JP2003155981A - 真空ポンプにおける運転制御方法及び運転制御装置 - Google Patents

真空ポンプにおける運転制御方法及び運転制御装置

Info

Publication number
JP2003155981A
JP2003155981A JP2001356469A JP2001356469A JP2003155981A JP 2003155981 A JP2003155981 A JP 2003155981A JP 2001356469 A JP2001356469 A JP 2001356469A JP 2001356469 A JP2001356469 A JP 2001356469A JP 2003155981 A JP2003155981 A JP 2003155981A
Authority
JP
Japan
Prior art keywords
pressure
pump
electric motor
rotation speed
pump torque
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001356469A
Other languages
English (en)
Japanese (ja)
Inventor
Shinya Yamamoto
真也 山本
Masahiro Kawaguchi
真広 川口
Osamu Uchiyama
理 内山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Industries Corp
Original Assignee
Toyota Industries Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Industries Corp filed Critical Toyota Industries Corp
Priority to JP2001356469A priority Critical patent/JP2003155981A/ja
Priority to EP02025927A priority patent/EP1314890A3/de
Priority to US10/300,064 priority patent/US20030123990A1/en
Publication of JP2003155981A publication Critical patent/JP2003155981A/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/403—Electric motor with inverter for speed control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F04C2270/075—Controlled or regulated

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2001356469A 2001-11-21 2001-11-21 真空ポンプにおける運転制御方法及び運転制御装置 Pending JP2003155981A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2001356469A JP2003155981A (ja) 2001-11-21 2001-11-21 真空ポンプにおける運転制御方法及び運転制御装置
EP02025927A EP1314890A3 (de) 2001-11-21 2002-11-20 Kontrollsystem für Vakuumpumpe
US10/300,064 US20030123990A1 (en) 2001-11-21 2002-11-20 Method for operation control of vacuum pump and control system for vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001356469A JP2003155981A (ja) 2001-11-21 2001-11-21 真空ポンプにおける運転制御方法及び運転制御装置

Publications (1)

Publication Number Publication Date
JP2003155981A true JP2003155981A (ja) 2003-05-30

Family

ID=19167980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001356469A Pending JP2003155981A (ja) 2001-11-21 2001-11-21 真空ポンプにおける運転制御方法及び運転制御装置

Country Status (3)

Country Link
US (1) US20030123990A1 (de)
EP (1) EP1314890A3 (de)
JP (1) JP2003155981A (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100775772B1 (ko) 2007-05-23 2007-11-12 주식회사 부강스틸 회전속도제어수단이 겸비된 회전식 강선인발장치
JPWO2011052675A1 (ja) * 2009-10-29 2013-03-21 株式会社アルバック ポンプユニット，ロードロックチャンバの排気装置，及び真空装置
KR20150010954A (ko) * 2012-05-18 2015-01-29 에드워즈 리미티드 진공 펌프 장치의 작동 파라미터 조정 방법 및 장치
JP2016048793A (ja) * 2008-06-02 2016-04-07 エドワーズ リミテッド 真空圧送システム
JP2020183738A (ja) * 2019-05-09 2020-11-12 株式会社アルバック 真空排気装置及びその運転方法

