CN113366321A - 加速度传感器 - Google Patents
加速度传感器 Download PDFInfo
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- CN113366321A CN113366321A CN201980090088.1A CN201980090088A CN113366321A CN 113366321 A CN113366321 A CN 113366321A CN 201980090088 A CN201980090088 A CN 201980090088A CN 113366321 A CN113366321 A CN 113366321A
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- deformation
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- acceleration sensor
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- 230000001133 acceleration Effects 0.000 title claims abstract description 228
- 230000008859 change Effects 0.000 claims abstract description 47
- 239000000758 substrate Substances 0.000 claims abstract description 46
- 230000005611 electricity Effects 0.000 claims abstract description 9
- 230000009471 action Effects 0.000 claims abstract description 6
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 238000005516 engineering process Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 16
- 238000000034 method Methods 0.000 description 15
- 230000008569 process Effects 0.000 description 14
- 230000007423 decrease Effects 0.000 description 12
- 238000005259 measurement Methods 0.000 description 8
- 230000035945 sensitivity Effects 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 238000001514 detection method Methods 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 239000004205 dimethyl polysiloxane Substances 0.000 description 6
- 238000001259 photo etching Methods 0.000 description 6
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 6
- 238000005530 etching Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229920000728 polyester Polymers 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- -1 Polydimethylsiloxane Polymers 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 238000009776 industrial production Methods 0.000 description 3
- 238000004806 packaging method and process Methods 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 229910021389 graphene Inorganic materials 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000004645 polyester resin Substances 0.000 description 2
- 229920001225 polyester resin Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- BWGNESOTFCXPMA-UHFFFAOYSA-N Dihydrogen disulfide Chemical compound SS BWGNESOTFCXPMA-UHFFFAOYSA-N 0.000 description 1
- 239000002042 Silver nanowire Substances 0.000 description 1
- QGJOPFRUJISHPQ-UHFFFAOYSA-N carbon disulfide Substances S=C=S QGJOPFRUJISHPQ-UHFFFAOYSA-N 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
一种加速度传感器(100)，包括：柔性衬底(11)；形变层(12)，形变层(12)设于柔性衬底(11)上，形变层(12)能够导电，当形变层(12)在外力作用下形变时，形变层(12)的电阻随着形变层(12)的形变量而变化；及检测器(13)，检测器(13)电连接形变层(12)，用于根据形变层(12)的电阻的变化值获取加速度。该加速度传感器(100)加工工艺简单、成本低、可用于曲面物体表面。
Description
PCT国内申请，说明书已公开。
Claims (20)
- PCT国内申请，权利要求书已公开。
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CN2019/104490 WO2021042316A1 (zh) | 2019-09-05 | 2019-09-05 | 加速度传感器 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113366321A true CN113366321A (zh) | 2021-09-07 |
Family
ID=74852678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201980090088.1A Pending CN113366321A (zh) | 2019-09-05 | 2019-09-05 | 加速度传感器 |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN113366321A (zh) |
| WO (1) | WO2021042316A1 (zh) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1409118A (zh) * | 2001-09-26 | 2003-04-09 | 日立金属株式会社 | 加速度传感器 |
| CN1793937A (zh) * | 2004-12-22 | 2006-06-28 | 冲电气工业株式会社 | 加速度传感器 |
| US20070051182A1 (en) * | 2005-09-06 | 2007-03-08 | Akira Egawa | Mechanical quantity sensor |
| CN101949952A (zh) * | 2009-07-10 | 2011-01-19 | 雅马哈株式会社 | 单轴加速度传感器 |
| CN102901843A (zh) * | 2012-10-12 | 2013-01-30 | 西安信唯信息科技有限公司 | 一种矢量加速度传感器 |
| CN204286669U (zh) * | 2014-11-19 | 2015-04-22 | 中国电子科技集团公司第四十八研究所 | 一种薄膜压力传感器 |
| CN104880206A (zh) * | 2015-06-09 | 2015-09-02 | 中国科学院深圳先进技术研究院 | 电阻应变片及电阻应变式传感器 |
| CN104931730A (zh) * | 2015-07-10 | 2015-09-23 | 四川奇胜科技有限公司 | 三维加速度传感器 |
| CN107076777A (zh) * | 2014-11-06 | 2017-08-18 | Iee国际电子工程股份公司 | 碰撞传感器 |
-
2019
- 2019-09-05 WO PCT/CN2019/104490 patent/WO2021042316A1/zh active Application Filing
- 2019-09-05 CN CN201980090088.1A patent/CN113366321A/zh active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1409118A (zh) * | 2001-09-26 | 2003-04-09 | 日立金属株式会社 | 加速度传感器 |
| CN1793937A (zh) * | 2004-12-22 | 2006-06-28 | 冲电气工业株式会社 | 加速度传感器 |
| US20070051182A1 (en) * | 2005-09-06 | 2007-03-08 | Akira Egawa | Mechanical quantity sensor |
| CN101949952A (zh) * | 2009-07-10 | 2011-01-19 | 雅马哈株式会社 | 单轴加速度传感器 |
| CN102901843A (zh) * | 2012-10-12 | 2013-01-30 | 西安信唯信息科技有限公司 | 一种矢量加速度传感器 |
| CN107076777A (zh) * | 2014-11-06 | 2017-08-18 | Iee国际电子工程股份公司 | 碰撞传感器 |
| CN204286669U (zh) * | 2014-11-19 | 2015-04-22 | 中国电子科技集团公司第四十八研究所 | 一种薄膜压力传感器 |
| CN104880206A (zh) * | 2015-06-09 | 2015-09-02 | 中国科学院深圳先进技术研究院 | 电阻应变片及电阻应变式传感器 |
| CN104931730A (zh) * | 2015-07-10 | 2015-09-23 | 四川奇胜科技有限公司 | 三维加速度传感器 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2021042316A1 (zh) | 2021-03-11 |
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Application publication date: 20210907 |