感器及其制作方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2940293B2 (ja) * 1992-03-31 1999-08-25 日産自動車株式会社 半導体加速度センサの製造方法
EP0567075B1 (en) * 1992-04-22 2001-10-24 Denso Corporation A method for producing semiconductor device
JP2776142B2 (ja) * 1992-05-15 1998-07-16 株式会社日立製作所 加速度センサ
JPH06148229A (ja) * 1992-11-04 1994-05-27 Fujikura Ltd 半導体加速度センサ
JP2639308B2 (ja) * 1992-11-19 1997-08-13 富士電機株式会社 力センサ，温度センサおよび温度・力センサ装置
JPH08107219A (ja) * 1994-10-04 1996-04-23 Seiko Instr Inc 半導体加速度センサ及び半導体加速度センサの製造方法
JP3305516B2 (ja) * 1994-10-31 2002-07-22 株式会社東海理化電機製作所 静電容量式加速度センサ及びその製造方法
FR2742230B1 (fr) * 1995-12-12 1998-01-09 Sextant Avionique Accelerometre et procede de fabrication
US5894090A (en) * 1996-05-31 1999-04-13 California Institute Of Technology Silicon bulk micromachined, symmetric, degenerate vibratorygyroscope, accelerometer and sensor and method for using the same
AU4722097A (en) * 1997-02-21 1998-09-09 Matsushita Electric Works Ltd. Acceleration sensor element and method of its manufacture
US6196067B1 (en) * 1998-05-05 2001-03-06 California Institute Of Technology Silicon micromachined accelerometer/seismometer and method of making the same

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100373161C (zh) * 2003-09-16 2008-03-05 日立金属株式会社 加速度传感器
CN100554970C (zh) * 2005-02-01 2009-10-28 松下电工株式会社 半导体加速度传感器
CN1873421B (zh) * 2005-05-30 2010-06-02 冲电气工业株式会社 半导体加速度传感器装置及其制造方法
CN102967729A (zh) * 2012-09-18 2013-03-13 华东光电集成器件研究所 一种压阻式mems加速度计
CN104919293A (zh) * 2012-12-06 2015-09-16 株式会社村田制作所 压阻式mems传感器
CN107963095A (zh) * 2017-11-23 2018-04-27 交控科技股份有限公司 车轮速度传感器、检测装置及车轴状态检测方法
WO2021042316A1 (zh) * 2019-09-05 2021-03-11 深圳市柔宇科技有限公司 加速度传感器
CN113366321A (zh) * 2019-09-05 2021-09-07 深圳市柔宇科技股份有限公司 加速度传感器

Also Published As

Publication number Publication date
US20030057447A1 (en) 2003-03-27
EP1298442A1 (en) 2003-04-02
KR20030026872A (ko) 2003-04-03
JP2003172745A (ja) 2003-06-20

Similar Documents

Publication Publication Date Title
CN1409118A (zh) 加速度传感器
CN1273836C (zh) 加速度传感器
JP3457037B2 (ja) 集積型加速度計
US5081867A (en) Semiconductor sensor
US5239870A (en) Semiconductor acceleration sensor with reduced cross axial sensitivity
KR100715644B1 (ko) 가속도 센서
EP0623825A1 (en) Accelerometer sense element
JPH0479420B2 (enExample)
JP4335545B2 (ja) 圧力と加速度との双方を検出するセンサおよびその製造方法
US7111514B2 (en) Acceleration sensor
CN114061797A (zh) 一种双电桥结构mems压阻式压力传感器及其制备方法
CN100335865C (zh) 一种多传感器集成芯片
US6763719B2 (en) Acceleration sensor
CN116678544B (zh) 一种硅应变计及制造方法
JP2004177357A (ja) 半導体加速度センサ
CN100422697C (zh) 加速度传感器
JP2002529684A (ja) 歪み測定器
JPH05340956A (ja) 加速度センサ
JPH08211091A (ja) 半導体加速度検出装置
JPH1144705A (ja) 半導体加速度センサおよびその製造方法
CN221147909U (zh) 基于soi隔离技术的温度、加速度、压力传感器芯片
CN120711998A (zh) 一种mems压电器件及mems检测系统
CN101613074A (zh) 用于测量三维矢量的微机电系统元件
JPH0295264A (ja) 半導体センサ
CN120102927A (zh) 重叠结构梳齿电容式z轴加速度敏感芯片及其制造方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication