EP1314890A3 - Kontrollsystem für Vakuumpumpe - Google Patents

Kontrollsystem für Vakuumpumpe Download PDF

Info

Publication number
EP1314890A3
EP1314890A3 EP02025927A EP02025927A EP1314890A3 EP 1314890 A3 EP1314890 A3 EP 1314890A3 EP 02025927 A EP02025927 A EP 02025927A EP 02025927 A EP02025927 A EP 02025927A EP 1314890 A3 EP1314890 A3 EP 1314890A3
Authority
EP
European Patent Office
Prior art keywords
alternating current
rotational speed
vacuum pump
current motor
predetermined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP02025927A
Other languages
English (en)
French (fr)
Other versions
EP1314890A2 (de
Inventor
Shinya Yamamoto
Masahiro Kawaguchi
Osamu Uchiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Industries Corp
Original Assignee
Toyota Industries Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Industries Corp filed Critical Toyota Industries Corp
Publication of EP1314890A2 publication Critical patent/EP1314890A2/de
Publication of EP1314890A3 publication Critical patent/EP1314890A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/403—Electric motor with inverter for speed control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F04C2270/075—Controlled or regulated
EP02025927A 2001-11-21 2002-11-20 Kontrollsystem für Vakuumpumpe Withdrawn EP1314890A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001356469 2001-11-21
JP2001356469A JP2003155981A (ja) 2001-11-21 2001-11-21 真空ポンプにおける運転制御方法及び運転制御装置

Publications (2)

Publication Number Publication Date
EP1314890A2 EP1314890A2 (de) 2003-05-28
EP1314890A3 true EP1314890A3 (de) 2003-08-20

Family

ID=19167980

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02025927A Withdrawn EP1314890A3 (de) 2001-11-21 2002-11-20 Kontrollsystem für Vakuumpumpe

Country Status (3)

Country Link
US (1) US20030123990A1 (de)
EP (1) EP1314890A3 (de)
JP (1) JP2003155981A (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1921922B (zh) * 2004-03-24 2010-06-09 唐纳森公司 过滤器元件，空气过滤器组件及方法
CN1993040B (zh) * 2004-07-13 2011-12-28 德拉瓦尔控股股份有限公司 挤奶系统、真空源和提供真空的方法
FR2883934B1 (fr) * 2005-04-05 2010-08-20 Cit Alcatel Pompage rapide d'enceinte avec limitation d'energie
JP4737770B2 (ja) * 2006-09-12 2011-08-03 アネスト岩田株式会社 真空ポンプの運転制御装置および方法
US8261564B2 (en) * 2007-05-10 2012-09-11 Spx Corporation Refrigerant recovery apparatus with variable vacuum time and method
KR100775772B1 (ko) 2007-05-23 2007-11-12 주식회사 부강스틸 회전속도제어수단이 겸비된 회전식 강선인발장치
GB0809976D0 (en) * 2008-06-02 2008-07-09 Edwards Ltd Vacuum pumping systems
DE102008062054B4 (de) 2008-12-12 2019-05-29 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe und Verfahren zum Betrieb einer Vakuumpumpe
JPWO2011052675A1 (ja) * 2009-10-29 2013-03-21 株式会社アルバック ポンプユニット，ロードロックチャンバの排気装置，及び真空装置
US9080576B2 (en) * 2011-02-13 2015-07-14 Applied Materials, Inc. Method and apparatus for controlling a processing system
GB2502134B (en) * 2012-05-18 2015-09-09 Edwards Ltd Method and apparatus for adjusting operating parameters of a vacuum pump arrangement
DE102013108090A1 (de) * 2013-07-29 2015-01-29 Hella Kgaa Hueck & Co. Pumpenanordnung
DE102016223782A1 (de) * 2016-11-30 2018-05-30 Leybold Gmbh Verfahren zum Betreiben eines Vakuumpumpensystems
JP7430035B2 (ja) * 2019-05-09 2024-02-09 株式会社アルバック 真空排気装置及びその運転方法
EP4172012B1 (de) * 2020-06-24 2024-02-28 Pierburg Pump Technology GmbH Kraftfahrzeug-vakuumpumpe
DE112020007339T5 (de) * 2020-06-24 2023-06-15 Pierburg Pump Technology Gmbh Kraftfahrzeugvakuumpumpe

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB986915A (en) * 1962-03-01 1965-03-24 Micafil Ag Improvements in and relating to evacuating arrangements employing a roots pump
US4604036A (en) * 1983-09-09 1986-08-05 Hitachi, Ltd. Torque control apparatus for enclosed compressors
US4664601A (en) * 1984-07-25 1987-05-12 Hitachi, Ltd. Operation control system of rotary displacement type vacuum pump
JPH05231381A (ja) * 1992-02-26 1993-09-07 Hitachi Ltd ドライ真空ポンプの真空排気容量制御方法とその装置並びにドライ真空ポンプおよび半導体製造用真空処理装置
JPH10220372A (ja) * 1996-08-05 1998-08-18 Boc Group Plc:The 真空ポンプ状態評価システム

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3569924B2 (ja) * 1992-03-19 2004-09-29 松下電器産業株式会社 流体回転装置
US5447414A (en) * 1994-05-27 1995-09-05 Emerson Electric Co. Constant air flow control apparatus and method
JP3847357B2 (ja) * 1994-06-28 2006-11-22 株式会社荏原製作所 真空系の排気装置
US5624394A (en) * 1994-10-28 1997-04-29 Iolab Corporation Vacuum system and a method of operating a vacuum system
US5944049A (en) * 1997-07-15 1999-08-31 Applied Materials, Inc. Apparatus and method for regulating a pressure in a chamber
US6045331A (en) * 1998-08-10 2000-04-04 Gehm; William Fluid pump speed controller
TW470815B (en) * 1999-04-30 2002-01-01 Arumo Technos Kk Method and apparatus for controlling a vacuum pump

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB986915A (en) * 1962-03-01 1965-03-24 Micafil Ag Improvements in and relating to evacuating arrangements employing a roots pump
US4604036A (en) * 1983-09-09 1986-08-05 Hitachi, Ltd. Torque control apparatus for enclosed compressors
US4664601A (en) * 1984-07-25 1987-05-12 Hitachi, Ltd. Operation control system of rotary displacement type vacuum pump
JPH05231381A (ja) * 1992-02-26 1993-09-07 Hitachi Ltd ドライ真空ポンプの真空排気容量制御方法とその装置並びにドライ真空ポンプおよび半導体製造用真空処理装置
JPH10220372A (ja) * 1996-08-05 1998-08-18 Boc Group Plc:The 真空ポンプ状態評価システム

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 017, no. 686 (M - 1529) 15 December 1993 (1993-12-15) *
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 13 30 November 1998 (1998-11-30) *

Also Published As

Publication number Publication date
US20030123990A1 (en) 2003-07-03
JP2003155981A (ja) 2003-05-30
EP1314890A2 (de) 2003-05-28

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