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
PL3470130T3 (pl) * 2004-03-24 2022-01-17 Donaldson Company, Inc. Wkład filtra powietrza i układ oczyszczacza powietrza
CA2573349C (en) * 2004-07-13 2013-09-24 Delaval Holding Ab Controllable vacuum source
FR2883934B1 (fr) * 2005-04-05 2010-08-20 Cit Alcatel Pompage rapide d'enceinte avec limitation d'energie
JP4737770B2 (ja) * 2006-09-12 2011-08-03 アネスト岩田株式会社 真空ポンプの運転制御装置および方法
US8261564B2 (en) * 2007-05-10 2012-09-11 Spx Corporation Refrigerant recovery apparatus with variable vacuum time and method
DE102008062054B4 (de) 2008-12-12 2019-05-29 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe und Verfahren zum Betrieb einer Vakuumpumpe
US9080576B2 (en) 2011-02-13 2015-07-14 Applied Materials, Inc. Method and apparatus for controlling a processing system
DE102013108090A1 (de) * 2013-07-29 2015-01-29 Hella Kgaa Hueck & Co. Pumpenanordnung
DE102016223782A1 (de) * 2016-11-30 2018-05-30 Leybold Gmbh Verfahren zum Betreiben eines Vakuumpumpensystems
WO2021259466A1 (en) * 2020-06-24 2021-12-30 Pierburg Pump Technology Gmbh Motor vehicle vacuum pump
WO2021259461A1 (en) * 2020-06-24 2021-12-30 Pierburg Pump Technology Gmbh Motor vehicle vacuum pump
GB2604188A (en) * 2021-02-22 2022-08-31 Edwards Tech Vacuum Engineering Qingdao Co Ltd Control of liquid ring pump

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH419423A (de) * 1962-03-01 1966-08-31 Micafil Ag Durch einen Gleichstrommotor angetriebene Rootspumpe
JPH0758069B2 (ja) * 1983-09-09 1995-06-21 株式会社日立製作所 圧縮機のモータ制御装置
JPH0631627B2 (ja) * 1984-07-25 1994-04-27 株式会社日立製作所 回転容積形真空ポンプ装置
JPH05231381A (ja) * 1992-02-26 1993-09-07 Hitachi Ltd ドライ真空ポンプの真空排気容量制御方法とその装置並びにドライ真空ポンプおよび半導体製造用真空処理装置
JP3569924B2 (ja) * 1992-03-19 2004-09-29 松下電器産業株式会社 流体回転装置
US5447414A (en) * 1994-05-27 1995-09-05 Emerson Electric Co. Constant air flow control apparatus and method
JP3847357B2 (ja) * 1994-06-28 2006-11-22 株式会社荏原製作所 真空系の排気装置
US5624394A (en) * 1994-10-28 1997-04-29 Iolab Corporation Vacuum system and a method of operating a vacuum system
GB9616457D0 (en) * 1996-08-05 1996-09-25 Boc Group Plc Improvements in vacuum pump systems
US5944049A (en) * 1997-07-15 1999-08-31 Applied Materials, Inc. Apparatus and method for regulating a pressure in a chamber
US6045331A (en) * 1998-08-10 2000-04-04 Gehm; William Fluid pump speed controller
TW470815B (en) * 1999-04-30 2002-01-01 Arumo Technos Kk Method and apparatus for controlling a vacuum pump

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100775772B1 (ko) 2007-05-23 2007-11-12 주식회사 부강스틸 회전속도제어수단이 겸비된 회전식 강선인발장치
JP2016048793A (ja) * 2008-06-02 2016-04-07 エドワーズ リミテッド 真空圧送システム
JPWO2011052675A1 (ja) * 2009-10-29 2013-03-21 株式会社アルバック ポンプユニット，ロードロックチャンバの排気装置，及び真空装置
KR20150010954A (ko) * 2012-05-18 2015-01-29 에드워즈 리미티드 진공 펌프 장치의 작동 파라미터 조정 방법 및 장치
KR102077875B1 (ko) 2012-05-18 2020-02-14 에드워즈 리미티드 진공 펌프 장치의 작동 파라미터 조정 방법 및 장치
JP2020183738A (ja) * 2019-05-09 2020-11-12 株式会社アルバック 真空排気装置及びその運転方法
JP7430035B2 (ja) 2019-05-09 2024-02-09 株式会社アルバック 真空排気装置及びその運転方法

Also Published As

Publication number Publication date
US20030123990A1 (en) 2003-07-03
EP1314890A2 (de) 2003-05-28
EP1314890A3 (de) 2003-08-20

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